Semiconductor antenna proximity lines
    5.
    发明申请
    Semiconductor antenna proximity lines 有权
    半导体天线接近线

    公开(公告)号:US20050133826A1

    公开(公告)日:2005-06-23

    申请号:US11042669

    申请日:2005-01-25

    IPC分类号: H01L23/52 H01L27/10 H01L29/73

    摘要: An embodiment of the invention is an integrated circuit 2 having antenna proximity lines 3 coupled to the semiconductor substrate 5. Another embodiment of the invention is a method of manufacturing an integrated circuit 2 having antenna proximity lines 3 coupled to the semiconductor substrate 5.

    摘要翻译: 本发明的实施例是具有耦合到半导体衬底5的天线接近线3的集成电路2。 本发明的另一个实施例是一种制造具有耦合到半导体衬底5的天线接近线3的集成电路2的方法。

    Methods for determining charging in semiconductor processing
    6.
    发明授权
    Methods for determining charging in semiconductor processing 有权
    用于确定半导体处理中的充电的方法

    公开(公告)号:US06582977B1

    公开(公告)日:2003-06-24

    申请号:US10230703

    申请日:2002-08-29

    IPC分类号: G01R3126

    CPC分类号: H01L22/34

    摘要: Methods are disclosed for determining charging related to one or more semiconductor processing steps. A wafer having a substantially unpolarized ferroelectric capacitor formed therein is exposed to a processing operation. After processing, the ferroelectric capacitor is measured to determine the extent to which the processing operation polarized the ferroelectric capacitor, and a process related charging value is determined according to the ferroelectric capacitor polarization.

    摘要翻译: 公开了用于确定与一个或多个半导体处理步骤有关的充电的方法。 在其中形成有基本上非偏振的铁电电容器的晶片暴露于处理操作。 在处理之后,测量铁电电容器以确定对铁电电容器进行极化处理操作的程度,并且根据铁电电容器极化确定处理相关充电值。

    System and method for accurate negative bias temperature instability characterization
    10.
    发明申请
    System and method for accurate negative bias temperature instability characterization 有权
    准确的负偏压温度不稳定性表征的系统和方法

    公开(公告)号:US20060049842A1

    公开(公告)日:2006-03-09

    申请号:US10935375

    申请日:2004-09-07

    IPC分类号: G01R31/26

    CPC分类号: G01R31/2621

    摘要: Methods and systems are provided for characterizing the negative temperature bias instability of a transistor. A bias voltage is maintained at a drain terminal of the transistor during a test period. A stress voltage is maintained at a gate terminal of the transistor during the test period, such that the stress voltage is applied concurrently with the bias voltage. At least one characteristic of the transistor is measured at periodic intervals during the stress period to determine a degradation of the at least one characteristic caused by the stress voltage until a termination event occurs.

    摘要翻译: 提供了用于表征晶体管的负温度偏置不稳定性的方法和系统。 在测试期间,晶体管的漏极端子保持偏置电压。 在测试期间,在晶体管的栅极端子处保持应力电压,使得与偏置电压同时施加应力电压。 在应力周期期间以周期性间隔测量晶体管的至少一个特性,以确定由应力电压引起的直到终止事件发生的至少一个特性的劣化。