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1.发明授权Acoustic wave device including a surface wave filter and a bulk wave filter, and method for making same 有权包括表面波滤波器和体波滤波器的声波器件及其制造方法公开(公告)号：US09106199B2
公开(公告)日：2015-08-11
申请号：US13500614
申请日：2010-10-04
CPC分类号： H03H3/08 , H03H3/02 , H03H2003/0071 , Y10T29/42
摘要： An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material.
摘要翻译： 一种声波装置，包括至少一个表面声波滤波器和一个体声波滤波器，该装置包括在包括第二压电材料的基板上，包括第一金属层和第一单晶压电材料层 其中，所述层的一部分被部分蚀刻以限定其中存在所述第一和第二压电材料的第一区域和不存在所述第一压电材料的第二区域; 在第一区域处的第二金属化，用于限定集成第一压电材料的体声滤波器，以及在第二区域处的第三金属化，用于限定整合第二压电材料的表面声波滤波器。
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2.发明授权Acoustic resonator comprising an electret and method of producing said resonator, application to switchable coupled resonator filters 有权包括驻极体的声谐振器和产生所述谐振器的方法，应用于可切换耦合谐振滤波器公开(公告)号：US08310129B2
公开(公告)日：2012-11-13
申请号：US12975974
申请日：2010-12-22
IPC分类号： H01L41/08
CPC分类号： H03H9/02015 , H03H3/04 , H03H9/02031 , H03H9/173 , H03H9/175 , H03H9/583 , H03H9/584 , H03H9/585 , H03H2003/0414 , H03H2009/02196 , Y10T29/42
摘要： Acoustic resonator comprising an electret, and method of producing said resonator, application to switchable coupled resonator filters.The resonator comprises: at least one piezoelectric layer (30); electrodes (24, 26) on either side of this layer; and at least one electret layer (32) between the electrodes, to apply a permanent electric field to the piezoelectric layer. The intensity of this electric field is determined to shift the resonance frequency of the resonator by a desired value. The piezoelectric layer may contain electrical charges to itself constitute the electret layer.
摘要翻译： 包括驻极体的声谐振器及其制造方法，可应用于可切换耦合的谐振滤波器。 所述谐振器包括：至少一个压电层（30）; 该层两侧的电极（24,26）; 和在电极之间的至少一个驻极体层（32），以向压电层施加永久电场。 确定该电场的强度以将谐振器的谐振频率偏移所需的值。 压电层可以包含电荷本身构成驻极体层。
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3.发明授权公开(公告)号：US09059677B2
公开(公告)日：2015-06-16
申请号：US13456026
申请日：2012-04-25
CPC分类号： H03H9/25 , H03H3/02 , H03H3/08 , H03H9/02228 , H03H9/02622 , H03H9/02637 , H03H9/02669 , H03H9/02763 , H03H9/02803 , H03H9/0542 , H03H9/17 , H03H9/542 , H03H9/6403 , H03H2009/02165
摘要： An electromechanical device having a resonator using acoustic waves propagating laterally within a piezoelectric plane resonant structure and electrodes on a face of said structure. The resonant structure comprises: a transduction region having a transduction length and generating acoustic waves; a free propagation region for the acoustic waves, adjacent to the transduction region and defined the plane of the transduction region; the resonant structure length being equal to an integer number of half-wavelengths, the resonance frequency of said resonator equaling the average propagation velocity of the wave within the structure divided by said wavelength, to adjust the quality factor of the resonator fixed by the length of the resonant structure and the coupling coefficient fixed by the ratio of the transduction length over the length of the resonant structure; the resonant structure defined by the assembly of the transduction region and the propagation region being laterally bounded by reflection regions.
摘要翻译： 一种机电装置，其具有使用在压电平面共振结构内横向传播的声波和在所述结构的面上的电极的谐振器。 谐振结构包括：具有转导长度并产生声波的转导区域; 用于声波的自由传播区域，邻近转导区域并限定换能区域的平面; 谐振结构长度等于半波长的整数，所述谐振器的谐振频率等于结构中的波的平均传播速度除以所述波长，以调整谐振器的质量因子固定的长度 谐振结构和耦合系数由谐振结构长度上的换能长度比固定; 由转导区域和传播区域的组装限定的共振结构由反射区域横向界定。
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公开(公告)号：US08872598B2
公开(公告)日：2014-10-28
申请号：US13099696
申请日：2011-05-03
CPC分类号： H03H9/0222 , H01L41/04 , H01L41/083 , H03H9/02228 , H03H9/585 , H03H9/589 , H03H9/70 , H03H9/74
摘要： An electrical signal combiner includes at least one first element and a second element respectively connected to a first input port and to a second input port, and a third element connected to an output port, the electrical signals being propagated between the input and output ports. The combiner includes a medium; and the first, second and third elements are acoustic wave transducers, the electrical signals being carried by acoustic waves propagated between the input and output ports within the medium. Advantageously, the first transducer and the third transducer are separated by an acoustic distance of (2k+1)λ/4 with k an integer greater than or equal to 0 with λ the acoustic propagation wavelength; the second transducer and the third transducer are separated by an acoustic distance of (2k′+1)λ/4 with k′ an integer greater than or equal to 0; and the first and second transducers are separated by an acoustic distance of (2k″+2)λ/4 with k″ an integer greater than or equal to 0—in such a manner as to, on the one hand, generate constructive interference at the output port and, on the other hand, to isolate the first and second input ports by destructive interference of acoustic waves at the ports.
摘要翻译： 电信号组合器包括分别连接到第一输入端口和第二输入端口的至少一个第一元件和第二元件，以及连接到输出端口的第三元件，电信号在输入端口和输出端口之间传播。 组合器包括介质; 并且第一，第二和第三元件是声波换能器，电信号由在介质内的输入和输出端口之间传播的声波承载。 有利地，第一换能器和第三换能器以（2k + 1）λ/ 4的声距离与k为大于或等于0的整数分开，λ为声传播波长; 第二换能器和第三换能器以（2k'+ 1）λ/ 4的声距离分开，k'为大于或等于0的整数; 并且第一和第二换能器以（2k“+2）λ/ 4的声距离分开，其中k”为大于或等于0的整数，一方面在一个方面产生建设性干扰 输出端口，另一方面，通过端口处的声波的相消干扰来隔离第一和第二输入端口。
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公开(公告)号：US09450563B2
公开(公告)日：2016-09-20
申请号：US13879598
申请日：2011-10-11
申请人： Marie Gorisse , Alexandre Reinhardt
发明人： Marie Gorisse , Alexandre Reinhardt
CPC分类号： H03H9/6433 , H03H9/0033 , H03H9/0095 , H03H9/02015 , H03H9/02047 , H03H9/02086 , H03H9/02543 , H03H9/02653 , H03H9/02818 , H03H9/547 , H03H9/564 , H03H9/6436 , H03H9/6453
摘要： An acoustic wave bandpass filter comprises at least an input first acoustic wave resonator with an output surface, and an output second acoustic wave resonator with an input surface, said resonators being coupled to each other along a set direction, the input and output surfaces being substantially opposite, and at least one first phononic crystal structure between said input and output resonators and/or a second phonic crystal structure at the periphery of said resonators so as to guide the acoustic waves, generated by said input resonator, toward said output resonator along said set direction, the resonators ensuring an impedance conversion and/or a mode conversion.
摘要翻译： 声波带通滤波器至少包括具有输出表面的输入第一声波谐振器和具有输入表面的输出第二声波谐振器，所述谐振器沿着设定方向彼此耦合，所述输入和输出表面基本上 所述输入和输出谐振器之间的至少一个第一声子晶体结构和/或所述谐振器周围的第二声子晶体结构，以便将由所述输入谐振器产生的声波沿着所述输入谐振器 设定方向，谐振器确保阻抗转换和/或模式转换。
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公开(公告)号：US09209779B2
公开(公告)日：2015-12-08
申请号：US13879562
申请日：2011-10-06
申请人： Alexandre Reinhardt
发明人： Alexandre Reinhardt
CPC分类号： H03H9/02535 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02543 , H03H9/02622 , Y10T29/49016
摘要： An acoustic structure comprising comprises a layer of material having a first Young's modulus called the intrinsic modulus and a first density called the intrinsic density, characterized in that the layer comprises at least one first zone having said first Young's modulus and said first density and at least one second zone buried in the volume of said layer of material and having a second Young's modulus and/or a second density obtained by implanting and/or by diffusing atoms into the volume of said layer.
摘要翻译： 声学结构包括包含称为固有模量的第一杨氏模量和称为固有密度的第一密度的材料层，其特征在于，所述层包括具有所述第一杨氏模量和所述第一密度的至少一个第一区域，并且至少 一个第二区域被埋在所述材料层的体积中，并且具有通过将原子注入和/或扩散到所述层的体积中而获得的第二杨氏模量和/或第二密度。
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公开(公告)号：US20130214879A1
公开(公告)日：2013-08-22
申请号：US13879406
申请日：2011-10-10
申请人： Marie Gorisse , Alexandre Reinhardt
发明人： Marie Gorisse , Alexandre Reinhardt
IPC分类号： H03H9/56
CPC分类号： H03H9/564 , H03H9/02086 , H03H9/56
摘要： An acoustic wave bandpass filter comprises at least two bulk acoustic wave resonators, laterally coupled to each other acoustically, each resonator including a film of piezoelectric material and at least a first electrode and/or a second electrode, said bulk waves propagating in a direction perpendicular to the plane of the film of piezoelectric material, characterized in that: it further comprises at least a first phononic crystal structure between said resonators such that the transmission coefficient of the lateral acoustic waves can be decreased in a direction parallel to the plane of the piezoelectric film; and the first phononic crystal structure is formed in a matrix of dielectric material or with patterns made from dielectric material.
摘要翻译： 声波带通滤波器包括至少两个在声学上彼此横向耦合的体声波谐振器，每个谐振器包括压电材料薄膜和至少第一电极和/或第二电极，所述体波在垂直方向上传播 到压电材料薄膜的平面，其特征在于：它还包括在所述谐振器之间的至少第一声子晶体结构，使得横向声波的透射系数可以在平行于压电体的平面的方向上减小 电影; 并且第一声子晶体结构形成在电介质材料的基体中或由介电材料制成的图案。
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公开(公告)号：US09325293B2
公开(公告)日：2016-04-26
申请号：US13879406
申请日：2011-10-10
申请人： Marie Gorisse , Alexandre Reinhardt
发明人： Marie Gorisse , Alexandre Reinhardt
CPC分类号： H03H9/564 , H03H9/02086 , H03H9/56
摘要： An acoustic wave bandpass filter comprises at least two bulk acoustic wave resonators, laterally coupled to each other acoustically, each resonator including a film of piezoelectric material and at least a first electrode and/or a second electrode, said bulk waves propagating in a direction perpendicular to the plane of the film of piezoelectric material, characterized in that: it further comprises at least a first phononic crystal structure between said resonators such that the transmission coefficient of the lateral acoustic waves can be decreased in a direction parallel to the plane of the piezoelectric film; and the first phononic crystal structure is formed in a matrix of dielectric material or with patterns made from dielectric material.
摘要翻译： 声波带通滤波器包括至少两个在声学上彼此横向耦合的体声波谐振器，每个谐振器包括压电材料薄膜和至少第一电极和/或第二电极，所述体波在垂直方向上传播 到压电材料薄膜的平面，其特征在于：它还包括在所述谐振器之间的至少第一声子晶体结构，使得横向声波的透射系数可以在平行于压电体的平面的方向上减小 电影; 并且第一声子晶体结构形成在电介质材料的基体中或由介电材料制成的图案。
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公开(公告)号：US08692630B2
公开(公告)日：2014-04-08
申请号：US12827875
申请日：2010-06-30
申请人： Alexandre Reinhardt , Issiaka Kone
发明人： Alexandre Reinhardt , Issiaka Kone
CPC分类号： H03H3/04 , H03H9/02228 , H03H9/589
摘要： A guided acoustic wave resonant device is provided. The device comprises at least two filters (F1, . . . , Fi, . . . , FN), each filter comprising at least two acoustic wave resonators (R11-R12, . . . , Ri1-Ri2, . . . , RN1-RN2), each filter having a useful frequency band (BF1, . . . , BFi, . . . , BFN) centered on a central frequency (f1, . . . , fi, . . . , fN), each resonator comprising at least one suite of inter-digitated upper electrodes exhibiting a periodic structure of period (Λij) and a layer of piezoelectric material, each resonator having a coupling coefficient (k21, k22, . . . , k2n) and a resonant frequency (fr1, . . . , fr2, . . . , fN), wherein at least one of the resonators comprises a differentiation layer (CDfi) making it possible in combination with the period of the inter-digitated electrodes to modify the coupling coefficient of the said resonator, the useful band and the central frequency being determined by the resonant frequencies and the coupling coefficients of the resonators which are adapted so as to have a determined useful bandwidth.
摘要翻译： 提供了一种引导声波谐振装置。 该装置包括至少两个滤波器（F1，...，Fi，...，FN），每个滤波器包括至少两个声波谐振器（R11-R12，...，Ri1-Ri2，...，RN1 -RN2），每个滤波器具有以中心频率（f1，...，fi，...，fN）为中心的有用频带（BF1，...，BFi，...，BFN），每个谐振器包括 具有周期（Λij）的周期性结构的至少一组数字化的上部电极和压电材料层，每个谐振器具有耦合系数（k21，k22，...，k2n）和谐振频率（fr1， 其中，所述谐振器中的至少一个包括微分层（CDfi），使得可以与所述数字化间电极的周期结合以修改所述谐振器的耦合系数 有用频带和中心频率由谐振频率和谐振器的耦合系数确定，这些谐振频率和谐振器的耦合系数被调整为具有 确定有用的带宽。
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10.发明申请ACOUSTIC WAVE DEVICE INCLUDING A SURFACE WAVE FILTER AND A BULK WAVE FILTER, AND METHOD FOR MAKING SAME 有权包括表面波浪滤波器和大容量波形滤波器的声波装置及其制造方法公开(公告)号：US20120206216A1
公开(公告)日：2012-08-16
申请号：US13500614
申请日：2010-10-04
CPC分类号： H03H3/08 , H03H3/02 , H03H2003/0071 , Y10T29/42
摘要： An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material.
摘要翻译： 一种声波装置，包括至少一个表面声波滤波器和一个体声波滤波器，该装置包括在包括第二压电材料的基板上，包括第一金属层和第一单晶压电材料层 其中，所述层的一部分被部分蚀刻以限定其中存在所述第一和第二压电材料的第一区域和不存在所述第一压电材料的第二区域; 在第一区域处的第二金属化，用于限定集成第一压电材料的体声滤波器，以及在第二区域处的第三金属化，用于限定整合第二压电材料的表面声波滤波器。
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