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    Delamination apparatus and inline thermal imaging system
    2.
    发明授权
    Delamination apparatus and inline thermal imaging system 有权
    分层装置和在线热成像系统

    公开(公告)号：US08869863B2

    公开(公告)日：2014-10-28

    申请号：US13486875

    申请日：2012-06-01

    申请人： Byung-Chul Lee ,  Jae-Seok Park ,  Jae-Ha Lim ,  Jin-Han Park ,  Dong-Sul Kim

    发明人： Byung-Chul Lee ,  Jae-Seok Park ,  Jae-Ha Lim ,  Jin-Han Park ,  Dong-Sul Kim

    IPC分类号： B32B38/10

    CPC分类号： H01L51/56 ,  B32B38/0004 ,  B32B38/10 ,  B32B2310/0843 ,  B32B2457/206 ,  H01L51/0024

    摘要： A delamination apparatus includes a stage, a first roll unit, a gripper, and a second roll unit. The stage includes a peripheral area and a substrate area. An edge of a donor film is attached at the peripheral area. An acceptor substrate, laminated at on the donor film, is disposed at the substrate area. The first roll unit is disposed on the donor film, moves in a lengthwise direction of the acceptor substrate. The gripper is disposed on the donor film, and is configured to separate the edge of the donor film from the stage so as to cause the donor film to contact the first roll unit. The second roll unit is disposed on the stage, contacts the donor film which contacts the first roll unit, and delaminates the donor film from the acceptor substrate by moving in the lengthwise direction with the first roll unit.

    摘要翻译： 分层装置包括台，第一卷单元，夹具和第二卷单元。 舞台包括周边区域和衬底区域。 供体膜的边缘附着在周边区域。 层叠在供体膜上的受主衬底设置在衬底区域。 第一辊单元设置在供体膜上，在受主衬底的长度方向上移动。 夹持器设置在供体膜上，并且构造成将施体膜的边缘与载物台分离，以使供体膜与第一辊单元接触。 第二辊单元设置在台架上，与第一辊单元接触供体膜，并且通过与第一辊单元沿长度方向移动，使施主膜从受主衬底分层。

    Delamination Apparatus and Inline Thermal Imaging System
    4.
    发明申请
    Delamination Apparatus and Inline Thermal Imaging System 有权
    分层装置和在线热成像系统

    公开(公告)号：US20130133835A1

    公开(公告)日：2013-05-30

    申请号：US13486875

    申请日：2012-06-01

    申请人： Byung-Chul Lee ,  Jae-Seok Park ,  Jae-Ha Lim ,  Jin-Han Park ,  Dong-Sul Kim

    发明人： Byung-Chul Lee ,  Jae-Seok Park ,  Jae-Ha Lim ,  Jin-Han Park ,  Dong-Sul Kim

    IPC分类号： B32B37/06 ,  B32B38/10

    CPC分类号： H01L51/56 ,  B32B38/0004 ,  B32B38/10 ,  B32B2310/0843 ,  B32B2457/206 ,  H01L51/0024

    摘要： A delamination apparatus includes a stage, a first roll unit, a gripper, and a second roll unit. The stage includes a peripheral area and a substrate area. An edge of a donor film is attached at the peripheral area. An acceptor substrate, laminated at on the donor film, is disposed at the substrate area. The first roll unit is disposed on the donor film, moves in a lengthwise direction of the acceptor substrate. The gripper is disposed on the donor film, and is configured to separate the edge of the donor film from the stage so as to cause the donor film to contact the first roll unit. The second roll unit is disposed on the stage, contacts the donor film which contacts the first roll unit, and delaminates the donor film from the acceptor substrate by moving in the lengthwise direction with the first roll unit.

    摘要翻译： 分层装置包括台，第一卷单元，夹具和第二卷单元。 舞台包括周边区域和衬底区域。 供体膜的边缘附着在周边区域。 层叠在供体膜上的受主衬底设置在衬底区域。 第一辊单元设置在供体膜上，在受主衬底的长度方向上移动。 夹持器设置在供体膜上，并且构造成将施体膜的边缘与载物台分离，以使供体膜与第一辊单元接触。 第二辊单元设置在台架上，与第一辊单元接触供体膜，并且通过与第一辊单元沿长度方向移动，使施主膜从受主衬底分层。

    Delamination apparatus and inline thermal imaging system
    5.
    发明授权
    Delamination apparatus and inline thermal imaging system 有权
    分层装置和在线热成像系统

    公开(公告)号：US09242414B2

    公开(公告)日：2016-01-26

    申请号：US13936298

    申请日：2013-07-08

    申请人： Kyung-Hyun Ahn ,  Jin-Han Park ,  Dong-Sul Kim ,  Byung-Chul Lee

    发明人： Kyung-Hyun Ahn ,  Jin-Han Park ,  Dong-Sul Kim ,  Byung-Chul Lee

    IPC分类号： B32B38/10 ,  B29C69/00 ,  B32B43/00

    CPC分类号： B29C69/006 ,  B32B38/10 ,  B32B43/006 ,  B32B2457/20 ,  Y10T156/1132 ,  Y10T156/1137 ,  Y10T156/1174 ,  Y10T156/1939 ,  Y10T156/195 ,  Y10T156/1956 ,  Y10T156/1978

    摘要： A delamination apparatus that includes a stage to which a lower support, an acceptor substrate disposed on the lower support, and a donor film laminated with the lower support along the edge of the acceptor substrate, interposing the acceptor substrate therebetween are mounted. The delamination apparatus further includes a first gripper disposed in an end side of the stage to move an end of the donor film to a direction far away from the acceptor substrate by gripping the end of the donor film; and a first peeling roll disposed on the donor film to support the donor film disposed between the acceptor substrate and the first gripper, and rotating itself to a direction of the first gripper.

    摘要翻译： 一种分层装置，其包括下部支撑体，设置在下部支撑体上的受主基板和沿着受主基板的边缘与下部支撑体层叠的供体膜，在其间插入受体基板的阶段。 分层装置还包括设置在台架的端侧的第一夹持器，通过夹持施主膜的端部将施主膜的端部移动到远离受主基板的方向; 以及第一剥离辊，其设置在供体膜上以支撑设置在受主基板和第一夹持器之间的供体膜，并且将其自身旋转到第一夹持器的方向。

    Surface inspection apparatus and method, and slit coater using the same
    6.
    发明申请
    Surface inspection apparatus and method, and slit coater using the same 有权
    表面检查装置和方法，以及使用其的狭缝涂布机

    公开(公告)号：US20110128550A1

    公开(公告)日：2011-06-02

    申请号：US12926622

    申请日：2010-11-30

    申请人： Eui-Shin Shin ,  Myeng Woo Nam ,  Jin-Han Park ,  Jae-Seok Park

    发明人： Eui-Shin Shin ,  Myeng Woo Nam ,  Jin-Han Park ,  Jae-Seok Park

    IPC分类号： G01B9/02 ,  G01N21/00

    CPC分类号： G01N21/94 ,  G01N21/8901 ,  G01N21/9501

    摘要： Provided are a surface inspection apparatus and method capable of detecting foreign materials on the surface of a substrate, and a slit coater having the surface inspection apparatus. In the surface inspection apparatus, a slit lighting unit irradiates slit-shaped light. An optical system splits the slit-shaped light into two beams traveling along two different paths, is incident upon a subject, and extracts an interference image caused by combination of the two beams reflected from the subject. An imaging device captures the interference image to output an image signal. An analysis unit acquires a luminance value of the image signal, analyzes the luminance value in real time, and determines whether or not foreign materials are present.

    摘要翻译： 提供了能够检测基板表面的异物的表面检查装置和方法，以及具有表面检查装置的狭缝涂布机。 在表面检查装置中，狭缝照明部照射狭缝状的光。 光学系统将狭缝状光分成沿着两个不同路径行进的两束光束，入射到被摄体上，并提取由对象反射的两束光的组合引起的干涉图像。 成像装置捕获干涉图像以输出图像信号。 分析单元获取图像信号的亮度值，实时分析亮度值，并确定是否存在异物。

    Interferometric surface inspection using a slit-shaped reference beam from inspection surface
    8.
    发明授权
    Interferometric surface inspection using a slit-shaped reference beam from inspection surface 有权
    使用来自检查表面的狭缝状参考光束进行干涉测试

    公开(公告)号：US08643845B2

    公开(公告)日：2014-02-04

    申请号：US12926622

    申请日：2010-11-30

    申请人： Eui-Shin Shin ,  Myeng Woo Nam ,  Jin-Han Park ,  Jae-Seok Park

    发明人： Eui-Shin Shin ,  Myeng Woo Nam ,  Jin-Han Park ,  Jae-Seok Park

    IPC分类号： G01N21/00 ,  G01B11/02

    CPC分类号： G01N21/94 ,  G01N21/8901 ,  G01N21/9501

    摘要： Provided are a surface inspection apparatus and method capable of detecting foreign materials on the surface of a substrate, and a slit coater having the surface inspection apparatus. In the surface inspection apparatus, a slit lighting unit irradiates slit-shaped light. An optical system splits the slit-shaped light into two beams traveling along two different paths, is incident upon a subject, and extracts an interference image caused by combination of the two beams reflected from the subject. An imaging device captures the interference image to output an image signal. An analysis unit acquires a luminance value of the image signal, analyzes the luminance value in real time, and determines whether or not foreign materials are present.

    摘要翻译： 提供了能够检测基板表面的异物的表面检查装置和方法，以及具有表面检查装置的狭缝涂布机。 在表面检查装置中，狭缝照明部照射狭缝状的光。 光学系统将狭缝状光分成沿着两个不同路径行进的两束光束，入射到被摄体上，并提取由对象反射的两束光的组合引起的干涉图像。 成像装置捕获干涉图像以输出图像信号。 分析单元获取图像信号的亮度值，实时分析亮度值，并确定是否存在异物。