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1.
公开(公告)号:US20170256700A1
公开(公告)日:2017-09-07
申请号:US15600395
申请日:2017-05-19
Applicant: FUJIFILM Corporation
Inventor: Naoki MURAKAMI
IPC: H01L41/316 , H01L41/09 , B41J2/14 , H01L41/08 , B41J2/045 , H01L41/187 , C04B35/493
CPC classification number: H01L41/316 , B41J2/045 , B41J2/14233 , B41J2/14274 , B41J2202/03 , C01G33/006 , C01P2002/34 , C01P2002/50 , C01P2002/72 , C01P2002/74 , C01P2006/40 , C04B35/493 , C04B35/62218 , C04B2235/3251 , C04B2235/3418 , C04B2235/6584 , C04B2235/768 , C04B2235/80 , C23C14/08 , H01L41/0805 , H01L41/09 , H01L41/187
Abstract: Provided is a piezoelectric film formed by a vapor phase growth method, the piezoelectric film containing:a perovskite oxide in which a perovskite oxide represented by the following formula P is doped with Si in an amount of from 0.2 mol % to less than 0.5 mol %, wherein a ratio of a peak intensity of a pyrochlore phase to a sum of peak intensities in respective plane orientations of (100), (001), (110), (101) and (111) of a perovskite phase measured by an X-ray diffraction method is 0.25 or less: A1+δ[(ZrxTi1−a)1−aNba]Oy Formula P wherein, in formula P, A is an A-site element primarily containing Pb; Zr, Ti, and Nb are B-site elements; x is more than 0 but less than 1; a is 0.1 or more but less than 0.3.
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2.
公开(公告)号:US20170157931A1
公开(公告)日:2017-06-08
申请号:US15439564
申请日:2017-02-22
Applicant: FUJIFILM Corporation
Inventor: Naoki MURAKAMI , Takami ARAKAWA , Takamichi FUJII
CPC classification number: B41J2/14209 , B41J2/14233 , B41J2/1607 , B41J2/1646 , C01G33/00 , C01P2002/34 , C01P2002/72 , C04B35/493 , C04B2235/3251 , C04B2235/76 , C04B2235/765 , C04B2235/768 , C04B2235/787 , C23C14/00 , C23C14/08 , C23C14/088 , C23C14/3471 , H01L41/00 , H01L41/047 , H01L41/0805 , H01L41/0973 , H01L41/183 , H01L41/1876 , H01L41/316
Abstract: A piezoelectric film of the present invention is a piezoelectric film including a perovskite oxide represented by the following formula (P), in which crystal phases of the perovskite oxide include tetragonal crystals and rhombohedral crystals at a ratio that satisfies the following formula (1). A1+δ[(ZrxTi1-x)1-aNba]Oy (P) 0.70≦rhombohedral crystals/(rhombohedral crystals+tetragonal crystals)≦0.95 (1), where, in the formula (P), A is an A-site element primarily containing Pb, and Zr, Ti, and Nb are B-site elements. x is equal to or higher than 0.4 and lower than 1, excluding x of equal to or higher than 0.51 and equal to or lower than 0.53. a is equal to or higher than 0.08.
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3.
公开(公告)号:US20200006622A1
公开(公告)日:2020-01-02
申请号:US16560325
申请日:2019-09-04
Applicant: FUJIFILM Corporation
Inventor: Naoki MURAKAMI , Daigo SAWAKI
IPC: H01L41/187 , H01L41/316 , C01G33/00 , C23C14/08 , C23C14/34
Abstract: To provide a piezoelectric body film and a piezoelectric element from which an excellent piezoelectric characteristic can be obtained even in a high-temperature environment and a method for manufacturing a piezoelectric element.A piezoelectric body film of the present invention is a piezoelectric body film containing a perovskite-type oxide represented by Formula (1), in which a content q of Nb with respect to the number of all atoms in the perovskite-type oxide and a ratio r of a diffraction peak intensity from a (200) plane to a diffraction peak intensity from a (100) plane of the perovskite-type oxide, which is measured using an X-ray diffraction method, satisfy Formula (2), Formula (1) A1+δ[(ZryTi1-y)1-xNbx]O2, Formula (2) 0.35≤r/q
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4.
公开(公告)号:US20190097121A1
公开(公告)日:2019-03-28
申请号:US16199296
申请日:2018-11-26
Applicant: FUJIFILM Corporation
Inventor: Daigo SAWAKI , Naoki MURAKAMI
IPC: H01L41/08 , H01L41/187 , H01L41/047 , H01L41/314
Abstract: Provided is a piezoelectric film that has a perovskite structure preferentially oriented to a (100) plane and that comprises a composite oxide represented by the following compositional formula: Pba[(ZrxTi1-x)1-yNby]bO3 wherein 0
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公开(公告)号:US20210392453A1
公开(公告)日:2021-12-16
申请号:US17460571
申请日:2021-08-30
Applicant: FUJIFILM Corporation
Inventor: Naoki MURAKAMI , Tetsu MIYOSHI
IPC: H04R31/00 , H01L41/257 , G10H3/14 , H04R17/02 , H04R17/00
Abstract: Provided are an electroacoustic transduction film capable of reproducing a sound with a sufficient sound volume at a high conversion efficiency, a manufacturing method thereof, an electroacoustic transducer, a flexible display, a vocal cord microphone, and a sensor for a musical instrument. The electroacoustic transduction film includes: a polymer composite piezoelectric body in which piezoelectric body particles are dispersed in a viscoelastic matrix formed of a polymer material having viscoelasticity at a normal temperature; two thin film electrodes laminated on both surfaces of the polymer composite piezoelectric body; and two protective layers respectively laminated on the two thin film electrodes, in which an intensity ratio α1=(002) plane peak intensity/((002) plane peak intensity+(200) plane peak intensity) between a (002) plane peak intensity and a (200) plane peak intensity derived from the piezoelectric body particles in a case where the polymer composite piezoelectric body is evaluated by an X-ray diffraction method is more than or equal to 0.6 and less than 1.
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公开(公告)号:US20180254406A1
公开(公告)日:2018-09-06
申请号:US15968522
申请日:2018-05-01
Applicant: FUJIFILM Corporation
Inventor: Naoki MURAKAMI , Takamichi FUJII , Takami ARAKAWA
IPC: H01L41/187 , B41J2/14 , B41J2/175 , H01L41/09
CPC classification number: H01L41/1876 , B41J2/14 , B41J2/14233 , B41J2/175 , B41J2202/03 , B41J2202/21 , H01L41/09 , H01L41/187
Abstract: The piezoelectric film includes a perovskite oxide which is represented by General Formula P, A1+δB1-x-yNbxNiyOz General Formula P where A contains at least Pb, B contains at least Zr and Ti, and x and y respectively satisfy 0.1≤x≤0.3 and 0≤y≤0.75x. Although standard values of δ and z are δ=0 and z=3, these values may deviate from the standard values in a range in which a perovskite structure is capable of being obtained.
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公开(公告)号:US20130233382A1
公开(公告)日:2013-09-12
申请号:US13872847
申请日:2013-04-29
Applicant: FUJIFILM CORPORATION
Inventor: Hiroyuki KOBAYASHI , Toshiaki FUKUNAGA , Naoki MURAKAMI
IPC: H01L31/0392
CPC classification number: H01L31/03923 , H01L31/022425 , Y02E10/541
Abstract: A photoelectric conversion device, which includes, on a substrate, a layered structure of a conductive layer formed by a transition metal element, a photoelectric conversion layer formed by a compound semiconductor containing a group Ib element, a group IIIb element and a group VIb element, and a transparent electrode, further includes a transition metal dichalcogenide thin film formed by the transition metal element and the group VIb element between the conductive layer and the photoelectric conversion layer. 80% or less of lot of crystallites forming the transition metal dichalcogenide thin film and occupying the surface of the conductive layer, on which the thin film is formed, have the c-axes thereof oriented substantially perpendicular to the surface of the conductive layer.
Abstract translation: 一种光电转换装置,在基板上包括由过渡金属元素形成的导电层的层叠结构,由含有Ib族元素,IIIb族元素和VIb族元素的化合物半导体形成的光电转换层 和透明电极,还包括由所述过渡金属元素形成的过渡金属二硫属元素化物薄膜和所述导电层与所述光电转换层之间的VIb族元素。 形成过渡金属二硫属元素化薄膜的微晶的80%以下,占据其上形成有薄膜的导电层的表面,其c轴取向为基本上垂直于导电层的表面。
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公开(公告)号:US20200066494A1
公开(公告)日:2020-02-27
申请号:US16669514
申请日:2019-10-31
Applicant: FUJIFILM CORPORATION
Inventor: Naoki MURAKAMI , Shuji TAKAHASHI
IPC: H01J37/32 , C23C14/34 , H01J37/34 , H01L41/316
Abstract: A film forming device includes an adhesion preventing mechanism in a film formation chamber, in which the adhesion preventing mechanism is configured with a plurality of adhesion preventing plates including at least a substrate edge adhesion preventing plate that is provided on an edge of a region on the substrate holding portion where the substrate is provided and a substrate outer peripheral region adhesion preventing plate that is disposed on an outer periphery of the substrate edge adhesion preventing plate to be spaced from the substrate edge adhesion preventing plate, a potential adjusting mechanism that is electrically connected to any one of the substrate edge adhesion preventing plate or the substrate outer peripheral region adhesion preventing plate is provided, and the adhesion preventing plate connected to the potential adjusting mechanism and an adhesion preventing plate disposed adjacent thereto are disposed at an interval of 0.5 mm to 3.0 mm.
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公开(公告)号:US20190157542A1
公开(公告)日:2019-05-23
申请号:US16208343
申请日:2018-12-03
Applicant: FUJIFILM Corporation
Inventor: Naoki MURAKAMI , Daigo SAWAKI
IPC: H01L41/187 , C01G33/00 , C23C14/08 , C23C16/40 , H01L41/047 , H01L41/316 , H01L41/08
CPC classification number: H01L41/1876 , C01F17/00 , C01G25/00 , C01G33/00 , C01G33/006 , C01P2002/34 , C01P2002/54 , C01P2002/72 , C01P2006/40 , C23C14/08 , C23C16/40 , H01L41/047 , H01L41/0805 , H01L41/09 , H01L41/187 , H01L41/316
Abstract: In the piezoelectric film including a perovskite oxide which is represented by General Formula P, 0.1≤x≤0.3 and 0
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公开(公告)号:US20180160248A1
公开(公告)日:2018-06-07
申请号:US15868146
申请日:2018-01-11
Applicant: FUJIFILM Corporation
Inventor: Naoki MURAKAMI , Tetsu MIYOSHI
CPC classification number: H04R31/003 , G10H3/14 , G10H3/143 , G10H2220/535 , G10H2220/541 , G10H2220/551 , G10H2220/555 , H01L41/183 , H01L41/257 , H04R1/46 , H04R7/10 , H04R17/005 , H04R17/02 , H04R2307/023 , H04R2307/025 , H04R2499/15
Abstract: Provided are an electroacoustic transduction film capable of reproducing a sound with a sufficient sound volume at a high conversion efficiency, a manufacturing method thereof, an electroacoustic transducer, a flexible display, a vocal cord microphone, and a sensor for a musical instrument. The electroacoustic transduction film includes: a polymer composite piezoelectric body in which piezoelectric body particles are dispersed in a viscoelastic matrix formed of a polymer material having viscoelasticity at a normal temperature; two thin film electrodes laminated on both surfaces of the polymer composite piezoelectric body; and two protective layers respectively laminated on the two thin film electrodes, in which an intensity ratio α1=(002) plane peak intensity/((002) plane peak intensity+(200) plane peak intensity) between a (002) plane peak intensity and a (200) plane peak intensity derived from the piezoelectric body particles in a case where the polymer composite piezoelectric body is evaluated by an X-ray diffraction method is more than or equal to 0.6 and less than 1.
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