公开(公告)号：US20110049578A1

公开(公告)日：2011-03-03

申请号：US12841286

申请日：2010-07-22

申请人： Akihiro Kojima

发明人： Akihiro Kojima

IPC分类号： H01L23/538 ,  H01L21/768

CPC分类号： H01L21/76816 ,  B81B2207/015 ,  B81C1/00246 ,  B81C2203/0735 ,  H01L2224/11

摘要： According to one embodiment, an electric component includes: a first insulating layer formed on a first wire; a second wire and a functional element formed on the first insulating layer; a second insulating layer formed on the first insulating layer; and a connection wire that connects the second wire and the first wire. In the connection wire, a first via, a second via, and an inter-via wire are integrally formed of the same material. The first via is formed in the second insulating layer. The second via is formed in the first and second insulating layers.

摘要翻译： 根据一个实施例，电气部件包括：形成在第一线上的第一绝缘层; 形成在第一绝缘层上的第二线和功能元件; 形成在所述第一绝缘层上的第二绝缘层; 以及连接第二线和第一线的连接线。 在连接线中，第一通孔，第二通孔和通孔间导线由相同的材料一体地形成。 第一通孔形成在第二绝缘层中。 第二通孔形成在第一和第二绝缘层中。

公开(公告)号：US07803434B2

公开(公告)日：2010-09-28

申请号：US11960023

申请日：2007-12-19

申请人： Akihiro Kojima ,  Fumio Shimano ,  Makoto Murakami ,  Jeong Hee Sung

发明人： Akihiro Kojima ,  Fumio Shimano ,  Makoto Murakami ,  Jeong Hee Sung

IPC分类号： C09K19/12 ,  C09K19/30 ,  C09K19/18 ,  C09K19/44 ,  G02F1/13

CPC分类号： C09K19/44 ,  C09K2019/123 ,  C09K2019/3063 ,  Y10T428/10

摘要： Disclosed is a liquid-crystalline medium based on a mixture of polar compounds having negative dielectric anisotropy, which contains at least one compound of formula I and at least one compound of formula I*, and their use in an electro-optical display.

摘要翻译： 公开了一种基于含有至少一种式I化合物和至少一种式I *化合物的具有负介电各向异性的极性化合物的混合物的液晶介质及其在电光显示器中的用途。

公开(公告)号：US07799673B2

公开(公告)日：2010-09-21

申请号：US12122015

申请日：2008-05-16

申请人： Shinya Arai ,  Akihiro Kojima

发明人： Shinya Arai ,  Akihiro Kojima

IPC分类号： H01L21/4763 ,  H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： H01L21/76811 ,  H01L21/31144 ,  H01L21/76835 ,  H01L23/5329 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device manufacturing method includes: forming a via pattern in an insulating film by use of an alignment mark of a lower wiring line; forming, by use of an alignment mark of the via pattern, an upper wiring groove pattern in an upper insulating film in which the via pattern is embedded; and repeating etching in a self-aligning manner to form a via and a wiring groove in an insulating film previously stacked under the insulating film in which the via pattern has been formed.

摘要翻译： 半导体器件制造方法包括：通过使用下布线的对准标记在绝缘膜中形成通孔图案; 通过所述通孔图案的对准标记形成在嵌入所述通孔图案的上绝缘膜中的上布线槽图案; 并且以自对准方式重复蚀刻，以在预先堆叠在已经形成通孔图案的绝缘膜下方的绝缘膜中形成通孔和布线槽。

公开(公告)号：US20090078678A1

公开(公告)日：2009-03-26

申请号：US12209617

申请日：2008-09-12

申请人： Akihiro Kojima ,  Hisataka Hayashi ,  Akio Ui

发明人： Akihiro Kojima ,  Hisataka Hayashi ,  Akio Ui

IPC分类号： B44C1/22 ,  C23F1/08

CPC分类号： H01L21/31116 ,  H01J37/32091 ,  H01J37/32165

摘要： A plasma processing apparatus for processing a substrate using plasma includes a first electrode configured to mount the substrate, a second electrode disposed to face the first electrode with a predetermined space, a chamber containing the first electrode and the second electrode, the chamber being capable of adjusting an inside atmosphere, a first electric power source device configured to apply a first RF voltage for controlling a self-bias voltage generated on the substrate to the first electrode, the first electric power source device applying a substantially constant width and a substantially constant value in a peak-to-peak voltage of an RF voltage of a first frequency at intervals, and a second electric power source device configured to apply a second RF voltage of a second frequency for generating plasma between the first and second electrodes to one of the first electrode and the second electrode.

摘要翻译： 使用等离子体处理衬底的等离子体处理装置包括：被配置为安装衬底的第一电极，以预定空间设置为面对第一电极的第二电极，容纳第一电极和第二电极的腔室， 调整内部气氛的第一电源装置，被配置为向第一电极施加用于控制在基板上产生的自偏压的第一RF电压的第一电源装置，施加基本上恒定的宽度和基本恒定的值的第一电力源装置 在间隔的第一频率的RF电压的峰峰值电压中，以及第二电源装置，被配置为将第二频率的第二RF电压施加到第一和第二电极之间的等离子体之一 第一电极和第二电极。

公开(公告)号：US20090065946A1

公开(公告)日：2009-03-12

申请号：US12232453

申请日：2008-09-17

申请人： Akihiro Kojima

发明人： Akihiro Kojima

IPC分类号： H01L23/535

CPC分类号： H01L21/7682 ,  H01L21/76831 ,  H01L21/76832 ,  H01L21/76849 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of fabricating a semiconductor device having an air-gapped multilayer interconnect wiring structure is disclosed. After having formed a first thin film on or above a substrate, define a first opening in the first thin film. Then, deposit a conductive material in the first opening. Then form a second thin film made of a porous material above the first thin film with the conductive material being deposited in the first opening. Next, define in the second thin film a second opening extending therethrough, followed by deposition of a conductive material in the second opening. The first thin film is removed through voids in the second thin film after having deposited the conductive material in the second opening. An integrated semiconductor device as manufactured thereby is also disclosed.

摘要翻译： 公开了一种制造具有空隙多层互连布线结构的半导体器件的方法。 在基板上或上方形成第一薄膜之后，在第一薄膜中限定第一开口。 然后，在第一开口中沉积导电材料。 然后在第一薄膜上形成由多孔材料制成的第二薄膜，导电材料沉积在第一开口中。 接下来，在第二薄膜中限定延伸穿过其中的第二开口，然后在第二开口中沉积导电材料。 在将导电材料沉积在第二开口中之后，通过第二薄膜中的空隙去除第一薄膜。 还公开了由此制造的集成半导体器件。

公开(公告)号：US20080191166A1

公开(公告)日：2008-08-14

申请号：US11960023

申请日：2007-12-19

申请人： Akihiro Kojima ,  Fumio Shimano ,  Makoto Murakami ,  Jeong Hee Sung

发明人： Akihiro Kojima ,  Fumio Shimano ,  Makoto Murakami ,  Jeong Hee Sung

IPC分类号： C09K19/00

CPC分类号： C09K19/44 ,  C09K2019/123 ,  C09K2019/3063 ,  Y10T428/10

摘要： Disclosed is a liquid-crystalline medium based on a mixture of polar compounds having negative dielectric anisotropy, which contains at least one compound of formula I and at least one compound of formula I*, and their use in an electro-optical display.

摘要翻译： 公开了一种基于含有至少一种式I化合物和至少一种式I *化合物的具有负介电各向异性的极性化合物的混合物的液晶介质及其在电光显示器中的用途。

公开(公告)号：US07255445B2

公开(公告)日：2007-08-14

申请号：US10884965

申请日：2004-07-07

申请人： Akihiro Kojima

发明人： Akihiro Kojima

IPC分类号： G03B21/26 ,  G03B21/00 ,  G03B21/28

CPC分类号： H04N9/3135 ,  G03B21/005

摘要： A projection type image display device is formed including projecting means for projecting an image onto a screen for image display by scanning laser light. The laser light includes a plurality of laser beams. The projecting means irradiates a substantially identical position on the screen with the plurality of laser beams with a time difference. An image signal applied to each of the laser beams has a time difference such that a preceding laser beam is delayed with respect to a succeeding laser beam so as to correspond to the time difference in irradiation.

摘要翻译： 投影型图像显示装置形成有用于通过扫描激光将图像投影到用于图像显示的屏幕上的投影装置。 激光包括多个激光束。 投影装置用多个激光束以时间差在屏幕上照射基本相同的位置。 施加到每个激光束的图像信号具有时间差，使得先前的激光束相对于后续的激光束被延迟，以便对应于照射的时间差。

公开(公告)号：US06846750B1

公开(公告)日：2005-01-25

申请号：US09604724

申请日：2000-06-28

申请人： Tokuhisa Ohiwa ,  Shoji Seta ,  Nobuo Hayasaka ,  Katsuya Okumura ,  Akihiro Kojima ,  Junko Ohuchi ,  Tsukasa Azuma ,  Hideo Ichinose ,  Ichiro Mizushima

发明人： Tokuhisa Ohiwa ,  Shoji Seta ,  Nobuo Hayasaka ,  Katsuya Okumura ,  Akihiro Kojima ,  Junko Ohuchi ,  Tsukasa Azuma ,  Hideo Ichinose ,  Ichiro Mizushima

IPC分类号： H01L21/302 ,  H01L21/033 ,  H01L21/30 ,  H01L21/306 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/316 ,  H01L21/768 ,  H01L21/461

CPC分类号： H01L21/76802 ,  H01L21/0331 ,  H01L21/31111 ,  H01L21/31116 ,  H01L21/31604 ,  H01L21/31616 ,  H01L21/76816 ,  H01L21/7682

摘要： According to the present invention, there is provided a method of manufacturing a semiconductor device, where a soluble thin film which is soluble in a dissolving liquid is used. According to the method of the present invention, when a soluble thin film is formed between a film to be processed which should be patterned and a mask pattern, it becomes possible to remove the mask pattern by lifting-off. On the other hand, when the thin film is used for a dummy layer for forming an air wiring structure, the dummy layer can be removed without performing ashing using oxygen plasma.

摘要翻译： 根据本发明，提供一种制造半导体器件的方法，其中使用可溶于溶解液的可溶性薄膜。 根据本发明的方法，当在要被图案化的被处理膜和掩模图案之间形成可溶性薄膜时，可以通过剥离来去除掩模图案。 另一方面，当薄膜用于形成空气布线结构的虚拟层时，可以去除虚拟层而不用氧等离子体进行灰化。

公开(公告)号：US5134962A

公开(公告)日：1992-08-04

申请号：US524378

申请日：1990-05-16

申请人： Haruo Amada ,  Akihiro Kojima ,  Hiroshi Kagohashi ,  Atsuyuki Sakai ,  Katsumasa Shimura ,  Hisamitsu Maekawa

发明人： Haruo Amada ,  Akihiro Kojima ,  Hiroshi Kagohashi ,  Atsuyuki Sakai ,  Katsumasa Shimura ,  Hisamitsu Maekawa

IPC分类号： G03F7/16 ,  B05C5/00 ,  B05C11/08 ,  B05C11/10 ,  G11B5/842 ,  H01L21/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： H01L21/6715 ,  B05C11/08

摘要： The present invention relates to a spin coating apparatus for feeding a clean liquid at a fixed rate. In any of the feeding apparatus in the prior art, no constituent other than a filter has the function of eliminating foreign matter, and the operation of feeding a liquid under precise control is not attained. This results in the problem of the mixing of the foreign matter (and air bubbles) in the feed liquid, and the problem of nonuniformity in a feed speed as well as a feed amount. As expedients for solving these problems, the present invention provides the functions of automatically sensing and excluding factors for the appearances of the foreign matters, and devices for automatically and precisely controlling feed control elements such as a pump, thereby feeding the clean liquid in a constant amount and at a constant speed.

摘要翻译： 本发明涉及一种用于以固定速率供给清洁液体的旋涂装置。 在现有技术中的任何一个进料装置中，除了过滤器之外的其它成分都不具有消除异物的功能，并且不能实现在精确控制下供给液体的操作。 这导致进料液体中异物（和气泡）的混合以及进料速度不均匀以及进料量的问题。 作为解决这些问题的方法，本发明提供了自动检测和排除外来物质的因素的功能，以及用于自动和精确地控制诸如泵的进料控制元件的装置，由此将清洁液体进料恒定 数量和恒定速度。

公开(公告)号：US4504764A

公开(公告)日：1985-03-12

申请号：US376146

申请日：1982-05-07

申请人： Yasuhiro Sakamoto ,  Koji Saita ,  Akihiro Kojima

发明人： Yasuhiro Sakamoto ,  Koji Saita ,  Akihiro Kojima

IPC分类号： H01J31/20 ,  H01J29/07 ,  F16M13/00 ,  H01J1/53

CPC分类号： H01J29/07 ,  H01J2229/0744 ,  H01J2229/0761

摘要： A cathode ray tube having a phosphor layer formed on an inner surface of a panel of an envelope, a color selecting aperture grill formed of a number of grid elements and located within the envelope opposing to the phosphor layer, a metal wire for coupling the number of the grid elements, an electron gun located within the envelope and a deflecting device located around the envelope is disclosed, in which the resonance frequency of at least one grid element of the color selecting grid is selected different from that of another grid element in the vicinity thereof.

摘要翻译： 一种阴极射线管，其具有形成在外壳的面板的内表面上的荧光体层，由若干格栅元件形成并位于与荧光体层相对的外壳内的选色孔格栅，用于将数字 的电子枪，位于外壳内的电子枪和位于封套周围的偏转装置，其中，选择栅格中至少一个栅格元件的谐振频率被选择为不同于另一栅格元件的谐振频率 附近。