公开(公告)号：US20070023870A1

公开(公告)日：2007-02-01

申请号：US11190644

申请日：2005-07-27

申请人： Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Muthumanickam Sankarapandian ,  Linda Sundberg ,  Willi Volksen

发明人： Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Muthumanickam Sankarapandian ,  Linda Sundberg ,  Willi Volksen

IPC分类号： H01L23/58 ,  H01L21/4763

CPC分类号： C08L101/12 ,  H01L21/02118 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/31695 ,  H01L21/76807 ,  H01L21/7682 ,  H01L2221/1047

摘要： A composition of matter and a structure fabricated using the composition. The composition comprising: a resin; polymeric nano-particles dispersed in the resin, each of the polymeric nano-particle comprising a multi-arm core polymer and pendent polymers attached to the multi-arm core polymer, the multi-arm core polymer immiscible with the resin and the pendent polymers miscible with the resin; and a solvent, the solvent volatile at a first temperature, the resin cross-linkable at a second temperature, the polymeric nano-particle decomposable at a third temperature, the third temperature higher than the second temperature, the second temperature higher than the first temperature, wherein a thickness of a layer of the composition shrinks by less than about 3.5% between heating the layer from the second temperature to the third temperature.

摘要翻译： 使用该组合物制造的物质组成和结构。 所述组合物包含：树脂; 分散在树脂中的聚合物纳米颗粒，每个聚合纳米颗粒包含多臂芯聚合物和连接到多臂芯聚合物的悬置聚合物，与树脂不混溶的多臂芯聚合物和可混溶的侧链聚合物 与树脂; 和溶剂，所述溶剂在第一温度下挥发，所述树脂在第二温度下可交联，所述聚合物纳米颗粒在第三温度下可分解，所述第三温度高于所述第二温度，所述第二温度高于所述第一温度 ，其中在从第二温度到第三温度的层之间加热组合物的层的厚度收缩小于约3.5％。

公开(公告)号：US20060084282A1

公开(公告)日：2006-04-20

申请号：US11031418

申请日：2005-01-07

申请人： Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Eva Simonyi ,  Willi Volksen

发明人： Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Eva Simonyi ,  Willi Volksen

IPC分类号： H01L21/31

CPC分类号： H01L21/7682 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02214 ,  H01L21/02282 ,  H01L21/02343 ,  H01L21/31633 ,  H01L21/31695 ,  H01L2221/1047

摘要： Oxycarbosilane materials make excellent matrix materials for the formation of porous low-k materials using incorporated pore generators (porogens). The elastic modulus numbers measured for porous samples prepared in this fashion are 3-6 times higher than porous organosilicates prepared using the sacrificial porogen route. The oxycarbosilane materials are used to produce integrated circuits for use in electronics devices. It is emphasized that this abstract is provided to comply with the rules requiring an abstract which will allow a searcher or other reader quickly to ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the appended issued claims.

摘要翻译： 氧碳硅烷材料制成优良的基质材料，用于形成使用并入的孔隙发生器（致孔剂）的多孔低k材料。 以这种方式制备的多孔样品测量的弹性模量数是使用牺牲致孔剂途径制备的多孔有机硅酸盐的3-6倍。 氧碳硅烷材料用于生产用于电子设备的集成电路。 要强调的是，该摘要被提供以符合要求抽象的规则，这将允许搜索者或其他读者快速地确定技术公开的主题。 提交它的理解是，它不会用于解释或限制所附权利要求的范围或含义。

公开(公告)号：US07229934B2

公开(公告)日：2007-06-12

申请号：US11031418

申请日：2005-01-07

申请人： Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Eva Simonyi ,  Willi Volksen

发明人： Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Eva Simonyi ,  Willi Volksen

IPC分类号： H01L21/31 ,  H01L21/469

CPC分类号： H01L21/7682 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02214 ,  H01L21/02282 ,  H01L21/02343 ,  H01L21/31633 ,  H01L21/31695 ,  H01L2221/1047

摘要： Oxycarbosilane materials make excellent matrix materials for the formation of porous low-k materials using incorporated pore generators(porogens). The elastic modulus numbers measured for porous samples prepared in this fashion are 3–6 times higher than porous organosilicates prepared using the sacrificial porogen route. The oxycarbosilane materials are used to produce integrated circuits for use in electronics devices.

摘要翻译： 氧碳硅烷材料制成优良的基质材料，用于形成使用并入的孔隙发生器（致孔剂）的多孔低k材料。 以这种方式制备的多孔样品测量的弹性模量数是使用牺牲致孔剂途径制备的多孔有机硅酸盐的3-6倍。 氧碳硅烷材料用于生产用于电子设备的集成电路。

公开(公告)号：US20060241194A1

公开(公告)日：2006-10-26

申请号：US11111343

申请日：2005-04-20

申请人： Jennifer Cha ,  Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Willi Volksen

发明人： Jennifer Cha ,  Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Willi Volksen

IPC分类号： C08J9/00

CPC分类号： C08G63/66 ,  C08J9/26 ,  C08K5/5419 ,  C08L67/00 ,  C08L83/04 ,  C08L83/00

摘要： Substantially or roughly spherical micellar structures useful in the formation of nanoporous materials by templating are disclosed. A roughly spherical micellar structure is formed by organization of one or more spatially unsymmetric organic amphiphilic molecules. Each of those molecules comprises a branched moiety and a second moiety. The branched moiety can form part of either the core or the surface of the spherical micellar structure, depending on the polarity of the environment. The roughly spherical micellar structures form in a thermosetting polymer matrix. They are employed in a templating process whereby the amphiphilic molecules are dispersed in the polymer matrix, the matrix is cured, and the porogens are then removed, leaving nanoscale pores.

公开(公告)号：US20060240240A1

公开(公告)日：2006-10-26

申请号：US11111055

申请日：2005-04-20

申请人： Jennifer Cha ,  Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Willi Volksen

发明人： Jennifer Cha ,  Geraud Dubois ,  James Hedrick ,  Ho-Cheol Kim ,  Victor Lee ,  Teddie Magbitang ,  Robert Miller ,  Willi Volksen

IPC分类号： B32B3/26

CPC分类号： H01L21/3121 ,  G03F7/0002 ,  H01L21/02118 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/312 ,  H01L21/31695 ,  Y10T428/249953 ,  Y10T428/31663

摘要： A nanoporous material exhibiting a lamellar structure is disclosed. The material comprises three or more substantially parallel sheets of an organosilicate material, separated by highly porous spacer regions. The distance between the centers of the sheets lies between 1 nm and 50 nm. The highly porous spacer regions may be substantially free of condensed material. For the manufacture of such materials, a process is disclosed in which matrix non-amphiphilic polymeric material and templating polymeric material are dispersed in a solvent, where the templating polymeric material includes a polymeric amphiphilic material. The solvent with the polymeric materials is distributed onto a substrate. Organization is induced in the templating polymeric material. The solvent is removed, leaving the polymeric materials in place. The matrix polymeric material is cured, forming a lamellar structure.

公开(公告)号：US20050243469A1

公开(公告)日：2005-11-03

申请号：US10835845

申请日：2004-04-29

申请人： Michael Chaw ,  Dan Dawson ,  Craig Hawker ,  James Hedrick ,  Wesley Hillman ,  Teddie Magbitang ,  Dennis McKean ,  Robert Miller ,  Willi Volksen

发明人： Michael Chaw ,  Dan Dawson ,  Craig Hawker ,  James Hedrick ,  Wesley Hillman ,  Teddie Magbitang ,  Dennis McKean ,  Robert Miller ,  Willi Volksen

IPC分类号： G11B5/60

CPC分类号： G11B5/6082 ,  Y10T29/49032 ,  Y10T29/4905 ,  Y10T156/11

摘要： A slider assembly is provided comprising a plurality of sliders bonded by a debondable solid encapsulant comprised of different first and second polymers The solid encapsulant is comprised of a polymer prepared by polymerizing an encapsulant fluid comprising a homogeneous mixture of first and second constituents. The first constituent is comprised of a first monomer suitable for in situ polymerization to form the first polymer. The second constituent is comprised of the second polymer or a second monomer suitable for in situ polymerization to form the second polymer. The first constituent does not substantially react with the second constituent. Each slider has a surface that is free from the encapsulant. The encapsulant-free surfaces are coplanar to each other. Also provided are methods for forming the assembly and methods for patterning a slider surface using the encapsulant.

摘要翻译： 提供了一种滑块组件，其包括由不同的第一和第二聚合物组成的可分散固体密封剂结合的多个滑块。固体密封剂由通过聚合包含第一和第二组分的均匀混合物的密封剂流体制备的聚合物组成。 第一组分由适于原位聚合以形成第一聚合物的第一单体组成。 第二组分由第二聚合物或适于原位聚合形成第二聚合物的第二单体组成。 第一组分基本上不与第二组分反应。 每个滑块具有没有密封剂的表面。 无密封剂的表面彼此共面。 还提供了用于形成组件的方法和使用密封剂来图案化滑块表面的方法。

公开(公告)号：US20050068680A1

公开(公告)日：2005-03-31

申请号：US10672011

申请日：2003-09-25

申请人： Nicholas Buchan ,  Michael Chaw ,  Sean Clemenza ,  Dan Dawson ,  Craig Hawker ,  James Hedrick ,  Wesley Hillman ,  Teddie Magbitang ,  Willi Volksen ,  Dennis McKean ,  Robert Miller

发明人： Nicholas Buchan ,  Michael Chaw ,  Sean Clemenza ,  Dan Dawson ,  Craig Hawker ,  James Hedrick ,  Wesley Hillman ,  Teddie Magbitang ,  Willi Volksen ,  Dennis McKean ,  Robert Miller

IPC分类号： G11B5/187 ,  G11B5/60

CPC分类号： G11B5/187 ,  G11B5/60

摘要： A slider assembly is provided comprising a plurality of sliders bonded by a debondable solid encapsulant. The solid encapsulant is comprised of a polymer prepared by polymerizing a mixture of first and second monomers in a nonstoichiometric ratio effective to render the encapsulant debondable. Each slider has a surface that is free from the encapsulant. The encapsulant-free surfaces are coplanar to each other. Also provided are methods for forming the assembly and methods for patterning a slider surface using the encapsulant.

摘要翻译： 提供了一种滑块组件，其包括通过可剥离固体密封剂结合的多个滑块。 固体密封剂由通过以非化学计量比聚合第一和第二单体的混合物而制备的聚合物有效地使密封剂脱粘。 每个滑块具有没有密封剂的表面。 无密封剂的表面彼此共面。 还提供了用于形成组件的方法和使用密封剂来图案化滑块表面的方法。

公开(公告)号：US20050067373A1

公开(公告)日：2005-03-31

申请号：US10673052

申请日：2003-09-26

申请人： Phillip Brock ,  Michael Chaw ,  Dan Dawson ,  Craig Hawker ,  James Hedrick ,  Teddie Magbitang ,  Dennis McKean ,  Robert Miller ,  Richard Palmisano ,  Willi Volksen

发明人： Phillip Brock ,  Michael Chaw ,  Dan Dawson ,  Craig Hawker ,  James Hedrick ,  Teddie Magbitang ,  Dennis McKean ,  Robert Miller ,  Richard Palmisano ,  Willi Volksen

IPC分类号： B44C1/22

CPC分类号： G11B5/102

摘要： An encapsulant fluid is provided comprising a mixture of a diene-containing compound and a dienophilic compound. At least one of the diene-containing and the dienophilic compounds is protected so that the compounds do not substantially react with each other at room temperature. The diene-containing and the dienophilic compounds undergo a reversible Diels-Alder polymerization reaction at a polymerization temperature above room temperature to form a solid debondable polymeric encapsulant. Also provided are methods for forming slider assemblies and methods for patterning a slider surface using the encapsulant.

摘要翻译： 提供了包含含二烯的化合物和二亲性化合物的混合物的密封剂流体。 至少一种含二烯和二亲性化合物被保护，使得化合物在室温下基本上不会彼此反应。 含二烯和二亲性化合物在聚合温度高于室温的条件下进行可逆的狄尔斯 - 阿尔德聚合反应，形成固体可分散的聚合物密封剂。 还提供了用于形成滑块组件的方法和使用该密封剂来构图滑块表面的方法。

公开(公告)号：US20060205875A1

公开(公告)日：2006-09-14

申请号：US11077804

申请日：2005-03-11

申请人： Jennifer Cha ,  James Hedrick ,  Ho-Cheol Kim ,  Robert Miller ,  Willi Volksen

发明人： Jennifer Cha ,  James Hedrick ,  Ho-Cheol Kim ,  Robert Miller ,  Willi Volksen

IPC分类号： C08L53/00

CPC分类号： C08L101/12 ,  C08L53/00 ,  G03F7/0002 ,  Y10T428/24 ,  Y10T428/2495 ,  Y10T428/24975 ,  Y10T428/249921 ,  Y10T428/249953 ,  Y10T428/249958 ,  Y10T428/249975 ,  Y10T428/249978 ,  Y10T428/249979 ,  Y10T428/24998 ,  Y10T428/25 ,  Y10T428/26 ,  Y10T428/31504 ,  Y10T428/31511 ,  Y10T428/31612 ,  Y10T428/31663 ,  Y10T428/31931 ,  Y10T428/31935 ,  Y10T428/31938

摘要： A material and an associated method of formation. A self-assembling block copolymer that includes a first block species and a second block species respectively characterized by a volume fraction of F1 and F2 with respect to the self-assembling block copolymer is provided. At least one crosslinkable polymer that is miscible with the second block species is provided. The self-assembling block copolymer and the at least one crosslinkable polymer are combined to form a mixture. The mixture having a volume fraction, F3, of the crosslinkable polymer, a volume fraction, F1A, of the first block species, and a volume fraction, F2A, of the second block species is formed. A material having a predefined morphology where the sum of F2A and F3 were preselected is formed.

摘要翻译： 一种材料和相关的形成方法。 一种自组装嵌段共聚物，其包括分别以相对于自组装的F 1和F 2的体积分数表征的第一嵌段物质和第二嵌段物质 嵌段共聚物。 提供了与第二嵌段物质混溶的至少一种可交联聚合物。 自组装嵌段共聚物和至少一种可交联聚合物组合形成混合物。 具有第一嵌段物质的可交联聚合物的体积分数F 3 N 3，体积分数F 1 A 1，以及体积分数F _{2A 。 预先选择具有预定形态的材料，其中预先选择F 2 A 2和F 3 3之和。}

公开(公告)号：US20080113169A1

公开(公告)日：2008-05-15

申请号：US11950453

申请日：2007-12-05

申请人： Jennifer Cha ,  James Hedrick ,  Ho-Cheol Kim ,  Robert Miller ,  Willi Volksen

发明人： Jennifer Cha ,  James Hedrick ,  Ho-Cheol Kim ,  Robert Miller ,  Willi Volksen

IPC分类号： C08L53/00 ,  C08L101/00 ,  C08J9/00 ,  B05D1/40 ,  B32B7/02

CPC分类号： C08L101/12 ,  C08L53/00 ,  G03F7/0002 ,  Y10T428/24 ,  Y10T428/2495 ,  Y10T428/24975 ,  Y10T428/249921 ,  Y10T428/249953 ,  Y10T428/249958 ,  Y10T428/249975 ,  Y10T428/249978 ,  Y10T428/249979 ,  Y10T428/24998 ,  Y10T428/25 ,  Y10T428/26 ,  Y10T428/31504 ,  Y10T428/31511 ,  Y10T428/31612 ,  Y10T428/31663 ,  Y10T428/31931 ,  Y10T428/31935 ,  Y10T428/31938

摘要： A material and an associated method of formation. A self-assembling block copolymer that includes a first block species and a second block species respectively characterized by a volume fraction of F1 and F2 with respect to the self-assembling block copolymer is provided. At least one crosslinkable polymer that is miscible with the second block species is provided. The self-assembling block copolymer and the at least one crosslinkable polymer are combined to form a mixture. The mixture having a volume fraction, F3, of the crosslinkable polymer, a volume fraction, F1A, of the first block species, and a volume fraction, F2A, of the second block species is formed. A material having a predefined morphology where the sum of F2A and F3 were preselected is formed.

摘要翻译： 一种材料和相关的形成方法。 一种自组装嵌段共聚物，其包括分别以相对于自组装的F 1和F 2的体积分数表征的第一嵌段物质和第二嵌段物质 嵌段共聚物。 提供了与第二嵌段物质混溶的至少一种可交联聚合物。 自组装嵌段共聚物和至少一种可交联聚合物组合形成混合物。 具有第一嵌段物质的可交联聚合物的体积分数F 3 N 3，体积分数F 1 A 1，以及体积分数F _{2A 。 预先选择具有预定形态的材料，其中预先选择F 2 A 2和F 3 3之和。}