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    METHODS AND APPARATUS FOR REDUCING THE CONSUMPTION OF REAGENTS IN ELECTRONIC DEVICE MANUFACTURING PROCESSES
    2.
    发明申请
    METHODS AND APPARATUS FOR REDUCING THE CONSUMPTION OF REAGENTS IN ELECTRONIC DEVICE MANUFACTURING PROCESSES 审中-公开
    减少电子设备制造过程中试剂消耗的方法和装置

    公开(公告)号：US20090017206A1

    公开(公告)日：2009-01-15

    申请号：US12140055

    申请日：2008-06-16

    申请人： Daniel O. Clark ,  Robert Z. Bachrach ,  Mehran Moalem ,  Jay J. Jung

    发明人： Daniel O. Clark ,  Robert Z. Bachrach ,  Mehran Moalem ,  Jay J. Jung

    IPC分类号： C23C16/44 ,  C23C16/54

    CPC分类号： C23C16/4412 ,  C23C16/45593

    摘要： A substrate coating system is provided which includes a substrate coating chamber; a gas box connected to the coating chamber and adapted to provide reagent gases to the coating chamber; and a reagent reclaim system connected to the substrate coating chamber and the gas box, wherein the reagent reclaim system includes a wet scrubber connected to the coating chamber; a polisher connected to the wet scrubber; and a dryer connected to the polisher and the gas box.

    摘要翻译： 提供了一种基材涂布系统，其包括基材涂布室; 连接到所述涂覆室并适于向所述涂覆室提供试剂气体的气体箱; 以及连接到所述基板涂覆室和所述气体箱的试剂回收系统，其中所述试剂回收系统包括连接到所述涂覆室的湿式洗涤器; 与湿式洗涤器连接的抛光机; 和连接到抛光机和气箱的干燥机。

    Systems and methods for treating flammable effluent gases from manufacturing processes
    4.
    发明授权
    Systems and methods for treating flammable effluent gases from manufacturing processes 有权
    用于处理来自制造过程的易燃废气的系统和方法

    公开(公告)号：US09387428B2

    公开(公告)日：2016-07-12

    申请号：US12365886

    申请日：2009-02-04

    申请人： Daniel O. Clark ,  Mehran Moalem ,  Robbert M. Vermeulen ,  Phil Chandler

    发明人： Daniel O. Clark ,  Mehran Moalem ,  Robbert M. Vermeulen ,  Phil Chandler

    IPC分类号： B01D53/00 ,  B01D53/40

    CPC分类号： B01D53/005 ,  B01D53/40 ,  B01D2257/108 ,  B01D2258/0216

    摘要： A system for treating flammable effluent gas is provided. The system includes an exhaust conduit to carry the flammable effluent gas to an abatement unit, a control system coupled to the abatement unit to determine an operating parameter of the abatement unit, a bypass valve coupled to the exhaust conduit which is an operative responsive to the monitoring system, and a source of second gas to be mixed with the effluent gas diverted from the abatement unit when the bypass valve is operating in a bypass mode to provide a mixed gas having a flammability lower than the effluent gas. Methods of the invention as well as numerous other aspects are provided.

    摘要翻译： 提供了一种处理易燃废气的系统。 该系统包括用于将可燃性流出气体运送到减排单元的排气管道，耦合到减排单元以确定减排单元的操作参数的控制系统;联接到排气管道的旁通阀，该旁通阀是响应于 监测系统，以及当旁通阀以旁通模式操作时与从减排单元转移的废气混合的第二气体源，以提供具有低于废气的可燃性的混合气体。 提供了本发明的方法以及许多其它方面。

    METHODS AND SYSTEMS FOR DESIGNING AND VALIDATING OPERATION OF ABATEMENT SYSTEMS
    5.
    发明申请
    METHODS AND SYSTEMS FOR DESIGNING AND VALIDATING OPERATION OF ABATEMENT SYSTEMS 审中-公开
    用于设计和确认退休系统操作的方法和系统

    公开(公告)号：US20090018688A1

    公开(公告)日：2009-01-15

    申请号：US12139472

    申请日：2008-06-14

    申请人： Phil Chandler ,  Daniel O. Clark ,  Robbert M. Vermeulen ,  Belynda Flippo ,  Mehran Moalem ,  Charles Murray

    发明人： Phil Chandler ,  Daniel O. Clark ,  Robbert M. Vermeulen ,  Belynda Flippo ,  Mehran Moalem ,  Charles Murray

    IPC分类号： G06F19/00

    CPC分类号： B01D53/346 ,  B01D2258/0216

    摘要： A method of developing an integrated abatement system is provided, including the steps: a) determining whether an integrated abatement system meets a destruction removal efficiency standard wherein the determination includes the steps: i) operating an electronic device manufacturing process tool using a best known method, whereby effluent containing a target species is produced; ii) abating the target species to form abated effluent, using an abatement system which is coupled to the process tool; and iii) calculating a destruction removal efficiency for the target species; and b) modifying the abatement system by altering at least one of a design parameter and an operating parameter of the abatement system to improve the destruction removal efficiency. Numerous other aspects are provided.

    摘要翻译： 提供了一种开发集成减排系统的方法，包括步骤：a）确定综合减排系统是否满足销毁去除效率标准，其中确定包括以下步骤：i）使用最佳已知方法操作电子设备制造工艺工具 由此产生含有目标物种的流出物; ii）使用与处理工具相连的减排系统来减轻目标物种以形成减排的流出物; 和iii）计算目标物种的破坏去除效率; 以及b）通过改变所述减排系统的设计参数和操作参数中的至少一个来改进所述减排系统，以提高所述破坏去除效率。 提供了许多其他方面。

    Methods and apparatus for treating exhaust gas in a processing system
    6.
    发明授权
    Methods and apparatus for treating exhaust gas in a processing system 有权
    在处理系统中处理废气的方法和装置

    公开(公告)号：US08747762B2

    公开(公告)日：2014-06-10

    申请号：US12957539

    申请日：2010-12-01

    申请人： Colin John Dickinson ,  Mehran Moalem ,  Daniel O. Clark

    发明人： Colin John Dickinson ,  Mehran Moalem ,  Daniel O. Clark

    IPC分类号： B01J19/08

    CPC分类号： B01D53/32 ,  B01D53/92 ,  B01D2258/0216 ,  B01D2259/122 ,  B01D2259/80 ,  B01D2259/818 ,  C23C16/4412

    摘要： Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, an apparatus for treating an exhaust gas in a foreline of a substrate processing system includes a plasma source coupled to a foreline of a process chamber, a reagent source coupled to the foreline upstream of the plasma source, and a foreline gas injection kit coupled to the foreline to controllably deliver a gas to the foreline, wherein the foreline injection kit includes a pressure regulator to set a foreline gas delivery pressure setpoint, and a first pressure gauge coupled to monitor a delivery pressure of the gas upstream of the foreline.

    摘要翻译： 本文提供了用于处理衬底处理系统的前级管线中的废气的方法和装置。 在一些实施例中，用于处理衬底处理系统的前级管线中的废气的装置包括耦合到处理室的前级管线的等离子体源，耦合到等离子体源上游的前级管线的试剂源和前级气体注入 前级管线注入套件包括用于设定前级气体输送压力设定点的压力调节器，以及耦合以监测前级管线上游气体的输送压力的第一压力表， 。

    SYSTEMS AND METHODS FOR TREATING FLAMMABLE EFFLUENT GASES FROM MANUFACTURING PROCESSES
    7.
    发明申请
    SYSTEMS AND METHODS FOR TREATING FLAMMABLE EFFLUENT GASES FROM MANUFACTURING PROCESSES 有权
    用于从制造过程中处理易燃气体的系统和方法

    公开(公告)号：US20090216061A1

    公开(公告)日：2009-08-27

    申请号：US12365886

    申请日：2009-02-04

    申请人： Daniel O. Clark ,  Mehran Moalem ,  Robbert M. Vermeulen ,  Phil Chandler

    发明人： Daniel O. Clark ,  Mehran Moalem ,  Robbert M. Vermeulen ,  Phil Chandler

    IPC分类号： A62D3/30 ,  B01J19/00

    CPC分类号： B01D53/005 ,  B01D53/40 ,  B01D2257/108 ,  B01D2258/0216

    摘要： A system for treating flammable effluent gas is provided. The system includes an exhaust conduit to carry the flammable effluent gas to an abatement unit, a control system coupled to the abatement unit to determine an operating parameter of the abatement unit, a bypass valve coupled to the exhaust conduit which is an operative responsive to the monitoring system, and a source of second gas to be mixed with the effluent gas diverted from the abatement unit when the bypass valve is operating in a bypass mode to provide a mixed gas having a flammability lower than the effluent gas. Methods of the invention as well as numerous other aspects are provided.

    摘要翻译： 提供了一种处理易燃废气的系统。 该系统包括用于将可燃性流出气体运送到减排单元的排气管道，耦合到减排单元以确定减排单元的操作参数的控制系统;联接到排气管道的旁通阀，该旁通阀是响应于 监测系统，以及当旁通阀以旁通模式操作时与从减排单元转移的废气混合的第二气体源，以提供具有低于废气的可燃性的混合气体。 提供了本发明的方法以及许多其它方面。

    Energy savings and global gas emissions monitoring and display
    9.
    发明授权
    Energy savings and global gas emissions monitoring and display 有权
    节能和全球气体排放监测和显示

    公开(公告)号：US09075408B2

    公开(公告)日：2015-07-07

    申请号：US12945869

    申请日：2010-11-14

    申请人： Youssef A. Loldj ,  Maxime Cayer ,  Jay J. Jung ,  Shaun Crawford ,  Dana Tribula ,  Daniel O. Clark

    发明人： Youssef A. Loldj ,  Maxime Cayer ,  Jay J. Jung ,  Shaun Crawford ,  Dana Tribula ,  Daniel O. Clark

    IPC分类号： G06F19/00 ,  G05B19/042 ,  G05B19/045

    CPC分类号： G05B19/042 ,  G05B19/045 ,  G05B2219/23316 ,  G05B2219/2612

    摘要： Methods and apparatus for enhanced control, monitoring and recording of incoming chemical and power use, and emissions of electronic device manufacturing systems are provided. In some embodiments, integrated sub-fab system systems may monitor the energy usage of the sub-fab equipment. The tool can enter many different depths of energy savings modes such as idle (shallow energy savings where production equipment can recover to normal production with no quality or throughput impact in seconds), sleep (deeper energy savings where production equipment can recover in minutes), or hibernate (where production equipment may require hours to recover not to have impact on quality, or throughput) for the system. In some embodiments, the system may monitor and display all gas emissions in a sub-fab as well as the Semi S23 method reporting of CO2 equivalent emission. The system may monitor effluent process gases and energy use from the process tool and sub-fab equipment.

    摘要翻译： 提供了用于增强控制，监控和记录进入的化学和电力使用以及电子设备制造系统的排放的方法和装置。 在一些实施例中，集成子晶圆厂系统系统可以监视子晶圆厂设备的能量使用。 该工具可以进入许多不同深度的节能模式，例如空闲（生产设备可以恢复到正常生产，质量或吞吐量影响在几秒钟内）的轻微节能，睡眠（生产设备可以在几分钟内恢复更深的节能）， 或休眠（生产设备可能需要几个小时才能恢复，不影响质量或吞吐量）。 在一些实施例中，系统可以监测和显示子晶圆中的所有气体排放以及报告二氧化碳当量排放的半S23方法。 该系统可以从过程工具和辅助设备设备监测废气处理气体和能源使用。