公开(公告)号：US06165311A

公开(公告)日：2000-12-26

申请号：US648254

申请日：1996-05-13

申请人： Kenneth S. Collins ,  Michael Rice ,  John Trow ,  Douglas Buchberger ,  Craig A. Roderick

发明人： Kenneth S. Collins ,  Michael Rice ,  John Trow ,  Douglas Buchberger ,  Craig A. Roderick

IPC分类号： H05H1/46 ,  B01D53/22 ,  B01D53/26 ,  C23C16/517 ,  C23F4/00 ,  H01J37/32 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/683 ,  C23F1/02

CPC分类号： H01J37/32458 ,  B01D53/22 ,  B01D53/226 ,  B01D53/268 ,  C23C16/517 ,  H01F2029/143 ,  H01J37/32082 ,  H01J37/321 ,  H01J37/32146 ,  H01J37/32165 ,  H01J37/32467 ,  H01J37/32522 ,  H01J37/32688 ,  H01J37/32706 ,  H01J37/32871 ,  H01J2237/3343 ,  H01J2237/3345 ,  H01J2237/3346 ,  H01L21/31116 ,  H01L21/6831

摘要： The invention is embodied in an inductively coupled RF plasma reactor including a reactor chamber enclosure defining a plasma reactor chamber and a support for holding a workpiece inside the chamber, a non-planar inductive antenna adjacent the reactor chamber enclosure, the non-planar inductive antenna including inductive elements spatially distributed in a non-planar manner relative to a plane of the workpiece to compensate for a null in an RF inductive pattern of the antenna, and a plasma source RF power supply coupled to the non-planar inductive antenna. The planar inductive antenna may be symmetrical or non-symmetrical, although it preferably includes a solenoid winding such as a vertical stack of conductive windings. In a preferred embodiment, the windings are at a minimum radial distance from the axis of symmetry while in an alternative embodiment the windings are at a radial distance from the axis of symmetry which is a substantial fraction of a radius of the chamber.

摘要翻译： 本发明体现在电感耦合RF等离子体反应器中，其包括限定等离子体反应器室的反应室外壳和用于将工件保持在室内的支撑件，邻近反应室壳体的非平面感应天线，非平面感应天线 包括相对于工件的平面以非平面方式空间分布的电感元件，以补偿天线的RF感应图案中的零点，以及耦合到非平面感应天线的等离子体源RF电源。 平面感应天线可以是对称的或非对称的，尽管它优选地包括诸如导电绕组的垂直堆叠的螺线管绕组。 在优选实施例中，绕组处于距对称轴的最小径向距离，而在替代实施例中，绕组处于与对称半径相当大的部分的对称轴的径向距离处。

公开(公告)号：US06063233A

公开(公告)日：2000-05-16

申请号：US733555

申请日：1996-10-21

申请人： Kenneth Collins ,  Michael Rice ,  Eric Askarinam ,  Douglas Buchberger ,  Craig Roderick

发明人： Kenneth Collins ,  Michael Rice ,  Eric Askarinam ,  Douglas Buchberger ,  Craig Roderick

IPC分类号： H05H1/46 ,  C23C16/517 ,  H01J37/32 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/683 ,  C23F1/02 ,  C23C16/00

CPC分类号： H01J37/32458 ,  C23C16/517 ,  H01J37/32082 ,  H01J37/321 ,  H01J37/32146 ,  H01J37/32165 ,  H01J37/32467 ,  H01J37/32522 ,  H01J37/32688 ,  H01J37/32706 ,  H01J37/32871 ,  H01L21/31116 ,  H01L21/6831 ,  H01F2029/143 ,  H01J2237/3343 ,  H01J2237/3345 ,  H01J2237/3346

摘要： The invention is embodied in a plasma reactor including a plasma reactor chamber and a workpiece support for holding a workpiece near a support plane inside the chamber during processing, the chamber having a reactor enclosure portion facing the support, a cold body overlying the reactor enclosure portion, a plasma source power applicator between the reactor enclosure portion and the cold body and a thermally conductor between and in contact with the cold body and the reactor enclosure. The thermal conductor and the cold sink define a cold sink interface therebetween, the reactor preferably further including a thermally conductive substance within the cold sink interface for reducing the thermal resistance across the cold sink interface. The thermally conductive substance can be a thermally conductive gas filling the cold body interface. Alternatively, the thermally conductive substance can be a thermally conductive solid material. The reactor can include a gas manifold in the cold body communicable with a source of the thermally conductive gas an inlet through the cold body from the gas manifold and opening out to the cold body interface. The reactor can further include an O-ring apparatus sandwiched between the cold body and the thermal conductor and defining a gas-containing volume in the cold body interface of nearly infinitesimal thickness in communication with the inlet from the cold body. More generally, the reactor can include the facilitation of thermal transfer across an interface between a hot and/or cold sink and any part exposed to the reactor chamber interior atmosphere, such as the ceiling, wall or polymer-hardening precursor ring, for example, by the insertion into that interface of a thermally conductive gas or substance.

公开(公告)号：US5990017A

公开(公告)日：1999-11-23

申请号：US104550

申请日：1998-06-25

申请人： Kenneth Collins ,  Michael Rice ,  David Groechel ,  Gerald Yin ,  Jon Mohn ,  Craig Roderick ,  Douglas Buchberger ,  Chan-Lon Yang ,  Jerry Wong ,  Jeffrey Marks ,  Peter Keswick

发明人： Kenneth Collins ,  Michael Rice ,  David Groechel ,  Gerald Yin ,  Jon Mohn ,  Craig Roderick ,  Douglas Buchberger ,  Chan-Lon Yang ,  Jerry Wong ,  Jeffrey Marks ,  Peter Keswick

IPC分类号： H01L21/302 ,  H01J37/32 ,  H01L21/02 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/00

CPC分类号： H01J37/321 ,  H01J37/32082 ,  H01J37/32146 ,  H01J37/32165 ,  H01J37/32458 ,  H01J37/32467 ,  H01J37/32522 ,  H01J37/32688 ,  H01J37/32706 ,  H01J37/32871 ,  H01L21/31116 ,  H01F2029/143 ,  H01J2237/3343 ,  H01J2237/3345 ,  H01J2237/3346 ,  H01J2237/3382

摘要： A general method of the invention is to provide a polymer-hardening precursor piece (such as silicon, carbon, silicon carbide or silicon nitride, but preferably silicon) within the reactor chamber during an etch process with a fluoro-carbon or fluoro-hydrocarbon gas, and to heat the polymer-hardening precursor piece above the polymerization temperature sufficiently to achieve a desired increase in oxide-to-silicon etch selectivity. Generally, this polymer-hardening precursor or silicon piece may be an integral part of the reactor chamber walls and/or ceiling or a separate, expendable and quickly removable piece, and the heating/cooling apparatus may be of any suitable type including apparatus which conductively or remotely heats the silicon piece.

公开(公告)号：US5477975A

公开(公告)日：1995-12-26

申请号：US138060

申请日：1993-10-15

申请人： Michael Rice ,  Jeffrey Marks ,  David W. Groechel ,  Nicolas J. Bright

发明人： Michael Rice ,  Jeffrey Marks ,  David W. Groechel ,  Nicolas J. Bright

IPC分类号： C23F4/00 ,  B44C1/22 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H05H1/00

CPC分类号： H01J37/32871 ,  H01J37/32082 ,  H01J37/321 ,  H01J37/32165 ,  H01J37/32458 ,  H01J37/32522 ,  H01J2237/3343 ,  H01J2237/3346 ,  Y10S438/909

摘要： The invention is embodied in a method of operating a plasma etch reactor, consisting of introducing a gas into the reactor which disassociates as a plasma into an etch species which etches oxide films on a work piece in the reactor and a non-etching species combinable with the etch species into an etch-preventing polymer condensable onto the work piece below a characteristic deposition temperature, providing an interior wall comprising a material which scavenges the etching species, and maintaining a temperature of the interior wall above the deposition temperature.

公开(公告)号：US08642255B2

公开(公告)日：2014-02-04

申请号：US12934644

申请日：2009-03-27

申请人： Ian B. Nicoud ,  Dominic M. Clarke ,  Aby J. Mathew ,  Michael Rice

发明人： Ian B. Nicoud ,  Dominic M. Clarke ,  Aby J. Mathew ,  Michael Rice

IPC分类号： A01N1/02

CPC分类号： C12N5/0641 ,  A01N1/02 ,  A01N1/0226 ,  A01N1/0284 ,  A61K35/44 ,  A61K35/50

摘要： The present invention relates to materials and methods for hypothermic collection of whole blood, and components thereof, which can extend the holding time of blood beyond the current useable limit. Additionally, blood can be drawn directly into a hypothermic preservation solution without the addition of standard anticoagulants. This is enabled by providing sustained cellular viability under hypothermic conditions using a nutrient matrix devoid of animal proteins and containing energy substrates, free-radical scavengers, and impermeants that is ionically balanced for storage of biologic materials at low temperatures to prevent cellular stress-induced apoptosis.

摘要翻译： 本发明涉及全血及其组分的低体温收集的材料和方法，其可以将血液的保持时间延长超过目前的可用极限。 此外，血液可以直接吸入低温保存溶液中，而不添加标准抗凝剂。 这是通过在低温条件下使用不含动物蛋白质的营养基质并含有能量底物，自由基清除剂和离子平衡的不渗液在低温下储存生物材料以防止细胞应激诱导的细胞凋亡来实现的 。

公开(公告)号：US20070265508A1

公开(公告)日：2007-11-15

申请号：US11724642

申请日：2007-03-15

申请人： Hamid Sheikhzadeh-Nadjar ,  Robert Brennan ,  Michael Rice

发明人： Hamid Sheikhzadeh-Nadjar ,  Robert Brennan ,  Michael Rice

IPC分类号： A61B5/00

CPC分类号： G10L21/0208 ,  A61B7/04 ,  G10L25/00 ,  H03H21/0012 ,  H03H2021/0041

摘要： A method and system for managing physiological systems is provided. The physiological system management (PSM) system includes one or more signal acquisition blocks to collect physiological information. The PSM system includes oversampled filterbanks for transferring one or more input signal related to the physiological information into subband signals, and a subband processing scheme for processing the outputs from the oversampled filterbanks for event detection in one or more physiological systems. The PSM system includes an adaptive controller which decides on the proper control measure and delivers the measure to the one or more physiological systems.

摘要翻译： 提供了一种用于管理生理系统的方法和系统。 生理系统管理（PSM）系统包括一个或多个收集生理信息的信号采集块。 PSM系统包括用于将与生理信息相关的一个或多个输入信号转换为子带信号的过采样滤波器组，以及用于处理来自过采样滤波器组的输出的子带处理方案，用于在一个或多个生理系统中进行事件检测。 PSM系统包括一个自适应控制器，该控制器决定适当的控制措施并将测量结果传递给一个或多个生理系统。

公开(公告)号：US20070128538A1

公开(公告)日：2007-06-07

申请号：US11673177

申请日：2007-02-09

申请人： KEVIN FAIRBAIRN ,  Michael Rice ,  Timothy Weidman ,  Christopher Ngai ,  Ian Latchford ,  Christopher Bencher ,  Yuxiang Wang

发明人： KEVIN FAIRBAIRN ,  Michael Rice ,  Timothy Weidman ,  Christopher Ngai ,  Ian Latchford ,  Christopher Bencher ,  Yuxiang Wang

IPC分类号： G03C8/00

CPC分类号： H01L21/76829 ,  C23C16/26 ,  H01L21/0276 ,  H01L21/28035 ,  H01L21/3081 ,  H01L21/3088 ,  H01L21/31138 ,  H01L21/31144 ,  H01L21/3146 ,  H01L21/31612 ,  H01L21/32137 ,  H01L21/76802 ,  H01L21/76807

摘要： A method of forming an integrated circuit using an amorphous carbon film. The amorphous carbon film is formed by thermally decomposing a gas mixture comprising a hydrocarbon compound and an inert gas. The amorphous carbon film is compatible with integrated circuit fabrication processes. In one integrated circuit fabrication process, the amorphous carbon film is used as a hardmask. In another integrated circuit fabrication process, the amorphous carbon film is an anti-reflective coating (ARC) for deep ultraviolet (DUV) lithography. In yet another integrated circuit fabrication process, a multi-layer amorphous carbon anti-reflective coating is used for DUV lithography.

摘要翻译： 一种使用无定形碳膜形成集成电路的方法。 无定形碳膜通过热分解包含烃化合物和惰性气体的气体混合物而形成。 无定形碳膜与集成电路制造工艺兼容。 在一个集成电路制造工艺中，非晶碳膜用作硬掩模。 在另一个集成电路制造工艺中，无定形碳膜是用于深紫外（DUV）光刻的抗反射涂层（ARC）。 在又一集成电路制造工艺中，多层无定形碳抗反射涂层用于DUV光刻。

公开(公告)号：US20070112465A1

公开(公告)日：2007-05-17

申请号：US11617035

申请日：2006-12-28

申请人： Iraj Sadighi ,  Jeff Hudgens ,  Michael Rice ,  Gary Wyka

发明人： Iraj Sadighi ,  Jeff Hudgens ,  Michael Rice ,  Gary Wyka

IPC分类号： G06F19/00

CPC分类号： H01L21/67259 ,  B25J9/1692 ,  B25J9/1697 ,  G05B2219/45031 ,  H01L21/681

摘要： A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.

摘要翻译： 提供了一种用于校准设置在处理系统中的机器人的运动的视觉系统和方法。 在一个实施例中，用于处理系统的视觉系统包括位于处理系统中的相机和校准晶片。 相机位于机器人上，并且适于获得设置在处理系统内的预定位置的校准晶片的图像数据。 图像数据用于校准机器人运动。

公开(公告)号：US07085622B2

公开(公告)日：2006-08-01

申请号：US10126493

申请日：2002-04-19

申请人： Iraj Sadighi ,  Jeff Hudgens ,  Michael Rice ,  Gary Wyka

发明人： Iraj Sadighi ,  Jeff Hudgens ,  Michael Rice ,  Gary Wyka

IPC分类号： G06F19/00

CPC分类号： H01L21/67259 ,  B25J9/1697 ,  H01L21/681

摘要： Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.

公开(公告)号：US20060061979A1

公开(公告)日：2006-03-23

申请号：US11219332

申请日：2005-09-02

申请人： Martin Elliott ,  Michael Rice

发明人： Martin Elliott ,  Michael Rice

IPC分类号： G06F19/00 ,  H05K7/04

CPC分类号： H01L21/67353 ,  H01L21/67379

摘要： A first substrate carrier is provided that includes a body adapted to store one or more substrates; and either (1) a bottom surface having one or more coupling features that extend into a storage region of the body or (2) coupling features that extend alongside the body, so that the substrate carrier's overall height is not increased by the entire height of the coupling feature. Numerous other aspects are provided.

摘要翻译： 提供了第一衬底载体，其包括适于存储一个或多个衬底的主体; 和（1）具有一个或多个连接特征的底表面，其延伸到主体的存储区域中，或者（2）耦合沿着身体延伸的特征，使得基板载体的整体高度不会增加整个高度 耦合功能。 提供了许多其他方面。