Vertical conductive unit and manufacturing method thereof
    6.
    发明授权
    Vertical conductive unit and manufacturing method thereof 有权
    垂直导电单元及其制造方法

    公开(公告)号:US09521759B2

    公开(公告)日:2016-12-13

    申请号:US14279774

    申请日:2014-05-16

    发明人: Tang-Chieh Huang

    摘要: The invention provides a vertical conductive unit. The vertical conductive unit comprises an insulating layer comprising a connecting via, a first conductor, a second conductor, and a third conductor. The insulating layer comprises photosensitive polyimide, and the glass transition temperature of the photosensitive polyimide is lower than about 200° C. The invention also provides a method for manufacturing the vertical conductive unit.

    摘要翻译: 本发明提供一种垂直导电单元。 垂直导电单元包括绝缘层,其包括连接通孔,第一导体,第二导​​体和第三导体。 绝缘层包括光敏聚酰亚胺,感光性聚酰亚胺的玻璃化转变温度低于约200℃。本发明还提供了制造垂直导电单元的方法。