公开(公告)号：US06831936B1

公开(公告)日：2004-12-14

申请号：US09633837

申请日：2000-08-07

Applicant: Donald V. Smart

Inventor： Donald V. Smart

IPC: H01S310

CPC classification number: H01C17/242 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/0648 ,  H01G5/019 ,  H01S3/0057 ,  H01S3/0085 ,  H01S3/08068 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/1068 ,  H01S3/117

Abstract: A pulsed laser system includes a laser pump, a laser rod, a reflector interposed between the laser pump and the laser rod, through which energy from the laser pump enters the laser rod, an output reflector through which energy is emitted from the laser rod, a switch interposed between the laser rod and the output reflector, and a control device. The switch, when closed, causes energy to be stored in the laser rod and, when opened, allows energy to be emitted from the laser rod during an emission period. The control device allows a primary laser pulse emitted from the laser rod during the emission period to impinge on a workpiece and blocks from the workpiece secondary laser emission occurring during the emission period after emission of the primary pulse. The pulsed laser system is operated over a range of repetition rates, so as to cause laser energy to be emitted during a plurality of emission periods at each repetition rate. At least a portion of the laser energy emitted during the emission periods is directed toward the target structure in order to perform passive or functional trimming of the target structure. The switch is closed for a fixed, predetermined period of time prior to each emission period regardless of repetition rate of the primary laser pulse within the range of repetition rates in order to store energy in the laser rod. The pump is operated continuously at constant power.

Abstract translation: 脉冲激光系统包括激光泵，激光棒，介于激光泵和激光棒之间的反射器，来自激光泵的能量通过该反射器进入激光棒，通过激光棒从激光棒发射能量的输出反射器， 介于激光棒和输出反射器之间的开关，以及控制装置。 关闭时，开关将能量存储在激光棒中，并且在打开时允许在发射期间从激光棒发射能量。 控制装置允许在发射周期期间从激光棒发射的初级激光脉冲撞击工件，并阻止在发射主脉冲之后的发射周期期间发生的工件辅助激光发射。 脉冲激光系统在重复频率的范围内运行，以便在每个重复频率的多个发射周期期间使激光能量发射。 在发射周期期间发射的激光能量的至少一部分指向目标结构，以便执行目标结构的被动或功能修整。 在每个发射周期之前，开关闭合固定的预定时间段，而不管重复频率范围内的主激光脉冲的重复率如何，以便在激光棒中存储能量。 泵以恒定功率连续运行。

公开(公告)号：US06567451B2

公开(公告)日：2003-05-20

申请号：US10098236

申请日：2002-03-15

Applicant: Juergen Kleinschmidt ,  Peter Lokai

Inventor： Juergen Kleinschmidt ,  Peter Lokai

IPC: H01S322

CPC classification number: H01S3/08068 ,  H01S3/0805 ,  H01S3/105 ,  H01S3/225

Abstract: An excimer or molecular fluorine laser includes a discharge chamber filled with a gas mixture, multiple electrodes within the discharge chamber connected to a power supply circuit for energizing the gas mixture, and a resonator including the discharge chamber and a pair of resonator reflectors for generating an output laser beam. One of the resonator reflectors is an output coupling interferometer including a pair of opposing reflecting surfaces tuned to produce a reflectivity maximum at a selected wavelength for narrowing a linewidth of the output laser beam. One of the pair of opposing reflecting surfaces is configured such that the opposing reflecting surfaces of the interferometer have a varying optical distance therebetween over an incident beam cross-section which serves to suppress outer portions of the reflectivity maximum to reduce spectral purity. Preferably, this surface is non-planar, and may include a step, a recess or a raised or recessed curved portion of a quarter wavelength in height or depth, respectively.

公开(公告)号：US06516012B2

公开(公告)日：2003-02-04

申请号：US10098258

申请日：2002-03-15

Applicant: Juergen Kleinschmidt ,  Peter Lokai

Inventor： Juergen Kleinschmidt ,  Peter Lokai

IPC: H01S313

CPC classification number: H01S3/08068 ,  H01S3/0805 ,  H01S3/105 ,  H01S3/225

Abstract: An excimer or molecular fluorine laser includes a discharge chamber filled with a gas mixture, multiple electrodes within the discharge chamber connected to a power supply circuit for energizing the gas mixture, and a resonator including the discharge chamber and a pair of resonator reflectors for generating an output laser beam. One of the resonator reflectors is an output coupling interferometer including a pair of opposing reflecting surfaces tuned to produce a reflectivity maximum at a selected wavelength for narrowing a linewidth of the output laser beam. One of the pair of opposing reflecting surfaces is configured such that the opposing reflecting surfaces of the interferometer have a varying optical distance therebetween over an incident beam cross-section which serves to suppress outer portions of the reflectivity maximum to reduce spectral purity. Preferably, this surface is non-planar, and may include a step, a recess or a raised or recessed curved portion of a quarter wavelength in height or depth, respectively.

公开(公告)号：US06421365B1

公开(公告)日：2002-07-16

申请号：US09715803

申请日：2000-11-17

Applicant: Juergen Kleinschmidt ,  Peter Lokai

Inventor： Juergen Kleinschmidt ,  Peter Lokai

IPC: H01S308

CPC classification number: H01S3/08068 ,  H01S3/0805 ,  H01S3/105 ,  H01S3/225

Abstract: An excimer or molecular fluorine laser includes a discharge chamber filled with a gas mixture, multiple electrodes within the discharge chamber connected to a power supply circuit for energizing the gas mixture, and a resonator including the discharge chamber and a pair of resonator reflectors for generating an output laser beam. One of the resonator reflectors is an output coupling interferometer including a pair of opposing reflecting surfaces tuned to produce a reflectivity maximum at a selected wavelength for narrowing a linewidth of the output laser beam. One of the pair of opposing reflecting surfaces is configured such that the opposing reflecting surfaces of the interferometer have a varying optical distance therebetween over an incident beam cross-section which serves to suppress outer portions of the reflectivity maximum to reduce spectral purity. Preferably, this surface is non-planar, and may include a step, a recess or a raised or recessed curved portion of a quarter wavelength in height or depth, respectively.

公开(公告)号：US20020071468A1

公开(公告)日：2002-06-13

申请号：US09970503

申请日：2001-10-03

Inventor： Richard L. Sandstrom ,  William N. Partlo ,  Eckehard D. Onkels ,  Alexander I. Ershov

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/10092 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08063 ,  H01S3/08068 ,  H01S3/0943 ,  H01S3/097 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2258 ,  H01S3/2325 ,  H01S3/2366

Abstract: A narrow band F2 laser system with two gain media useful for integrated circuit lithography. An output beam from a first F2 laser gain medium is filtered with a pre-gain filter to produce a seed beam having a narrow bandwidth. The seed beam is amplified in a power gain stage which includes a second F2 laser gain medium. The output beam of the system is a pulsed laser beam with a bandwidth corresponding to the filtered bandwidth from the first gain medium. In a preferred embodiment the pre-gain filter includes a wavelength monitor which permits feedback control over the centerline wavelength so that the pre-gain filter optics can be adjusted to ensure that the desired bandwidth range is injected into the power gain stage. In some embodiments the bandwidth is severely narrowed by the pre-gain filter to produce an output bandwidth in the range of about 0.2 pm or less. In other preferred embodiments, the bandwidth is narrowed by the pregain filter to match the bandwidth of the most intense of the F2 spectral lines which is the 157.63 spectral line having a bandwidth of about 0.6 to 1.2 pm depending on conditions of the gain medium. Applicants have discovered a group of previously unknown emission lines very near to the strong 157.63 nm F2 spectral line. Prior art techniques used to separate out the 157.52 nm F2 line are ineffective in removing the newly discovered lines; however, a pregain filter of the present invention is effective in removing these newly discovered lines.

Abstract translation: 具有两个增益介质的窄带F2激光系统，可用于集成电路光刻。 来自第一F2激光增益介质的输出光束用预增益滤波器滤波以产生具有窄带宽的种子束。 种子束在包括第二F2激光增益介质的功率增益级中被放大。 系统的输出光束是具有对应于来自第一增益介质的滤波带宽的带宽的脉冲激光束。 在优选实施例中，预增益滤波器包括允许对中心线波长进行反馈控制的波长监视器，使得可以调整预增益滤波器光学器件，以确保将期望的带宽范围注入功率增益级。 在一些实施例中，带宽被预增益滤波器严重变窄，以产生在大约0.2μm或更小的范围内的输出带宽。 在其他优选实施例中，通过预制滤波器使带宽变窄，以便根据增益介质的条件来匹配具有约0.6至1.2μm带宽的157.63谱线的最强的F2谱线的带宽。 申请人已经发现一组以前未知的发射线非常接近强157.63 nm F2光谱线。 用于分离157.52nm F2线的现有技术在去除新发现的线路方面是无效的; 然而，本发明的前置滤波器有效地去除这些新发现的线。

公开(公告)号：US06215807B1

公开(公告)日：2001-04-10

申请号：US09027591

申请日：1998-02-24

Applicant: James P. Reilly

Inventor： James P. Reilly

IPC: H01S310

CPC classification number: H01S3/2383 ,  H01S3/0606 ,  H01S3/07 ,  H01S3/08059 ,  H01S3/08068 ,  H01S3/08081 ,  H01S3/10092

Abstract: A coherent multiple beam laser system including a plurality of slab lasers and a feedback device responsive to the output of at least one of the slab lasers, for feeding back a portion of the slab laser output to the remaining slab lasers for synchronizing the phase of the outputs of all the slab lasers.

Abstract translation: 一种相干多光束激光系统，包括多个平板激光器和响应于至少一个平板激光器的输出的反馈装置，用于将平板激光器输出的一部分输出反馈到剩余的平板激光器，以使 所有平板激光器的输出。

公开(公告)号：US6134259A

公开(公告)日：2000-10-17

申请号：US142626

申请日：1998-12-23

Applicant: Yochay Danziger ,  Erez Hasman ,  Nir Davidson

Inventor： Yochay Danziger ,  Erez Hasman ,  Nir Davidson

IPC: H01S3/08 ,  H01S3/098 ,  H01S3/10

CPC classification number: H01S3/0804 ,  H01S2301/20 ,  H01S3/03 ,  H01S3/061 ,  H01S3/0805 ,  H01S3/08068 ,  H01S3/082 ,  H01S3/083 ,  H01S3/0941 ,  H01S3/10076 ,  H01S3/2232

Abstract: This invention discloses an optical resonator (24) including at least one spiral optical element (44) operative to change the angular phase distribution of modes in the optical resonator (24), thereby to generally eliminate undesirable modes.

Abstract translation: PCT No.PCT / IL97 / 00064 Sec。 371日期1998年12月23日第 102（e）日期1998年12月23日PCT 1997年2月18日提交PCT公布。 公开号WO97 / 34344 日期：1997年9月18日本发明公开了一种光学谐振器（24），其包括至少一个螺旋形光学元件（44），其操作以改变光学谐振器（24）中的模式的角度相位分布，从而通常消除不期望的模式。

公开(公告)号：US5615043A

公开(公告)日：1997-03-25

申请号：US979576

申请日：1993-05-07

Applicant: Henry Plaessmann ,  William M. Grossman

Inventor： Henry Plaessmann ,  William M. Grossman

IPC: H01S3/0941 ,  H01S3/23 ,  H01S3/081 ,  H01S3/0933

CPC classification number: H01S3/2325 ,  H01S3/005 ,  H01S3/08068 ,  H01S3/09415

Abstract: A multiple-pass laser amplifier that uses optical focusing between subsequent passes through a single gain medium so that a reproducibly stable beam size is achieved within the gain region. A confocal resonator or White Cell resonator is provided, including two or three curvilinearly shaped mirrors facing each other along a resonator axis and an optical gain medium positioned on the resonator axis between the mirrors (confocal resonator) or adjacent to one of the mirrors (White Cell). In a first embodiment, two mirrors, which may include adjacent lenses, are configured so that a light beam passing through the gain medium and incident on the first mirror is reflected by that mirror toward the second mirror in a direction approximately parallel to the resonator axis. A light beam translator, such as an optical flat of transparent material, is positioned to translate this light beam by a controllable amount toward or away from the resonator axis for each pass of the light beam through the translator. The optical gain medium may be solid-state, liquid or gaseous medium and may be pumped longitudinally or transversely. In a second embodiment, first and second mirrors face a third mirror in a White Cell configuration, and the optical gain medium is positioned at or adjacent to one of the mirrors. Defocusing means and optical gain medium cooling means are optionally provided with either embodiment, to controllably defocus the light beam, to cool the optical gain medium and to suppress thermal lensing in the gain medium.

Abstract translation: 一种多遍激光放大器，其在后续通过单个增益介质之间使用光学聚焦，使得在增益区域内实现可再现的稳定的光束尺寸。 提供共焦共振器或白电池谐振器，包括沿着谐振器轴线彼此面对的两个或三个曲线形状的反射镜和位于反射镜之间的谐振器轴上的光学增益介质（共焦共振器）或与其中一个反射镜相邻（白色 细胞）。 在第一实施例中，可以包括相邻透镜的两个反射镜被配置为使得通过增益介质并且入射在第一反射镜上的入射到第一反射镜的光束被反射镜朝向第二反射镜在大致平行于谐振器轴的方向上反射 。 定位光束平移器，例如透明材料的光学平面，以使光束通过可调量量朝向或远离谐振器轴线移动，以使光束通过翻译器的每次通过。 光学增益介质可以是固态，液态或气态介质，并且可以纵向或横向泵送。 在第二实施例中，第一和第二反射镜面对白色单元配置中的第三反射镜，并且光学增益介质位于或邻近其中一个反射镜。 散焦装置和光学增益介质冷却装置可选地设置有任一实施例，以可控地散焦光束，冷却光学增益介质并抑制增益介质中的热透镜。

公开(公告)号：US5592505A

公开(公告)日：1997-01-07

申请号：US434788

申请日：1995-05-04

Applicant: James R. Leger

Inventor： James R. Leger

IPC: G02B5/18 ,  G02B27/00 ,  H01S3/08 ,  H01S3/10

CPC classification number: G02B5/1871 ,  G02B27/0037 ,  H01S3/10076 ,  H01S2301/206 ,  H01S3/08045 ,  H01S3/0805 ,  H01S3/08059 ,  H01S3/08068

Abstract: Method for making a custom phase-conjugating diffractive mirror for a laser resonator comprising the steps of: (a) choosing a specified beam mode profile a.sub.1 (x,y) that will suit need of said designer, (b) calculating the mode profile b(x',y') which is a value of the specified beam a.sub.1 (x,y) that is propagated to the reflection surface of the diffractive mirror and (c) calculating mirror reflectance t(x',y') which reflects phase conjugate of b(x',y'). A method for fabricating such a mirror is shown. Another aspect of the invention is the addition of a phase adjusting element into a laser resonator, and compensating for the addition of a phase adjusting element in the design of other phase-adjusting elements such as the mirrors.

Abstract translation: 一种用于制造用于激光谐振器的定制相位共轭衍射镜的方法，包括以下步骤：（a）选择适合所述设计者需要的指定波束模式分布a1（x，y），（b）计算模式分布b （x'，y'），其是传播到衍射镜的反射面的指定光束a1（x，y）的值，（c）计算反射相位的镜面反射率t（x'，y'） b（x'，y'）的共轭。 示出了制造这种反射镜的方法。 本发明的另一方面是将相位调整元件添加到激光谐振器中，并且在其他相位调整元件（例如反射镜）的设计中补偿相位调整元件的添加。

公开(公告)号：US5506858A

公开(公告)日：1996-04-09

申请号：US121347

申请日：1993-09-15

Applicant: Yushi Takenaka ,  Masaki Kuzumoto ,  Kenji Yoshizawa ,  Takashi Yamamoto ,  Masato Matsubara ,  Junichi Nishimae ,  Koji Yasui ,  Akihiro Otani

Inventor： Yushi Takenaka ,  Masaki Kuzumoto ,  Kenji Yoshizawa ,  Takashi Yamamoto ,  Masato Matsubara ,  Junichi Nishimae ,  Koji Yasui ,  Akihiro Otani

IPC: B23K26/06 ,  H01S3/036 ,  H01S3/06 ,  H01S3/07 ,  H01S3/08 ,  H01S3/0975 ,  H01S3/098 ,  H01S3/13 ,  H01S3/23 ,  H01S3/139

CPC classification number: B23K26/0608 ,  B23K26/06 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/123 ,  H01S3/08059 ,  H01S3/036 ,  H01S3/076 ,  H01S3/08068 ,  H01S3/0975 ,  H01S3/2366

Abstract: A laser system wherein, in order that a high-output and high-quality single mode of a cross sectional area larger than the beam diameter determined by the construction of a resonator can be obtained stably, although this has heretofore been impossible, there is used a coupling mirror provided with a partial reflection film and an antireflecting film, a laser beam mode is selected using the partial reflection film, a phase difference between laser beam portions caused by a difference in construction between the partial reflection film and the antireflecting film is compensated using a phase difference compensating apparatus, and there is formed an aperture whose diameter is set to a value of not larger than four times the diameter of the partial reflection film.

Abstract translation: 一种激光系统，其中为了稳定地获得横截面积大于通过谐振器结构确定的光束直径的高输出和高质量的单一模式，尽管迄今为止已经不可能使用 设置有部分反射膜和抗反射膜的耦合镜，使用部分反射膜选择激光束模式，补偿由部分反射膜和抗反射膜之间的结构差引起的激光束部分之间的相位差 使用相位差补偿装置，形成直径设定为不大于部分反射膜直径的4倍的孔径。