Surface inspection apparatus and method, and slit coater using the same
    1.
    发明申请
    Surface inspection apparatus and method, and slit coater using the same 有权
    表面检查装置和方法,以及使用其的狭缝涂布机

    公开(公告)号:US20110128550A1

    公开(公告)日:2011-06-02

    申请号:US12926622

    申请日:2010-11-30

    IPC分类号: G01B9/02 G01N21/00

    摘要: Provided are a surface inspection apparatus and method capable of detecting foreign materials on the surface of a substrate, and a slit coater having the surface inspection apparatus. In the surface inspection apparatus, a slit lighting unit irradiates slit-shaped light. An optical system splits the slit-shaped light into two beams traveling along two different paths, is incident upon a subject, and extracts an interference image caused by combination of the two beams reflected from the subject. An imaging device captures the interference image to output an image signal. An analysis unit acquires a luminance value of the image signal, analyzes the luminance value in real time, and determines whether or not foreign materials are present.

    摘要翻译: 提供了能够检测基板表面的异物的表面检查装置和方法,以及具有表面检查装置的狭缝涂布机。 在表面检查装置中,狭缝照明部照射狭缝状的光。 光学系统将狭缝状光分成沿着两个不同路径行进的两束光束,入射到被摄体上,并提取由对象反射的两束光的组合引起的干涉图像。 成像装置捕获干涉图像以输出图像信号。 分析单元获取图像信号的亮度值,实时分析亮度值,并确定是否存在异物。

    Interferometric surface inspection using a slit-shaped reference beam from inspection surface
    2.
    发明授权
    Interferometric surface inspection using a slit-shaped reference beam from inspection surface 有权
    使用来自检查表面的狭缝状参考光束进行干涉测试

    公开(公告)号:US08643845B2

    公开(公告)日:2014-02-04

    申请号:US12926622

    申请日:2010-11-30

    IPC分类号: G01N21/00 G01B11/02

    摘要: Provided are a surface inspection apparatus and method capable of detecting foreign materials on the surface of a substrate, and a slit coater having the surface inspection apparatus. In the surface inspection apparatus, a slit lighting unit irradiates slit-shaped light. An optical system splits the slit-shaped light into two beams traveling along two different paths, is incident upon a subject, and extracts an interference image caused by combination of the two beams reflected from the subject. An imaging device captures the interference image to output an image signal. An analysis unit acquires a luminance value of the image signal, analyzes the luminance value in real time, and determines whether or not foreign materials are present.

    摘要翻译: 提供了能够检测基板表面的异物的表面检查装置和方法,以及具有表面检查装置的狭缝涂布机。 在表面检查装置中,狭缝照明部照射狭缝状的光。 光学系统将狭缝状光分成沿着两个不同路径行进的两束光束,入射到被摄体上,并提取由对象反射的两束光的组合引起的干涉图像。 成像装置捕获干涉图像以输出图像信号。 分析单元获取图像信号的亮度值,实时分析亮度值,并确定是否存在异物。

    Method of manufacturing organic light emitting display apparatus, surface treatment device for organic light emitting display apparatus, and organic light emitting display apparatus
    5.
    发明授权
    Method of manufacturing organic light emitting display apparatus, surface treatment device for organic light emitting display apparatus, and organic light emitting display apparatus 有权
    有机发光显示装置的制造方法,有机发光显示装置的表面处理装置以及有机发光显示装置

    公开(公告)号:US08389323B2

    公开(公告)日:2013-03-05

    申请号:US12954310

    申请日:2010-11-24

    IPC分类号: H01L21/00

    摘要: Provided are a method of manufacturing an organic light emitting display apparatus, a surface treatment device for an organic light emitting display apparatus, and an organic light emitting display apparatus. To easily form organic emissive layers, the method includes: forming a first electrode on a substrate; forming on the first electrode a pixel defining layer having openings that expose predetermined portions of the first electrode; forming a charge carrying layer on the pixel defining layer and the first electrode exposed through the openings; hydrophobically treating portions of a surface of the charge carrying layer selectively, wherein the portions do not correspond to the openings, using a laser; forming organic emissive layers on the charge carrying layer; and forming a second electrode on the organic emissive layers so as to be electrically connected with the organic emissive layers.

    摘要翻译: 提供一种制造有机发光显示装置的方法,有机发光显示装置的表面处理装置和有机发光显示装置。 为了容易地形成有机发光层,该方法包括:在基板上形成第一电极; 在所述第一电极上形成具有露出所述第一电极的预定部分的开口的像素限定层; 在所述像素限定层和通过所述开口暴露的所述第一电极上形成电荷承载层; 选择性地处理电荷载体层的表面的部分,其中使用激光将部分不对应于开口; 在电荷载体层上形成有机发光层; 以及在所述有机发光层上形成第二电极以与所述有机发光层电连接。

    METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS, SURFACE TREATMENT DEVICE FOR ORGANIC LIGHT EMITTING DISPLAY APPARATUS, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS
    6.
    发明申请
    METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS, SURFACE TREATMENT DEVICE FOR ORGANIC LIGHT EMITTING DISPLAY APPARATUS, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS 有权
    有机发光显示装置的制造方法,有机发光显示装置的表面处理装置和有机发光显示装置

    公开(公告)号:US20110127507A1

    公开(公告)日:2011-06-02

    申请号:US12954310

    申请日:2010-11-24

    IPC分类号: H01L51/00 H01L21/28 G21K5/00

    摘要: Provided are a method of manufacturing an organic light emitting display apparatus, a surface treatment device for an organic light emitting display apparatus, and an organic light emitting display apparatus. To easily form organic emissive layers, the method includes: forming a first electrode on a substrate; forming on the first electrode a pixel defining layer having openings that expose predetermined portions of the first electrode; forming a charge carrying layer on the pixel defining layer and the first electrode exposed through the openings; hydrophobically treating portions of a surface of the charge carrying layer selectively, wherein the portions do not correspond to the openings, using a laser; forming organic emissive layers on the charge carrying layer; and forming a second electrode on the organic emissive layers so as to be electrically connected with the organic emissive layers.

    摘要翻译: 提供一种制造有机发光显示装置的方法,有机发光显示装置的表面处理装置和有机发光显示装置。 为了容易地形成有机发光层,该方法包括:在基板上形成第一电极; 在所述第一电极上形成具有露出所述第一电极的预定部分的开口的像素限定层; 在所述像素限定层和通过所述开口暴露的所述第一电极上形成电荷承载层; 选择性地处理电荷载体层的表面的部分,其中使用激光将部分不对应于开口; 在电荷载体层上形成有机发光层; 以及在所述有机发光层上形成第二电极以与所述有机发光层电连接。

    Delamination apparatus and inline thermal imaging system
    8.
    发明授权
    Delamination apparatus and inline thermal imaging system 有权
    分层装置和在线热成像系统

    公开(公告)号:US08869863B2

    公开(公告)日:2014-10-28

    申请号:US13486875

    申请日:2012-06-01

    IPC分类号: B32B38/10

    摘要: A delamination apparatus includes a stage, a first roll unit, a gripper, and a second roll unit. The stage includes a peripheral area and a substrate area. An edge of a donor film is attached at the peripheral area. An acceptor substrate, laminated at on the donor film, is disposed at the substrate area. The first roll unit is disposed on the donor film, moves in a lengthwise direction of the acceptor substrate. The gripper is disposed on the donor film, and is configured to separate the edge of the donor film from the stage so as to cause the donor film to contact the first roll unit. The second roll unit is disposed on the stage, contacts the donor film which contacts the first roll unit, and delaminates the donor film from the acceptor substrate by moving in the lengthwise direction with the first roll unit.

    摘要翻译: 分层装置包括台,第一卷单元,夹具和第二卷单元。 舞台包括周边区域和衬底区域。 供体膜的边缘附着在周边区域。 层叠在供体膜上的受主衬底设置在衬底区域。 第一辊单元设置在供体膜上,在受主衬底的长度方向上移动。 夹持器设置在供体膜上,并且构造成将施体膜的边缘与载物台分离,以使供体膜与第一辊单元接触。 第二辊单元设置在台架上,与第一辊单元接触供体膜,并且通过与第一辊单元沿长度方向移动,使施主膜从受主衬底分层。