公开(公告)号：US08653486B2

公开(公告)日：2014-02-18

申请号：US13713251

申请日：2012-12-13

申请人： Axcelis Technologies, Inc.

发明人： Edward C. Eisner

IPC分类号： H01J37/317 ,  H01J37/10

CPC分类号： H01J3/14 ,  G21K5/10 ,  H01J37/302 ,  H01J37/3171 ,  H01J2237/049 ,  H01J2237/30477 ,  H01J2237/30483

摘要： The present invention relates to a method and apparatus for varying the cross-sectional shape of an ion beam, as the ion beam is scanned over the surface of a workpiece, to generate a time-averaged ion beam having an improved ion beam current profile uniformity. In one embodiment, the cross-sectional shape of an ion beam is varied as the ion beam moves across the surface of the workpiece. The different cross-sectional shapes of the ion beam respectively have different beam profiles (e.g., having peaks at different locations along the beam profile), so that rapidly changing the cross-sectional shape of the ion beam results in a smoothing of the beam current profile (e.g., reduction of peaks associated with individual beam profiles) that the workpiece is exposed to. The resulting smoothed beam current profile provides for improved uniformity of the beam current and improved workpiece dose uniformity.

摘要翻译： 本发明涉及一种用于在离子束在工件的表面上扫描时改变离子束截面形状的方法和装置，以产生具有改进的离子束电流分布均匀性的时间平均离子束 。 在一个实施例中，离子束的横截面形状随着离子束移动穿过工件表面而变化。 离子束的不同横截面形状分别具有不同的光束轮廓（例如，沿着光束轮廓在不同位置处具有峰值），使得快速改变离子束的横截面形状导致光束电流的平滑 工件暴露于的轮廓（例如，减小与各个梁轮廓相关联的峰）。 所得到的平滑光束电流分布提供了改进的束电流均匀性和改进的工件剂量均匀性。

公开(公告)号：US20120273677A1

公开(公告)日：2012-11-01

申请号：US13456944

申请日：2012-04-26

申请人： Lubomir Tuma ,  Petr Hlavenka ,  Petr Sytar ,  Radek Ceska ,  Bohuslav Sed'a

发明人： Lubomir Tuma ,  Petr Hlavenka ,  Petr Sytar ,  Radek Ceska ,  Bohuslav Sed'a

IPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/10

CPC分类号： H01J37/26 ,  H01J37/145 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/04926 ,  H01J2237/2443 ,  H01J2237/24465

摘要： The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk that acts as one of the electrode faces forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector, such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector for detecting secondary electrons that are kept closer to the axis. A light guide may be used to offer electrical insulation between the photon detector and the scintillator.

摘要翻译： 本发明涉及一种柱内反向散射电子检测器，该探测器放置在用于SEM的组合静电/磁性物镜中。 检测器形成为带电粒子敏感表面，优选地形成作为形成静电聚焦场的电极面之一的闪烁体盘。 在闪烁体中产生的光子被光子检测器（例如光电二极管或多像素光子检测器）检测。 物镜可以配备有用于检测保持靠近轴线的二次电子的另一电子检测器。 可以使用光导来在光子检测器和闪烁体之间提供电绝缘。

公开(公告)号：US20100200750A1

公开(公告)日：2010-08-12

申请号：US12658476

申请日：2010-02-08

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： H01J37/26 ,  H01J37/28 ,  H01J37/244 ,  H01J37/10

CPC分类号： H01J37/28 ,  H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256

摘要： A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

摘要翻译： 粒子束系统包括用于产生一次粒子束13的粒子束源5，用于将一次粒子束13聚焦在物平面23中的物镜19; 粒子检测器17; 以及布置在物镜和物平面之间的X射线检测器47。 X射线检测器包括多个半导体检测器，每个半导体检测器具有朝向物体平面的检测表面51。 膜位于物体平面和半导体检测器的检测表面之间，其中不同的半导体检测器具有位于前面的不同的膜，不同的膜相对于二次电子透射率不同。

公开(公告)号：US07501638B1

公开(公告)日：2009-03-10

申请号：US11553160

申请日：2006-10-26

申请人： Fang Zhou

发明人： Fang Zhou

IPC分类号： H01J37/10 ,  H01J37/147

CPC分类号： H01J9/505 ,  H01J3/06 ,  H01J37/067 ,  Y02W30/828

摘要： A charged particle beam emitting device includes at least two charged particle beam guns, each of the at least two charged particle beam guns having a separate charged particle emitter with an emitting surface for emitting a respective charged particle beam. The charged particle beam emitting device further includes an aperture element comprising at least one aperture opening and a deflector unit. The deflector unit is adapted for alternatively directing the charged particle beams of the at least two charged particle beam guns on the at least one aperture opening so that, at the same time, one of the at least two charged particle beams is directed on the aperture opening while the respective other charged particle beam of the at least two charged particle beams is deflected from the aperture opening by the deflector unit. At the same time, only one of the two charged particle beam guns is used so that the temporarily unused charged particle beam gun can be subjected to a cleaning procedure. This ensures that the emitting surfaces of both charged particle beam guns can be alternatively and frequently cleaned with minimum interruption of the operation of the charged particle beam device.

摘要翻译： 带电粒子束发射装置包括至少两个带电粒子束枪，所述至少两个带电粒子束枪中的每一个具有分离的带电粒子发射器，具有用于发射相应带电粒子束的发射表面。 带电粒子束发射装置还包括孔元件，该孔元件包括至少一个孔口和偏转器单元。 偏转器单元适于将至少两个带电粒子束枪的带电粒子束交替地引导到至少一个孔口上，使得同时，至少两个带电粒子束中的一个被引导到孔 所述至少两个带电粒子束的相应的其它带电粒子束由所述偏转器单元从所述开口偏转。 同时，仅使用两个带电粒子束枪中的一个，使得临时使用的带电粒子束枪可以进行清洁程序。 这确保了两个带电粒子束枪的发射表面可以以最小的带电粒子束装置的操作中断来交替地和频繁地清洁。

公开(公告)号：US06946663B2

公开(公告)日：2005-09-20

申请号：US10811494

申请日：2004-03-26

申请人： Eiji Kawai

发明人： Eiji Kawai

IPC分类号： H01J3/22 ,  H01J9/14 ,  H01J9/236 ,  H01J37/10 ,  H01J37/141 ,  H01J49/00 ,  G21K1/08 ,  H01J3/14

CPC分类号： H01J37/141 ,  H01J9/236 ,  Y10S430/143

摘要： A method of efficiently fabricating a multipole lens. The multipole lens has plural polar elements and an annular holding member. Each polar element has a held portion. The annular holding member is provided with through-holes for holding the held portions of the polar elements. A resin is injected into the through-holes in the holding member via openings formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes.

摘要翻译： 一种有效地制造多极镜的方法。 多极透镜具有多个极性元件和环形保持构件。 每个极性元件具有保持部分。 环形保持构件设置有用于保持极性元件的保持部分的通孔。 通过形成在保持构件中的开口将树脂注入到保持构件的通孔中，开口与通孔连通。 注入的树脂被固化，从而将极性元件的保持部分保持在通孔内的保持构件。

公开(公告)号：US5986269A

公开(公告)日：1999-11-16

申请号：US932981

申请日：1997-09-18

申请人： Marcellinus P. C. M. Krijn ,  Alexander Henstra ,  Karel D. van der Mast

发明人： Marcellinus P. C. M. Krijn ,  Alexander Henstra ,  Karel D. van der Mast

IPC分类号： H01J37/153 ,  H01J37/10 ,  H01J37/145

CPC分类号： H01J37/153 ,  H01J2237/1534

摘要： Particle-optical rotationally symmetrical lenses inevitably have chromatic aberration. This lens fault determines the limit of the resolution of known particle-optical apparatus at a comparatively low acceleration voltage (0.5 kV to 5 kV) of the particle beam. This lens fault cannot be eliminated by compensation by means of rotationally symmetrical fields. In order to enhance the resolution of the particle-optical apparatus nevertheless, it has already been proposed to mitigate said lens fault by means of a Wien type corrector. Such a known configuration is provided with a number of electrical and magnetic multipoles. In order to achieve easier adjustment of the various multipole fields, the pole faces (30-i) governing the multipole fields according to the invention have a specific length L=(2.pi..sup.2 n.sup.2)/(K.sub.obj.sup.2 C.sub.c,obj), in which K.sub.obj is the strength of the focusing lens to be corrected and C.sub.c,obj is the coefficient of chromatic aberration of this lens.

摘要翻译： 颗粒光学旋转对称透镜不可避免地具有色差。 这种镜片故障在粒子束的相对低的加速电压（0.5kV至5kV）下确定了已知的粒子光学装置的分辨率的极限。 这种透镜故障不能通过旋转对称场的补偿来消除。 然而，为了提高粒子光学装置的分辨率，已经提出通过维恩型校正器来减轻所述透镜故障。 这种已知的配置设置有多个电和磁多极。 为了实现各种多极场的更容易的调整，根据本发明的控制多极场的极面（30-i）具有特定长度L =（2πnn2）/（Kobj2Cc，obj），其中Kobj是 要校正的聚焦透镜的强度和Cc，obj是该透镜的色差系数。

公开(公告)号：US5736742A

公开(公告)日：1998-04-07

申请号：US729670

申请日：1996-10-03

申请人： Yukinori Ochiai

发明人： Yukinori Ochiai

IPC分类号： H01J37/141 ,  H01J37/10 ,  H01J37/20

CPC分类号： H01J37/10 ,  H01J2237/1035 ,  H01J2237/20

摘要： An in-lens type objective lens is separated into two parts along the plane perpendicular to the direction of electron or ion orbit, so that a target sample can placed between the upper part and the lower part of the lens. Coils for the two parts are serially connected so as to work as one coil. Each of the upper and lower parts of the lens is provided with a lens positioning device. If the in-lens type objective lens is of a three-piece electrostatic type, a structure is provided which enables a target sample to be placed between a first and second electrode group and the third electrode.

摘要翻译： 透镜式物镜沿着垂直于电子或离子轨道方向的平面分成两部分，使得目标样品可以放置在透镜的上部和下部之间。 两个部分的线圈串联连接，以作为一个线圈工作。 透镜的上部和下部各设置有透镜定位装置。 如果透镜式物镜是三体式静电型的，则提供能够将目标样品置于第一和第二电极组与第三电极之间的结构。

公开(公告)号：US4827127A

公开(公告)日：1989-05-02

申请号：US922715

申请日：1986-10-24

申请人： Hideo Todokoro

发明人： Hideo Todokoro

IPC分类号： H01J37/10 ,  H01J37/04 ,  H01J37/147 ,  H01J37/15 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/268 ,  H01J37/04 ,  H01J37/15 ,  G01R31/307

摘要： An apparatus using a charged particle beam is disclosed which includes means for generating charged particles, means for accelerating the charged particles so that the charged particles have desired kinetic energy, lens means including at least one objective lens for focusing a charged particle beam formed of the accelerated, charged particles, on the surface of a specimen, scanning means for scanning the surface of the specimen two-dimensionally with the focused beam, detection means for detecting secondary electrons, reflected electrons, X-rays and light, all of which emerge from the surface of the specimen, objective lens moving means for moving an objective lens nearest to the specimen, and deflection means linked with the objective lens moving means for deflecting the charged particle beam so that the charged particle beam carries out parallel displacement at the objective lens by an amount corresponding to the moving distance of the objective lens.

摘要翻译： 公开了一种使用带电粒子束的装置，其包括用于产生带电粒子的装置，用于加速带电粒子以使带电粒子具有期望动能的装置，透镜装置包括至少一个物镜，用于聚焦由 在样品表面上加速带电的颗粒，用聚焦光束二维扫描样品的扫描装置的扫描装置，用于检测二次电子，反射电子，X射线和光的检测装置，所有这些都从 样本表面，用于移动最接近样本的物镜的物镜移动装置以及与物镜移动装置连接的偏转装置，用于偏转带电粒子束，使得带电粒子束在物镜处执行平行位移 相当于物镜的移动距离的量。

公开(公告)号：US4806766A

公开(公告)日：1989-02-21

申请号：US65536

申请日：1987-06-23

申请人： Thomas Chisholm

发明人： Thomas Chisholm

IPC分类号： H01J37/141 ,  G01Q30/06 ,  H01J37/14 ,  H01J37/21 ,  H01J37/10

CPC分类号： H01J37/14

摘要： A magnetic lens system is provided for a beam of charged particles, comprising a pair of ring-shaped permanent magnets through which the beam passes, the axes of the rings lying coaxially along the beam direction, and the two rings being axially separated and axially oppositely magnetised. A pair of separated conducting focus coils are provided one for each ring, the axes of the focus coils lying coaxially along the beam direction, each focus coil lying within its associated ring, and the focus coils being connected in series opposition to carry an adjustable direct electric current for fine focusing of the beam by the lens without rotation of the focused beam. The lens may provide the fast fine focus adjustment needed to compensate for space charge defocussing produced by changes in beam current.

摘要翻译： 一个磁性透镜系统被提供用于一个带电粒子束，包括一对环形永磁体，光束通过该永磁体，环的轴线沿着光束方向同轴地放置，两个环轴向分离并且轴向相对 磁化。 为每个环设置一对分离的导电聚焦线圈，聚焦线圈的轴线沿着光束方向同轴地放置，每个聚焦线圈位于其相关联的环内，并且聚焦线圈串联连接以携带可调直接 用于通过透镜精细聚焦光束的电流而不使聚焦光束旋转。 透镜可提供所需的快速精细调焦以补偿由束电流变化产生的空间电荷抖动。

公开(公告)号：US4775790A

公开(公告)日：1988-10-04

申请号：US871852

申请日：1986-06-09

申请人： Hiroyuki Kobayashi ,  Shigeto Isakozawa

发明人： Hiroyuki Kobayashi ,  Shigeto Isakozawa

IPC分类号： H01J37/10 ,  H01J37/26

CPC分类号： H01J37/265

摘要： A transmission electron microscope for irradiating a sample with an electron beam and for causing an image formation lens system to enlarge the electron beam having passed through the sample so that a magnified image of the sample is formed by the electron beam. The image formation lens system includes a plurality of lens groups each having a plurality of electromagnetic lenses, and the focal length of each of the electromagnetic lenses included in at least one lens group is changed while keeping the resultant focal length of each lens group constant, to rotate the magnified image in a state that the magnification of the image is kept constant.

摘要翻译： 一种透射电子显微镜，用于用电子束照射样品，并使图像形成透镜系统放大已经通过样品的电子束，使得通过电子束形成样品的放大图像。 图像形成透镜系统包括多个具有多个电磁透镜的透镜组，并且包括在至少一个透镜组中的每个电磁透镜的焦距被改变，同时保持每个透镜组的合成焦距保持不变， 以使图像的倍率保持恒定的状态来旋转放大图像。