Chip mounting device and callibration method therein
    2.
    发明授权
    Chip mounting device and callibration method therein 有权
    芯片安装装置及其校准方法

    公开(公告)号:US06811627B2

    公开(公告)日:2004-11-02

    申请号:US10363693

    申请日:2003-03-12

    IPC分类号: B32B3100

    摘要: A chip mounting device comprising a first recognition means (3) for recognizing a first recognition mark (5) on the upper chip-retainable head (2) side, a second recognition means (4) for recognizing a second recognition mark (6) on the lower substrate-retainable stage (1) side, a third recognition means (18) for recognizing the recognition marks (5, 6) concurrently when the first recognition mark (5) is brought close to or into contact with the second recognition mark (6), and a temperature detection means (17) attached to the first recognition means (3) or the second recognition means (4), wherein calibration is carried out based on the recognition of the recognition marks when the temperature detection means (17) detects a beyond-allowance temperature change, whereby permitting a high-accuracy, efficient calibration independently of mechanical deformation and temperature change in environmental atmosphere.

    摘要翻译: 一种芯片安装装置,包括用于识别上部可芯片保持头部(2)侧的第一识别标记(5)的第一识别装置(3),用于识别第二识别标记(6)的第二识别装置 下基板保持级(1)侧,第三识别装置(18),用于当第一识别标记(5)靠近或接触第二识别标记时同时识别识别标记(5,6) 6),以及安装在第一识别装置(3)或第二识别装置(4)上的温度检测装置(17),其中当温度检测装置(17)基于识别标记的识别执行校准, 检测超出容限的温度变化,从而独立于环境气氛中的机械变形和温度变化,允许高精度,高效的校准。

    Calibration method in a chip mounting device
    3.
    发明授权
    Calibration method in a chip mounting device 失效
    芯片安装装置的校准方法

    公开(公告)号:US07341877B2

    公开(公告)日:2008-03-11

    申请号:US11016720

    申请日:2004-12-21

    IPC分类号: H01L21/66

    摘要: A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).

    摘要翻译: 一种在芯片安装装置中精确校准标记识别装置的移动控制系统的方法,包括以下步骤:识别放置在平台(26)上的头部(2)和第二识别标记(13)上的第一识别标记 ),用于校准和更新输入到两场识别装置(7)的运动控制系统中的先前控制参数; 并且当头部(2)降低以将第一识别标记定位到第二识别标记(13)时,当两场识别装置(7)被移回时,用第三识别装置(20)识别两个标记,以便 校准和更新输入到两场识别装置(7)的运动控制系统中的先前控制参数。

    Chip mounting device and method of calibrating the device
    4.
    发明申请
    Chip mounting device and method of calibrating the device 失效
    芯片安装装置及其校准方法

    公开(公告)号:US20050104230A1

    公开(公告)日:2005-05-19

    申请号:US11016720

    申请日:2004-12-21

    摘要: A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).

    摘要翻译: 一种在芯片安装装置中精确校准标记识别装置的移动控制系统的方法,包括以下步骤:识别放置在平台(26)上的头部(2)和第二识别标记(13)上的第一识别标记 ),用于校准和更新输入到两场识别装置(7)的运动控制系统中的先前控制参数; 并且当头部(2)降低以将第一识别标记定位到第二识别标记(13)时,当两场识别装置(7)被移回时,用第三识别装置(20)识别两个标记,以便 校准和更新输入到两场识别装置(7)的运动控制系统中的先前控制参数。

    Chip mounting device
    5.
    发明授权
    Chip mounting device 有权
    芯片安装装置

    公开(公告)号:US06892447B1

    公开(公告)日:2005-05-17

    申请号:US10416452

    申请日:2000-11-14

    摘要: A method accurately calibrating a movement control system of mark recognition in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).

    摘要翻译: 一种在芯片安装装置中精确校准标记识别的移动控制系统的方法,包括以下步骤:识别放置在平台(26)上的头部(2)和第二识别标记(13)上的第一识别标记, 双场识别装置(7),用于校准和更新输入到两场识别装置(7)的运动控制系统的先前控制参数; 并且当头部(2)降低以将第一识别标记定位到第二识别标记(13)时,当两场识别装置(7)被移回时,用第三识别装置(20)识别两个标记,以便 校准和更新输入到两场识别装置(7)的运动控制系统中的先前控制参数。

    Alignment device
    6.
    发明授权
    Alignment device 失效
    对准装置

    公开(公告)号:US06825915B2

    公开(公告)日:2004-11-30

    申请号:US10362461

    申请日:2003-02-25

    IPC分类号: G03B2742

    摘要: An alignment device comprising a movable table, a plurality of movable support means for movably supporting the movable table, means for reading a recognition mark, and a control means for controlling the drive of the movable support means based on information from the recognition means, wherein each movable support means comprises means having a pair of support blocks each provided to be able to contact/separate with/from the movable table and a pair of piezoelectric actuators each provided with expansible first, second and third piezoelectric elements connected to a support block and extending in each direction, and being capable of walking operation relative to the movable table by the operations of the respective piezoelectric actuators. An alignment accuracy up to a nanometer level can be attained, and the alignment device itself and therefore the entire apparatus incorporating the alignment device can be significantly reduced in thickness and size.

    摘要翻译: 一种对准装置,包括可移动台,用于可移动地支撑可移动台的多个可移动支撑装置,用于读取识别标记的装置,以及用于基于来自识别装置的信息来控制可移动支撑装置的驱动的控制装置,其中 每个可移动支撑装置包括具有一对支撑块的装置,每个支撑块设置成能够与可移动工作台接触/分离;以及一对压电致动器,每个压电致动器设置有连接到支撑块的可膨胀的第一,第二和第三压电元件, 在每个方向上延伸,并且能够通过各个压电致动器的操作相对于可移动工作台行走操作。 可以达到高达纳米级的对准精度,并且对准装置本身以及因此整合对准装置的整个装置的厚度和尺寸可以显着减小。

    MONOCLONAL ANTIBODY HAVING NEUTRALIZING ACTIVITY AGAINST MMP13
    10.
    发明申请
    MONOCLONAL ANTIBODY HAVING NEUTRALIZING ACTIVITY AGAINST MMP13 失效
    具有对MMP13的中和活性的单克隆抗体

    公开(公告)号:US20100330092A1

    公开(公告)日:2010-12-30

    申请号:US12668201

    申请日:2008-07-08

    摘要: A neutralizing monoclonal antibody specifically reacting with MMP13, a method of neutralizing enzyme activity of MMP13 and an immunological measuring method each using the antibody, as well as a diagnostic agent and a pharmaceutical composition containing the antibody, are provided. Various antibodies to MMP13 have been hitherto obtained, but an antibody having neutralizing activity against MMP13 has not been obtained. The present inventors intensively studied, as a result, found out a neutralizing antibody having specificity for MMP13, resulting in completion of the present invention.

    摘要翻译: 提供了与MMP13特异性反应的中和单克隆抗体,中和MMP13的酶活性的方法和各自使用该抗体的免疫学测定方法,以及含有该抗体的诊断剂和药物组合物。 迄今为止已经获得了MMP13的各种抗体,但是尚未获得具有针对MMP13的中和活性的抗体。 本发明人深入研究了结果,发现了对MMP13具有特异性的中和抗体,从而完成了本发明。