Hybrid dielectric film
    1.
    发明申请
    Hybrid dielectric film 有权
    混合电介质膜

    公开(公告)号:US20060051972A1

    公开(公告)日:2006-03-09

    申请号:US10936156

    申请日:2004-09-07

    IPC分类号: H01L21/469 C23C16/00

    摘要: A method of forming a hybrid inorganic/organic dielectric layer on a substrate for use in an integrated circuit is provided, wherein the method includes forming a first dielectric layer on the substrate via chemical vapor deposition, and forming a second dielectric layer on the first dielectric layer via chemical vapor deposition, wherein one of the first dielectric layer and the second dielectric layer is formed from an organic dielectric material, and wherein the other of the first dielectric layer and the second dielectric layer is formed from an inorganic dielectric material.

    摘要翻译: 提供了一种在用于集成电路的衬底上形成杂化无机/有机电介质层的方法,其中所述方法包括通过化学气相沉积在衬底上形成第一电介质层,并在第一电介质上形成第二电介质层 层,其中所述第一介电层和所述第二介电层中的一个由有机介电材料形成,并且其中所述第一介电层和所述第二介电层中的另一个由无机介电材料形成。

    Method and system for forming an organic light-emitting device display having a plurality of passive polymer layers
    2.
    发明申请
    Method and system for forming an organic light-emitting device display having a plurality of passive polymer layers 审中-公开
    用于形成具有多个被动聚合物层的有机发光器件显示器的方法和系统

    公开(公告)号:US20050158454A1

    公开(公告)日:2005-07-21

    申请号:US11071668

    申请日:2005-03-02

    摘要: A method of forming an organic light-emitting display on a substrate is disclosed, wherein the method includes forming a thin film transistor portion of the device on the substrate, wherein the thin film transistor portion includes control circuitry having an array of thin film transistors; and forming a light-emitting portion of the device over the thin film transistor portion, wherein the light-emitting portion includes an organic light-emitting layer, an electrode layer in electrical communication with the organic light-emitting layer, a polymer barrier layer disposed between the organic light-emitting layer and the electrode, and at least one other passive polymer layer, wherein the barrier layer and at least one other passive polymer layer are formed from a same polymer material.

    摘要翻译: 公开了一种在衬底上形成有机发光显示器的方法,其中该方法包括在衬底上形成器件的薄膜晶体管部分,其中薄膜晶体管部分包括具有薄膜晶体管阵列的控制电路; 以及在所述薄膜晶体管部分上形成所述器件的发光部分,其中所述发光部分包括有机发光层,与所述有机发光层电连通的电极层,设置有聚合物阻挡层 在有机发光层和电极之间以及至少一个其它被动聚合物层,其中阻挡层和至少一个其它被动聚合物层由相同的聚合物材料形成。

    METHOD OF ENCAPSULATING AN ORGANIC LIGHT EMITTING DEVICE
    6.
    发明申请
    METHOD OF ENCAPSULATING AN ORGANIC LIGHT EMITTING DEVICE 失效
    封装有机发光器件的方法

    公开(公告)号:US20080038986A2

    公开(公告)日:2008-02-14

    申请号:US11239988

    申请日:2005-09-30

    IPC分类号: H01J9/26 H01J9/32

    CPC分类号: H01L51/5253

    摘要: A method of forming an organic light emitting device on a substrate is provided, wherein the method includes forming an active device structure on the substrate, adhering a mask to the substrate, wherein the mask covers an electrical contact portion of the substrate while exposing the active device structure, forming an encapsulant layer over the active device structure and the mask, forming a separation between a portion of the encapsulant layer that covers the active device structure and a portion of the encapsulant layer that covers the mask, and removing the mask from the substrate.

    摘要翻译: 提供一种在衬底上形成有机发光器件的方法,其中该方法包括在衬底上形成有源器件结构,将掩模粘贴到衬底上,其中掩模覆盖衬底的电接触部分,同时暴露活性物质 在活性器件结构和掩模上形成密封剂层,在覆盖有源器件结构的封装剂层的一部分和覆盖掩模的封装剂层的一部分之间形成间隔, 基质。

    System for forming composite polymer dielectric film
    7.
    发明申请
    System for forming composite polymer dielectric film 有权
    用于形成复合聚合物电介质膜的系统

    公开(公告)号:US20050223989A1

    公开(公告)日:2005-10-13

    申请号:US10816179

    申请日:2004-03-31

    摘要: A system for depositing a composite polymer dielectric film on a substrate is disclosed, wherein the composite polymer dielectric film includes a low dielectric constant polymer layer disposed between a first silane-containing layer and a second silane-containing layer. The system includes a process module having a processing chamber and a monomer delivery system configured to admit a gas-phase monomer into the processing chamber for deposition of the low dielectric constant polymer layer, a post-treatment module for annealing the composite polymer dielectric film, and a silane delivery system configured to admit a vapor flow containing a silane precursor into at least one of the process module and the post-treatment module for the formation of the first silane-containing layer and the silane-containing layer.

    摘要翻译: 公开了一种用于在基板上沉积复合聚合物电介质膜的系统,其中复合聚合物电介质膜包括设置在第一含硅烷层和第二含硅烷层之间的低介电常数聚合物层。 该系统包括具有处理室和单体输送系统的处理模块,该单体输送系统构造成将气相单体进入处理室以沉积低介电常数聚合物层,用于退火复合聚合物电介质膜的后处理模块, 以及硅烷输送系统,其被构造成允许含有硅烷前体的蒸汽流进入至少一个工艺模块和后处理模块中,用于形成第一含硅烷层和含硅烷层。

    Method of encapsulating an organic light-emitting device
    10.
    发明申请
    Method of encapsulating an organic light-emitting device 失效
    封装有机发光装置的方法

    公开(公告)号:US20070105473A1

    公开(公告)日:2007-05-10

    申请号:US11271410

    申请日:2005-11-09

    IPC分类号: H05B33/10 H01L51/56

    摘要: A method of encapsulating an organic light-emitting device is disclosed, wherein the device includes a light-emitting portion and an electrical contact portion, the method including forming a polymer layer over the light-emitting portion and the electrical contact portion of the device; forming a separation in the polymer layer between a portion of the polymer layer disposed over the light-emitting portion of the device and a portion of the polymer layer disposed over the electrical contact portion of the device; adhering a film removal structure to the portion of the polymer layer disposed over the electrical contact portion of the device; and removing the film removal structure, thereby causing the removal of the portion of the polymer layer disposed over the electrical contact portion of the device.

    摘要翻译: 公开了一种封装有机发光器件的方法,其中该器件包括发光部分和电接触部分,该方法包括在器件的发光部分和电接触部分上形成聚合物层; 在所述聚合物层的设置在所述器件的发光部分之上的部分和设置在所述器件的电接触部分之上的聚合物层的一部分之间的聚合物层中形成分离; 将膜去除结构粘附到设置在所述器件的电接触部分上方的聚合物层的部分; 并去除膜去除结构,从而导致去除设置在器件的电接触部分上的聚合物层的部分。