Method and apparatus for recording information on a recording surface
through the use of mists
    1.
    发明授权
    Method and apparatus for recording information on a recording surface through the use of mists 失效
    通过使用雾记录在记录表面上的信息的方法和装置

    公开(公告)号:US3974769A

    公开(公告)日:1976-08-17

    申请号:US581058

    申请日:1975-05-27

    摘要: A first mist having at least one material is selectively applied to selected portions of a recording surface to form desired characters or other information thereon. A second mist of a material which reacts with the one material is applied to the recording surface. The reaction of the two materials forms a compound on the selected portions of the recording surface having a sufficient contrast with the recording surface to produce characters or other information on the recording surface. If the one material has an ink applied therewith to the recording surface, the material in the second mist reacts with the one material to enhance the contrast of the ink on the recording surface.

    摘要翻译: 具有至少一种材料的第一雾被选择性地施加到记录表面的选定部分以形成所需的字符或其它信息。 将与该材料反应的材料的第二雾施加到记录表面。 两种材料的反应在记录表面的选定部分上形成与记录表面具有足够对比度的化合物,以在记录表面上产生字符或其他信息。 如果一种材料将油墨施加到记录表面上,则第二雾中的材料与一种材料反应,以增强记录表面上的油墨的对比度。

    Method of making high density semiconductor structure
    2.
    发明授权
    Method of making high density semiconductor structure 失效
    制造高密度半导体结构的方法

    公开(公告)号:US5168078A

    公开(公告)日:1992-12-01

    申请号:US631671

    申请日:1990-12-21

    IPC分类号: H01L23/48 H01L23/535

    摘要: A method of forming a high density semiconductor structure including one or more buried metal layers. One or more metal layers may be formed on a first semiconductor substrate, with the metal layer or layers being insulated from one another and from the substrate. One or more metal layers may be formed on the surface of a second substrate which may or may not be a semiconductor substrate. The topmost metal layers, either or both of which may have an insulating layer thereon, are placed in contact and heated in an oxidizing ambient atmosphere to form a bond therebetween. One or more vias connect the buried metal layers to the active devices in the substrates. The buried metal layers may form buried power and ground planes and buried metallization patterns for device interconnection.

    摘要翻译: 一种形成包括一个或多个掩埋金属层的高密度半导体结构的方法。 一个或多个金属层可以形成在第一半导体衬底上,金属层彼此绝缘并且与衬底绝缘。 可以在可以是半导体衬底也可以不是半导体衬底的第二衬底的表面上形成一个或多个金属层。 将其中的一个或两者中的一个或两个可以具有绝缘层的最顶层金属层放置在接触中并在氧化环境气氛中加热以在它们之间形成结合。 一个或多个通孔将掩埋的金属层连接到基板中的有源器件。 掩埋金属层可以形成掩埋电源和接地层以及用于器件互连的掩埋金属化图案。

    Metal-organic chemical vapor deposition for repairing broken lines in
microelectronic packages
    3.
    发明授权
    Metal-organic chemical vapor deposition for repairing broken lines in microelectronic packages 失效
    金属有机化学气相沉积在微电子封装中修复断线

    公开(公告)号:US5145714A

    公开(公告)日:1992-09-08

    申请号:US605688

    申请日:1990-10-30

    摘要: A thermally activated method of depositing a metal on a localized microscopic portion of a substrate, that can be carried out at relatively low process temperatures, and that is particularly useful for depositing metals in an amount and purity sufficient for electrical conductivity on substrates containing microelectronic circuits and devices or their respective precursors. The method comprises heating a substrate in the presence of a vaporized metal-organic composition to a first temperature that is just below the temperature at which the vaporized metal-organic composition will dissociate into a metal and an organic-containing portion, and then raising the temperature of a localized portion of the heated substrate from the first temperature to a second, higher temperature at which the vaporized metal-organic composition will dissociate into a metal and an organic-containing portion but below the temperature at which the organic-containing portion will decompose to produce and deposit organic decomposition products upon the localized portion, and until an amount of the dissociated metal sufficient for electrical conductivity deposits upon the localized portion.

    摘要翻译: 一种热激活的方法,其在基底的局部微观部分上沉积金属,其可以在相对较低的工艺温度下进行,并且特别适用于在含有微电子电路的基底上沉积足够导电性的量和纯度的金属 设备或其各自的前体。 该方法包括在蒸发的金属 - 有机组合物的存在下将基底加热至刚好低于蒸发的金属 - 有机组合物将分解成金属和含有机物部分的温度的第一温度,然后将 被加热的衬底的局部部分的温度从第一温度升至第二较高的温度,在此温度下蒸发的金属 - 有机组合物将分解成金属和含有机物的部分,但低于含有有机物部分的温度 分解产生并将有机分解产物沉积在局部部分上,并且直到一定量的离解金属足以导电沉积在局部部分上。

    Method for selectively depositing material on substrates
    4.
    发明授权
    Method for selectively depositing material on substrates 失效
    在衬底上选择性地沉积材料的方法

    公开(公告)号:US5112439A

    公开(公告)日:1992-05-12

    申请号:US585238

    申请日:1990-11-14

    摘要: An alternating cyclic (A.C.) method for selectively depositing materials, on the surface of a substrate without depositing the material on an adjacent mask layer. A gas of a reducible compound of the material and a reducing gas, preferably hydrogen, are simultaneously flowed through a reaction chamber to deposit the material on the substrate surface and to a lesser extent on the mask layer. Then, the flow of reducing gas is interrupted to cause the reducible compound gas to etch the material which forms on the mask layer in a disproportionation reaction. The deposition and etch steps are repeated in an alternating cyclic fashion until the requisite thickness is deposited. The process may take place in a single reaction chamber, using only the reducible compound gas and pulsed flow of the reducing gas.

    摘要翻译: 用于在衬底的表面上选择性地沉积材料的交替循环(A.C.)方法,而不在相邻掩模层上沉积材料。 材料的可还原化合物和还原气体(优选氢气)的气体同时流过反应室,以将材料沉积在衬底表面上并在较小程度上沉积在掩模层上。 然后,中和还原气体的流动导致可还原化合物气体在歧化反应中蚀刻在掩模层上形成的材料。 以交替的循环方式重复沉积和蚀刻步骤,直到沉积必需的厚度。 该过程可以在单个反应室中进行,仅使用可还原的化合物气体和还原气体的脉冲流。

    Ink jet nozzle
    8.
    发明授权
    Ink jet nozzle 失效
    喷墨喷嘴

    公开(公告)号:US4007464A

    公开(公告)日:1977-02-08

    申请号:US543600

    申请日:1975-01-23

    摘要: In an ink jet printing system, a single nozzle or an array of nozzles are etched in a semiconductor material such as silicon. Each nozzle has polygonal or N-sided entrance and exit apertures of different cross-sectional area. Preferably, the nozzle is in the shape of a truncated pyramid with the entrance and exit apertures being substantially square in cross-section. The corners of the apertures and wall interfaces may be rounded to reduce stress concentrations.

    摘要翻译: 在喷墨打印系统中,在诸如硅的半导体材料中蚀刻单个喷嘴或喷嘴阵列。 每个喷嘴具有不同横截面积的多边形或N侧入口和出口孔。 优选地,喷嘴是截头棱锥的形状,其中入口孔和出口孔的横截面基本上是正方形。 孔和壁界面的角可以是圆形的以减少应力集中。

    Method of interconnecting wiring planes
    9.
    发明授权
    Method of interconnecting wiring planes 失效
    互连布线方法

    公开(公告)号:US4667404A

    公开(公告)日:1987-05-26

    申请号:US781982

    申请日:1985-09-30

    摘要: A microelectronics apparatus and a method of fabricating customized connections between wiring planes superposed on a substrate is disclosed. A first wiring plane having multiple conductors is formed upon the substrate. An insulating layer is formed that overlies and electrically insulates the first wiring plane. A second wiring plane having multiple conductors is formed above the insulating layer by forming multiple conductors that are electrically connected to the first wiring plane with selected conductors of the first wiring plane being electrically connected to selected conductors of the second wiring plane. The connections may be modified by breaking selected ones of the electrical connections between the first and second wiring planes to customize the electrical interconnections.

    摘要翻译: 公开了一种微电子设备和在叠置在基板上的布线平面之间制造定制连接的方法。 具有多个导体的第一布线平面形成在基板上。 形成绝缘层,其覆盖并使第一布线平面电绝缘。 通过形成与第一布线平面电连接的多个导体,在绝缘层的上方形成具有多个导体的第二布线平面,第一布线面的选定导体与第二布线平面的选定导体电连接。 可以通过断开第一和第二布线平面之间的电连接的选定的连接来修改连接以定制电互连。