Carrier bonding and detaching processes for a semiconductor wafer
    1.
    发明授权
    Carrier bonding and detaching processes for a semiconductor wafer 有权
    用于半导体晶片的载体结合和分离工艺

    公开(公告)号:US08865520B2

    公开(公告)日:2014-10-21

    申请号:US13216063

    申请日:2011-08-23

    Abstract: The present invention provides a temporary carrier bonding and detaching process. A first surface of a semiconductor wafer is mounted on a first carrier by a first adhesive layer, and a first isolation coating disposed between the first adhesive layer and the first carrier. Then, a second carrier is mounted on the second surface of the semiconductor wafer. The first carrier is detached. Then, the first surface of the semiconductor wafer is mounted on a film frame. The second carrier is detached. The method of the present invention utilizes the second carrier to support and protect the semiconductor wafer, after which the first carrier is detached. Therefore, the semiconductor wafer will not be damaged or broken, thereby improving the yield rate of the semiconductor process. Furthermore, the simplicity of the detaching method for the first carrier allows for improvement in efficiency of the semiconductor process.

    Abstract translation: 本发明提供了临时的载体接合和分离工艺。 半导体晶片的第一表面通过第一粘合剂层安装在第一载体上,第一隔离涂层设置在第一粘合层和第一载体之间。 然后,第二载体安装在半导体晶片的第二表面上。 第一个承运人分离。 然后,将半导体晶片的第一表面安装在胶片框架上。 第二个承运人分离。 本发明的方法利用第二载体来支撑和保护半导体晶片,然后分离第一载体。 因此,半导体晶片不会被损坏或破损,从而提高半导体工艺的成品率。 此外,第一载体的分离方法的简单性允许提高半导体工艺的效率。

    Method for forming a via in a substrate and substrate with a via
    2.
    发明申请
    Method for forming a via in a substrate and substrate with a via 有权
    在具有通孔的基板和基板中形成通孔的方法

    公开(公告)号:US20110048788A1

    公开(公告)日:2011-03-03

    申请号:US12583949

    申请日:2009-08-28

    Abstract: The present invention relates to a method for forming a via in a substrate and a substrate with a via. The method includes the following steps: (a) providing a substrate having a first surface and a second surface; (b) forming a groove that has a side wall and a bottom wall on the first surface of the substrate; (c) forming a conductive metal on the side wall and the bottom wall of the groove so as to form a central groove; (d) forming an annular groove that surrounds the conductive metal on the first surface of the substrate; (e) forming an insulating material in the central groove and the annular groove; and (f) removing part of the second surface of the substrate to expose the conductive metal and the insulating material.

    Abstract translation: 本发明涉及一种用于在基板和具有通孔的基板上形成通孔的方法。 该方法包括以下步骤:(a)提供具有第一表面和第二表面的基底; (b)在所述基板的第一表面上形成具有侧壁和底壁的凹槽; (c)在槽的侧壁和底壁上形成导电金属,以形成中心槽; (d)形成围绕所述基板的第一表面上的所述导电金属的环形槽; (e)在所述中央槽和所述环形槽中形成绝缘材料; 和(f)去除衬底的第二表面的一部分以暴露导电金属和绝缘材料。

    MICROELECTROMECHANICAL SYSTEM PACKAGE AND THE METHOD FOR MANUFACTURING THE SAME
    4.
    发明申请
    MICROELECTROMECHANICAL SYSTEM PACKAGE AND THE METHOD FOR MANUFACTURING THE SAME 有权
    微电子系统包装及其制造方法

    公开(公告)号:US20080303126A1

    公开(公告)日:2008-12-11

    申请号:US12018711

    申请日:2008-01-23

    CPC classification number: B81B7/0064 H01L2224/16145 H01L2224/16225

    Abstract: A method for manufacturing a microelectromechanical system package is provided. A plurality of cavities is first formed on a surface of a silicon wafer. The surface of the silicon wafer is then bonded to the microelectromechanical system wafer in such a manner that the active areas of the chips on the microelectromechanical system wafer are corresponding to the cavities on the silicon wafer. The structure assembly of the two wafers is finally singulated to form individual microelectromechanical system chips whose active areas are covered by the cavities. In this way, the profile of the microelectromechanical system package may be reduced accordingly.

    Abstract translation: 提供了一种用于制造微机电系统封装的方法。 首先在硅晶片的表面上形成多个空腔。 然后将硅晶片的表面以这样的方式结合到微机电系统晶片,使得微机电系统晶片上的芯片的有源区域对应于硅晶片上的空腔。 最终将两个晶片的结构组件分开以形成其有源区域被空腔覆盖的单独的微机电系统芯片。 以这种方式,可以相应地减小微机电系统封装的轮廓。

    CHIP SCALE PACKAGE AND METHOD FOR MARKING CHIP SCALE PACKAGES
    5.
    发明申请
    CHIP SCALE PACKAGE AND METHOD FOR MARKING CHIP SCALE PACKAGES 审中-公开
    芯片尺寸包装和标记芯片尺寸包装的方法

    公开(公告)号:US20080132000A1

    公开(公告)日:2008-06-05

    申请号:US11871056

    申请日:2007-10-11

    Abstract: A method for marking chip scale packages at the wafer level is provided. First, a positioning step is performed to determine the position of a plurality of semi-finished chip scale packages formed on a wafer. Each of the semi-finished chip scale package includes a plurality of terminals for making external electrical connections and each die has a plurality of bonding pads on an active surface thereof. The bonding pads are electrically connected to the respective terminals wherein a backside surface of the die is exposed from a surface of the respective semi-finished chip scale package. The exposed backside surface of the die is then marked by ink-jet printing. Afterward, the ink marks on the dice are cured. Finally, the wafer is diced to obtain a plurality of separated chip scale packages.

    Abstract translation: 提供了一种用于在晶片级标记芯片级封装的方法。 首先,执行定位步骤以确定形成在晶片上的多个半成品芯片级封装的位置。 每个半成品芯片级封装包括用于进行外部电连接的多个端子,并且每个管芯在其有效表面上具有多个焊盘。 接合焊盘电连接到各个端子,其中芯片的背面从相应的半成品芯片尺寸封装的表面露出。 然后通过喷墨打印标记模具的暴露的背面。 之后,骰子上的墨迹被修复。 最后,切割晶片以获得多个分离的芯片级封装。

    Method for packaging an image sensor die and a package thereof
    7.
    发明申请
    Method for packaging an image sensor die and a package thereof 审中-公开
    包装图像传感器芯片及其封装的方法

    公开(公告)号:US20060255253A1

    公开(公告)日:2006-11-16

    申请号:US11287269

    申请日:2005-11-28

    Abstract: A method and package for packaging an image sensor die utilizes a substrate having a concave space and an opening to connect the image sensor die with the substrate by SMT method. This method can reduce the manufacturing process of packaging the image sensor. The packaging method comprises providing a wafer having a plurality of image sensors, sawing the wafer to form a plurality of dies with a single image sensor, electrically connecting the die having the image sensor with a substrate, the substrate comprising a concave space and an opening, a plurality of solder pads disposed in the concave space for electrically connecting the die having an image sensor, and a plurality of input/output solder pads on the same side of the substrate for connecting to an external element, and filling a transparent adhesive into the opening of the substrate.

    Abstract translation: 用于封装图像传感器芯片的方法和封装利用具有凹形空间和开口的基板,通过SMT方法将图像传感器裸片与基板连接。 这种方法可以减少包装图像传感器的制造过程。 包装方法包括提供具有多个图像传感器的晶片,锯切晶片以形成具有单个图像传感器的多个管芯,将具有图像传感器的管芯与基板电连接,该基板包括凹形空间和开口 设置在所述凹形空间中的多个焊盘,用于电连接具有图像传感器的管芯,以及在所述衬底的同一侧上的多个输入/输出焊盘,用于连接到外部元件,并且将透明粘合剂填充到 基板的开口。

    Chip-scale semiconductor package
    9.
    发明授权
    Chip-scale semiconductor package 有权
    芯片级半导体封装

    公开(公告)号:US06150730A

    公开(公告)日:2000-11-21

    申请号:US349231

    申请日:1999-07-08

    Abstract: A chip-scale semiconductor package mainly includes a semiconductor chip, a substrate and a package body. Said chip is attached onto said substrate by an adhesive layer. Said chip has a plurality of bonding pads formed thereon. Said adhesive layer has an aperture corresponding to the bonding pads of said chip such that the bonding pads can be exposed within an aperture. Said substrate has several through-holes respectively corresponding to the bonding pads of said chip and parts of the area around the edge of said chip for dispensing of encapsulant after the soldering of leads of said substrate to the bonding pads of said chip. The encapsulant dispensed into the through-holes can flow from the surface of said chip to the edge thereof. Said package body has one portion provided within the through-hole of said substrate and another portion provided around the edge of said chip whereby encapsulation process is accomplished without having to turn the whole semiconductor package device.

    Abstract translation: 芯片级半导体封装主要包括半导体芯片,基板和封装体。 所述芯片通过粘合剂层附着在所述基板上。 所述芯片具有形成在其上的多个接合焊盘。 所述粘合剂层具有对应于所述芯片的焊盘的孔,使得焊盘可以暴露在孔内。 所述衬底具有分别对应于所述芯片的焊盘和所述芯片的边缘周围区域的部分的多个通孔,用于在将所述衬底的引线焊接到所述芯片的焊盘之后分配密封剂。 分配到通孔中的密封剂可以从所述芯片的表面流动到其边缘。 所述封装体具有设置在所述基板的通孔内的一部分和设置在所述芯片的边缘周围的另一部分,从而实现封装处理而不必转动整个半导体封装器件。

    Method for forming a via in a substrate and substrate with a via
    10.
    发明授权
    Method for forming a via in a substrate and substrate with a via 有权
    在具有通孔的基板和基板中形成通孔的方法

    公开(公告)号:US08471156B2

    公开(公告)日:2013-06-25

    申请号:US12583949

    申请日:2009-08-28

    Abstract: The present invention relates to a method for forming a via in a substrate and a substrate with a via. The method includes the following steps: (a) providing a substrate; (b) forming a groove on a first surface of the substrate; (c) forming a conductive metal on the groove so as to form a central groove; (d) forming an annular groove that surrounds the conductive metal; (e) forming an insulating material in the central groove and the annular; groove; and (f) removing part of the substrate to expose the conductive metal and the insulating material.

    Abstract translation: 本发明涉及一种用于在基板和具有通孔的基板上形成通孔的方法。 该方法包括以下步骤:(a)提供衬底; (b)在所述基板的第一表面上形成凹槽; (c)在槽上形成导电金属以形成中心槽; (d)形成围绕所述导电金属的环形槽; (e)在中央槽和环形中形成绝缘材料; 槽; 和(f)去除衬底的一部分以暴露导电金属和绝缘材料。

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