Chemical mechanical polish process control for improvement in within-wafer thickness uniformity
    2.
    发明授权
    Chemical mechanical polish process control for improvement in within-wafer thickness uniformity 有权
    化学机械抛光过程控制,以提高晶片内厚度均匀性

    公开(公告)号:US08129279B2

    公开(公告)日:2012-03-06

    申请号:US12250239

    申请日:2008-10-13

    IPC分类号: H01L21/302

    CPC分类号: B24B37/013 B24B49/12

    摘要: A method of performing chemical mechanical polish (CMP) processes on a wafer includes providing the wafer; determining a thickness profile of a feature on a surface of the wafer; and, after the step of determining the thickness profile, performing a high-rate CMP process on the feature using a polish recipe to substantially achieve a within-wafer thickness uniformity of the feature. The polish recipe is determined based on the thickness profile.

    摘要翻译: 在晶片上进行化学机械抛光(CMP)工艺的方法包括提供晶片; 确定晶片表面上的特征的厚度分布; 并且在确定厚度分布的步骤之后,使用抛光配方对特征进行高速率CMP处理,以基本上实现特征的晶片内厚度均匀性。 根据厚度分布确定抛光配方。

    Method and system for automatically performing an operation on multiple
computer systems within a cluster
    8.
    发明授权
    Method and system for automatically performing an operation on multiple computer systems within a cluster 失效
    在集群内的多个计算机系统上自动执行操作的方法和系统

    公开(公告)号:US5946463A

    公开(公告)日:1999-08-31

    申请号:US681202

    申请日:1996-07-22

    CPC分类号: H04L29/06 H04L67/10

    摘要: A method and system for automatically performing one or more operations on multiple computer systems within a cluster are disclosed. In accordance with the present invention, a begin operations command construct is defined within an input file. In addition, an input command indicating one or more operations to be performed on at least two computer systems within the cluster and an end operations command construct are defined. In response to a selected input, one or more operations indicated by the input command are automatically performed on at least two computer systems. In accordance with one embodiment, the begin operations command construct indicates selected computer systems within the cluster on which the one or more operations are to be performed and whether the operations are to be performed on the selected computer systems serially or in parallel.

    摘要翻译: 公开了一种用于在群集内的多个计算机系统上自动执行一个或多个操作的方法和系统。 根据本发明,在输入文件内定义开始操作命令结构。 此外,定义指示要在群集内的至少两个计算机系统执行的一个或多个操作的输入命令和结束操作命令结构。 响应于所选择的输入,在至少两个计算机系统上自动执行由输入命令指示的一个或多个操作。 根据一个实施例,开始操作命令结构指示要在其上执行一个或多个操作的集群内的所选择的计算机系统以及是否在所选择的计算机系统上串行或并行执行操作。