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公开(公告)号：US20040240489A1
公开(公告)日：2004-12-02
申请号：US10857547
申请日：2004-06-01
发明人： Yuichi Teramura , Fusao Yamanaka , Yoji Okazaki
IPC分类号： H01S003/30
CPC分类号： G03F7/70216 , G02B6/08 , G02B19/0014 , G02B19/0057 , G02B27/0994 , G03F7/70025 , H01S5/005 , H01S5/02216 , H01S5/02284 , H01S5/02292 , H01S5/4012 , H01S5/4025
摘要： In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation: 1 cladding thickness null null null h null ( emission null null null light null null null amount of null null null one null null null laser null null null module null null null W required intensity null null null C null packing ratio null null null P - core diameter null null null t ) null 2 As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.
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公开(公告)号：US20030226834A1
公开(公告)日：2003-12-11
申请号：US10456741
申请日：2003-06-09
发明人： Hiromi Ishikawa , Akinori Harada , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hideo Yamanaka , Hiromitsu Yamakawa
IPC分类号： B23K026/00 , H01L021/00 , H01L021/84
CPC分类号： B23K26/0608 , B23K26/0604 , C23C14/28 , C23C16/483
摘要： A laser annealer has a laser light source with at least one GaN-type semiconductor laser and is configured so as to form emission points that emit laser beams having a wavelength of 350 to 450 nm, and a scanning device for scanning an annealing surface with the laser beams. The laser annealer may have a spatial light modulator for modulating the laser beams, and in which pixel portions whose light modulating states change in accordance with control signals are arranged on a substrate. The invention is applied to a laser thin-film forming apparatus. The apparatus has a laser source that has at least one semiconductor laser and is configured so as to form emission points, and an optical system for focusing laser beams into a single beam in the width direction of a substrate.
摘要翻译： 激光退火炉具有具有至少一个GaN型半导体激光器的激光光源，并且被配置为形成发射波长为350至450nm的激光束的发射点，以及用于扫描退火表面的扫描装置 激光束。 激光退火炉可以具有用于调制激光束的空间光调制器，并且其中光调制状态根据控制信号改变的像素部分被布置在基板上。 本发明应用于激光薄膜形成装置。 该装置具有至少一个半导体激光器并且被配置为形成发射点的激光源，以及用于将激光束在基板的宽度方向上聚焦成单个光束的光学系统。
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公开(公告)号：US20030214571A1
公开(公告)日：2003-11-20
申请号：US10409686
申请日：2003-04-09
IPC分类号： B41J002/47
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
摘要翻译： 在本发明的曝光装置中，对于空间光调制器，利用根据曝光信息生成的控制信号来控制少于像素部分总数的多个像素部分中的每一个。 即，在不控制基板上的整个像素部分的情况下，控制像素部分的一部分。 因此，像素部分中的像素数量减少，并且控制信号的传送时间变短。 这使得能够增加激光束的调制速度并执行高速曝光。 其中激光束并入并撞击在光纤上的并入的激光光源优于激光装置。 通过采用所结合的激光光源，可以获得高亮度和高输出，并且优选空间光调制器的曝光。 由于光纤阵列获得的光纤很少，所以成本低。 由于光纤的数量少，所以在配置光纤时，发光区域进一步降低。
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公开(公告)号：US20020048299A1
公开(公告)日：2002-04-25
申请号：US09987051
申请日：2001-11-13
发明人： Hiroaki Hyuga , Yoji Okazaki
IPC分类号： H01S003/16 , H01S003/08
CPC分类号： H01S3/1062 , H01S3/0405 , H01S3/109 , H01S3/1673
摘要： A solid laser produces a laser beam of a 1 nullm wavelength band with an Nd-doped solid laser medium. An oscillation mode is brought to a single longitudinal mode with a Fabry-Pnullrot etalon located within a resonator. An etalon thickness, an etalon reflectivity, an etalon inclination, and a resonator longitudinal mode interval satisfy the relationships, 1.2%nullRNnull15% and 0.5nullnullnullnull2.0null, in which RN represents an effective reflectivity of the etalon with respect to wavelengths nullnullnull0nullnullnullc deviating by a resonator longitudinal mode interval nullnullc from a resonance wavelength null0 of the etalon, and null represents an inclination of an etalon optical axis with respect to a resonator optical axis.
摘要翻译： 固体激光器产生具有Nd掺杂固体激光介质的1mum波长带的激光束。 使用位于谐振器内的法布里 - 佩舍尔标准具将振荡模式带到单一纵向模式。 标准具厚度，标准准子反射率，标准准则倾斜度和谐振器纵向模式间隔满足关系：1.2％<= RN <= 15％和0.5°<=θ<= 2.0°，其中RN表示 与谐振器纵模间隔DELTAlambdc从标准具的谐振波长lambd0偏离的波长lambd = lambd0±DELTAlambdc的标准具，θ表示标准具光轴相对于谐振器光轴的倾斜度。
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公开(公告)号：US20040066812A1
公开(公告)日：2004-04-08
申请号：US10671780
申请日：2003-09-29
发明人： Kazuhiko Nagano , Yoji Okazaki
IPC分类号： H01S003/04
CPC分类号： H01S5/02453 , H01S5/02208 , H01S5/02284 , H01S5/0612 , H01S5/06213 , H01S5/06825 , H01S5/32341 , H01S5/4012 , H01S5/4031
摘要： In a method for stabilizing an optical output of a semiconductor laser: the semiconductor laser is heated with a heater when the semiconductor laser is not in operation; and the heating of the semiconductor laser is stopped, or the amount of heat supplied to the semiconductor laser is lowered, almost simultaneously with startup of the semiconductor laser.
摘要翻译： 一种用于稳定半导体激光器的光输出的方法：当半导体激光器不工作时，用加热器加热半导体激光器; 并且与半导体激光器的启动几乎同时半导体激光器的加热停止，或者提供给半导体激光器的热量降低。
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6.发明申请Laser apparatus, exposure head, exposure apparatus, and optical fiber connection method 失效激光装置，曝光头，曝光装置和光纤连接方法公开(公告)号：US20040022503A1
公开(公告)日：2004-02-05
申请号：US10409675
申请日：2003-04-09
IPC分类号： G02B006/255
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
摘要翻译： 束状纤维光源的光纤是芯直径均匀但发射端包层直径比其入射端包层直径小的光纤，其发光区域变小。 来自通过透镜系统并入射到DMD上的该较高亮度束状光纤光源的光通量的角度较小，即使照明NA更小。 因此，入射在要曝光的表面上的通量角较小。 也就是说，可以在不增加图像形成NA的情况下获得微小的图像形成光束，焦点深度被延长。
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公开(公告)号：US20030214987A1
公开(公告)日：2003-11-20
申请号：US10405931
申请日：2003-04-03
IPC分类号： H01S003/04 , H01S005/00
CPC分类号： H01S5/4012 , H01L2224/48091 , H01S5/0021 , H01S5/02212 , H01S5/0222 , H01S5/02284 , H01S5/32341 , H01S5/4031 , H01L2924/00014
摘要： In a disclosed laser module, a usage amount of organic adhesive is set to no more than 1.0 g/ml. Thus, an equilibrium density of outgas components from the adhesive after an air removal treatment is less than 1000 ppm. In another laser module, a heat sink at which a semiconductor laser element is adhered on a submount, an electrode terminal wire-connected with the laser element, a photodiode wire-connected with the electrode terminal, and a zeolite adsorbent are fixedly provided on a stem. These are ring-welded in a container in a dry air atmosphere (80% nitrogen, 20% oxygen). In still another laser module, sixteen multiplexed lasers are disposed in a container. The container is connected with an air circulation apparatus, which is provided with a filter for removing contaminants, a rotary pump for circulating inert gas, and a valve for controlling replenishment of the gas.
摘要翻译： 在公开的激光模块中，将有机粘合剂的使用量设定为不超过1.0g / ml。 因此，除气处理后的粘合剂的气体组分的平衡密度小于1000ppm。 在另一激光模块中，将半导体激光元件粘附在基座上的散热器，与激光元件连接的电极端子，与电极端子连接的光电二极管和沸石吸附剂固定地设置在 干。 它们在干燥空气气氛（80％氮气，20％氧气）中在容器中环焊。 在另一个激光模块中，十六个复用激光器设置在容器中。 容器与具有用于除去污染物的过滤器，用于循环惰性气体的旋转泵和用于控制气体补充的阀的空气循环装置连接。
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公开(公告)号：US20030052105A1
公开(公告)日：2003-03-20
申请号：US10236930
申请日：2002-09-09
发明人： Kazuhiko Nagano , Yoji Okazaki
IPC分类号： B23K026/02
CPC分类号： B23K26/0665 , B23K26/0604 , B23K26/0613 , B23K26/0643 , B23K26/0648 , B29C64/153 , B33Y30/00 , H01S3/067 , H01S3/0941 , H01S3/109 , H01S3/1613 , H01S3/1653 , H01S5/32341
摘要： A laser sintering apparatus for realizing high-speed and high-precision forming. When a first position of an exposure unit is decided by an XY-positioning mechanism, a micromirror of a DMD is turned on and off in accordance with image data in a region corresponding to the first position and a laser beam in a predetermined region including ultraviolet is supplied to the DMD and modulated for each pixel in accordance with image data. A laser beam reflected in the direction of a reflection mirror is reflected therefrom in the direction of a surface of a powdered body. A region having a predetermined area on the surface of the powdered body is exposed by the laser beam, and the exposed portion is thereby cured. Similarly, by repeating movement of and exposure with the exposure unit, the entire surface of the powdered body is exposed.
摘要翻译： 一种用于实现高速高精度成形的激光烧结装置。 当通过XY定位机构确定曝光单元的第一位置时，根据包括紫外线的预定区域中的与第一位置相对应的区域和激光束的图像数据，DMD的微镜被打开和关闭 被提供给DMD并且根据图像数据针对每个像素进行调制。 在反射镜的方向上反射的激光束从粉末体的表面的方向反射。 在该粉体的表面上具有规定面积的区域被激光束曝光，露出部由此固化。 类似地，通过重复曝光单元的移动和曝光，粉末体的整个表面被暴露。
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9.发明申请Laser-diode-excited laser apparatus, fiber laser apparatus, and fiber laser amplifier in which laser medium doped with one of Ho3+, Sm3+, Eu3+, Dy3+, Er3+, and Tb3+ is excited with GaN-based compound laser diode 失效激光二极管激光装置，光纤激光装置和光纤激光放大器，其中掺杂有Ho3 +，Sm3 +，Eu3 +，Dy3 +，Er3 +和Tb3 +之一的激光介质被GaN基复合激光二极管公开(公告)号：US20020172251A1
公开(公告)日：2002-11-21
申请号：US10143806
申请日：2002-05-14
发明人： Hisashi Ohtsuka , Yoji Okazaki , Takayuki Katoh
IPC分类号： H01S003/091 , H01S003/094
CPC分类号： H01S3/067 , H01S3/025 , H01S3/0405 , H01S3/042 , H01S3/0602 , H01S3/09415 , H01S3/109 , H01S3/1603 , H01S3/161 , H01S3/1615 , H01S5/32341 , H01S2302/00
摘要： A solid-state laser crystal constituting a laser-diode-excited solid-state laser apparatus or an optical fiber constituting a fiber laser apparatus or fiber laser amplifier is doped with one of Ho3null, Sm3null, Eu3null, Dy3null, Er3null, and Tb3null so that a laser beam is emitted from the solid-state laser crystal or the optical fiber, or incident light of the fiber laser amplifier is amplified, by one of the transitions from 5S2 to 5I7, from 5S2 to 5I8, from 4G5/2 to 6H5/2, from 4G5/2 to 6H7/2, from 4F3/2 to 6H11/2, from 5D0 to 7F2, from 4F9/2 to 6H13/2, from 4F9/2 to 6H11/2, from 4S3/2 to 4I15/2, from 2H9/2 to 4I13/2, and from 5D4 to 7F5. The above solid-state laser crystal or optical fiber is excited with a GaN-based compound laser diode.
摘要翻译： 构成激光二极管激发的固态激光装置的固态激光晶体或构成光纤激光装置或光纤激光放大器的光纤掺杂有Ho3 +，Sm3 +，Eu3 +，Dy3 +，Er3 +和Tb3 +之一，使得 激光束从固体激光晶体或光纤发射，或光纤激光放大器的入射光被放大，从5S2到5I7的转换之一，从5S2到5I8，从4G5 / 2到6H5 / 2，从4G5 / 2到6H7 / 2，从4F3 / 2到6H11 / 2，从5D0到7F2，从4F9 / 2到6H13 / 2，从4F9 / 2到6H11 / 2，从4S3 / 2到4I15 / 2，从2H9 / 2到4I13 / 2，从5D4到7F5。 上述固态激光晶体或光纤被GaN基复合激光二极管激发。
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10.发明申请Optical recording method, apparatus, system and medium using high-power laser light 失效使用大功率激光的光记录方法，装置，系统和介质公开(公告)号：US20020126200A1
公开(公告)日：2002-09-12
申请号：US10144863
申请日：2002-05-15
发明人： Toshiro Hayakawa , Nobufumi Mori , Yoji Okazaki , Hiroyuki Hiiro
IPC分类号： B41J002/47
CPC分类号： B41J2/442
摘要： An optical recording method in which an effective recording sensitivity in the recording of image information on a photosensitive material is raised, whereby a productivity is enhanced owing to lowered energy (laser power) required for the recording or a heightened recording speed. An image is recorded by projecting a light beam onto the photosensitive material formed on a base material backing. The optical recording method includes the steps of: (a) successively outputting pulse light whose duty factor is at most 50%, from a light source; (b) modulating the pulse light output from the light source, in accordance with an image signal, and then projecting the modulated pulse light onto the photosensitive material; and (c) recording the image by causing the pulse light to scan the photosensitive material.
摘要翻译： 提高了在感光材料上记录图像信息时的有效记录灵敏度的光记录方法，由于记录所需的能量（激光功率）降低或记录速度提高，从而提高了生产率。 通过将光束投影到形成在基材背衬上的感光材料上来记录图像。 光记录方法包括以下步骤：（a）从光源连续输出占空比最多为50％的脉冲光; （b）根据图像信号调制从光源输出的脉冲光，然后将调制的脉冲光投射到感光材料上; 和（c）通过使脉冲光扫描感光材料来记录图像。
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