Wavelength converting device and method of fabricating wavelength
converting device
    2.
    发明授权
    Wavelength converting device and method of fabricating wavelength converting device 失效
    波长转换装置及制造波长转换装置的方法

    公开(公告)号:US6163397A

    公开(公告)日:2000-12-19

    申请号:US271914

    申请日:1999-03-18

    摘要: A wavelength converting device for converting a wavelength of a light is provided. The wavelength converting device includes: a substrate comprising MgO; a waveguide membrane comprising KNbO.sub.3, for guiding the light; a buffer membrane which is disposed between the substrate and the waveguide membrane and which comprises KTa.sub.x Nb.sub.(1-x) O.sub.3. A mixing rate of Ta in the KTa.sub.x Nb.sub.(1-x) O.sub.3 in the buffer membrane is in a range of 40 atom % to 60 atom % at a surface of the buffer membrane touching the substrate, and is 0 atom % at a surface of the buffer membrane touching the waveguide membrane.

    摘要翻译: 提供了用于转换光的波长的波长转换装置。 波长转换装置包括:包含MgO的基板; 包括用于引导光的KNbO 3的波导膜; 缓冲膜,其设置在基板和波导膜之间,并且包括KTaxNb(1-x)O 3。 缓冲膜中的KTaxNb(1-x)O 3中的Ta的混合比在缓冲膜的与基材接触的表面处为40原子%〜60原子%的范围,并且在表面为0原子% 缓冲膜接触波导膜。

    Method of manufacturing a ridge-shaped three dimensional waveguide
    4.
    发明授权
    Method of manufacturing a ridge-shaped three dimensional waveguide 失效
    制造脊形三维波导的方法

    公开(公告)号:US06605227B2

    公开(公告)日:2003-08-12

    申请号:US09425940

    申请日:1999-10-25

    IPC分类号: C30B3300

    摘要: A method of manufacturing a ridge-shaped 3-dimensional waveguide, has the steps of: forming a crystal film made of a second ferroelectric oxide non-linear crystal having a refractive index higher than that of a substrate made of a first ferroelectric oxide non-linear crystal on the substrate; forming a metal film on the crystal film; forming a mask by etching the metal film; and forming a ridge portion by selectively removing the crystal film through the mask by a dry etching method.

    摘要翻译: 制造脊状三维波导的方法具有以下步骤:形成由第二铁电氧化物非线性晶体构成的晶体膜,该第二铁电氧化物非线性晶体的折射率高于由第一铁电氧化物非线性晶体构成的衬底的折射率, 衬底上的直线晶体; 在晶体膜上形成金属膜; 通过蚀刻金属膜形成掩模; 并通过干蚀刻方法通过掩模选择性地除去晶体膜而形成脊部。

    Surface acoustic wave device and method of manufacturing the same

    公开(公告)号:US06510597B2

    公开(公告)日:2003-01-28

    申请号:US10043177

    申请日:2002-01-14

    IPC分类号: H04R1700

    摘要: A surface acoustic wave device includes a crystalline substrate with a structure selected from the group consisting of the perovskite structure, the spinel structure, and the rock salt structure. The device also includes a thin piezoelectric crystalline film having the perovskite structure and deposited on the crystalline substrate by chemical vapor deposition, and an electrode means for generating a surface acoustic wave on the thin piezoelectric crystalline film. In the device, a surface of the crystalline substrate on which the thin piezoelectric crystalline film is deposited is a mirror surface inclined at an offset angle &thgr; from the (001) plane of the crystalline substrate, and the electrode means have electrode fingers arranged in parallel to each other so that a surface acoustic wave propagates along one direction of crystalline axes of the thin piezoelectric crystalline film.

    Surface acoustic wave device and method of manufacturing the same
    6.
    发明授权
    Surface acoustic wave device and method of manufacturing the same 失效
    表面声波装置及其制造方法

    公开(公告)号:US06348754B1

    公开(公告)日:2002-02-19

    申请号:US09606170

    申请日:2000-06-29

    IPC分类号: H03H308

    摘要: A surface acoustic wave device includes a crystalline substrate with a structure selected from the group consisting of the perovskite structure, the spinel structure, and the rock salt structure. The device also includes a thin piezoelectric crystalline film having the perovskite structure and deposited on the crystalline substrate by chemical vapor deposition, and an electrode means for generating a surface acoustic wave on the thin piezoelectric crystalline film. In the device, a surface of the crystalline substrate on which the thin piezoelectric crystalline film is deposited is a mirror surface inclined at an offset angle &thgr; from the (001) plane of the crystalline substrate, and the electrode means have electrode fingers arranged in parallel to each other so that a surface acoustic wave propagates along one direction of crystalline axes of the thin piezoelectric crystalline film.

    摘要翻译: 表面声波装置包括具有选自钙钛矿结构,尖晶石结构和岩盐结构的结构的结晶基板。 该器件还包括具有钙钛矿结构并通过化学气相沉积沉积在晶体衬底上的薄压电晶体膜,以及用于在薄压电晶体膜上产生表面声波的电极装置。 在该器件中,其上沉积有薄压电晶体膜的晶体衬底的表面是与晶体衬底的(001)平面倾斜偏离角度θ的反射镜表面,并且电极装置具有并联布置的电极指 使得表面声波沿着薄压电晶体膜的晶轴的一个方向传播。

    Second harmonic wave-generating element
    7.
    发明授权
    Second harmonic wave-generating element 失效
    二次谐波发生元件

    公开(公告)号:US06204957B1

    公开(公告)日:2001-03-20

    申请号:US09307525

    申请日:1999-05-07

    IPC分类号: G02F137

    摘要: A second harmonic wave-generating element for generating a second harmonic wave from a fundamental wave, having an optical waveguide layer made of first epitaxial material having a fundamental composition of K3Li2−x(Nb1−YTaY)5+XO15+Z, an underclad part made of second epitaxial material having a fundamental composition of K3Li2−X+A(Nb1−Y−BTaY+B)5+X−AO15+Z, an overclad part made of third epitaxial material having a fundamental composition of K3Li2−X+C(Nb1−Y−DTaY+D)5+X−CO15+Z and formed on and contacting the optical waveguide layer, wherein X=0.006 to 0.5, Y=0.00 to 0.05, A=0.006 to 0.12, B=0.005 to 0.5, C=0.006 to 0.12, D=0.005 to 0.5, X−A≦0, X−C≧0, |A−C|≦0.006, and |B−D|≦0.005).

    摘要翻译: 一种用于从基波产生二次谐波的二次谐波发生元件,具有由具有K3Li2-x(Nb1-YTaY)5 + XO15 + Z的基本组成的第一外延材料制成的光波导层,下部部分 由具有K3Li2-X + A(Nb1-Y-BTaY + B)5 + X-AO15 + Z的基本组成的第二外延材料制成,由具有K 3 Li 2 -X + C的基本组成的第三外延材料制成的外包层 (Nb1-Y-DTaY + D)5 + X-CO15 + Z,形成在光波导层上并与光波导层接触,其中X = 0.006〜0.5,Y = 0.00〜0.05,A = 0.006〜0.12,B = 0.005〜0.5 ,C = 0.006〜0.12,D = 0.005〜0.5,XA <= 0,XC> = 0,| AC |≤0.006,| BD |≤0.005)。

    Device for feeding raw material for chemical vapor phase deposition and method therefor
    8.
    发明授权
    Device for feeding raw material for chemical vapor phase deposition and method therefor 有权
    用于进行化学气相沉积原料的装置及其方法

    公开(公告)号:US06270839B1

    公开(公告)日:2001-08-07

    申请号:US09621739

    申请日:2000-07-21

    IPC分类号: C23C1600

    CPC分类号: C23C16/4481

    摘要: A raw material feeding apparatus is provided for a film-forming apparatus in which a thin film is formed from a solid matter as a raw material during chemical vapor-phase deposition. The apparatus includes sub-containers each having an opening for introduction of a gas, an opening for discharge of a gas, a bottom, on which a solid raw material is spread between the inlet opening and the outlet opening, and a wall defining a gap, in which a gas being introduced and discharged is made to contact the solid raw material spread on the bottom while the gas is moved on the surfaces of the material. The apparatus also includes a raw material container for receiving and holding the sub-containers. The apparatus also includes a heating device for heating the raw material container, and carrier gas conveying tubes for introducing a carrier gas into the raw material container and including a passage communicated to the outlet openings of the sub-containers.

    摘要翻译: 本发明提供一种原料输送装置,用于在化学气相沉积期间以固体物质作为原料形成薄膜的成膜装置。 该装置包括各自具有用于引入气体的开口,用于排出气体的开口,底部,其上固体原料在其上在入口和出口之间铺展的子容器,以及限定间隙的壁 其中引入和排出的气体在气体在材料的表面上移动时与扩散在底部上的固体原料接触。 该设备还包括用于接收和保持子容器的原料容器。 该装置还包括用于加热原料容器的加热装置和用于将载气引入原料容器中的载气输送管,并且包括连通到子容器的出口的通道。