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公开(公告)号:US10438808B2
公开(公告)日:2019-10-08
申请号:US15164801
申请日:2016-05-25
申请人: Alex Philip Graham Robinson , Thomas Lada , John L. Roth , Alan G. Brown , Andreas Frommhold , Edward A. Jackson
发明人: Alex Philip Graham Robinson , Thomas Lada , John L. Roth , Alan G. Brown , Andreas Frommhold , Edward A. Jackson
IPC分类号: H01L21/308 , C08J3/24 , C08J3/28 , C09D4/06 , C09D167/02 , H01L21/3065 , C09C1/44 , H01L21/02 , C08K3/04 , C09D163/00
摘要: Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative and a crosslinking agent. Further disclosed is a process for forming a hard-mask.
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公开(公告)号:US09383646B2
公开(公告)日:2016-07-05
申请号:US14516472
申请日:2014-10-16
CPC分类号: G03F7/38 , A61B5/042 , A61B5/065 , A61B5/6852 , A61B5/7221 , A61B34/20 , A61B2505/03 , A61B2505/05 , A61M25/01 , A61M2025/0166 , A61M2205/13 , A61M2205/18 , A61M2205/50 , A61M2210/125 , A61M2230/005 , A61M2230/04 , G03F7/038 , G03F7/0382 , G03F7/0384 , G03F7/0392 , G03F7/2024 , G06F17/18 , Y02E10/549
摘要: The present disclosure relates to novel two-step photoresist compositions and processes. The processes involve removing acid-labile groups in step one and crosslinking the remaining material with themselves or added crosslinking systems in step two. The incorporation of a multistep pathway in the resist catalytic chain increases the chemical gradient in areas receiving a low dose of irradiation, effectively acting as a built in dose depend quencher-analog and thus enhancing chemical gradient and thus resolution. The photoresist compositions and the methods are ideal for fine pattern processing using, for example, ultraviolet radiation, beyond extreme ultraviolet radiation, extreme ultraviolet radiation, X-rays and charged particle rays. Dual functionality photosensitive compositions and methods are also disclosed.
摘要翻译: 本发明涉及新的两步光刻胶组合物和方法。 所述方法包括在步骤1中除去酸不稳定基团,并在第二步中与其自身交联剩余的材料或加入交联体系。 在抗蚀剂催化链中结合多步途径增加了接受低剂量照射的区域的化学梯度,有效地作为内置剂量依赖猝灭剂 - 类似物,从而增强了化学梯度,从而提高了分辨率。 光致抗蚀剂组合物和方法对于使用例如紫外线辐射,超过极紫外辐射,极紫外辐射,X射线和带电粒子射线的精细图案处理是理想的。 还公开了双功能光敏组合物和方法。
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公开(公告)号:US20170345669A1
公开(公告)日:2017-11-30
申请号:US15164801
申请日:2016-05-25
申请人: Alex Philip Graham Robinson , Thomas Lada , John L. Roth , Alan G. Brown , Andreas Frommhold , Edward A. Jackson
发明人: Alex Philip Graham Robinson , Thomas Lada , John L. Roth , Alan G. Brown , Andreas Frommhold , Edward A. Jackson
IPC分类号: H01L21/308 , C08J3/28 , C09D4/06 , C09D163/00 , H01L21/3065 , C08J3/24
CPC分类号: H01L21/3081 , C08J3/24 , C08J3/28 , C08J2363/00 , C08K3/045 , C09C1/44 , C09D4/06 , C09D163/00 , H01L21/02118 , H01L21/02282 , H01L21/3065 , H01L21/3085 , H01L21/3086
摘要: Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative and a crosslinking agent. Further disclosed is a process for forming a hard-mask.
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公开(公告)号:US20150241773A1
公开(公告)日:2015-08-27
申请号:US14516472
申请日:2014-10-16
CPC分类号: G03F7/38 , A61B5/042 , A61B5/065 , A61B5/6852 , A61B5/7221 , A61B34/20 , A61B2505/03 , A61B2505/05 , A61M25/01 , A61M2025/0166 , A61M2205/13 , A61M2205/18 , A61M2205/50 , A61M2210/125 , A61M2230/005 , A61M2230/04 , G03F7/038 , G03F7/0382 , G03F7/0384 , G03F7/0392 , G03F7/2024 , G06F17/18 , Y02E10/549
摘要: The present disclosure relates to novel two-step photoresist compositions and processes. The processes involve removing acid-labile groups in step one and crosslinking the remaining material with themselves or added crosslinking systems in step two. The incorporation of a multistep pathway in the resist catalytic chain increases the chemical gradient in areas receiving a low dose of irradiation, effectively acting as a built in dose depend quencher-analog and thus enhancing chemical gradient and thus resolution. The photoresist compositions and the methods are ideal for fine pattern processing using, for example, ultraviolet radiation, beyond extreme ultraviolet radiation, extreme ultraviolet radiation, X-rays and charged particle rays. Dual functionality photosensitive compositions and methods are also disclosed.
摘要翻译: 本发明涉及新的两步光刻胶组合物和方法。 所述方法包括在步骤1中除去酸不稳定基团,并在第二步中与其自身交联剩余的材料或加入交联体系。 在抗蚀剂催化链中结合多步途径增加了接受低剂量照射的区域的化学梯度,有效地作为内置剂量依赖猝灭剂 - 类似物,从而增强了化学梯度,从而提高了分辨率。 光致抗蚀剂组合物和方法对于使用例如紫外线辐射,超过极紫外辐射,极紫外辐射,X射线和带电粒子射线的精细图案处理是理想的。 还公开了双功能光敏组合物和方法。
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公开(公告)号:US11746255B2
公开(公告)日:2023-09-05
申请号:US15904420
申请日:2018-02-25
申请人: Alex P. G. Robinson , Guy Dawson , Alan G. Brown , Thomas Lada , John Roth , Edward Jackson
发明人: Alex P. G. Robinson , Guy Dawson , Alan G. Brown , Thomas Lada , John Roth , Edward Jackson
IPC分类号: H01L21/033 , C08G59/50 , C09D163/04
CPC分类号: C09D163/04 , C08G59/5033 , H01L21/0332
摘要: Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative substituted with an amine and a crosslinking agent. The formulation is drain compatible with other solvents used in the semiconductor industry.
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公开(公告)号:US20090201420A1
公开(公告)日:2009-08-13
申请号:US12347801
申请日:2008-12-31
申请人: Alan G. Brown , Stephen Brown , Leo Chen , Chris Kurpinski , Damien Stolarz
发明人: Alan G. Brown , Stephen Brown , Leo Chen , Chris Kurpinski , Damien Stolarz
CPC分类号: H04N21/4622 , H04B1/205 , H04N5/44543 , H04N21/4113 , H04N21/4135 , H04N21/41407 , H04N21/4143 , H04N21/42204 , H04N21/4312 , H04N21/4363 , H04N21/443 , H04N21/47202 , H04N21/4781 , H04N21/4782 , H04N21/482 , H04N21/485 , H04N21/4882
摘要: A television system that provides an on screen display menu system that allows a user to select from available input source using a graphical user interface. The television system also automatically adapts to the type on input signal selected for display. The television system and on screen display menu also support interaction between the television system and attached devices to unify the control of such devices including attached personal computers through the remote control of the television system.
摘要翻译: 一种提供屏幕显示菜单系统的电视系统,其允许用户使用图形用户界面从可用的输入源中进行选择。 电视系统还自动适应所选择的显示输入信号的类型。 电视系统和屏幕显示菜单还支持电视系统和附属设备之间的交互,以通过遥控电视机统一对包括附属个人计算机在内的这些设备的控制。
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公开(公告)号:USD293581S
公开(公告)日:1988-01-05
申请号:US754469
申请日:1985-07-15
申请人: Alan G. Brown
设计人: Alan G. Brown
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公开(公告)号:US08863219B2
公开(公告)日:2014-10-14
申请号:US12347801
申请日:2008-12-31
申请人: Alan G. Brown , Stephen Brown , Leo Chen , Chris Kurpinski , Damien Stolarz
发明人: Alan G. Brown , Stephen Brown , Leo Chen , Chris Kurpinski , Damien Stolarz
IPC分类号: H04N7/16 , H04N21/488 , H04N21/41 , H04N21/482 , H04N21/462 , H04N5/445 , H04N21/4363 , H04N21/431 , H04B1/20 , H04N21/422 , H04N21/443 , H04N21/4782 , H04N21/472 , H04N21/478
CPC分类号: H04N21/4622 , H04B1/205 , H04N5/44543 , H04N21/4113 , H04N21/4135 , H04N21/41407 , H04N21/4143 , H04N21/42204 , H04N21/4312 , H04N21/4363 , H04N21/443 , H04N21/47202 , H04N21/4781 , H04N21/4782 , H04N21/482 , H04N21/485 , H04N21/4882
摘要: A television system that provides an on screen display menu system that allows a user to select from available input source using a graphical user interface. The television system also automatically adapts to the type on input signal selected for display. The television system and on screen display menu also support interaction between the television system and attached devices to unify the control of such devices including attached personal computers through the remote control of the television system.
摘要翻译: 一种提供屏幕显示菜单系统的电视系统,其允许用户使用图形用户界面从可用的输入源中进行选择。 电视系统还自动适应所选择的显示输入信号的类型。 电视系统和屏幕显示菜单还支持电视系统和附属设备之间的交互,以通过遥控电视机统一对包括附属个人计算机在内的这些设备的控制。
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公开(公告)号:US4856862A
公开(公告)日:1989-08-15
申请号:US185103
申请日:1988-04-22
CPC分类号: G11C21/00 , G02B6/2861 , G02B6/4457 , G06E1/02
摘要: A storage system based on the propagation delay of light is disclosed which utilizes an array of fiber optics to store the information. The storage device is configured as two loops. Data is injected from one loop and data is continuously recirculated for storage in the other loop. A pulsed laser provides the clocked energy source and is split for use, both, in recirculating the data, and for new data injection. Multiple channels of light are extracted by using a diffraction grating. The source may be interrupted to erase data in the recirculating memory. Recirculation takes place over a single strand fiber optics coil of any length. Multiple frequency encoded channels of data are multiplexed into the single strand of fiber optic with an integrating lens and the channels are decoupled on the other end with a diffraction grating. To prevent compounding signal degradation, optical switches are used to regenerate the signal at each pass through the loop. A beam splitter in the recirculating loop provides for data extraction through the use of a photosensor array. Data is injected into the recirculating loop by pulsing in light using electro-optical shutters. The device is useful for data storage in optical and digital computing. The device may also be used as a platform for recursive optical computing by the placement of optical computing components within the recirculating memory loop.
摘要翻译: 公开了一种基于光的传播延迟的存储系统,其利用光纤阵列来存储信息。 存储设备配置为两个循环。 数据从一个循环注入,数据被连续再循环以存储在另一个循环中。 脉冲激光器提供了时钟能量源,并且被分开用于在再循环数据和新数据注入中使用。 通过使用衍射光栅提取多个光通道。 源可能被中断以擦除再循环存储器中的数据。 在任何长度的单股光纤线圈上进行再循环。 数据的多频编码通道用积分透镜复用到单根光纤中,并且通道在另一端用衍射光栅去耦。 为了防止复合信号劣化,光开关用于在每次通过环路时再生信号。 再循环回路中的分束器通过使用光电传感器阵列提供数据提取。 数据通过使用电光快门的光脉冲注入循环回路。 该设备对光学和数字计算中的数据存储非常有用。 该装置还可以用作通过在循环存储器环路内放置光学计算部件来进行递归光学计算的平台。
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