公开(公告)号：US20070273887A1

公开(公告)日：2007-11-29

申请号：US11805074

申请日：2007-05-22

申请人： James T. Russell

发明人： James T. Russell

IPC分类号： G01B9/02

CPC分类号： A61M16/08 ,  A61M16/0858 ,  A61M16/0866 ,  A61M2016/0027 ,  A61M2016/0036 ,  A61M2016/102 ,  G01B9/02023 ,  G01B2290/25 ,  G01F1/38 ,  G01F1/383 ,  G01F1/40 ,  G01L9/0077

摘要： An airway adapter that comprises a housing and a pressure transducer. The housing comprises a flow path having a first end and a second end, a first pressure port that communicates with the flow path, and a second pressure port that communicates with the flow path. The first pressure port is spaced apart from the second pressure port. The flow restriction is disposed in the flow path between the first and second pressure ports that creates a pressure differential therebetween. The pressure transducer generates a signal that reflects the differential pressure created by the flow restriction between the first and second pressure ports, wherein the pressure transducer comprises an optical interferometer.

摘要翻译： 一种气道适配器，包括壳体和压力传感器。 壳体包括具有第一端和第二端的流路，与流路连通的第一压力端口和与流路连通的第二压力口。 第一压力口与第二压力口隔开。 流量限制设置在第一和第二压力端口之间的流动路径中，在它们之间产生压力差。 压力传感器产生反映由第一和第二压力端口之间的流动限制产生的压差的信号，其中压力传感器包括光学干涉仪。

公开(公告)号：US20050231728A1

公开(公告)日：2005-10-20

申请号：US10824600

申请日：2004-04-15

申请人： Anbo Wang ,  Bing Yu

发明人： Anbo Wang ,  Bing Yu

IPC分类号： G01B9/02

CPC分类号： G01B9/02067 ,  G01B9/02007 ,  G01B9/02023 ,  G01B9/02041 ,  G01B2290/25

摘要： A linear interferometric sensor system in which the light output from the interferometric sensor is optically bandpass filtered before conversion to an electrical signal by an adjustable diffraction grating and the center wavelength of the adjustable diffraction grating is controlled by a feedback circuit responsive to the steady state component of the electrical signal corresponding to the filtered sensor return. The adjustable may comprise a diffraction grating a diffraction grating mounted on a motor driven rotary stage. The invention is particularly useful in self calibrating interferometric/intensity-based sensor configuration, but is also applicable in a wide variety of linear interferometric sensor configurations.

摘要翻译： 线性干涉测量传感器系统，其中来自干涉测量传感器的光输出在通过可调节衍射光栅转换成电信号之前被光学带通滤波，并且可调节衍射光栅的中心波长由响应于稳态分量的反馈电路控制 的电信号对应于滤波的传感器返回。 可调节的可以包括衍射光栅，其安装在电机驱动的旋转台上的衍射光栅。 本发明在自校准基于干涉/强度的传感器配置中特别有用，但也适用于各种各样的线性干涉测量传感器配置。

公开(公告)号：US06934036B2

公开(公告)日：2005-08-23

申请号：US10140815

申请日：2002-05-09

申请人： Keishi Kubo ,  Yukio Imada ,  Hiroyuki Takeuchi ,  Kouji Handa ,  Keiichi Yoshizumi

发明人： Keishi Kubo ,  Yukio Imada ,  Hiroyuki Takeuchi ,  Kouji Handa ,  Keiichi Yoshizumi

IPC分类号： G01B11/24 ,  G01B9/02 ,  G01B11/02 ,  H01L21/66

CPC分类号： G01B9/02023 ,  G01B9/02018 ,  G01B9/02031 ,  G01B11/026 ,  G01B2290/70

摘要： Arranged on both sides of a thin plate are optical displacement gauges that irradiate measurement lights onto surfaces of the thin plate and receive the measurement lights reflected by the surface so as to measure displacements of the surfaces of the thin plate. Variation of thickness of the thin plate is obtained on the basis of the displacements of the surfaces of the thin plate measured by each of the optical displacement gauges. Each of the optical displacement gauges detects the displacement of a respective surface of the thin plate with high accuracy by irradiating the measurement light to the thin plate two times.

摘要翻译： 在薄板的两侧排列的是光学位移计，其将测量光照射到薄板的表面上，并接收由表面反射的测量光，以测量薄板表面的位移。 基于由每个光学位移计测量的薄板的表面的位移，获得薄板厚度的变化。 每个光学位移计通过将测量光照射到薄板两次来高精度地检测薄板的各个表面的位移。

公开(公告)号：US20050062979A1

公开(公告)日：2005-03-24

申请号：US10911635

申请日：2004-08-05

申请人： Yizheng Zhu ,  Xingwei Wang ,  Juncheng Xu ,  Anbo Wang

发明人： Yizheng Zhu ,  Xingwei Wang ,  Juncheng Xu ,  Anbo Wang

IPC分类号： G01B20060101 ,  G01B9/02 ,  G01H9/00 ,  G01L9/00 ,  G01P15/093

CPC分类号： G01L9/0079 ,  G01B9/02023 ,  G01B2290/25 ,  G01H9/004 ,  G01P15/093

摘要： A fiber optic sensor has a hollow tube bonded to the endface of an optical fiber, and a diaphragm bonded to the hollow tube. The fiber endface and diaphragm comprise an etalon cavity. The length of the etalon cavity changes when applied pressure or acceleration flexes the diaphragm. The entire structure can be made of fused silica. The fiber, tube, and diaphragm can be bonded with a fusion splice. The present sensor is particularly well suited for measuring pressure or acceleration in high temperature, high pressure and corrosive environments (e.g., oil well downholes and jet engines). The present sensors are also suitable for use in biological and medical applications.

摘要翻译： 光纤传感器具有结合到光纤端面的中空管，以及结合到中空管的隔膜。 纤维端面和隔膜包括标准具腔。 当施加压力或加速度弯曲隔膜时，标准具腔的长度会发生变化。 整个结构可以由熔融石英制成。 纤维，管和隔膜可以用熔接粘合。 本传感器特别适用于在高温，高压和腐蚀性环境（例如油井下井和喷气发动机）中测量压力或加速度。 本传感器也适用于生物和医学应用。

公开(公告)号：US20040130728A1

公开(公告)日：2004-07-08

申请号：US10704932

申请日：2003-11-10

发明人： Fahrettin Levent Degertekin ,  Neal Allen Hall ,  Wook Lee

IPC分类号： G01B009/02

CPC分类号： G01B11/026 ,  G01B9/02023 ,  G01B2290/30

摘要： The present invention relates to micron-scale displacement measurement devices. A first embodiment is a device that includes a substrate and a rigid structure suspended above the substrate to form a backside cavity. Formed in the rigid structure is a reflective diffraction grating positioned to reflect a first portion of an incident light and transmit a second portion of the incident light such that the second portion of the incident light is diffracted. The device also includes a membrane positioned a distance d above the reflective diffraction grating and at least a first photo-detector for receiving interference patterns produced from the first portion of the incident light reflected from the diffraction grating and the second portion of the incident light reflected from the membrane.

摘要翻译： 本发明涉及微米级位移测量装置。 第一实施例是一种装置，其包括基板和悬挂在基板上方的刚性结构，以形成背侧空腔。 形成在刚性结构中的反射衍射光栅被定位成反射入射光的第一部分并透射入射光的第二部分，使得入射光的第二部分被衍射。 该装置还包括位于反射衍射光栅上方距离d处的膜和至少第一光电检测器，用于接收从衍射光栅反射的入射光的第一部分产生的干涉图案，并将入射光的第二部分反射 从膜。

公开(公告)号：US6118534A

公开(公告)日：2000-09-12

申请号：US126253

申请日：1998-07-30

申请人： Mark S. Miller

发明人： Mark S. Miller

IPC分类号： G01B9/02

CPC分类号： G01B9/02023 ,  G01B9/02007 ,  G01B2290/25

摘要： A sensor has an interferometer which measures a change in an applied environmental condition relative to a reference environmental condition. The interferometer is operated under the applied environmental condition to generate an interference spectrum. Intensities of the interference spectrum are measured at first and second wavelengths, respectively. The first and second wavelengths correspond to first and second reference intensities that lie on respective sides of an extremum in the interference spectrum when the interferometer is operated under the reference condition. Measurement of the change in the applied environmental condition is based on the measured intensities and the first and second reference intensities.

摘要翻译： 传感器具有相对于参考环境条件来测量所施加的环境条件的变化的干涉仪。 干涉仪在施加的环境条件下运行以产生干涉光谱。 分别在第一和第二波长处测量干涉光谱的强度。 当干涉仪在参考条件下操作时，第一和第二波长对应于位于干涉光谱中的极值的相应侧上的第一和第二参考强度。 应用环境条件的变化的测量基于测量的强度和第一和第二参考强度。

公开(公告)号：US5260567A

公开(公告)日：1993-11-09

申请号：US865227

申请日：1992-04-08

申请人： Ryo Kuroda ,  Katsunori Hatanaka ,  Toshihiko Miyazaki ,  Takayuki Yagi ,  Toshimitsu Kawase ,  Katsuhiko Shinjo

发明人： Ryo Kuroda ,  Katsunori Hatanaka ,  Toshihiko Miyazaki ,  Takayuki Yagi ,  Toshimitsu Kawase ,  Katsuhiko Shinjo

IPC分类号： G01B21/30 ,  G01B7/34 ,  G01B9/02 ,  G01N37/00 ,  G01P15/08 ,  G01Q20/02 ,  G01Q60/08 ,  G01Q60/24 ,  G01Q60/40 ,  G01Q60/50 ,  G01Q60/56 ,  G01Q70/14 ,  G01Q80/00 ,  G01R33/038 ,  G11B9/00 ,  G11B9/14 ,  H01J5/16

CPC分类号： G01B9/02051 ,  B82Y35/00 ,  G01B9/02022 ,  G01B9/02023 ,  G01P15/0894 ,  G01Q20/02 ,  G01Q60/08 ,  G01Q60/38 ,  G01Q60/56 ,  G01R33/0385 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  B82Y10/00 ,  B82Y25/00 ,  G01B2290/30 ,  G01Q80/00 ,  Y10S977/868 ,  Y10S977/873

摘要： A cantilever unit comprises a cantilever for supporting a probe and a displacement amount detecting means, the displacement amount detecting means being integrated with the cantilever. An information processing apparatus comprises the cantilever unit and optionally an information recording medium stationed in close vicinity to the unit, wherein an information in the medium is reproduced at a signal on the basis of an displacement amount of the cantilever. An atomic force microscope and magnetic force microscope comprise the cantilever unit, respectively.

公开(公告)号：US3715599A

公开(公告)日：1973-02-06

申请号：US3715599D

申请日：1971-04-20

申请人： THOMSON CSF

发明人： MARCY R

IPC分类号： G01B9/02 ,  G01D5/26 ,  G03F7/20 ,  G01D5/34

CPC分类号： G03F7/70716 ,  G01B9/02023 ,  G01B11/02 ,  G01D5/266

摘要： Electro-optical system for controlling the attitude of a stage mounted on a carriage sliding along a parallel bench. The system in accordance with the invention corrects ''''yaw'''' defects on the part of the moving element sliding along the bench. To this end a beam of radiant energy supplies the directional reference and electromechanical transducers are used for controlling the attitude of the stage with respect to this optical reference.

摘要翻译： 用于控制安装在沿着平行工作台滑动的滑架上的平台姿态的电光系统。

公开(公告)号：US12038276B2

公开(公告)日：2024-07-16

申请号：US18344651

申请日：2023-06-29

申请人： Huvr, Inc

发明人： Zbigniew Sobolewski

IPC分类号： G01B9/02 ,  G01B9/02015 ,  G01C19/72

CPC分类号： G01B9/02023 ,  G01C19/727 ,  G01C19/728

摘要： An optical fiber ring interferometer is provided, which is based on a common light path for two or more light beam pairs preferably originated from two or more light sources of a substantially different spectrum or from a single light source split spectrum and whereas each light beam of a specific pair is propagating in relative opposite directions, wherein at least one pair of light beams is utilized to detect acousto-mechanical events and to provide information regarding location and other characteristics of detected environmental disturbance.

公开(公告)号：US11920915B2

公开(公告)日：2024-03-05

申请号：US17567674

申请日：2022-01-03

申请人： The Boeing Company

发明人： Farahnaz Sisco ,  Jeffrey Martin Devlin ,  Nathan Christopher McRae

IPC分类号： G01B11/14 ,  B64F5/60 ,  G01B9/02015

CPC分类号： G01B11/14 ,  B64F5/60 ,  G01B9/02023

摘要： Systems and methods are provided for inspection. One embodiment is a method for measuring a hole. The method includes driving a fiber optic probe into the hole, determining a profile by scanning the hole via the fiber optic probe, and determining whether an interface gap exists at the hole based on the profile.