Acid-amplifier having acetal group and photoresist composition including the same
    81.
    发明授权
    Acid-amplifier having acetal group and photoresist composition including the same 失效
    具有缩醛基的酸性放大器和包含其的光致抗蚀剂组合物

    公开(公告)号:US07935474B2

    公开(公告)日:2011-05-03

    申请号:US12174759

    申请日:2008-07-17

    Abstract: An acid-amplifier having an acetal group and a photoresist composition including the same, are disclosed. The acid-amplifier produces an acid (second acid) during a post-exposure-bake (PEB), which is induced by an acid (first acid) generated from a photo-acid generator (PAG) at the exposure process so that a line edge roughness (LER) of the photoresist pattern and photoresist energy sensitivity are improved. The acid-amplifier has a structure of following Formula 1. in Formula 1, R is C4˜C20 mono-cyclic or multi-cyclic saturated hydrocarbon, R1 is C1˜C10 linear hydrocarbon, C1˜C10 perfluoro compound or C5˜C20 aromatic compound, Ra and Rb are independently hydrogen atom or C1˜C4 saturated hydrocarbon and A is independently oxygen atom (O) or sulfur atom (S).

    Abstract translation: 公开了具有缩醛基的酸性放大器和包含该缩醛基的光致抗蚀剂组合物。 在曝光过程中,酸放大器在曝光前烘烤(PEB)中产生酸(第二酸),其由在光生酸发生器(PAG)产生的酸(第一酸)诱导,使得线 改善了光致抗蚀剂图案的边缘粗糙度(LER)和光致抗蚀剂的能量灵敏度。 酸式放大器在式1中具有下式1的结构,R为C 4〜C 20单环或多环饱和烃,R 1为C 1〜C 10直链烃,C 1〜C 10全氟化合物或C 5〜C 20芳族化合物 ,Ra和Rb独立地为氢原子或C1〜C4饱和烃,A独立地为氧原子(O)或硫原子(S)。

    METHOD AND APPARATUS FOR BOOTING AN IMAGE REPRODUCTION APPARATUS
    82.
    发明申请
    METHOD AND APPARATUS FOR BOOTING AN IMAGE REPRODUCTION APPARATUS 有权
    用于拍摄图像重现装置的方法和装置

    公开(公告)号:US20110037993A1

    公开(公告)日:2011-02-17

    申请号:US12649812

    申请日:2009-12-30

    CPC classification number: H04N5/63 G06F9/4418 H04N21/4436

    Abstract: An image reproduction apparatus including a power control unit detecting whether an error has occurred in supplying power to the image reproduction apparatus; and a booting control unit selectively cold-booting the image reproduction apparatus based on the detection of whether the error with supplying the power has occurred.

    Abstract translation: 一种图像再现装置,包括:功率控制单元,检测在向图像再现装置供电时是否发生错误; 以及引导控制单元,基于是否发生了提供电源的错误的检测来选择性地冷启动图像再现设备。

    Method of fabricating nano-wire array
    83.
    发明授权
    Method of fabricating nano-wire array 失效
    制造纳米线阵列的方法

    公开(公告)号:US07846786B2

    公开(公告)日:2010-12-07

    申请号:US11927881

    申请日:2007-10-30

    Abstract: Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer. Accordingly, even in an unparallel structure of nano-wires to electrode lines, a large scale nano-wire array is practicable and applicable to an integrated circuit or display unit with nano-wire alignment difficulty, as well as to device applications using flexible substrates.

    Abstract translation: 提供一种制造纳米线阵列的方法,包括以下步骤:在衬底上沉积包含纳米线的纳米线溶液; 在衬底上形成带状的第一蚀刻区域,然后对纳米线进行构图; 形成彼此平行的漏极和源极电极线,其间插入图案化的纳米线; 形成多个漏电极,所述多个漏电极的一端连接到所述漏电极线并接触所述纳米线中的至少一个,并且形成多个源电极,所述多个源电极的一端连接到所述源电极线并接触所述纳米线, 接触漏电极的电线; 在所述漏极和源极电极之间形成第二蚀刻区域,以防止所述漏极和源极电极之间的电接触; 在所述基板上形成绝缘层; 以及在与绝缘层上的纳米线接触的漏极和源电极之间形成栅电极。 因此,即使在纳米线与电极线的不平行结构中,大规模的纳米线阵列也是可行的并且适用于具有纳米线对准困难的集成电路或显示单元以及使用柔性基板的器件应用。

    PHOTOLITHOGRAPHY SYSTEM USING AN OPTICAL MICROSCOPE
    85.
    发明申请
    PHOTOLITHOGRAPHY SYSTEM USING AN OPTICAL MICROSCOPE 审中-公开
    使用光学显微镜的光刻机系统

    公开(公告)号:US20100002213A1

    公开(公告)日:2010-01-07

    申请号:US12033264

    申请日:2008-02-19

    CPC classification number: G03F7/70383

    Abstract: A photolithography system using an optical microscope is provided that can form various types of selective patterns at a low cost in small-scale research using unit-size silicon substrates which is not targeted for mass production, without requiring an expensive photomask.

    Abstract translation: 提供了一种使用光学显微镜的光刻系统,其可以在不需要昂贵的光掩模的情况下以小规模研究形成各种类型的选择性图案,其使用不是大规模生产的单位尺寸硅衬底。

    Method for fabricating a micro-electromechanical system switch
    87.
    发明授权
    Method for fabricating a micro-electromechanical system switch 有权
    微机电系统开关的制造方法

    公开(公告)号:US07546677B2

    公开(公告)日:2009-06-16

    申请号:US11898002

    申请日:2007-09-07

    Abstract: A method includes forming a signal line on the substrate so as to have a predetermined opening portion; at least one supporting frame each formed on the substrate at both sides of the signal line; a ground line formed on the substrate between the supporting frame and the signal line; a moving plate fixed to the supporting frame at both sides thereof, the moving plate being movable upward and downward; a switching unit positioned on the moving plate, the switching unit comprising contact means for connecting the opened signal line; and a supporting layer for supporting the moving plate and the switching unit, wherein the supporting layer comprises a support protrusion portion for maintaining a distance from the substrate.

    Abstract translation: 一种方法包括在基板上形成信号线以具有预定的开口部分; 至少一个支撑框架,每个形成在信号线两侧的基板上; 形成在支撑框架和信号线之间的基板上的接地线; 移动板在其两侧固定到支撑框架,移动板可向上和向下移动; 位于移动板上的切换单元,切换单元包括用于连接打开的信号线的接触装置; 以及用于支撑所述移动板和所述切换单元的支撑层,其中所述支撑层包括用于保持与所述基板的距离的支撑突出部分。

    PHOTO-SENSITIVE COMPOUND AND PHOTORESIST COMPOSITION INCLUDING THE SAME
    89.
    发明申请
    PHOTO-SENSITIVE COMPOUND AND PHOTORESIST COMPOSITION INCLUDING THE SAME 失效
    光敏化合物和包括其的光电组合物

    公开(公告)号:US20080305430A1

    公开(公告)日:2008-12-11

    申请号:US12134840

    申请日:2008-06-06

    CPC classification number: C07C69/42 C07C69/76 G03F7/0382

    Abstract: Disclosed are a photo-sensitive compound and a photoresist composition containing the same, for forming ultra-fine photoresist patterns. The photo-sensitive compound is resented by following Formula 1, wherein x is an integer of 1 to 5, y is an integer of 2 to 6, R is a C2˜C20 hydrocarbon group. The photoresist composition comprises 1˜85 weight % of a photo-sensitive compound represented by following Formula 1, 1˜55 weight % of a compound which reacts with a hydroxyl group (—OH) of the compound represented by Formula 1 to combine with the photo-sensitive compound represented by Formula 1; 1˜15 weight % of a photo-acid generator; and 12˜97 weight % of an organic solvent.

    Abstract translation: 公开了用于形成超细光致抗蚀剂图案的光敏化合物和含有该光敏化合物的光致抗蚀剂组合物。 光敏化合物按下式1,其中x为1〜5的整数,y为2〜6的整数,R为C2〜C20的烃基。 光致抗蚀剂组合物包含1〜85重量%的由下式1表示的感光性化合物,1〜55重量%的与式1表示的化合物的羟基(-OH)反应的化合物,与 由式1表示的光敏化合物; 1〜15重量%的光酸发生剂; 和12〜97重量%的有机溶剂。

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