Film-forming apparatus and method
    2.
    发明授权
    Film-forming apparatus and method 有权
    成膜装置及方法

    公开(公告)号:US09194056B2

    公开(公告)日:2015-11-24

    申请号:US13568872

    申请日:2012-08-07

    摘要: A film-forming apparatus and method comprising a film-forming chamber for supplying a reaction gas, a cylindrical shaped liner provided in the film-forming chamber, a straightening vane provided above the liner for the reaction gas to pass through, wherein the outside of the film-forming chamber connects the inside of the liner via a substrate transfer portion provided at the wall of the film-forming chamber by moving the straightening vane from the position that the straightening vane closes the upper opening of the liner. A substrate supporting portion provided in the liner, for supporting the substrate before the film-forming to move the substrate in a vertical direction, a substrate transfer unit capable of moving inside the film-forming chamber through the substrate transfer portion, wherein the substrate is transferred between the substrate supporting portion and the substrate transfer unit.

    摘要翻译: 一种成膜装置和方法,包括:用于提供反应气体的成膜室,设置在成膜室中的圆柱形衬垫,设置在衬套上方的用于反应气体通过的矫直叶片,其中外部 成膜室通过从整形叶片封闭衬垫的上部开口的位置移动矫直叶片,通过设置在成膜室的壁处的衬底转移部分来连接衬里的内部。 一种基板支撑部分,其设置在所述衬垫中,用于在成膜之前支撑所述基板以在垂直方向上移动所述基板;基板转移单元,其能够通过所述基板转移部分在所述成膜室内移动,其中所述基板为 在衬底支撑部分和衬底转移单元之间转移。

    Deposition apparatus and method
    3.
    发明授权
    Deposition apparatus and method 有权
    沉积装置和方法

    公开(公告)号:US09194044B2

    公开(公告)日:2015-11-24

    申请号:US13029402

    申请日:2011-02-17

    IPC分类号: C23C16/00 C23C16/455

    CPC分类号: C23C16/4557

    摘要: A deposition apparatus 50 includes a chamber 1 having at its top section a gas inlet 4 for supplying deposition gas 25. Inside chamber 1 is a susceptor 7 on which to place a substrate 6; a heater 8 located below the substrate 6; and a liner 2 for covering the inner walls of the chamber 1. Apparatus 50 deposits a film on the substrate 6 by supplying deposition gas 25 from gas inlet 4 into chamber 1 while heating substrate 6. An upper electric resistance heater cluster 35 is located between the inner walls of the chamber 1 and liner 2 such that the upper heater 35 surrounds the liner 2. The upper heater 35 is divided vertically into electric resistance heaters 36, 37, and 38 which are independently temperature-controlled. The substrate 6 is heated with the use of both heater 8 and the upper heater cluster 35.

    摘要翻译: 沉积设备50包括在其顶部具有用于供应沉积气体25的气体入口4的腔室1.腔室1内是放置衬底6的基座7; 位于基板6下方的加热器8; 以及用于覆盖室1的内壁的衬垫2.装置50通过在加热衬底6的同时将气体入口4的沉积气体25供应到室1中而将衬底6沉积在衬底6上。上电阻加热器组35位于 腔室1和衬套2的内壁,使得上部加热器35围绕衬垫2.上部加热器35被垂直分割成独立温度控制的电阻加热器36,37和38。 使用加热器8和上加热器簇35来加热基板6。

    Particulate matter processing apparatus
    4.
    发明授权
    Particulate matter processing apparatus 有权
    颗粒物处理装置

    公开(公告)号:US09128026B2

    公开(公告)日:2015-09-08

    申请号:US13519021

    申请日:2011-03-16

    摘要: An amount of aggregation of particulate matter is estimated with a high degree of accuracy. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an estimation device that estimates an amount of aggregation of the particulate matter based on the electric current detected at the time when the voltage is applied to the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a prohibition device which prohibits an estimation by the estimation device in the case of a rich air fuel ratio.

    摘要翻译: 以高精度估计颗粒物质的聚集量。 在其中安装有电极的处理部件的颗粒物处理装置设置在内燃机的排气通道中,其中通过在电极和处理部件之间产生电位差而使颗粒物质聚集, 与电极连接并对其施加电压的电源,检测通过电极的电流的电流检测装置,基于在电极上检测到的电流来估计颗粒物的聚集量的估计装置, 对电极施加电压的时间,检测或估计通过排气通路的排气的空燃比的空燃比检测装置,以及禁止在估计装置中进行的估计的禁止装置 超大空燃比的情况。

    PARTICULATE MATTER PROCESSING APPARATUS
    5.
    发明申请
    PARTICULATE MATTER PROCESSING APPARATUS 有权
    颗粒物加工设备

    公开(公告)号:US20140007650A1

    公开(公告)日:2014-01-09

    申请号:US13519021

    申请日:2011-03-16

    IPC分类号: G01N27/04

    摘要: An amount of aggregation of particulate matter is estimated with a high degree of accuracy. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an estimation device that estimates an amount of aggregation of the particulate matter based on the electric current detected at the time when the voltage is applied to the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a prohibition device which prohibits an estimation by the estimation device in the case of a rich air fuel ratio.

    摘要翻译: 以高精度估计颗粒物质的聚集量。 在其中安装有电极的处理部件的颗粒物处理装置设置在内燃机的排气通道中,其中通过在电极和处理部件之间产生电位差而使颗粒物质聚集, 与电极连接并对其施加电压的电源,检测通过电极的电流的电流检测装置,基于在电极上检测到的电流来估计颗粒物的聚集量的估计装置, 对电极施加电压的时间,检测或估计通过排气通路的排气的空燃比的空燃比检测装置,以及禁止在估计装置中进行的估计的禁止装置 超大空燃比的情况。

    FUEL SUPPLY SYSTEM FOR INTERNAL COMBUSTION ENGINE
    7.
    发明申请
    FUEL SUPPLY SYSTEM FOR INTERNAL COMBUSTION ENGINE 有权
    内燃机燃油供应系统

    公开(公告)号:US20130013173A1

    公开(公告)日:2013-01-10

    申请号:US13636045

    申请日:2010-03-19

    IPC分类号: F02D41/30

    摘要: An engine includes a normal fuel tank, fuel gas tank, an in-tank injection valve and a fuel gas supply valve. During operation of the engine, in a state where the fuel gas supply valve is closed, a fuel is injected into the fuel gas tank through the in-tank injection valve to generate a fuel gas by vaporizing the fuel. The fuel gas is stored in the fuel gas tank and is maintained in the gas phase due to the natural decompression even after the engine is stopped. To start the engine, the fuel gas supply valve is opened to supply the fuel gas in the fuel gas tank to a surge tank. Thus, compared with the case where the fuel gas is generated at the start of the engine, the fuel gas can be quickly supplied into the cylinder, so that the ability to start the engine is improved.

    摘要翻译: 发动机包括正常燃料箱,燃料气罐,罐内喷射阀和燃料气体供给阀。 在发动机的运转中,在燃料气体供给阀关闭的状态下,燃料通过箱内喷射阀向燃料气体罐内喷出,通过使燃料蒸发而产生燃料气体。 燃料气体储存在燃料气罐中,并且即使在发动机停止之后也由于自然减压而保持在气相中。 为了启动发动机,燃料气体供给阀被打开以将燃料气体箱中的燃料气体供应到缓冲罐。 因此,与在发动机起动时产生燃料气体的情况相比,可以将燃料气体快速供给到气缸中,从而提高起动发动机的能力。

    CONTROL APPARATUS AND CONTROL METHOD FOR INTERNAL COMBUSTION ENGINE
    9.
    发明申请
    CONTROL APPARATUS AND CONTROL METHOD FOR INTERNAL COMBUSTION ENGINE 有权
    内燃机控制装置及控制方法

    公开(公告)号:US20110308500A1

    公开(公告)日:2011-12-22

    申请号:US13162221

    申请日:2011-06-16

    IPC分类号: F02D19/02 F02M37/04

    摘要: A control apparatus and control method is provided for an internal combustion engine that includes a vaporized fuel tank in which vaporized fuel is stored, and a normally-closed vaporized fuel supply valve that opens and closes a connecting portion between the vaporized fuel tank and a surge tank. This apparatus and method produce vaporized fuel by injecting fuel into the tank while the vaporized fuel supply valve is closed while the engine is operating, then open the vaporized fuel supply valve at engine startup and supply the vaporized fuel stored in the tank to the surge tank. If there is no vaporized fuel remaining in the vaporized fuel tank when the engine stops, vacuum is generated in the vaporized fuel tank by temporarily opening the vaporized fuel supply valve before the engine stops. Vaporized fuel is then produced by injecting fuel into the vaporized fuel tank in this vacuum state.

    摘要翻译: 提供一种用于内燃机的控制装置和控制方法,所述内燃机包括蒸发燃料的汽化燃料箱,其中储存蒸发燃料;以及常闭汽化燃料供给阀,其将所述汽化燃料箱与喘振之间的连接部分打开和关闭 坦克。 该装置和方法通过在发动机运转时关闭燃料燃料供给阀的同时将燃料喷射到罐中而产生汽化燃料,然后在发动机起动时打开汽化燃料供给阀并将储存在罐中的蒸发燃料供应到缓冲罐 。 如果在发动机停止时在蒸发的燃料箱中没有蒸发的燃料残留,则在发动机停止之前暂时打开蒸发的燃料供给阀,在蒸发的燃料箱中产生真空。 然后通过在该真空状态下将燃料喷射到蒸发的燃料箱中来产生汽化燃料。

    CONTROL APPARATUS FOR INTERNAL COMBUSTION ENGINE
    10.
    发明申请
    CONTROL APPARATUS FOR INTERNAL COMBUSTION ENGINE 审中-公开
    内燃机控制装置

    公开(公告)号:US20110247593A1

    公开(公告)日:2011-10-13

    申请号:US13082703

    申请日:2011-04-08

    IPC分类号: F02M33/02

    CPC分类号: F02M31/18 Y02T10/126

    摘要: A control apparatus for an internal combustion engine includes a fuel tank; a vaporized fuel tank that is connected to an intake passage; an in-tank fuel supplying portion that supplies fuel in the fuel tank to the vaporized fuel tank; a vaporized fuel supply valve that opens and closes a connecting portion between the vaporized fuel tank and the intake passage; an air introduction valve provided in the vaporized fuel tank; a throttle valve; a vaporized fuel producing portion that produces vaporized fuel in the vaporized fuel tank; a vaporized fuel supplying portion that supplies vaporized fuel stored in the vaporized fuel tank; and a supply amount controlling portion that controls a supply amount of vaporized fuel according to an opening amount of the throttle valve by driving the throttle valve when supplying vaporized fuel.

    摘要翻译: 一种用于内燃机的控制装置包括燃料箱; 连接到进气通道的汽化燃料箱; 将燃料箱内的燃料供给汽化后的燃料箱的箱内燃料供给部; 气化燃料供给阀,其使所述汽化燃料箱与所述进气通路之间的连接部分开闭; 设置在蒸发的燃料箱中的空气引入阀; 节流阀; 汽化燃料生产部分,其在汽化燃料箱中产生汽化燃料; 蒸发燃料供应部分,其供应储存在汽化燃料箱中的蒸发燃料; 以及供给量控制部,其通过在供给汽化燃料时驱动所述节流阀,根据所述节流阀的开度来控制蒸发燃料的供给量。