Metal Oxide Semiconductor Field Effect Transistors (MOSFETS) Including Recessed Channel Regions
    82.
    发明申请
    Metal Oxide Semiconductor Field Effect Transistors (MOSFETS) Including Recessed Channel Regions 审中-公开
    金属氧化物半导体场效应晶体管(MOSFET)包括嵌入式通道区域

    公开(公告)号:US20110079831A1

    公开(公告)日:2011-04-07

    申请号:US12966362

    申请日:2010-12-13

    IPC分类号: H01L29/772

    摘要: Unit cells of metal oxide semiconductor (MOS) transistors are provided having an integrated circuit substrate and a MOS transistor on the integrated circuit substrate. The MOS transistor includes a source region, a drain region and a gate. The gate is between the source region and the drain region. A channel region is provided between the source and drain regions. The channel region has a recessed region that is lower than bottom surfaces of the source and drain regions. Related methods of fabricating transistors are also provided.

    摘要翻译: 金属氧化物半导体(MOS)晶体管的单位电池在集成电路基板上具有集成电路基板和MOS晶体管。 MOS晶体管包括源极区,漏极区和栅极。 栅极在源极区域和漏极区域之间。 在源区和漏区之间提供沟道区。 沟道区具有比源区和漏区的底表面低的凹陷区域。 还提供了制造晶体管的相关方法。

    GATE STRUCTURES OF SEMICONDUCTOR DEVICES
    83.
    发明申请
    GATE STRUCTURES OF SEMICONDUCTOR DEVICES 审中-公开
    半导体器件的门结构

    公开(公告)号:US20100237401A1

    公开(公告)日:2010-09-23

    申请号:US12726836

    申请日:2010-03-18

    IPC分类号: H01L29/792

    摘要: Gate structures of semiconductor devices and methods of forming gate structures of semiconductor devices are provided. A first insulating pattern may be disposed on an active region of a semiconductor substrate. A data storage pattern may be disposed on the first insulating pattern. A second insulating pattern may be disposed on the data storage pattern and may contact the data storage pattern. A first conductive pattern may conform to the second insulating pattern and to sidewalls of a mold comprising the second insulating pattern. A second conductive pattern may be disposed within a cavity defined by the first conductive pattern. Spacers may be formed on sidewalls of at least one of the first insulating pattern, the data storage pattern, the second insulating pattern, and the conductive pattern.

    摘要翻译: 提供了半导体器件的栅极结构和形成半导体器件的栅极结构的方法。 第一绝缘图案可以设置在半导体衬底的有源区上。 数据存储图案可以设置在第一绝缘图案上。 第二绝缘图案可以设置在数据存储图案上并且可以接触数据存储图案。 第一导电图案可以符合第二绝缘图案以及包括第二绝缘图案的模具的侧壁。 第二导电图案可以设置在由第一导电图案限定的空腔内。 间隔件可以形成在第一绝缘图案,数据存储图案,第二绝缘图案和导电图案中的至少一个的侧壁上。

    Multichannel Metal Oxide Semiconductor (MOS) Transistors
    84.
    发明申请
    Multichannel Metal Oxide Semiconductor (MOS) Transistors 审中-公开
    多通道金属氧化物半导体(MOS)晶体管

    公开(公告)号:US20100109087A1

    公开(公告)日:2010-05-06

    申请号:US12687613

    申请日:2010-01-14

    IPC分类号: H01L29/78

    摘要: Unit cells of metal oxide semiconductor (MOS) transistors are provided including an integrated circuit substrate an a MOS transistor on the integrated circuit substrate. The MOS transistor includes a source region, a drain region and a gate. The gate is positioned between the source region and the drain region. A horizontal channel is provided between the source and drain regions. The horizontal channel includes at least two spaced apart horizontal channel regions. Related methods of fabricating MOS transistors are also provided.

    摘要翻译: 提供金属氧化物半导体(MOS)晶体管的单元电池,其包括集成电路基板和集成电路基板上的MOS晶体管。 MOS晶体管包括源极区,漏极区和栅极。 栅极位于源极区域和漏极区域之间。 在源区和漏区之间提供水平通道。 水平通道包括至少两个间隔开的水平通道区域。 还提供了制造MOS晶体管的相关方法。

    Vertical Channel Fin Field-Effect Transistors Having Increased Source/Drain Contact Area and Methods for Fabricating the Same
    85.
    发明申请
    Vertical Channel Fin Field-Effect Transistors Having Increased Source/Drain Contact Area and Methods for Fabricating the Same 有权
    具有增加的源极/漏极接触面积的垂直沟道鳍效应晶体管及其制造方法

    公开(公告)号:US20100044784A1

    公开(公告)日:2010-02-25

    申请号:US12613025

    申请日:2009-11-05

    IPC分类号: H01L29/78

    摘要: A fin field-effect transistor (FinFET) device includes a fin-shaped active region having first and second source/drain regions therein and a channel region therebetween vertically protruding from a semiconductor substrate. A gate electrode is formed on an upper surface and sidewalls of the channel region. First and second source/drain contacts are formed on respective upper surfaces and sidewalls of the first and second source/drain regions of the fin-shaped active region at opposite sides of the gate electrode. The channel region may be narrower than the first and second source/drain regions of the fin-shaped active region.

    摘要翻译: 翅片场效应晶体管(FinFET)器件包括其中具有第一和第二源极/漏极区域的鳍状有源区域以及从半导体衬底垂直突出的沟道区域。 栅电极形成在沟道区的上表面和侧壁上。 第一和第二源极/漏极触点形成在栅极电极的相对侧的鳍状有源区域的第一和第二源极/漏极区域的相应上表面和侧壁上。 沟道区域可以比鳍状有源区域的第一和第二源极/漏极区域窄。

    SEMICONDUCTOR DEVICE EMPLOYING BURIED INSULATING LAYER AND METHOD OF FABRICATING THE SAME
    88.
    发明申请
    SEMICONDUCTOR DEVICE EMPLOYING BURIED INSULATING LAYER AND METHOD OF FABRICATING THE SAME 失效
    采用绝缘绝缘层的半导体器件及其制造方法

    公开(公告)号:US20080296649A1

    公开(公告)日:2008-12-04

    申请号:US11944260

    申请日:2007-11-21

    IPC分类号: H01L27/108 H01L21/8242

    摘要: A semiconductor device employs an asymmetrical buried insulating layer, and a method of fabricating the same. The semiconductor device includes a lower semiconductor substrate. An upper silicon pattern is located on the lower semiconductor substrate. The upper silicon pattern includes a channel region, and a source region and a drain region spaced apart from each other by the channel region. A gate electrode is electrically insulated from the upper silicon pattern and intersects over the channel region. A bit line and a cell capacitor are electrically connected to the source region and the drain region, respectively. A buried insulating layer is interposed between the drain region and the lower semiconductor substrate. The buried insulating layer has an extension portion partially interposed between the channel region and the lower semiconductor substrate.

    摘要翻译: 半导体器件采用非对称埋层绝缘层及其制造方法。 半导体器件包括下半导体衬底。 上硅图案位于下半导体衬底上。 上部硅图案包括通道区域以及由沟道区域彼此间隔开的源极区域和漏极区域。 栅电极与上硅图案电绝缘,并且在沟道区域上相交。 位线和单元电容器分别电连接到源极区域和漏极区域。 掩埋绝缘层插入在漏区和下半导体衬底之间。 掩埋绝缘层具有部分插入在沟道区域和下半导体衬底之间的延伸部分。

    SEMICONDUCTOR DEVICE HAVING PARTIALLY INSULATED FIELD EFFECT TRANSISTOR (PiFET) AND METHOD OF FABRICATING THE SAME
    89.
    发明申请
    SEMICONDUCTOR DEVICE HAVING PARTIALLY INSULATED FIELD EFFECT TRANSISTOR (PiFET) AND METHOD OF FABRICATING THE SAME 审中-公开
    具有部分绝缘场效应晶体管(PiFET)的半导体器件及其制造方法

    公开(公告)号:US20080145989A1

    公开(公告)日:2008-06-19

    申请号:US12040636

    申请日:2008-02-29

    IPC分类号: H01L29/06

    摘要: Embodiments of the invention include a partially insulated field effect transistor and a method of fabricating the same. According to some embodiments, a semiconductor substrate is formed by sequentially stacking a bottom semiconductor layer, a sacrificial layer, and a top semiconductor layer. The sacrificial layer may be removed to form a buried gap region between the bottom semiconductor layer and the top semiconductor layer. Then, a transistor may be formed on the semiconductor substrate. The sacrificial layer may be a crystalline semiconductor formed by an epitaxial growth technology.

    摘要翻译: 本发明的实施例包括部分绝缘的场效应晶体管及其制造方法。 根据一些实施例,通过顺序堆叠底部半导体层,牺牲层和顶部半导体层来形成半导体衬底。 可以去除牺牲层以在底部半导体层和顶部半导体层之间形成掩埋间隙区域。 然后,可以在半导体衬底上形成晶体管。 牺牲层可以是通过外延生长技术形成的晶体半导体。