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1.发明授权Probe card assembly with carbon nanotube probes having a spring mechanism therein 有权具有碳纳米管探针的探针卡组件，其中具有弹簧机构公开(公告)号：US08130007B2
公开(公告)日：2012-03-06
申请号：US11872008
申请日：2007-10-13
申请人： Benjamin N. Eldridge , John K. Gritters , Rodney I. Martens , Alexander H. Slocum , Onnik Yaglioglu
发明人： Benjamin N. Eldridge , John K. Gritters , Rodney I. Martens , Alexander H. Slocum , Onnik Yaglioglu
IPC分类号： G01R31/26
CPC分类号： G01R1/06716 , G01R1/06744 , G01R1/0675 , G01R1/06755 , G01R3/00 , H01L2924/0002 , Y10T29/49004 , Y10T29/49147 , Y10T29/49204 , H01L2924/00
摘要： Columns comprising a plurality of vertically aligned carbon nanotubes can be configured as electromechanical contact structures or probes. The columns can be grown on a sacrificial substrate and transferred to a product substrate, or the columns can be grown on the product substrate. The columns can be treated to enhance mechanical properties such as stiffness, electrical properties such as electrical conductivity, and/or physical contact characteristics. The columns can be mechanically tuned to have predetermined spring properties. The columns can be used as electromechanical probes, for example, to contact and test electronic devices such as semiconductor dies, and the columns can make unique marks on terminals of the electronic devices.
摘要翻译： 包括多个垂直排列的碳纳米管的柱可以被配置为机电接触结构或探针。 柱可以在牺牲衬底上生长并转移到产物基底，或者可以在产物基底上生长柱。 可以处理柱以增强诸如刚度，电性能如导电性和/或物理接触特性的机械性能。 柱可以被机械调节以具有预定的弹簧性质。 这些列可以用作机电探针，例如用于接触和测试诸如半导体管芯的电子器件，并且这些列可以在电子器件的端子上形成独特的标记。
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公开(公告)号：US20090066352A1
公开(公告)日：2009-03-12
申请号：US11872008
申请日：2007-10-13
申请人： John K. Gritters , Rodney Ivan Martens , Onnik Yaglioglu , Benjamin N. Eldridge , Alexander H. Slocum
发明人： John K. Gritters , Rodney Ivan Martens , Onnik Yaglioglu , Benjamin N. Eldridge , Alexander H. Slocum
CPC分类号： G01R1/06716 , G01R1/06744 , G01R1/0675 , G01R1/06755 , G01R3/00 , H01L2924/0002 , Y10T29/49004 , Y10T29/49147 , Y10T29/49204 , H01L2924/00
摘要： Columns comprising a plurality of vertically aligned carbon nanotubes can be configured as electromechanical contact structures or probes. The columns can be grown on a sacrificial substrate and transferred to a product substrate, or the columns can be grown on the product substrate. The columns can be treated to enhance mechanical properties such as stiffness, electrical properties such as electrical conductivity, and/or physical contact characteristics. The columns can be mechanically tuned to have predetermined spring properties. The columns can be used as electromechanical probes, for example, to contact and test electronic devices such as semiconductor dies, and the columns can make unique marks on terminals of the electronic devices.
摘要翻译： 包括多个垂直排列的碳纳米管的柱可以被配置为机电接触结构或探针。 柱可以在牺牲衬底上生长并转移到产物基底，或者可以在产物基底上生长柱。 可以处理柱以增强诸如刚度，电性能如导电性和/或物理接触特性的机械性能。 柱可以被机械调节以具有预定的弹簧性质。 这些列可以用作机电探针，例如用于接触和测试诸如半导体管芯的电子器件，并且这些列可以在电子器件的端子上形成独特的标记。
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3.发明授权Carbon nanotube spring contact structures with mechanical and electrical components 有权碳纳米管弹簧接触结构具有机械和电气部件公开(公告)号：US08149007B2
公开(公告)日：2012-04-03
申请号：US12421805
申请日：2009-04-10
申请人： Jimmy K. Chen , Treliant Fang , Michael Harburn , Igor Y. Khandros , Rodney I. Martens , Gaetan L. Mathieu , Alexander H. Slocum , Onnik Yaglioglu
发明人： Jimmy K. Chen , Treliant Fang , Michael Harburn , Igor Y. Khandros , Rodney I. Martens , Gaetan L. Mathieu , Alexander H. Slocum , Onnik Yaglioglu
CPC分类号： G01R1/06716 , G01R1/06744 , G01R1/06755 , G01R1/07357 , H01L23/49811 , H01L24/72 , H01L2924/01078 , H01L2924/01079 , H01L2924/19107 , Y10T29/49204
摘要： A composite spring contact structure includes a structural component and a conduction component distinct from each other and having differing mechanical and electrical characteristics. The structural component can include a group of carbon nanotubes. A mechanical characteristic of the composite spring contact structure can be dominated by a mechanical characteristic of the structural component, and an electrical characteristic of the composite spring contact structure can be dominated by an electrical characteristic of the conduction component. Composite spring contact structures can be used in probe cards and other electronic devices. Various ways of making contact structures are also disclosed.
摘要翻译： 复合弹簧接触结构包括彼此不同的并具有不同机械和电特性的结构部件和导电部件。 结构组分可以包括一组碳纳米管。 复合弹簧接触结构的机械特性可以由结构部件的机械特性主导，并且复合弹簧接触结构的电特性可以由导电部件的电特性来支配。 复合弹簧接触结构可用于探针卡和其他电子设备。 还公开了制造接触结构的各种方式。
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4.发明申请CARBON NANOTUBE CONTACT STRUCTURES FOR USE WITH SEMICONDUCTOR DIES AND OTHER ELECTRONIC DEVICES 审中-公开碳纳米管接触结构与半导体器件和其他电子器件公开(公告)号：US20100252317A1
公开(公告)日：2010-10-07
申请号：US12418368
申请日：2009-04-03
CPC分类号： H01L24/80 , B82Y10/00 , B82Y30/00 , H01B1/20 , H01L23/49811 , H01L24/11 , H01L24/12 , H01L24/16 , H01L24/742 , H01L25/0657 , H01L51/0048 , H01L2224/0401 , H01L2224/0557 , H01L2224/11003 , H01L2224/11334 , H01L2224/13021 , H01L2224/13025 , H01L2224/13082 , H01L2224/1329 , H01L2224/133 , H01L2224/13582 , H01L2224/13624 , H01L2224/13639 , H01L2224/13644 , H01L2224/13647 , H01L2224/16225 , H01L2225/06513 , H01L2225/06517 , H01L2225/06527 , H01L2924/00013 , H01L2924/00014 , H01L2924/0002 , H01L2924/01006 , H01L2924/01013 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01079 , H01L2924/014 , H01L2924/14 , H01L2924/15174 , H01L2924/15312 , H01L2924/15787 , H01L2924/19041 , H01L2924/19043 , H01L2924/30107 , H05K3/4007 , H05K2201/026 , H05K2201/0323 , H05K2201/0367 , H05K2203/0338 , Y10T29/49147 , Y10T29/49206 , H01L2224/13099 , H01L2224/05552 , H01L2924/00
摘要： A method of making carbon nanotube contact structures on an electronic device includes growing a plurality of carbon nanotube columns on a mandrel. Electrically-conductive adhesive is applied to ends of the columns distal from the mandrel, and the columns are transferred to the electronic device. An electrically-conductive material is deposited onto some or all of the columns. The mandrel can be reused to grow a second plurality of carbon nanotube columns.
摘要翻译： 在电子设备上制造碳纳米管接触结构的方法包括在心轴上生长多个碳纳米管柱。 将导电粘合剂施加到远离心轴的柱的端部，并且柱被转移到电子装置。 导电材料沉积在一些或所有的柱上。 心轴可以重新用于生长第二多个碳纳米管柱。
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公开(公告)号：US08697301B2
公开(公告)日：2014-04-15
申请号：US13015848
申请日：2011-01-28
IPC分类号： H01M8/06
摘要： A fuel cell comprises an anode, a cathode, and a proton exchange membrane. The anode and cathode can include a catalyst layer which includes a plurality of generally aligned carbon nanotubes. Methods of making a fuel cell are also disclosed.
摘要翻译： 燃料电池包括阳极，阴极和质子交换膜。 阳极和阴极可以包括包括多个大致排列的碳纳米管的催化剂层。 还公开了制造燃料电池的方法。
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公开(公告)号：US20110189564A1
公开(公告)日：2011-08-04
申请号：US13015848
申请日：2011-01-28
摘要： A fuel cell comprises an anode, a cathode, and a proton exchange membrane. The anode and cathode can include a catalyst layer which includes a plurality of generally aligned carbon nanotubes. Methods of making a fuel cell are also disclosed.
摘要翻译： 燃料电池包括阳极，阴极和质子交换膜。 阳极和阴极可以包括包括多个大致排列的碳纳米管的催化剂层。 还公开了制造燃料电池的方法。
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7.发明申请CARBON NANOTUBE SPRING CONTACT STRUCTURES WITH MECHANICAL AND ELECTRICAL COMPONENTS 有权碳纳米管弹簧接触结构与机械和电气部件公开(公告)号：US20090197484A1
公开(公告)日：2009-08-06
申请号：US12421805
申请日：2009-04-10
申请人： Jimmy K. Chen , Treliant Fang , Michael Harburn , Igor Y. Khandros , Rodney I. Martens , Gaetan L. Mathieu , Alexander Slocum , Onnik Yaglioglu
发明人： Jimmy K. Chen , Treliant Fang , Michael Harburn , Igor Y. Khandros , Rodney I. Martens , Gaetan L. Mathieu , Alexander Slocum , Onnik Yaglioglu
CPC分类号： G01R1/06716 , G01R1/06744 , G01R1/06755 , G01R1/07357 , H01L23/49811 , H01L24/72 , H01L2924/01078 , H01L2924/01079 , H01L2924/19107 , Y10T29/49204
摘要： A composite spring contact structure includes a structural component and a conduction component distinct from each other and having differing mechanical and electrical characteristics. The structural component can include a group of carbon nanotubes. A mechanical characteristic of the composite spring contact structure can be dominated by a mechanical characteristic of the structural component, and an electrical characteristic of the composite spring contact structure can be dominated by an electrical characteristic of the conduction component. Composite spring contact structures can be used in probe cards and other electronic devices. Various ways of making contact structures are also disclosed.
摘要翻译： 复合弹簧接触结构包括彼此不同的并具有不同机械和电特性的结构部件和导电部件。 结构组分可以包括一组碳纳米管。 复合弹簧接触结构的机械特性可以由结构部件的机械特性主导，并且复合弹簧接触结构的电特性可以由导电部件的电特性来支配。 复合弹簧接触结构可用于探针卡和其他电子设备。 还公开了制备接触结构的各种方式。
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公开(公告)号：US08872176B2
公开(公告)日：2014-10-28
申请号：US13253665
申请日：2011-10-05
申请人： Treliant Fang , John K. Gritters , Onnik Yaglioglu
发明人： Treliant Fang , John K. Gritters , Onnik Yaglioglu
CPC分类号： G01R1/06744 , B82Y10/00 , G01R31/2886 , H01L2224/13 , H01L2924/00013 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599
摘要： Contacts of an electrical device can be made of carbon nanotube columns. Contact tips can be disposed at ends of the columns. The contact tips can be made of an electrically conductive paste applied to the ends of the columns and cured (e.g., hardened). The paste can be applied, cured, and/or otherwise treated to make the contact tips in desired shapes. The carbon nanotube columns can be encapsulated in an elastic material that can impart the dominant mechanical characteristics, such as spring characteristics, to the contacts. The contacts can be electrically conductive and can be utilized to make pressure-based electrical connections with electrical terminals or other contact structures of another device.
摘要翻译： 电气装置的触点可以由碳纳米管柱制成。 接触尖端可以放在柱的末端。 接触尖端可以由施加到柱的端部并被固化（例如硬化）的导电浆料制成。 可以施加，固化和/或以其他方式处理糊状物以使接触尖端成为所需形状。 碳纳米管柱可以被包封在弹性材料中，该弹性材料可以赋予触点更大的机械特性，例如弹簧特性。 触点可以是导电的，并且可以用于与电端子或另一器件的其它接触结构进行基于压力的电连接。
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9.发明授权Carbon nanotube columns and methods of making and using carbon nanotube columns as probes 有权碳纳米管柱及其制备和使用碳纳米管柱作为探针的方法公开(公告)号：US08354855B2
公开(公告)日：2013-01-15
申请号：US12632428
申请日：2009-12-07
CPC分类号： B82Y40/00 , B82Y10/00 , B82Y30/00 , C01B32/16 , C01B2202/08 , G01R1/06755 , G01R3/00 , Y10T29/49117
摘要： Carbon nanotube columns each comprising carbon nanotubes can be utilized as electrically conductive contact probes. The columns can be grown, and parameters of a process for growing the columns can be varied while the columns grow to vary mechanical characteristics of the columns along the growth length of the columns. Metal can then be deposited inside and/or on the outside of the columns, which can enhance the electrical conductivity of the columns. The metalized columns can be coupled to terminals of a wiring substrate. Contact tips can be formed at or attached to ends of the columns. The wiring substrate can be combined with other electronic components to form an electrical apparatus in which the carbon nanotube columns can function as contact probes.
摘要翻译： 每个包含碳纳米管的碳纳米管柱可用作导电接触探针。 柱可以生长，并且用于生长柱的方法的参数可以变化，同时柱生长以改变柱沿着生长长度的机械特性。 然后可以将金属沉积在柱的内部和/或外部，这可以增强柱的导电性。 金属化柱可以连接到布线基板的端子。 接触尖端可以形成在柱或端附近。 布线基板可以与其他电子部件组合以形成其中碳纳米管柱可用作接触探针的电气设备。
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10.发明申请CARBON NANOTUBE COLUMNS AND METHODS OF MAKING AND USING CARBON NANOTUBE COLUMNS AS PROBES 有权碳纳米管柱和制备和使用碳纳米管柱作为探针的方法公开(公告)号：US20100083489A1
公开(公告)日：2010-04-08
申请号：US12632428
申请日：2009-12-07
CPC分类号： B82Y40/00 , B82Y10/00 , B82Y30/00 , C01B32/16 , C01B2202/08 , G01R1/06755 , G01R3/00 , Y10T29/49117
摘要： Carbon nanotube columns each comprising carbon nanotubes can be utilized as electrically conductive contact probes. The columns can be grown, and parameters of a process for growing the columns can be varied while the columns grow to vary mechanical characteristics of the columns along the growth length of the columns. Metal can then be deposited inside and/or on the outside of the columns, which can enhance the electrical conductivity of the columns. The metalized columns can be coupled to terminals of a wiring substrate. Contact tips can be formed at or attached to ends of the columns. The wiring substrate can be combined with other electronic components to form an electrical apparatus in which the carbon nanotube columns can function as contact probes.
摘要翻译： 每个包含碳纳米管的碳纳米管柱可用作导电接触探针。 柱可以生长，并且用于生长柱的方法的参数可以变化，同时柱生长以改变柱沿着生长长度的机械特性。 然后可以将金属沉积在柱的内部和/或外部，这可以增强柱的导电性。 金属化柱可以连接到布线基板的端子。 接触尖端可以形成在柱或端附近。 布线基板可以与其他电子部件组合以形成其中碳纳米管柱可用作接触探针的电气设备。
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