公开(公告)号：US20170351088A1

公开(公告)日：2017-12-07

申请号：US13899077

申请日：2013-05-21

申请人： Isao AOYAGI ,  Kanae MURATA ,  Takashi OZAKI ,  Norio FUJITSUKA ,  Yutaka NONOMURA ,  Teruhisa AKASHI

发明人： Isao AOYAGI ,  Kanae MURATA ,  Takashi OZAKI ,  Norio FUJITSUKA ,  Yutaka NONOMURA ,  Teruhisa AKASHI

IPC分类号： G02B26/08 ,  G02B26/10 ,  G02B6/35 ,  B81B5/00 ,  H04N1/113 ,  G02B7/182

CPC分类号： G02B26/0841 ,  B81B3/0062 ,  B81B5/00 ,  B81B2201/042 ,  G02B6/3512 ,  G02B6/3572 ,  G02B7/1821 ,  G02B26/085 ,  G02B26/10 ,  H04N1/113

摘要： The present application discloses a deflector including a substrate portion, a movable portion, a reflective portion, a support portion, and a moving mechanism. The movable portion is supported by a first end of the support portion. A second end of the support portion is supported by the substrate portion. An end of the movable portion is capable of coming into contact with the substrate portion. The reflective portion is formed on the movable portion. The moving mechanism is capable of driving the movable portion so as to bring the movable portion into at least any one of a first state, a second state, a third state, and a fourth state.

公开(公告)号：US20110215428A1

公开(公告)日：2011-09-08

申请号：US13035186

申请日：2011-02-25

申请人： Hirofumi FUNABASHI ,  Yutaka NONOMURA ,  Yoshiyuki HATA ,  Motohiro FUJIYOSHI ,  Teruhisa AKASHI ,  Yoshiteru OMURA

发明人： Hirofumi FUNABASHI ,  Yutaka NONOMURA ,  Yoshiyuki HATA ,  Motohiro FUJIYOSHI ,  Teruhisa AKASHI ,  Yoshiteru OMURA

IPC分类号： H01L29/84 ,  H01L21/02

CPC分类号： H01L21/02 ,  H01L29/84

摘要： In a MEMS structure, a first trench which penetrates the first layer, the second layer and the third layer is formed, and a second trench which penetrates the fifth layer, the forth layer and the third layer is formed. The first trench forms a first part of an outline of the movable portion in a view along the stacked direction. The second trench forms a second part of the outline of the movable portion in the view along the stacked direction. At least a part of the first trench overlaps with the first extending portion in the view along the stacked direction.

摘要翻译： 在MEMS结构中，形成贯穿第一层，第二层和第三层的第一沟槽，形成贯穿第五层，第四层和第三层的第二沟槽。 第一沟槽沿着堆叠的方向形成可动部分的轮廓的第一部分。 第二沟槽沿着堆叠方向在视图中形成可动部分的轮廓的第二部分。 第一沟槽的至少一部分沿着堆叠方向在视图中与第一延伸部分重叠。

公开(公告)号：US07662340B2

公开(公告)日：2010-02-16

申请号：US10500385

申请日：2001-12-28

申请人： Yoshihiro Nagaoka ,  Naruo Watanabe ,  Teruhisa Akashi ,  Yuji Miyahara ,  Kei Takenaka ,  Tomoki Ohashi

发明人： Yoshihiro Nagaoka ,  Naruo Watanabe ,  Teruhisa Akashi ,  Yuji Miyahara ,  Kei Takenaka ,  Tomoki Ohashi

IPC分类号： G01N9/30

CPC分类号： G01N35/025 ,  B01L3/502738 ,  B01L2200/0621 ,  B01L2300/0636 ,  B01L2300/0816 ,  B01L2400/0409 ,  B01L2400/0622 ,  B01L2400/0694 ,  G01N21/07 ,  G01N35/1079 ,  G01N2035/00504 ,  G01N2035/0449 ,  G01N2035/0451 ,  Y10T436/111666

摘要： The invention is achieved by feeding a reagent using centrifugal force, without providing a valve for controlling the flow rate of the reagent in the reagent flow path.A chemical analyzer is used which comprises a structure that is supported so as to be rotatable, said structure comprising a capturing section for capturing specific chemical substances from a specimen, specimen containers and reagent containers including washing solution containers.The washing solution containers and the other reagent containers comprise a liquid outlet port which is provided at the side opposite to the rotation center side, and the capturing section is held in the structure, closer to the outer periphery side than the specimen container and washing solution and the other reagent containers, and a flow path is provided, with a bent flow path portion which returns to the rotation center side, and which at a particular stage prevents the flow of liquid from the washing solution containers to the capturing section, and at another stage, forms the liquid flow due to the centrifugal force from the rotation of the structure.

摘要翻译： 本发明通过使用离心力供给试剂而不设置用于控制试剂流路中的试剂的流量的阀来实现。 使用化学分析器，其包括被支撑为可旋转的结构，所述结构包括用于从样品捕获特定化学物质的捕获部分，样本容器和包括洗涤溶液容器的试剂容器。 洗涤溶液容器和其他试剂容器包括设置在与旋转中心侧相反的一侧的液体出口，并且捕获部分保持在结构中，比检体容器和洗涤液更靠近外周侧 和其他试剂容器以及流路，其具有返回到旋转中心侧的弯曲流路部分，并且在特定阶段防止液体从洗涤溶液容器流向捕获部分，并且在 另一个阶段由于结构旋转的离心力而形成液体流动。

公开(公告)号：US07400568B2

公开(公告)日：2008-07-15

申请号：US10722482

申请日：2003-11-28

申请人： Seiichi Katou ,  Katsuhiko Kimura ,  Teruhisa Akashi ,  Kazuyuki Fukuda ,  Ryoji Okada ,  Hiromitsu Imamiya ,  Toshio Sugiyama ,  Hideo Suenaga

发明人： Seiichi Katou ,  Katsuhiko Kimura ,  Teruhisa Akashi ,  Kazuyuki Fukuda ,  Ryoji Okada ,  Hiromitsu Imamiya ,  Toshio Sugiyama ,  Hideo Suenaga

IPC分类号： G11B7/00

CPC分类号： G11B7/22 ,  G11B7/123 ,  G11B7/1275 ,  G11B7/1356 ,  G11B7/1359 ,  G11B2007/0006 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48464 ,  H01L2924/19107 ,  H01L2924/00014

摘要： An optical device wherein an optical component and a plurality of light emitting elements are mounted on an identical substrate, a level of a surface on which the optical component is mounted is different from that of a surface on which the light emitting elements are mounted by a step provided on the substrate, at least one plane vertical to the surface on which the optical component is mounted and located on a periphery of the substrate is opened, a reflecting surface, a transmitting surface or a diffraction grating surface of the optical component is provided along sides generated by the step provided in the substrate, optical axes of the plurality of light emitting elements of which polarization axes are in parallel with each other intersect with each other on the surface, and an exit light beam of the light emitting elements is emitted from the opened plane.

摘要翻译： 一种光学器件，其中光学部件和多个发光元件安装在相同的基板上，安装有光学部件的表面的水平与安装有发光元件的表面的水平不同 提供在基板上的至少一个垂直于其上安装有光学部件并且位于基板的周边上的表面的平面，提供光学部件的反射表面，透射表面或衍射光栅表面 沿着由衬底中提供的台阶产生的边，偏振轴彼此平行的多个发光元件的光轴在表面上彼此相交，并且发射元件的出射光束 从开放的飞机。

公开(公告)号：US06934448B2

公开(公告)日：2005-08-23

申请号：US10309243

申请日：2002-12-04

申请人： Teruhisa Akashi ,  Yoshishige Endou ,  Hideaki Takemori ,  Masatoshi Seki ,  Kazuhiro Hirose ,  Satoshi Higashiyama

发明人： Teruhisa Akashi ,  Yoshishige Endou ,  Hideaki Takemori ,  Masatoshi Seki ,  Kazuhiro Hirose ,  Satoshi Higashiyama

IPC分类号： G02B6/36 ,  G02B6/42 ,  G02B6/30

CPC分类号： G02B6/4204 ,  G02B6/4224 ,  G02B6/4236 ,  G02B6/4243 ,  G02B6/4244 ,  G02B6/426 ,  G02B6/4265 ,  G02B6/4266 ,  G02B6/4286 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2924/10253 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2924/00012

摘要： An optical element-mounting substrate that makes it easy to optically couple the optical semiconductor element to the optical fiber or to the lens and that can be highly integrated while suppressing deterioration in the high-frequency signals. The optical element-mounting substrate for optically coupling the optical semiconductor element to the optical fiber through the lens, comprises an insulating film formed on the surface of the optical element-mounting substrate, grooves formed on the substrate for installing the optical fiber and the lens, a thin-film electrode formed on the insulating film, a thin-film capacitor and a thin-film temperature sensor arranged maintaining a distance from the thin-film electrode, and a solder film formed on the insulating film in a region where the optical semiconductor element is mounted so as to be electrically connected to the thin-film electrode.

摘要翻译： 一种光学元件安装基板，其使得容易将光学半导体元件光学耦合到光纤或透镜，并且可以高度集成，同时抑制高频信号的劣化。 用于通过透镜将光半导体元件光学耦合到光纤的光学元件安装基板包括形成在光学元件安装基板的表面上的绝缘膜，用于安装光纤和透镜的基板上形成的凹槽 ，形成在绝缘膜上的薄膜电极，薄膜电容器和薄膜温度传感器，其设置成保持与薄膜电极的距离，以及在绝缘膜上形成的焊料膜，其中光学 半导体元件安装成电连接到薄膜电极。

公开(公告)号：US20050095172A1

公开(公告)日：2005-05-05

申请号：US10500385

申请日：2001-12-28

申请人： Yoshihiro Nagaoka ,  Naruo Watanabe ,  Teruhisa Akashi ,  Yuji Miyahara ,  Kei Takenaka ,  Tomoki Ohashi

发明人： Yoshihiro Nagaoka ,  Naruo Watanabe ,  Teruhisa Akashi ,  Yuji Miyahara ,  Kei Takenaka ,  Tomoki Ohashi

IPC分类号： B01D11/04 ,  G01N1/10 ,  G01N21/07 ,  G01N35/00 ,  G01N35/02 ,  G01N33/00

CPC分类号： G01N35/025 ,  B01L3/502738 ,  B01L2200/0621 ,  B01L2300/0636 ,  B01L2300/0816 ,  B01L2400/0409 ,  B01L2400/0622 ,  B01L2400/0694 ,  G01N21/07 ,  G01N35/1079 ,  G01N2035/00504 ,  G01N2035/0449 ,  G01N2035/0451 ,  Y10T436/111666

摘要： The invention is achieved by feeding a reagent using centrifugal force, without providing a valve for controlling the flow rate of the reagent in the reagent flow path. A chemical analyzer is used which comprises a structure that is supported so as to be rotatable, said structure comprising a capturing section for capturing specific chemical substances from a specimen, specimen containers and reagent containers including washing solution containers. The washing solution containers and the other reagent containers comprise a liquid outlet port which is provided at the side opposite to the rotation center side, and the capturing section is held in the structure, closer to the outer periphery side than the specimen container and washing solution and the other reagent containers, and a flow path is provided, with a bent flow path portion which returns to the rotation center side, and which at a particular stage prevents the flow of liquid from the washing solution containers to the capturing section, and at another stage, forms the liquid flow due to the centrifugal force from the rotation of the structure.

摘要翻译： 本发明通过使用离心力供给试剂而不设置用于控制试剂流路中的试剂的流量的阀来实现。 使用化学分析器，其包括被支撑为可旋转的结构，所述结构包括用于从样品捕获特定化学物质的捕获部分，样本容器和包括洗涤溶液容器的试剂容器。 洗涤溶液容器和其他试剂容器包括设置在与旋转中心侧相反的一侧的液体出口，并且捕获部分保持在结构中，比检体容器和洗涤液更靠近外周侧 和其他试剂容器以及流路，其具有返回到旋转中心侧的弯曲流路部分，并且在特定阶段防止液体从洗涤溶液容器流向捕获部分，并且在 另一个阶段由于结构旋转的离心力而形成液体流动。

公开(公告)号：US06219472B1

公开(公告)日：2001-04-17

申请号：US09018958

申请日：1998-02-05

申请人： Masaya Horino ,  Kazutaka Sato ,  Teruhisa Akashi ,  Masaru Muranishi ,  Norifumi Komatsu ,  Dai Kobayashi ,  Hiroaki Okano

发明人： Masaya Horino ,  Kazutaka Sato ,  Teruhisa Akashi ,  Masaru Muranishi ,  Norifumi Komatsu ,  Dai Kobayashi ,  Hiroaki Okano

IPC分类号： G02B600

CPC分类号： G02B6/3508 ,  G02B6/3502 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/3566 ,  G02B6/3572 ,  G02B6/3582 ,  G02B6/3584

摘要： An optical switch for switching an optical path of an input optical signal comprises a substrate composed of a silica glass substrate, a separation layer formed on the silica glass substrate, a plurality of cantilever beams and formed in parallel to one another on the separation layer and connected at their tip ends to a connection member, at least one silica glass optical waveguide core formed on the cantilever beams, a plurality of optical waveguide fixed in opposition to the silica glass optical waveguide core, a cover for covering the cantilever beams, and a switch drive unit for bending the cantilever beams. The switch drive unit comprises electromagnetic actuators, which comprise soft magnetic bodies formed on the connection member for the cantilever beams and on the substrate, soft magnetic yokes formed of a soft magnetic body, permanent magnets, and wire coils.

摘要翻译： 用于切换输入光信号的光路的光开关包括由石英玻璃基板，形成在石英玻璃基板上的分离层，多个悬臂梁和分离层上彼此平行地形成的基板，以及 在其末端连接到连接构件，形成在悬臂梁上的至少一个石英玻璃光波导芯，与石英玻璃光波导芯相对固定的多个光波导，用于覆盖悬臂梁的盖，以及 用于弯曲悬臂梁的开关驱动单元。 开关驱动单元包括电磁致动器，其包括形成在用于悬臂梁的连接构件上的软磁体和在基板上的由软磁体，永磁体和线圈组成的软磁轭。

公开(公告)号：US08698315B2

公开(公告)日：2014-04-15

申请号：US13596859

申请日：2012-08-28

申请人： Yoshiyuki Hata ,  Yutaka Nonomura ,  Teruhisa Akashi ,  Hirofumi Funabashi ,  Motohiro Fujiyoshi ,  Yoshiteru Omura

发明人： Yoshiyuki Hata ,  Yutaka Nonomura ,  Teruhisa Akashi ,  Hirofumi Funabashi ,  Motohiro Fujiyoshi ,  Yoshiteru Omura

IPC分类号： H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： B81C1/00825 ,  B81B2201/0235 ,  B81B2203/033 ,  B81B2203/0392 ,  G01C19/5762 ,  G01C19/5769 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/084

摘要： When forming a trench of a narrow width in a thick semiconductor layer, a trench can be formed without the occurrence of semiconductor residue. In this Specification, a semiconductor device in which a trench is formed in a semiconductor layer is disclosed. In the semiconductor layer of the semiconductor device, a compensation pattern which compensates for sudden changes in the width of the trench is formed at a place at which the width of the trench changes suddenly. In the semiconductor layer of the above-described semiconductor device, since a compensation pattern is formed at a place at which the trench width changes suddenly, in the case where forming the trench using a deep RIE method, the occurrence of steep inclined portions arising from semiconductor residue can be prevented. Consequently, when forming a trench of a narrow width in a thick semiconductor layer, the occurrence of semiconductor residue can be prevented.

摘要翻译： 当在厚半导体层中形成窄宽度的沟槽时，可以形成沟槽而不会发生半导体残渣。 在本说明书中，公开了在半导体层中形成沟槽的半导体器件。 在半导体器件的半导体层中，在沟槽宽度急剧变化的地方形成补偿沟槽宽度突然变化的补偿图案。 在上述半导体器件的半导体层中，由于在沟槽宽度突然变化的地方形成补偿图案，所以在使用深RIE法形成沟槽的情况下，由于 可以防止半导体残渣。 因此，当在厚半导体层中形成窄宽度的沟槽时，可以防止发生半导体残渣。

公开(公告)号：US08368196B2

公开(公告)日：2013-02-05

申请号：US12710571

申请日：2010-02-23

申请人： Teruhisa Akashi ,  Hirofumi Funabashi ,  Motohiro Fujiyoshi ,  Yutaka Nonomura

发明人： Teruhisa Akashi ,  Hirofumi Funabashi ,  Motohiro Fujiyoshi ,  Yutaka Nonomura

IPC分类号： H01L23/02

CPC分类号： B81B3/001 ,  B81B2201/025 ,  G01P15/125 ,  G01P15/18

摘要： The micro device includes a support substrate, and a movable structure configured to move with respect to the support substrate. At least one of the support substrate and the movable structure is provided with at least one protrusion protruding towards the other of the support substrate and the movable structure. Further, a base portion extending into the one of the support substrate and the movable structure is provided integrally with the at least one protrusion. With this configuration, the protrusion is securely held by the base portion, and the detachment of the protrusion can therefore be prevented even after repeated collisions between the support substrate and the movable structure via the protrusion.

摘要翻译： 微型装置包括支撑基板和被配置为相对于支撑基板移动的可移动结构。 支撑基板和可移动结构中的至少一个设置有至少一个朝着支撑基板和可移动结构中的另一个突出的突起。 此外，延伸到支撑基板和可移动结构中的一个的基部与所述至少一个突起一体设置。 通过这种构造，突起被基部牢固地保持，并且因此即使在支撑基板和可移动结构经由突起重复碰撞之后也能够防止突起的分离。

公开(公告)号：US20100219716A1

公开(公告)日：2010-09-02

申请号：US12710571

申请日：2010-02-23

申请人： Teruhisa AKASHI ,  Hirofumi FUNABASHI ,  Motohiro FUJIYOSHI ,  Yutaka NONOMURA

发明人： Teruhisa AKASHI ,  Hirofumi FUNABASHI ,  Motohiro FUJIYOSHI ,  Yutaka NONOMURA

IPC分类号： H02N1/00 ,  H01L21/00

CPC分类号： B81B3/001 ,  B81B2201/025 ,  G01P15/125 ,  G01P15/18

摘要： The micro device includes a support substrate, and a movable structure configured to move with respect to the support substrate. At least one of the support substrate and the movable structure is provided with at least one protrusion protruding towards the other of the support substrate and the movable structure. Further, a base portion extending into the one of the support substrate and the movable structure is provided integrally with the at least one protrusion. With this configuration, the protrusion is securely held by the base portion, and the detachment of the protrusion can therefore be prevented even after repeated collisions between the support substrate and the movable structure via the protrusion.

摘要翻译： 微型装置包括支撑基板和被配置为相对于支撑基板移动的可移动结构。 支撑基板和可移动结构中的至少一个设置有至少一个朝着支撑基板和可移动结构中的另一个突出的突起。 此外，延伸到支撑基板和可移动结构中的一个的基部与所述至少一个突起一体设置。 通过这种构造，突起被基部牢固地保持，并且因此即使在支撑基板和可移动结构经由突起重复碰撞之后也能够防止突起的分离。