公开(公告)号：US09389125B2

公开(公告)日：2016-07-12

申请号：US14107106

申请日：2013-12-16

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT

Inventor： Jean-Jacques Yon ,  Geoffroy Dumont ,  Pierre Imperinetti ,  Stephane Pocas

IPC: G01J5/20 ,  G01J5/10 ,  H01L31/18 ,  G01J5/02

CPC classification number: G01J5/20 ,  G01J5/024 ,  G01J2005/106 ,  H01L31/18

Abstract: An infrared detection device including an infrared heat detector and a connection pad each spaced apart from an etching stop layer by a non-zero distance substantially equal relatively to each other, wherein first and second electrically conducting vias are respectively electrically connected to first and second portions of a metal line of a penultimate level of electrical interconnections, and wherein an empty space formed in a first inter-metal dielectric layer surrounds the first electrically conducting via and extends under the infrared heat detector.

Abstract translation: 一种红外检测装置，其包括红外热检测器和连接垫，每个红外热检测器和连接焊盘与蚀刻停止层隔开相互之间基本相等的非零距离，其中第一和第二导电通孔分别电连接到第一和第二部分 具有倒数第二级电互连的金属线，并且其中形成在第一金属间介电层中的空白空间围绕所述第一导电通孔并在所述红外热检测器下方延伸。

公开(公告)号：US09347834B2

公开(公告)日：2016-05-24

申请号：US14520563

申请日：2014-10-22

Applicant: Redwood Systems, Inc.

Inventor： Luc W. Adriaenssens ,  Stewart Findlater

IPC: G01J5/10 ,  H05B37/02 ,  G01J5/04 ,  H05K7/20 ,  G01J5/08 ,  G01J5/00

CPC classification number: G01J5/10 ,  G01J5/04 ,  G01J5/089 ,  G01J2005/0085 ,  G01J2005/106 ,  H05B37/0227 ,  H05K7/20836

Abstract: Temperature monitoring systems for data centers include a plurality of ceiling-mounted infrared sensor arrays. Each infrared sensor array includes a two-dimensional array of infrared emission sensors, and at least some of the infrared emission sensors have field of view patterns that project onto aisle faces of equipment racks that are mounted in rows in the data center. These systems may further include a controller that is remote from at least some of the infrared sensor arrays and that is in communications with the infrared sensor arrays, the controller configured to provide a two-dimensional thermal map of the aisle faces of the equipment racks based at least in part on temperature data received from the infrared sensor arrays.

Abstract translation: 用于数据中心的温度监测系统包括多个天花板安装的红外传感器阵列。 每个红外传感器阵列包括二维阵列的红​​外发射传感器，并且至少一些红外发射传感器具有投影到安装在数据中心行中的设备机架的通道面上的视野图案。 这些系统还可以包括远离至少一些红外传感器阵列并且与红外传感器阵列通信的控制器，该控制器被配置为提供设备机架的通道面的二维热图 至少部分地基于从红外传感器阵列接收的温度数据。

公开(公告)号：US20160138188A1

公开(公告)日：2016-05-19

申请号：US14987446

申请日：2016-01-04

Applicant: Applied Materials, Inc.

Inventor： Joseph M. RANISH ,  Paul BRILLHART ,  Jose Antonio MARIN ,  Satheesh KUPPURAO ,  Balasubramanian RAMACHANDRAN ,  Swaminathan T. SRINIVASAN ,  Mehmet Tugrul SAMIR

IPC: C30B25/10 ,  H01L21/02 ,  G01J5/10 ,  C30B25/14 ,  C30B25/16 ,  C30B25/08 ,  H01L21/67 ,  H01L21/66

CPC classification number: C30B25/105 ,  C23C16/4583 ,  C23C16/481 ,  C23C16/52 ,  C30B25/08 ,  C30B25/12 ,  C30B25/14 ,  C30B25/16 ,  G01J5/0007 ,  G01J5/10 ,  G01J2005/106 ,  H01L21/0262 ,  H01L21/67115 ,  H01L21/67248 ,  H01L22/10 ,  H01L22/20

Abstract: A method and apparatus for processing a semiconductor substrate is described. The apparatus is a process chamber having an optically transparent upper dome and lower dome. Vacuum is maintained in the process chamber during processing. The upper dome is thermally controlled by flowing a thermal control fluid along the upper dome outside the processing region. Thermal lamps are positioned proximate the lower dome, and thermal sensors are disposed among the lamps. The lamps are powered in zones, and a controller adjusts power to the lamp zones based on data received from the thermal sensors.

Abstract translation: 描述了一种用于处理半导体衬底的方法和设备。 该装置是具有光学透明的上部圆顶和下部圆顶的处理室。 在处理过程中真空保持在处理室中。 通过使热控制流体沿着加工区域外的上部圆顶流动来对上部圆顶进行热控制。 散热灯靠近下穹顶定位，热传感器设置在灯之间。 灯具已通电，并且控制器根据从热传感器接收的数据调节灯区的电源。

公开(公告)号：US09285274B2

公开(公告)日：2016-03-15

申请号：US13546318

申请日：2012-07-11

Applicant: Hidetaka Saito

Inventor： Hidetaka Saito

IPC: G01J5/34 ,  G01J5/20 ,  H01L27/14 ,  G01T1/24 ,  G01J5/02 ,  H01L31/0203 ,  G01N21/01 ,  G01J5/00 ,  G01J5/10 ,  G01N21/84 ,  G08B13/191 ,  G01N21/17 ,  H01L31/02 ,  H01L31/024 ,  H01L23/48 ,  H01L23/498 ,  H01L23/52

CPC classification number: G01J5/0225 ,  G01J5/0003 ,  G01J5/0022 ,  G01J5/0025 ,  G01J5/0205 ,  G01J5/023 ,  G01J5/024 ,  G01J5/10 ,  G01J5/34 ,  G01J2005/0077 ,  G01J2005/106 ,  G01J2005/202 ,  G01J2005/345 ,  G01N21/17 ,  G01N21/84 ,  G01N2021/0106 ,  G01N2201/02 ,  G01N2201/0216 ,  G08B13/191 ,  H01L23/481 ,  H01L23/49811 ,  H01L23/49827 ,  H01L23/52 ,  H01L27/14 ,  H01L31/02 ,  H01L31/0203 ,  H01L31/024 ,  H01L2224/48091 ,  H01L2924/3025 ,  Y10S250/01 ,  H01L2924/00014 ,  H01L2924/00

Abstract: The infrared detecting element has a first base plate that has a first front surface, a first back surface, a first recessed portion, and an infrared detecting section for detecting infrared rays provided in an area of the first front surface that opposes the first recessed portion; a second base plate that has a second front surface, a second back surface on the opposite side of the second front surface, and a second recessed portion provided in an area of the second back surface that faces the first recessed portion; and an adhesion film that bonds the first back surface and the second back surface, wherein a second outer peripheral portion where the second recessed portion intersects with the second back surface surrounds a first outer peripheral portion where the first recessed portion intersects with the first back surface.

Abstract translation: 红外线检测元件具有第一基板，其具有第一前表面，第一后表面，第一凹部和红外线检测部，用于检测设置在与第一凹部对置的第一前表面的区域中的红外线 ; 第二基板，其具有第二前表面，在所述第二前表面的相对侧上的第二后表面和设置在所述第二后表面的面向所述第一凹部的区域中的第二凹部; 以及粘合膜，其粘结所述第一背面和所述第二后表面，其中所述第二凹部与所述第二背面相交的第二外周部包围第一外周部，在所述第一外周部，所述第一凹部与所述第一背面相交 。

公开(公告)号：US20160005156A1

公开(公告)日：2016-01-07

申请号：US14758248

申请日：2013-12-26

Applicant: Hao WANG

Inventor： Hao Wang

IPC: G06T7/00 ,  H04N5/33 ,  H04N5/232 ,  G06K9/62

CPC classification number: G06T7/001 ,  G01J2005/106 ,  G06K9/00369 ,  G06K9/2018 ,  G06K9/3233 ,  G06K9/6201 ,  G06K9/6202 ,  G06K9/6267 ,  H04N5/23293 ,  H04N5/33

Abstract: This invention provides an infrared selecting device and method, which relates to a thermal imaging device, a thermal image processing device, and infrared thermal imaging detection. The conventional thermal imaging device is excessively dependent on subjective experience of users to photograph a thermal image of a body, causing great workload and failing to ensure the quality of the thermal image. In the invention, a reference image is displayed, specified information of a specified body thermal image can be automatically detected from the acquired thermal imaging data frame, or auxiliary information is considered. Thus, the thermal imaging data frame satisfying a specified condition can be automatically selected from the continuously acquired thermal imaging data frames, thereby facilitating subsequent processing or operation, such as inform, analysis, or storage, simplifying photographing operation, and improving the photographing speed and the quality of the thermal image.

Abstract translation: 本发明提供一种涉及热成像装置，热图像处理装置和红外热成像检测的红外选择装置和方法。 常规的热成像装置过度依赖于用户拍摄身体的热图像的主观体验，造成很大的工作量并且不能确保热图像的质量。 在本发明中，显示参考图像，可以从获取的热成像数据帧中自动检测指定体热图像的指定信息，或考虑辅助信息。 因此，可以从连续获取的热成像数据帧中自动选择满足特定条件的热成像数据帧，从而有助于随后的处理或操作，诸如通知，分析或存储，简化拍摄操作，并且提高拍摄速度和 热图像的质量。

公开(公告)号：US09194752B2

公开(公告)日：2015-11-24

申请号：US14657578

申请日：2015-03-13

Applicant: Robert Bosch GmbH

Inventor： Paul Koop

IPC: G01J5/10 ,  G01J5/00

CPC classification number: G01J5/10 ,  G01J5/025 ,  G01J5/026 ,  G01J5/061 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/068 ,  G01J2005/106

Abstract: An IR sensor system, an IR sensor module, a temperature detection module and a corresponding calibration method are provided. The IR sensor system has an IR sensor module including a pixelated IR detection area, which has a first control unit for controlling an IR measuring operation and a calibration operation, and a storage unit connected to it, and including a temperature detection module which is detectable in a pixel subarea of the IR detection area, the temperature detection module having a temperature sensor device and a second control unit connected to it. The geometric position of the pixel subarea on the IR detection area is storable in the storage unit.

Abstract translation: 提供IR传感器系统，IR传感器模块，温度检测模块和相应的校准方法。 IR传感器系统具有红外线传感器模块，其包括像素化IR检测区域，其具有用于控制IR测量操作和校准操作的第一控制单元和与其连接的存储单元，并且包括可检测的温度检测模块 在IR检测区域的像素区域中，温度检测模块具有温度传感器装置和与其连接的第二控制单元。 IR检测区域上的像素子区域的几何位置可存储在存储单元中。

公开(公告)号：US20150276490A1

公开(公告)日：2015-10-01

申请号：US14431114

申请日：2014-07-08

Applicant: PANASONIC INTELLECTUAL PROPERTY CORPORATION OF AMERICA

Inventor： Shinichi Shikii ,  Koichi Kusukame

IPC: G01J5/08 ,  G01J5/10

CPC classification number: G01J5/0806 ,  G01J1/04 ,  G01J5/0025 ,  G01J5/08 ,  G01J5/0809 ,  G01J5/10 ,  G01J2005/106 ,  G02B3/06 ,  G02B3/08 ,  G02B7/02 ,  G02B13/00 ,  G02B17/00 ,  H04N5/33

Abstract: A sensor assembly includes: a sensor including pixels that are aligned in a predetermined direction, the pixels being for detecting an electromagnetic wave; and a lens that forms, in a detector plane on the sensor, an image according to the electromagnetic wave, wherein the lens has an f-number in a first direction and an f-number in a second direction, the f-number in the first direction being different from the f-number in the second direction, the first direction being orthogonal to the predetermined direction in a plane parallel to the detector plane, and the second direction being the predetermined direction. For example, the f-number of the lens in the first direction is smaller than the f-number of the lens in the second direction.

Abstract translation: 传感器组件包括：传感器，包括沿预定方向排列的像素，所述像素用于检测电磁波; 以及在所述传感器的检测器平面中形成根据所述电磁波的图像的透镜，其中，所述透镜在第一方向上具有f数，在第二方向上形成f数，所述f数 第一方向与第二方向上的f数不同，第一方向与平行于检测器平面的平面中的预定方向正交，第二方向为预定方向。 例如，第一方向上的透镜的f数小于透镜在第二方向上的f数。

公开(公告)号：US20140273419A1

公开(公告)日：2014-09-18

申请号：US14292300

申请日：2014-05-30

Applicant: APPLIED MATERIALS, INC.

Inventor： Joseph M. RANISH ,  Paul BRILLHART ,  Jose Antonio MARIN ,  Satheesh KUPPURAO ,  Balasubramanian RAMACHANDRAN ,  Swaminathan T. SRINIVASAN ,  Mehmet Tugrul SAMIR

IPC: H01L21/67 ,  H01L21/02

CPC classification number: C30B25/105 ,  C23C16/4583 ,  C23C16/481 ,  C23C16/52 ,  C30B25/08 ,  C30B25/12 ,  C30B25/14 ,  C30B25/16 ,  G01J5/0007 ,  G01J5/10 ,  G01J2005/106 ,  H01L21/0262 ,  H01L21/67115 ,  H01L21/67248 ,  H01L22/10 ,  H01L22/20

Abstract: A substrate processing apparatus is provided. The substrate processing apparatus includes a vacuum chamber having a dome and a floor. A substrate support is disposed inside the vacuum chamber. A plurality of thermal lamps are arranged in a lamphead and positioned proximate the floor of the vacuum chamber. A reflector is disposed proximate the dome, where the reflector and the dome together define a thermal control space. The substrate processing apparatus further includes a plurality of power supplies coupled to the thermal lamps and a controller for adjusting the power supplies to control a temperature in the vacuum chamber.

Abstract translation: 提供了一种基板处理装置。 基板处理装置包括具有圆顶和底板的真空室。 衬底支撑件设置在真空室内。 多个热灯布置在灯头中并且靠近真空室的地板定位。 反射器靠近穹顶设置，其中反射器和穹顶一起限定了热控制空间。 基板处理装置还包括耦合到热灯的多个电源和用于调节电源以控制真空室中的温度的控制器。

公开(公告)号：US08829441B2

公开(公告)日：2014-09-09

申请号：US13402143

申请日：2012-02-22

Applicant: Brian McLaughlin

Inventor： Brian McLaughlin

IPC: G08B13/183 ,  G01V8/20 ,  G07C9/00

CPC classification number: G01V8/20 ,  G01J5/027 ,  G01J5/10 ,  G01J2005/106 ,  G07C9/00 ,  G08B13/183

Abstract: A system, for calculating an object location within a portal, includes a portal map formed by a plurality of infra-red beams. The system further includes a broken beam detector for detecting and recording, in response to an object moving through the portal map, data indicative of one or more broken beams of the plurality of infra-red beams. The data includes first data indicative of an initial position of the object within the portal, second data indicative of a subsequent position of the object within the portal, and third data including one or more time records. The system also includes at least one broken beam analyzer for obtaining the data from the broken beam detector, the broken beam analyzer calculating the object location based on at least one of the first data, the second data, and the third data.

Abstract translation: 用于计算门户内的对象位置的系统包括由多个红外线束形成的门户地图。 该系统还包括一个破碎的光束检测器，用于响应于移动通过门禁图的物体，检测和记录指示多个红外线束中的一个或多个断裂光束的数据。 数据包括指示门户内的对象的初始位置的第一数据，指示对象在门户内的后续位置的第二数据，以及包括一个或多个时间记录的第三数据。 该系统还包括至少一个用于从破碎光束检测器获得数据的断裂光束分析器，该破碎光束分析仪基于第一数据，第二数据和第三数据中的至少一个来计算对象位置。

公开(公告)号：US08627643B2

公开(公告)日：2014-01-14

申请号：US12850770

申请日：2010-08-05

Applicant: Rahul Jaikaran Chillar ,  Julio E. Mestroni ,  Eric J. Kauffman ,  Adil Ansari

Inventor： Rahul Jaikaran Chillar ,  Julio E. Mestroni ,  Eric J. Kauffman ,  Adil Ansari

IPC: F02C7/00 ,  G01J5/02

CPC classification number: F01D21/003 ,  F01D17/085 ,  F02C6/18 ,  F02C9/28 ,  F05D2270/303 ,  G01J5/0088 ,  G01J5/025 ,  G01J5/0809 ,  G01J2005/106 ,  Y02E20/16

Abstract: A system includes a radiation detector array configured to direct a field of view toward multiple conduits within a fluid flow path from a turbine into a heat exchanger. The radiation detector array is configured to output a signal indicative of a multi-dimensional temperature profile of the fluid flow path based on thermal radiation emitted by the conduits. The system also includes a controller communicatively coupled to the radiation detector array. The controller is configured to determine a temperature variation across the fluid flow path based on the signal, and to compare the temperature variation to a threshold value.

Abstract translation: 一种系统包括辐射检测器阵列，该辐射检测器阵列构造成将视场朝向从涡轮机进入热交换器的流体流动路径内的多个管道引导。 辐射检测器阵列被配置为基于由导管发射的热辐射来输出指示流体流动路径的多维温度分布的信号。 该系统还包括通信地耦合到辐射探测器阵列的控制器。 控制器被配置为基于该信号来确定跨过流体流动路径的温度变化，并将温度变化与阈值进行比较。