摘要:
An excessively large electric current is suppressed from flowing to an electrode. Provision is made for an electrode arranged in an exhaust passage of an internal combustion engine, a power supply connected to the electrode for applying a voltage thereto, an air fuel ratio detection device for detecting or estimating an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a power upper limit setting device for setting an upper limit for electric power supplied to the electrode from the power supply in cases where the air fuel ratio detected or estimate.
摘要:
A film-forming apparatus and method comprising a film-forming chamber for supplying a reaction gas, a cylindrical shaped liner provided in the film-forming chamber, a straightening vane provided above the liner for the reaction gas to pass through, wherein the outside of the film-forming chamber connects the inside of the liner via a substrate transfer portion provided at the wall of the film-forming chamber by moving the straightening vane from the position that the straightening vane closes the upper opening of the liner. A substrate supporting portion provided in the liner, for supporting the substrate before the film-forming to move the substrate in a vertical direction, a substrate transfer unit capable of moving inside the film-forming chamber through the substrate transfer portion, wherein the substrate is transferred between the substrate supporting portion and the substrate transfer unit.
摘要:
A deposition apparatus 50 includes a chamber 1 having at its top section a gas inlet 4 for supplying deposition gas 25. Inside chamber 1 is a susceptor 7 on which to place a substrate 6; a heater 8 located below the substrate 6; and a liner 2 for covering the inner walls of the chamber 1. Apparatus 50 deposits a film on the substrate 6 by supplying deposition gas 25 from gas inlet 4 into chamber 1 while heating substrate 6. An upper electric resistance heater cluster 35 is located between the inner walls of the chamber 1 and liner 2 such that the upper heater 35 surrounds the liner 2. The upper heater 35 is divided vertically into electric resistance heaters 36, 37, and 38 which are independently temperature-controlled. The substrate 6 is heated with the use of both heater 8 and the upper heater cluster 35.
摘要:
An amount of aggregation of particulate matter is estimated with a high degree of accuracy. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an estimation device that estimates an amount of aggregation of the particulate matter based on the electric current detected at the time when the voltage is applied to the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a prohibition device which prohibits an estimation by the estimation device in the case of a rich air fuel ratio.
摘要:
An amount of aggregation of particulate matter is estimated with a high degree of accuracy. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an estimation device that estimates an amount of aggregation of the particulate matter based on the electric current detected at the time when the voltage is applied to the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a prohibition device which prohibits an estimation by the estimation device in the case of a rich air fuel ratio.
摘要:
A heater for heating a wafer includes elements that are arranged at a distance from one another in a rotationally symmetrical fashion with respect to a shaft extending through a center of the wafer, an electrode being provided to each of the elements to heat the wafer uniformly.
摘要:
An engine includes a normal fuel tank, fuel gas tank, an in-tank injection valve and a fuel gas supply valve. During operation of the engine, in a state where the fuel gas supply valve is closed, a fuel is injected into the fuel gas tank through the in-tank injection valve to generate a fuel gas by vaporizing the fuel. The fuel gas is stored in the fuel gas tank and is maintained in the gas phase due to the natural decompression even after the engine is stopped. To start the engine, the fuel gas supply valve is opened to supply the fuel gas in the fuel gas tank to a surge tank. Thus, compared with the case where the fuel gas is generated at the start of the engine, the fuel gas can be quickly supplied into the cylinder, so that the ability to start the engine is improved.
摘要:
A control device for an internal combustion engine according to the present embodiment, includes: cooling units 40L and 40R arranged on a path where a coolant is circulated, and cooling an exhaust gas of the internal combustion engine with the coolant flowing through the cooling units 40L and 40R; and ECUs 7L and 7R estimating a heat quantity of the exhaust gas, and deciding whether or not to prohibit an idle reduction control in response to the estimated heat quantity of the exhaust gas.
摘要:
A control apparatus and control method is provided for an internal combustion engine that includes a vaporized fuel tank in which vaporized fuel is stored, and a normally-closed vaporized fuel supply valve that opens and closes a connecting portion between the vaporized fuel tank and a surge tank. This apparatus and method produce vaporized fuel by injecting fuel into the tank while the vaporized fuel supply valve is closed while the engine is operating, then open the vaporized fuel supply valve at engine startup and supply the vaporized fuel stored in the tank to the surge tank. If there is no vaporized fuel remaining in the vaporized fuel tank when the engine stops, vacuum is generated in the vaporized fuel tank by temporarily opening the vaporized fuel supply valve before the engine stops. Vaporized fuel is then produced by injecting fuel into the vaporized fuel tank in this vacuum state.
摘要:
A control apparatus for an internal combustion engine includes a fuel tank; a vaporized fuel tank that is connected to an intake passage; an in-tank fuel supplying portion that supplies fuel in the fuel tank to the vaporized fuel tank; a vaporized fuel supply valve that opens and closes a connecting portion between the vaporized fuel tank and the intake passage; an air introduction valve provided in the vaporized fuel tank; a throttle valve; a vaporized fuel producing portion that produces vaporized fuel in the vaporized fuel tank; a vaporized fuel supplying portion that supplies vaporized fuel stored in the vaporized fuel tank; and a supply amount controlling portion that controls a supply amount of vaporized fuel according to an opening amount of the throttle valve by driving the throttle valve when supplying vaporized fuel.