公开(公告)号：US08629395B2

公开(公告)日：2014-01-14

申请号：US13521273

申请日：2011-01-12

申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01N23/22

CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

公开(公告)号：US09029766B2

公开(公告)日：2015-05-12

申请号：US14241121

申请日：2012-05-28

申请人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

发明人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

IPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/04

CPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2444 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2804 ,  H01J2237/2806

摘要： To provide a low acceleration scanning electron microscope that can discriminate and detect reflected electrons and secondary electrons even with a low probe current, this scanning electron microscope is provided with an electron gun (29), an aperture (26), a sample table (3), an electron optical system (4-1) for making an electron beam (31) converge on a sample (2), a deflection means (10), a secondary electron detector (8), a reflected electron detector (9), and a cylindrical electron transport means (5) in a position between the electron gun (29) and sample (2). The reflected electron detector (9) is provided within the electron transport means (5) and on a side further away from the electron gun (29) than the secondary electron detector (8) and the deflection means (10). The reception surface (9-1) of the reflected electron detector (9) is electrically wired so as to have the same potential as the electron transport means (5).

摘要翻译： 为了提供即使在低探针电流下能够区分和检测反射电子和二次电子的低加速度扫描电子显微镜，该扫描电子显微镜设置有电子枪（29），孔（26），样品台（3 ），用于使电子束（31）会聚在样品（2）上的电子光学系统（4-1），偏转装置（10），二次电子检测器（8），反射电子检测器（9） 以及在电子枪（29）和样品（2）之间的位置的圆柱形电子传输装置（5）。 反射电子检测器（9）设置在电子传输装置（5）内并且比二次电子检测器（8）和偏转装置（10）更远离电子枪（29）的一侧。 反射电子检测器（9）的接收表面（9-1）被电连接以具有与电子传输装置（5）相同的电位。

公开(公告)号：US20120298864A1

公开(公告)日：2012-11-29

申请号：US13521273

申请日：2011-01-12

申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

IPC分类号： H01J37/26

CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

公开(公告)号：US09202667B2

公开(公告)日：2015-12-01

申请号：US13521092

申请日：2010-08-11

申请人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

发明人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

IPC分类号： H01J37/28 ,  H01J37/244

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2448

摘要： Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.

摘要翻译： 公开了一种具有带电粒子源的带电粒子辐射装置，其产生作为探针的带电粒子，带电粒子光学系统，样品台，真空放电系统，限制探针的孔，导电膜和带电粒子 粒子检测器，其中所述导电膜设置在除了所述样品台和所述孔之间的所述光学系统的光轴之外的位置处; 并且带电粒子检测器的表面的感测表面与样品台之间的距离大于样品台和导电膜之间的距离，使得导电膜的表面和检测器的感测表面倾斜 。

公开(公告)号：US20130043388A1

公开(公告)日：2013-02-21

申请号：US13521092

申请日：2010-08-11

申请人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

发明人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

IPC分类号： H01J37/26

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2448

摘要： Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.

摘要翻译： 公开了一种具有带电粒子源的带电粒子辐射装置，其产生作为探针的带电粒子，带电粒子光学系统，样品台，真空放电系统，限制探针的孔，导电膜和带电粒子 粒子检测器，其中所述导电膜设置在除了所述样品台和所述孔之间的所述光学系统的光轴之外的位置处; 并且带电粒子检测器的表面的感测表面与样品台之间的距离大于样品台和导电膜之间的距离，使得导电膜的表面和检测器的感测表面倾斜 。

公开(公告)号：US09208994B2

公开(公告)日：2015-12-08

申请号：US13817086

申请日：2011-07-07

申请人： Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

发明人： Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

IPC分类号： G01N23/00 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/261 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/153 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20221

摘要： The present invention provides an electron beam apparatus comprising a means for visualizing an axial displacement of a retarding electric field, and a means for adjusting axial displacement. The axial displacement visualizing means includes a reflective plate (6), and an optical system (2, 3) for converging a secondary electron beam (9) on the reflective plate (6), and the axial displacement adjusting means includes an incline rotation mechanism (8) for a sample stage (5). With this configuration, in electron beam apparatuses such as SEM and the like, such problems as visual field displacement caused by displacement of the axial symmetry of the electric field between an objective lens (3) and a sample (4) and inability to measure secondary electrons and reflected electrons that provide desired information can be eliminated.

摘要翻译： 本发明提供了一种电子束装置，包括用于使延迟电场的轴向位移可视化的装置和用于调节轴向位移的装置。 轴向位移可视化装置包括反射板（6）和用于会聚反射板（6）上的二次电子束（9）的光学系统（2,3），并且轴向位移调节装置包括倾斜旋转机构 （8）用于样品台（5）。 利用这种结构，在诸如SEM等的电子束装置中，存在由物镜（3）和样品（4）之间的电场的轴对称位移引起的视野位移的问题，并且不能测量次级 可以消除提供所需信息的电子和反射电子。

公开(公告)号：US20130146766A1

公开(公告)日：2013-06-13

申请号：US13817086

申请日：2011-07-07

申请人： Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

发明人： Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

IPC分类号： H01J37/26

CPC分类号： H01J37/261 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/153 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20221

摘要： The present invention provides an electron beam apparatus comprising a means for visualizing an axial displacement of a retarding electric field, and a means for adjusting axial displacement. The axial displacement visualizing means includes a reflective plate (6), and an optical system (2,3) for converging a secondary electron beam (9) on the reflective plate (6), and the axial displacement adjusting means includes an incline rotation mechanism (8) for a sample stage (5). With this configuration, in electron beam apparatuses such as SEM and the like, such problems as visual field displacement caused by displacement of the axial symmetry of the electric field between an objective lens (3) and a sample (4) and inability to measure secondary electrons and reflected electrons that provide desired information can be eliminated.

摘要翻译： 本发明提供了一种电子束装置，包括用于使延迟电场的轴向位移可视化的装置和用于调节轴向位移的装置。 轴向位移可视化装置包括反射板（6）和用于会聚反射板（6）上的二次电子束（9）的光学系统（2,3），并且轴向位移调节装置包括倾斜旋转机构 （8）用于样品台（5）。 利用这种结构，在诸如SEM等的电子束装置中，存在由物镜（3）和样品（4）之间的电场的轴对称位移引起的视野位移的问题，并且不能测量次级 可以消除提供所需信息的电子和反射电子。

公开(公告)号：US20090230304A1

公开(公告)日：2009-09-17

申请号：US12396593

申请日：2009-03-03

申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

IPC分类号： G01N23/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

公开(公告)号：US07511271B2

公开(公告)日：2009-03-31

申请号：US11230642

申请日：2005-09-21

申请人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

发明人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

IPC分类号： H01J47/00

CPC分类号： H01J37/256 ,  H01J37/244 ,  H01J2237/2444 ,  H01J2237/2448 ,  H01J2237/2605 ,  H01J2237/2806

摘要： A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.

摘要翻译： 扫描电子显微镜包括用于向样品照射电子束的照射光学系统; 用于支撑样品的样品保持器，布置在样品室内; 至少一个电场供给电极，布置在所述样品保持器周围; 和离子电流检测电极。

公开(公告)号：US08097848B2

公开(公告)日：2012-01-17

申请号：US12396593

申请日：2009-03-03

申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

IPC分类号： H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。