COMPOSITE ELECTROFORMED SCREENING MASK AND METHOD OF MAKING THE SAME
    1.
    发明申请
    COMPOSITE ELECTROFORMED SCREENING MASK AND METHOD OF MAKING THE SAME 审中-公开
    复合电镀屏幕及其制作方法

    公开(公告)号:US20060243700A1

    公开(公告)日:2006-11-02

    申请号:US10908126

    申请日:2005-04-28

    CPC classification number: H05K3/1225 H05K3/062

    Abstract: A copper core used in electroformed metal (EFM) masks is replaced with a copper/molybdenum/copper clad core (Cu/Mo/Cu). The copper cladding on the molybdenum enhances adhesion of electroplated nickel. The nickel is electro-deposited through a patterned resist template onto the copper clad molybdenum surface. The copper and molybdenum are etched by selective etchants that do not attack other non-etched layers, leaving a patterned nickel stencil on a high-strength supporting base.

    Abstract translation: 用于电铸金属(EFM)掩模的铜芯被铜/钼/铜包芯(Cu / Mo / Cu)替代。 钼上的铜包层增强了电镀镍的附着力。 镍通过图案化的抗蚀剂模板电沉积到铜包覆钼表面上。 铜和钼通过不侵蚀其它未蚀刻层的选择性蚀刻剂进行蚀刻,在高强度支撑基底上留下图案化的镍网板。

    NICKEL ALLOY PLATED STRUCTURE
    3.
    发明申请
    NICKEL ALLOY PLATED STRUCTURE 失效
    镍合金结构

    公开(公告)号:US20080070057A1

    公开(公告)日:2008-03-20

    申请号:US11865170

    申请日:2007-10-01

    Abstract: A structure. The structure includes a layered configuration including a copper layer, a first layer, and a second layer. The first and second layers are disposed on opposite sides of the copper layer and are in direct mechanical contact with the copper layer. The first and second layers each include a same alloy of nickel and a metal consisting of cobalt, iron, copper, manganese, or molybdenum. A first region in the first layer extends completely through the first layer. A second region in the second layer extends completely through the second layer. A third region in the first layer extends completely through the first layer. The third region does not extend into any portion of the second layer. The first, second region, and third regions each include a photoresist or an opening such that photoresist or opening extends completely through the first, second, and first layer, respectively.

    Abstract translation: 一个结构。 该结构包括包括铜层,第一层和第二层的层状构造。 第一层和第二层设置在铜层的相对侧上,并与铜层直接机械接触。 第一层和第二层各自包括镍和由钴,铁,铜,锰或钼组成的金属的相同合金。 第一层中的第一区域完全延伸穿过第一层。 第二层中的第二区域完全延伸穿过第二层。 第一层中的第三区域完全延伸穿过第一层。 第三区域不延伸到第二层的任何部分。 第一,第二区域和第三区域各自包括光致抗蚀剂或开口,使得光致抗蚀剂或开口分别完全延伸穿过第一层,第二层和第一层。

    NICKEL ALLOY PLATED STRUCTURE
    4.
    发明申请
    NICKEL ALLOY PLATED STRUCTURE 有权
    镍合金结构

    公开(公告)号:US20060269770A1

    公开(公告)日:2006-11-30

    申请号:US10908883

    申请日:2005-05-31

    Abstract: A structure and associated methods of formation. The structure includes a layered configuration comprising a copper layer, a first layer, and a second layer. The copper layer consists essentially of copper. The first and second layers are disposed on opposite sides of the copper layer and are in direct mechanical contact with the copper layer. The first and second layers each consist essentially of a same alloy of nickel and cobalt having a weight percent concentration of cobalt in a range of 3% to 21%. A through hole in the layered configuration extends completely through the first layer, the copper layer, and the second layer, wherein a first opening in the layered configuration extends completely through the first layer and does not extend into any portion of the second layer.

    Abstract translation: 一种结构和相关的形成方法。 该结构包括包括铜层,第一层和第二层的分层结构。 铜层基本上由铜组成。 第一层和第二层设置在铜层的相对侧上,并与铜层直接机械接触。 第一层和第二层各自主要由镍和钴的相同合金组成,钴的重量百分比浓度在3%至21%的范围内。 分层结构中的通孔完全延伸穿过第一层,铜层和第二层,其中分层结构中的第一开口完全延伸穿过第一层,并且不延伸到第二层的任何部分。

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