摘要:
An imaging element is formed on the first main surface of a semiconductor substrate. An external terminal is formed on the second main surface of the semiconductor substrate. A through-hole electrode is formed in a through hole formed in the semiconductor substrate. A first electrode pad is formed on the through-hole electrode in the first main surface. An interlayer insulating film is formed on the first electrode pad and on the first main surface. A second electrode pad is formed on the interlayer insulating film. A passivation film is formed on the second electrode pad and the interlayer insulating film, and has an opening which exposes a portion of the second electrode pad. A contact plug is formed between the first and second electrode pads in a region which does not overlap the opening when viewed in a direction perpendicular to the surface of the semiconductor substrate.
摘要:
A semiconductor package includes a solid-state imaging element, electrode pad, through-hole electrode, and light-transmitting substrate. The solid-state imaging element is formed on the first main surface of a semiconductor substrate. The electrode pad is formed on the first main surface of the semiconductor substrate. The through-hole electrode is formed to extend through the semiconductor substrate between the first main surface and a second main surface opposite to the electrode pad formed on the first main surface. The light-transmitting substrate is placed on a patterned adhesive to form a hollow on the solid-state imaging element. The thickness of the semiconductor substrate below the hollow when viewed from the light-transmitting substrate is larger than that of the semiconductor substrate below the adhesive.
摘要:
A semiconductor package includes a solid-state imaging element, electrode pad, through-hole electrode, and light-transmitting substrate. The solid-state imaging element is formed on the first main surface of a semiconductor substrate. The electrode pad is formed on the first main surface of the semiconductor substrate. The through-hole electrode is formed to extend through the semiconductor substrate between the first main surface and a second main surface opposite to the electrode pad formed on the first main surface. The light-transmitting substrate is placed on a patterned adhesive to form a hollow on the solid-state imaging element. The thickness of the semiconductor substrate below the hollow when viewed from the light-transmitting substrate is larger than that of the semiconductor substrate below the adhesive.
摘要:
According to one embodiment, a manufacturing method of a semiconductor device is disclosed. The semiconductor device includes a semiconductor substrate having first and second main surfaces, and a through hole passing through between the first and second main surfaces, a pad on the first main surface, a through electrode in the through hole, and a connection structure including a connection portion to directly connect the pad and the through electrode, and another connection portion to indirectly connect the pad and the through electrode. The method includes forming an isolation region in the first main surface, the isolation region being in a region where the through electrode is to be formed and being in a region other than the region where the through hole is to be formed, forming the pad, and forming the through hole by processing the substrate to expose a part of the pad.
摘要:
A method of manufacturing a semiconductor device includes forming a trench for isolation on a surface of a substrate including a semiconductor substrate, filling the trench with a solution containing a perhydrosilazane polymer by applying the solution on the substrate, converting the solution into a film containing the perhydrosilazane polymer by heating the solution, and converting the film into a silicon dioxide film including heating the film at a first temperature in an atmosphere containing vapor, and heating the film heated at the first temperature at a second temperature lower than the first temperature in an atmosphere containing vapor or in pure water.
摘要:
There is disclosed a method of manufacturing a semiconductor device, wherein an Si3N4 film is formed as a mask member on the surface of a silicon substrate, then etched to form an STI trench. A solution of perhydrogenated silazane polymer is coated on the surface of the silicon substrate having an STI trench formed thereon to deposit a coated film (PSZ film) thereon. The PSZ film deposited on the mask member is removed, leaving part of the PSZ film inside the trench, wherein the thickness of the PSZ film is controlled to make the height thereof from the bottom of the STI trench become 600 nm or less. Thereafter, the PSZ film is heat-treated in a water vapor-containing atmosphere to convert the PSZ film into a silicon oxide film through a chemical reaction of the PSZ film. Subsequently, the silicon oxide film is heat-treated to densify the silicon oxide film.
摘要翻译:公开了一种制造半导体器件的方法,其中在硅衬底的表面上形成Si 3 N 4 N 4膜作为掩模构件,然后蚀刻形成 一个STI沟槽。 将过氢化硅氮烷聚合物的溶液涂布在其上形成有STI沟槽的硅衬底的表面上,以在其上沉积涂膜(PSZ膜)。 去除沉积在掩模构件上的PSZ膜,使PSZ膜的一部分留在沟槽内,其中控制PSZ膜的厚度使其从STI沟槽底部的高度变为600nm以下。 然后,在含水蒸汽的气氛中对PSZ膜进行热处理,通过PSZ膜的化学反应将PSZ膜转换为氧化硅膜。 随后,对氧化硅膜进行热处理以使氧化硅膜致密化。
摘要:
This invention relates to a compressive hemostatic belt wherein a cup-shaped rigid case is attached by an attaching device to a predetermined position on a band made of non-stretchable or low-stretchable fiber, nonwoven fabric or film, and a balloon adapted to be inflated by being filled with fluid is received in the rigid case. Preferably, at least the portion of the band which corresponds to the leg when the band is wrapped around the body is shaped in curve form. Buckles may be attached to the opposite ends of the band and a buckle attaching plate may be attached to the rigid case. One end of the band may be provided with projections so that when the band is wrapped around the body, the other end of the band is thrusted on the projections to fix the band in position. If the band is made of adhesive material, more reliable fixing can be achieved. A check valve adapted to prevent fluid from flowing back from the balloon may be removably connected to the balloon to provide for reuse of the check valve.
摘要:
According to one embodiment, a solid-state image sensing device includes a semiconductor substrate on which a plurality of pixels are arranged, a transparent substrate including a first through via provided in an opening formed in advance to extend through, an adhesive including a second through via connected to the first through via and configured to bond the semiconductor substrate and the transparent substrate while exposing the pixels, and an imaging lens unit arranged on the transparent substrate.
摘要:
Disclosed is a method for production of human erythropoietin. By the method, the cells are cultured in a serum-free medium with repetitive medium exchanges, in which medium exchange is carried out either by collecting 80 to 95% of the culture when viable cell density has reached at 2×106˜4×106 cells/mL, or by adjusting the amount of the exchanged medium so that the initial density of the viable cells may be 1.5×105˜2.5×105 cells/mL.
摘要:
A method for manufacturing an electronic device using a closed-type transport container, includes: controlling relative humidity inside the closed-type transport container to be lower than ambient relative humidity outside the closed-type transport container on a particular interprocess transport path in which an intermediate product stored in the closed-type transport container is transported from a first manufacturing process to a second manufacturing process. The first manufacturing process allows basic compounds containing nitrogen atoms to be released from the intermediate product. The second manufacturing process is susceptible to degradation due to contamination by the basic compounds.