公开(公告)号：US06964894B2

公开(公告)日：2005-11-15

申请号：US10601980

申请日：2003-06-23

申请人： Bruce K. Wachtmann ,  Michael W. Judy

发明人： Bruce K. Wachtmann ,  Michael W. Judy

IPC分类号： B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  H01G20060101 ,  H01L21/8238 ,  H01L27/14

CPC分类号： B81C1/00238

摘要： A method of forming a MEMS device produces a device layer wafer having a pre-formed conductive pathway before coupling it with a handle wafer. To that end, the method produces the noted device layer wafer by 1) providing a material layer, 2) coupling a conductor to the material layer, and 3) forming at least two conductive paths through at least a portion of the material layer to the conductor. The method then provides the noted handle wafer, and couples the device layer wafer to the handle wafer. The wafers are coupled so that the conductor is contained between the material layer and the handle wafer.

摘要翻译： 形成MEMS器件的方法在将其与处理晶片连接之前产生具有预先形成的导电通路的器件层晶片。 为此，该方法通过以下方式产生所提到的器件层晶片：1）提供材料层，2）将导体耦合到材料层，以及3）形成至少两个导电路径，穿过至少一部分材料层到 导体。 该方法然后提供所述处理晶片，并将器件层晶片耦合到处理晶片。 晶片被耦合，使得导体被容纳在材料层和处理晶片之间。

公开(公告)号：US07134340B2

公开(公告)日：2006-11-14

申请号：US11130025

申请日：2005-05-16

申请人： Howard R. Samuels ,  Michael W. Judy

发明人： Howard R. Samuels ,  Michael W. Judy

IPC分类号： G01P15/125 ,  H01G7/00

CPC分类号： G01P15/18 ,  B81B3/0072 ,  B81B2201/0235 ,  B81B2203/051 ,  B81B2203/055 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/082 ,  Y10T29/49007 ,  Y10T74/1293

摘要： Micromachined structures, such as fixed drive or sensing fingers of an inertial sensor, are anchored to a substrate using multiple anchors or elongated anchors in order to reduce the bending or twisting of the micromachined structure about the anchor point.

摘要翻译： 微机械加工结构，例如惯性传感器的固定驱动或感测指状物，使用多个锚固件或细长锚固件锚定到基底上，以便减少微加工结构围绕锚点的弯曲或扭转。

公开(公告)号：US6148670A

公开(公告)日：2000-11-21

申请号：US329479

申请日：1999-06-10

申请人： Michael W. Judy

发明人： Michael W. Judy

IPC分类号： G01P15/125 ,  G01P15/18

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/082

摘要： A device for detecting with differential capacitors accelerations in more than one orientation through time-division multiplexing. A micromachined mass is movable along or about any axis in response to a force. The mass forms the common electrode of a set of differential capacitors, wherein the other electrodes of each differential capacitor are fixed. With each differential capacitor, one fixed electrode is set to one voltage and the other fixed electrode is set to a second voltage. The mass is connected to the input of an amplifier and to a switch for connecting the mass to a fixed voltage. The output of the amplifier is coupled to a demodulator for each orientation. A timing circuit activates one demodulator at a time. By toggling the voltages on the fixed electrodes of the differential capacitor corresponding to the active demodulator, the movement of the mass in the orientation corresponding to the active demodulator can be determined.

摘要翻译： 用于通过时分复用在多于一个方向上用差分电容器加速度进行检测的装置。 微加工物质可以响应于力而沿着或围绕任何轴线移动。 质量形成一组差分电容器的公共电极，其中每个差分电容器的其它电极是固定的。 对于每个差分电容器，将一个固定电极设置为一个电压，另一个固定电极设置为第二电压。 质量块连接到放大器的输入端和用于将质量连接到固定电压的开关。 放大器的输出端与每个取向的解调器耦合。 定时电路一次激活一个解调器。 通过切换与有源解调器相对应的差分电容器的固定电极上的电压，可以确定与有源解调器对应的取向中的质量块的移动。

公开(公告)号：US08939029B2

公开(公告)日：2015-01-27

申请号：US13437859

申请日：2012-04-02

申请人： Xin Zhang ,  Michael W. Judy

发明人： Xin Zhang ,  Michael W. Judy

IPC分类号： G01P15/125 ,  G01P15/08 ,  B81B3/00 ,  G01P15/18 ,  G01P21/00

CPC分类号： G01P15/0802 ,  B81B3/0051 ,  B81B2203/053 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/0871

摘要： A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure electrically coupled to the mass of the MEMS sensor. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.

摘要翻译： MEMS传感器包括衬底和耦合到衬底的MEMS结构。 MEMS结构具有相对于基板移动的质量。 MEMS传感器还包括电耦合到MEMS传感器的质量的参考结构。 参考结构用于提供参考以抵消可能影响MEMS传感器的任何环境变化，以提高其测量的准确性。

公开(公告)号：US08146425B2

公开(公告)日：2012-04-03

申请号：US12205241

申请日：2008-09-05

申请人： Xin Zhang ,  Michael W. Judy

发明人： Xin Zhang ,  Michael W. Judy

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P21/00

摘要： A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.

摘要翻译： MEMS传感器包括衬底和耦合到衬底的MEMS结构。 MEMS结构具有相对于基板移动的质量。 MEMS传感器还包括从MEMS结构径向向外定位的参考结构。 参考结构用于提供参考，以抵消可能影响MEMS传感器的任何环境变化，以提高其测量的准确性。

公开(公告)号：US07327003B2

公开(公告)日：2008-02-05

申请号：US11058483

申请日：2005-02-15

申请人： John R. Martin ,  Timothy J. Brosnihan ,  Michael W. Judy ,  Xin Zhang

发明人： John R. Martin ,  Timothy J. Brosnihan ,  Michael W. Judy ,  Xin Zhang

IPC分类号： H01L29/84

CPC分类号： B60C23/0408 ,  B81B3/0018 ,  H01G5/18 ,  H01G5/40 ,  H01L2224/16145 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

摘要： Rather than increasing the mass of the structure, the structure in a sensor system suspends its substrate from some mechanical ground. Motion of the substrate relative to the mechanical ground thus provides the movement information. To those ends, the sensor system includes a base, a substrate, and a flexible member suspended from at least a portion of the substrate. At least a portion of the flexible member is capable of moving relative to at least a portion of the substrate. In addition, the flexible member is secured to the base, thus causing the substrate to be movable relative to the base. Moreover, the mass of the substrate is greater than the mass of the flexible member. The substrate and flexible member are configured to interact to produce a motion signal identifying movement of the base.

摘要翻译： 传感器系统中的结构不是增加结构的质量，而是将其基板从某些机械接地处悬挂下来。 因此，基板相对于机械地面的运动提供运动信息。 为此，传感器系统包括基底，基底和从基底的至少一部分悬挂的柔性构件。 柔性构件的至少一部分能够相对于衬底的至少一部分移动。 此外，柔性构件被固定到基部，从而使得基板相对于基座移动。 此外，衬底的质量大于柔性构件的质量。 衬底和柔性构件被配置为相互作用以产生识别基部的移动的运动信号。

公开(公告)号：US07166911B2

公开(公告)日：2007-01-23

申请号：US10952424

申请日：2004-09-28

申请人： Maurice S. Karpman ,  Nicole Hablutzel ,  Peter W. Farrell ,  Michael W. Judy ,  Lawrence E. Felton ,  Lewis Long

发明人： Maurice S. Karpman ,  Nicole Hablutzel ,  Peter W. Farrell ,  Michael W. Judy ,  Lawrence E. Felton ,  Lewis Long

IPC分类号： H01L23/12

CPC分类号： B81B7/0048 ,  H01L2224/32014 ,  H01L2924/1461 ,  H01L2924/16195 ,  H01L2924/00

摘要： A MEMS inertial sensor is secured within a premolded-type package formed, at least in part, from a low moisture permeable molding material. Consequently, such a motion detector should be capable of being produced more economically than those using ceramic packages. To those ends, the package has at least one wall (having a low moisture permeability) extending from a leadframe to form a cavity, and an isolator (with a top surface) within the cavity. The MEMS inertial sensor has a movable structure suspended above a substrate having a bottom surface. The substrate bottom surface is secured to the isolator top surface at a contact area. In illustrative embodiments, the contact area is less than the surface area of the bottom surface of the substrate. Accordingly, the isolator forms a space between at least a portion of the bottom substrate surface and the package. This space thus is free of the isolator. Moreover, due to the low moisture permeability of the package, further production steps can be avoided while ensuring that moisture does not adversely affect the MEMS inertial sensor within the cavity.

摘要翻译： MEMS惯性传感器固定在至少部分由低透湿成型材料形成的预成型包装中。 因此，这种运动检测器应该能够比使用陶瓷封装的那些更经济地生产。 为了达到这些目的，包装件具有从引线框架延伸以形成空腔的至少一个壁（具有低的透湿性），并且在该空腔内具有隔离器（具有顶部表面）。 MEMS惯性传感器具有悬挂在具有底表面的基底上方的可移动结构。 衬底底表面在接触区域处固定到隔离器顶表面。 在说明性实施例中，接触面积小于衬底的底表面的表面积。 因此，隔离器在底部基板表面的至少一部分和封装之间形成空间。 因此，这个空间没有隔离器。 此外，由于封装的透湿性低，可以避免进一步的生产步骤，同时确保水分不会对空腔内的MEMS惯性传感器产生不利影响。

公开(公告)号：US06931170B2

公开(公告)日：2005-08-16

申请号：US10274496

申请日：2002-10-18

申请人： Chang-Han Yun ,  Shanti Bhattacharya ,  Yakov Reznichenko ,  John R. Martin ,  Lawrence E. Felton ,  Jeffrey Swift ,  Kieran P. Harney ,  Michael W. Judy

发明人： Chang-Han Yun ,  Shanti Bhattacharya ,  Yakov Reznichenko ,  John R. Martin ,  Lawrence E. Felton ,  Jeffrey Swift ,  Kieran P. Harney ,  Michael W. Judy

IPC分类号： G02B6/26 ,  G02B6/35 ,  G02B6/42

CPC分类号： G02B6/3512 ,  G02B6/266 ,  G02B6/3556

摘要： A fiber-attached optical device with in-plane micromachined mirrors includes a cover having at least one reflector formed on one side and a substrate having a plurality of micromachined optical mirrors formed substantially on a single plane on a side facing toward the mirrored side of the cover. The micromachined optical mirrors are controllable to reflect optical signals between a plurality of optical fiber segments via the at least one reflector. The plurality of optical fiber segments can be attached to either the cover or the substrate so as to form an integrated package including the substrate, the cover, and the plurality of optical fiber segments. The mirrors can be controlled to variably attenuate the optical signals.

摘要翻译： 具有面内微加工反射镜的光纤附接光学器件包括具有在一侧形成的至少一个反射器的盖，以及具有多个微加工光学镜的基板，所述多个微机械光学镜基本上在面向所述镜面侧的一侧的单个平面上形成 盖。 微加工的光学镜可被控制以经由至少一个反射器反射多个光纤段之间的光信号。 多个光纤段可以附着到盖或基板上，以形成包括基板，盖和多个光纤段的集成封装。 可以控制镜子以可变地衰减光信号。

公开(公告)号：US5939633A

公开(公告)日：1999-08-17

申请号：US878192

申请日：1997-06-18

申请人： Michael W. Judy

发明人： Michael W. Judy

IPC分类号： G01P15/125 ,  G01P15/18

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/082

摘要： A device for detecting with differential capacitors accelerations in more than one orientation through time-division multiplexing. A micromachined mass is movable along or about any axis in response to a force. The mass forms the common electrode of a set of differential capacitors, wherein the other electrodes of each differential capacitor are fixed. With each differential capacitor, one fixed electrode is set to one voltage and the other fixed electrode is set to a second voltage. The mass is connected to the input of an amplifier and to a switch for connecting the mass to a fixed voltage. The output of the amplifier is coupled to a demodulator for each orientation. A timing circuit activates one demodulator at a time. By toggling the voltages on the fixed electrodes of the differential capacitor corresponding to the active demodulator, the movement of the mass in the orientation corresponding to the active demodulator can be determined.

公开(公告)号：US08919199B2

公开(公告)日：2014-12-30

申请号：US13308687

申请日：2011-12-01

申请人： Michael W. Judy ,  John A. Geen ,  Houri Johari-Galle

发明人： Michael W. Judy ,  John A. Geen ,  Houri Johari-Galle

IPC分类号： G01C19/56 ,  G01P15/125 ,  G01C19/5698 ,  G01C19/5684

CPC分类号： G01C19/5698 ,  G01C19/5684 ,  Y10T29/49002

摘要： One or more electrodes that interact with a movable mass in a MEMS device are anchored or otherwise supported from both the top and bottom and optionally also from one or more of the lateral sides other than the transduction side (i.e., the side of the electrode facing the mass) in order to severely restrict movement of the electrodes such as from interaction with the mass and/or external forces.

摘要翻译： 与MEMS器件中的可移动质量相互作用的一个或多个电极被锚定或以其他方式从顶部和底部支撑，并且还可选地还可以从除了传导侧之外的一个或多个侧面（即，电极面对 质量），以便严格限制电极的运动，例如与质量和/或外力的相互作用。