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    SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM
    5.
    发明申请
    SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM 审中-公开
    使用比例热流体输送系统的基座载体

    公开(公告)号：US20160148822A1

    公开(公告)日：2016-05-26

    申请号：US14555467

    申请日：2014-11-26

    申请人： Phillip Criminale ,  Justin Phi ,  Dan A. Marohl ,  Sergio Fukuda Shoji ,  Brad L. Mays

    发明人： Phillip Criminale ,  Justin Phi ,  Dan A. Marohl ,  Sergio Fukuda Shoji ,  Brad L. Mays

    IPC分类号： H01L21/67 ,  H01L21/66 ,  H01L21/683 ,  H01J37/32 ,  H01L21/3065

    CPC分类号： H01L21/67248 ,  H01J37/32724 ,  H01L21/67017 ,  H01L21/67109 ,  H01L21/6831

    摘要： A substrate carrier is described that uses a proportional thermal fluid delivery system In one example the apparatus includes a heat exchanger to provide a thermal fluid to a fluid channel of a substrate carrier and to receive the thermal fluid from the fluid channel, the thermal fluid in the fluid channel to control the temperature of the carrier during substrate processing. A proportional valve controls the rate of flow of thermal fluid from the heat exchanger to the fluid channel, A temperature controller receives a measured temperature from a thermal sensor of the carrier and controls the proportional valve in response to the measured temperature to adjust the rate of flow.

    摘要翻译： 描述了使用比例热流体输送系统的衬底载体。在一个示例中，该装置包括热交换器，以将热流体提供给衬底载体的流体通道并从流体通道接收热流体， 流体通道，用于在衬底处理期间控制载体的温度。 比例阀控制从热交换器到流体通道的热流体的流速。温度控制器从载体的热传感器接收测量的温度，并根据测量的温度控制比例阀，以调节速度 流。

    DUAL ZONE COMMON CATCH HEAT EXCHANGER/CHILLER
    6.
    发明申请
    DUAL ZONE COMMON CATCH HEAT EXCHANGER/CHILLER 审中-公开
    双区通用热交换器/冷却器

    公开(公告)号：US20130105081A1

    公开(公告)日：2013-05-02

    申请号：US13647314

    申请日：2012-10-08

    申请人： Fernando SILVEIRA ,  Brad L. MAYS

    发明人： Fernando SILVEIRA ,  Brad L. MAYS

    IPC分类号： F28F27/02

    CPC分类号： F28F27/02 ,  F28D2021/0077 ,  H01J37/32724

    摘要： Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a coupling each of the reservoirs to a common secondary reservoir. Heat transfer fluid is pumped from the secondary reservoir to either the hot or cold reservoir in response to a low level sensed in the reservoir. In an embodiment, both the hot and cold reservoirs are contained in a same platform as the secondary reservoir with the hot and cold reservoirs disposed above the secondary reservoir to permit the secondary reservoir to catch gravity driven overflow from either the hot or cold reservoir.

    摘要翻译： 通过脉冲施加加热功率和脉冲施加冷却功率来控制等离子体处理室中的温度的方法和系统。 在一个实施例中，通过将每个储存器联接到公共二次储存器来部分地保持耦合到温度受控部件的热储存器和冷储存器中的每一个中的流体液位。 响应于在储层中感测到的低水平，将传热流体从次级储存器泵送到热储存器或冷储存器。 在一个实施例中，热蓄冷池和冷水箱都包含在与次级储存器相同的平台中，其中热储存器和冷储存器设置在次级储存器上方，以允许二级储存器从热储存器或冷储存器捕获重力驱动的溢流。