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81.
公开(公告)号:US20240258991A1
公开(公告)日:2024-08-01
申请号:US18160877
申请日:2023-01-27
Applicant: Akoustis, Inc.
Inventor: Kenneth Fallon , Carlos R. Padilla , Mary Winters , Robert Charles Dry , Ethan Gram , Westbrook Hoose
CPC classification number: H03H9/105 , H03H3/02 , H03H9/0523 , H03H9/173
Abstract: A wafer including an array of bulk acoustic wave resonator devices can include a first bulk acoustic wave resonator device on the wafer, the first bulk acoustic wave resonator device including a passivation layer on a piezoelectric layer, a second bulk acoustic wave resonator device on the wafer directly adjacent to the first bulk acoustic wave resonator device, the second bulk acoustic wave resonator device including the passivation layer and the piezoelectric layer, a wall layer on the wafer forming first and second wall cavity structures that extend around the first and second bulk acoustic wave resonator devices, respectively, a capping layer extending over the wall layer to cover the first and second wall cavity structures that include the first and second bulk acoustic wave resonator devices, respectively, a metallization layer coupling together bulk acoustic wave resonators included in the first or second bulk acoustic wave resonator device and a pillar that protrudes vertically from the metallization layer to contact the cap layer.
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公开(公告)号:US20240088860A1
公开(公告)日:2024-03-14
申请号:US18510119
申请日:2023-11-15
Applicant: Akoustis, Inc.
Inventor: Craig Moe , Jeffrey M. Leathersich
IPC: H03H3/02 , H03H9/02 , H03H9/05 , H03H9/10 , H03H9/13 , H03H9/17 , H03H9/54 , H10N30/00 , H10N30/02 , H10N30/06 , H10N30/077 , H10N30/086 , H10N30/85 , H10N30/87 , H10N30/88
CPC classification number: H03H3/02 , H03H9/02015 , H03H9/02118 , H03H9/0523 , H03H9/105 , H03H9/13 , H03H9/173 , H03H9/175 , H03H9/177 , H03H9/547 , H10N30/02 , H10N30/06 , H10N30/077 , H10N30/086 , H10N30/10513 , H10N30/85 , H10N30/875 , H10N30/877 , H10N30/88 , H03H2003/021 , H03H2003/025 , H10N30/072 , Y10T29/42
Abstract: A method of forming a piezoelectric thin film can include depositing a material on a first surface of a Si substrate to provide a stress neutral template layer. A piezoelectric thin film including a Group III element and nitrogen can be sputtered onto the stress neutral template layer and a second surface of the Si substrate that is opposite the first surface can be processed to remove that Si substrate and the stress neutral template layer to provide a remaining portion of the piezoelectric thin film. A piezoelectric resonator can be formed on the remaining portion of the piezoelectric thin film.
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公开(公告)号:US11901880B2
公开(公告)日:2024-02-13
申请号:US17151552
申请日:2021-01-18
Applicant: Akoustis, Inc.
Inventor: Guillermo Moreno Granado , Rohan W. Houlden , David M. Aichele , Jeffrey B. Shealy
CPC classification number: H03H9/703 , H03H3/02 , H03H9/02031 , H03H9/0523 , H03H9/0533 , H03H9/105 , H03H9/173 , H03H9/175 , H03H9/176 , H03H9/562 , H03H9/564 , H03H9/566 , H03H2003/021 , H03H2003/025
Abstract: An RF diplexer circuit device using modified lattice, lattice, and ladder circuit topologies. The diplexer can include a pair of filter circuits, each with a plurality of series resonator devices and shunt resonator devices. In the ladder topology, the series resonator devices are connected in series while shunt resonator devices are coupled in parallel to the nodes between the resonator devices. In the lattice topology, a top and a bottom serial configurations each includes a plurality of series resonator devices, and a pair of shunt resonators is cross-coupled between each pair of a top serial configuration resonator and a bottom serial configuration resonator. The modified lattice topology adds baluns or inductor devices between top and bottom nodes of the top and bottom serial configurations of the lattice configuration. A multiplexing device or inductor device can be configured to select between the signals coming through the first and second filter circuits.
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84.
公开(公告)号:US20230412145A1
公开(公告)日:2023-12-21
申请号:US18455402
申请日:2023-08-24
Applicant: Akoustis, Inc.
Inventor: Jeffrey B. SHEALY
IPC: H03H9/17 , H03H3/02 , H03H9/02 , H03H9/05 , H03H9/10 , H03H9/54 , H03H9/56 , H10N30/06 , H10N30/072
CPC classification number: H03H9/173 , Y10T29/42 , H03H9/02031 , H03H9/0514 , H03H9/0533 , H03H9/105 , H03H9/176 , H03H9/542 , H03H9/566 , H03H9/568 , H03H9/175 , H10N30/06 , H10N30/072 , H03H2003/025 , H03H2003/021 , H03H3/02
Abstract: A method and structure for single crystal acoustic electronic device. The device includes a substrate having an enhancement layer formed overlying its surface region, a support layer formed overlying the enhancement layer and an air cavity formed through a portion of the support layer. Single crystal piezoelectric material is formed overlying the air cavity and a portion of the enhancement layer. Also, a first electrode material coupled to the backside surface region of the crystal piezoelectric material and spatially configured within the cavity. A second electrode material is formed overlying the topside of the piezoelectric material, and a dielectric layer formed overlying the second electrode material. Further, one or more shunt layers can be formed around the perimeter of a resonator region of the device to connect the piezoelectric material to the enhancement layer.
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公开(公告)号:US11804819B2
公开(公告)日:2023-10-31
申请号:US17694514
申请日:2022-03-14
Applicant: Akoustis, Inc.
Inventor: Jeffrey B. Shealy
IPC: H03H9/17 , H03H3/02 , H03H9/02 , H03H9/05 , H03H9/10 , H03H9/54 , H03H9/56 , H10N30/06 , H10N30/072
CPC classification number: H03H9/173 , H03H3/02 , H03H9/02031 , H03H9/0514 , H03H9/0533 , H03H9/105 , H03H9/175 , H03H9/176 , H03H9/542 , H03H9/566 , H03H9/568 , H10N30/06 , H10N30/072 , H03H2003/021 , H03H2003/025 , Y10T29/42
Abstract: A method and structure for single crystal acoustic electronic device. The device includes a substrate having an enhancement layer formed overlying its surface region, a support layer formed overlying the enhancement layer, and an air cavity formed through a portion of the support layer. Single crystal piezoelectric material is formed overlying the air cavity and a portion of the enhancement layer. Also, a first electrode material coupled to the backside surface region of the crystal piezoelectric material and spatially configured within the cavity. A second electrode material is formed overlying the topside of the piezoelectric material, and a dielectric layer formed overlying the second electrode material. Further, one or more shunt layers can be formed around the perimeter of a resonator region of the device to connect the piezoelectric material to the enhancement layer.
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公开(公告)号:US20230336151A1
公开(公告)日:2023-10-19
申请号:US18339939
申请日:2023-06-22
Applicant: Akoustis, Inc.
Inventor: Dae Ho Kim , Mary Winters , Zhiqiang Bi
CPC classification number: H03H9/132 , H03H9/02157 , H03H9/131 , H03H9/547 , H03H9/171 , H03H9/02015
Abstract: A resonator circuit device. This device can include a piezoelectric layer having a front-side electrode and a back-side electrode spatially configured on opposite sides of the piezoelectric layer. Each electrode has a connection region and a resonator region. Each electrode also includes a partial mass-loaded structure configured within a vicinity of its connection region. The front-side electrode and the back-side electrode are spatially configured in an anti-symmetrical manner with the resonator regions of both electrodes at least partially overlapping and the first and second connection regions on opposing sides. This configuration provides a symmetric acoustic impedance profile for improved Q factor and can reduce the issues of misalignment or unbalanced boundary conditions associated with conventional single mass-loaded perimeter configurations.
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87.
公开(公告)号:US11736177B2
公开(公告)日:2023-08-22
申请号:US17544319
申请日:2021-12-07
Applicant: Akoustis Inc.
Inventor: Jeffrey B. Shealy , Rohan W. Houlden , David M. Aichele
IPC: H04B1/02 , H04B7/08 , H04B1/00 , H03H3/02 , H03F1/26 , H03F3/195 , H03F3/72 , H03H9/02 , H03H9/17
CPC classification number: H04B7/0814 , H03F1/26 , H03F3/195 , H03F3/72 , H03H3/02 , H04B1/006 , H03F2200/294 , H03F2200/451 , H03F2203/7239 , H03H9/02118 , H03H9/173 , H03H9/175 , H03H2003/023 , H03H2003/025
Abstract: A front end module (FEM) for a 5.6/6.6 GHz Wi-Fi acoustic wave resonator RF filter circuit. The device can include a power amplifier (PA), a 5.6/6.6 GHz resonator, and a diversity switch. The device can further include a low noise amplifier (LNA). The PA is electrically coupled to an input node and can be configured to a DC power detector or an RF power detector. The resonator can be configured between the PA and the diversity switch, or between the diversity switch and an antenna. The LNA may be configured to the diversity switch or be electrically isolated from the switch. Another 5.6/6.6 GHZ resonator may be configured between the diversity switch and the LNA. In a specific example, this device integrates a 5.6/6.6 GHz PA, a 5.6/6.6 GHZ bulk acoustic wave (BAW) RF filter, a single pole two throw (SP2T) switch, and a bypassable LNA into a single device.
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88.
公开(公告)号:US20230253943A1
公开(公告)日:2023-08-10
申请号:US18303163
申请日:2023-04-19
Applicant: Akoustis, Inc.
Inventor: Dae Ho KIM , Mary Winters , Ramakrishna Vetury , Jeffrey B. Shealy
IPC: H03H3/02 , H03H9/10 , H03H9/13 , H03H9/17 , H03H9/54 , H03H9/02 , H03H9/05 , H10N30/02 , H10N30/06 , H10N30/077 , H10N30/85 , H10N30/086 , H10N30/88 , H10N30/87 , H10N30/00
CPC classification number: H03H3/02 , H03H9/105 , H03H9/13 , H03H9/173 , H03H9/177 , H03H9/547 , H03H9/175 , H03H9/02015 , H03H9/02118 , H03H9/0523 , H10N30/02 , H10N30/06 , H10N30/077 , H10N30/85 , H10N30/086 , H10N30/88 , H10N30/875 , H10N30/877 , H10N30/10513 , Y10T29/42 , H03H2003/025 , H03H2003/021
Abstract: A bulk acoustic wave (BAW) resonator includes a solidly mounted reflector, for example, a Bragg-type reflector, a piezoelectric layer, and first and second electrodes on first and second surfaces, respectively, of the piezoelectric layer. A filter device or filter system includes at least one BAW resonator. Related methods of fabrication include forming the BAW resonator.
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公开(公告)号:US20230246618A1
公开(公告)日:2023-08-03
申请号:US18002339
申请日:2021-08-02
Applicant: Akoustis, Inc.
Inventor: Craig Moe , Jeffrey M. Leathersich
CPC classification number: H03H3/02 , C30B29/38 , C30B25/10 , C30B25/18 , C30B25/16 , H03H9/02015 , H03H2003/023
Abstract: MOCVD systems can be used to form single crystal piezoelectric ScxAl1−xN layers having a concentration of Sc in a range between about 4% and about 18% at temperatures in a range, for example, between about 800 degrees Centigrade and about 950 degrees Centigrade. The single crystal piezoelectric ScxAl1−xN layers can have a crystalline structure characterized by an XRD ω-rocking curve FWHM value in a range between about less than 1.0 degrees to about 0.001 degrees as measured about the omega angle as of the ScxAl1−xN (0002) film reflection.
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公开(公告)号:US11683021B2
公开(公告)日:2023-06-20
申请号:US16707885
申请日:2019-12-09
Applicant: Akoustis, Inc.
Inventor: Jeffrey B. Shealy , Rohan W. Houlden , David M. Aichele
CPC classification number: H03H9/562 , H03H3/04 , H03H9/568 , H10N30/10516 , H03H2003/0428 , H03H2003/0435
Abstract: An RF circuit device using modified lattice, lattice, and ladder circuit topologies. The devices can include four resonator devices and four shunt resonator devices. In the ladder topology, the resonator devices are connected in series from an input port to an output port while shunt resonator devices are coupled the nodes between the resonator devices. In the lattice topology, a top and a bottom serial configurations each includes a pair of resonator devices that are coupled to differential input and output ports. A pair of shunt resonators is cross-coupled between each pair of a top serial configuration resonator and a bottom serial configuration resonator. The modified lattice topology adds baluns or inductor devices between top and bottom nodes of the top and bottom serial configurations of the lattice configuration. These topologies may be applied using single crystal or polycrystalline bulk acoustic wave (BAW) resonators.
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