Optical synthetic quartz glass and method for producing the same
    4.
    发明申请
    Optical synthetic quartz glass and method for producing the same 有权
    光学合成石英玻璃及其制备方法

    公开(公告)号:US20060183622A1

    公开(公告)日:2006-08-17

    申请号:US10548237

    申请日:2004-03-03

    摘要: The present invention provides an optical synthetic quartz glass material which substantially does not cause changes in transmitted wave surface (TWS) by solarization, compaction (TWS delayed), rarefaction (TWS progressed) and photorefractive effect when ArF excimer laser irradiation is applied at a low energy density, e.g. at energy density per pulse of 0.3 mJ/cm2 or less. The present invention further provides a method for manufacturing the same. In order to solve the above-mentioned problems, the optical synthetic quartz glass material of the present invention is characterized in that, in a synthetic quartz glass prepared by a flame hydrolysis method using a silicon compound as a material, the followings are satisfied that the amount of SiOH is within a range of more than 10 ppm by weight to 400 ppm by weight, content of fluorine is 30 to 1000 ppm by weight, content of hydrogen is 0.1×1017 to 10×1017 molecules/cm3 and, when the amounts of SiOH and fluorine are A and B, respectively, total amount of A and B is 100 ppm by weight or more and B/A is 0.25 to 25.

    摘要翻译: 本发明提供了一种光学合成石英玻璃材料,其在低温下施加ArF准分子激光照射时,通过太阳化,压实(TWS延迟),稀释(TWS进行)和光折射效应基本上不会引起透射波面(TWS)的变化 能量密度,例如 每个脉冲的能量密度为0.3mJ / cm 2以下。 本发明还提供一种制造该方法的方法。 为了解决上述问题,本发明的光学合成石英玻璃材料的特征在于,在使用硅化合物作为材料的火焰水解法制备的合成石英玻璃中,满足以下条件: SiOH的量在大于10重量ppm至400重量ppm的范围内,氟含量为30至1000重量ppm,氢含量为0.1×10 17至10 10 17分子/ cm 3,当SiOH和氟的量分别为A和B时,A和B的总量为100重量ppm以上,B / A为 0.25至25。

    Fuel injection system executing overlap injection operation
    5.
    发明申请
    Fuel injection system executing overlap injection operation 失效
    燃油喷射系统执行重叠喷射操作

    公开(公告)号:US20050229898A1

    公开(公告)日:2005-10-20

    申请号:US11103473

    申请日:2005-04-12

    摘要: A control device executes an overlap injection operation, in which one of the plurality of injectors is energized first to inject fuel, and a next one of the plurality of injectors is energized to inject fuel after starting of the energization of the one of the plurality of injectors while the one of the plurality of injectors is still kept energized. The control device corrects an energization period of the next one of the injectors by lengthening the energization period of the next one of the injectors in comparison to a normal energization period of the next one of the injectors, which is set for a non-overlap injection operation of the next one of the plurality of injectors.

    摘要翻译: 控制装置执行重叠喷射操作,其中多个喷射器中的一个首先被激发以喷射燃料,并且在多个喷射器中的一个的通电开始之后,多个喷射器中的下一个喷射器被激励以喷射燃料 而多个喷射器中的一个仍然保持通电。 控制装置与下一个喷射器的正常通电周期相比,通过延长下一个喷射器的通电周期来校正下一个喷射器的通电周期,该正常通电周期被设置用于非重叠喷射 多个喷射器中的下一个喷射器的操作。

    Synthetic quartz glass blank
    6.
    发明授权
    Synthetic quartz glass blank 有权
    合成石英玻璃毛坯

    公开(公告)号:US06761951B2

    公开(公告)日:2004-07-13

    申请号:US10315990

    申请日:2002-12-11

    IPC分类号: B32B300

    摘要: A cylindrical, chlorine-free synthetic quartz glass blank of a specific size obtained by homogenizing a synthetic quartz glass ingot having periodic striae along a direction of growth has (a) striae grades in the working and off-axis directions which meet grade A of U.S. military specification MIL-G-174B, (b) average hydroxyl group concentrations in the working and off-axis directions of 700 to 1,000 ppm each, (c) average fictive temperatures in the working and off-axis directions of 850 to 950° C. each, and (d) a refractive index distribution for 633 nm wavelength light in the working direction of at most 1×10−6. The blank has a good transmittance to laser light, undergoes little deterioration when irradiated with laser light, and is particularly suitable for ArF excimer laser-related applications.

    摘要翻译: 通过沿着生长方向均匀化具有周期条纹的合成石英玻璃锭获得的具有特定尺寸的圆柱形,无氯合成石英玻璃坯料具有(a)在工作和离轴方向上的条纹等级,其满足美国A级 军事规格MIL-G-174B,(b)工作和离轴方向的平均羟基浓度分别为700〜1,000ppm,(c)工作和离轴方向的平均假想温度为850〜950℃ ,和(d)工作方向上最多为1×10 -6的633nm波长的光的折射率分布。 该空白对激光具有良好的透射率,当用激光照射时几乎不发生劣化,并且特别适用于ArF准分子激光相关应用。

    Projection aligner for integrated circuit fabrication
    7.
    发明授权
    Projection aligner for integrated circuit fabrication 失效
    用于集成电路制造的投影对准器

    公开(公告)号:US6031238A

    公开(公告)日:2000-02-29

    申请号:US29451

    申请日:1998-02-26

    IPC分类号: G02B13/14 G03F7/20

    摘要: A known projection aligner for integrated circuit fabrication, in which an integrated circuit pattern image is projected on a wafer, comprises an ArF excimer laser and an optical system composed of groups of quartz glass optical members made of synthetic quartz glass. To provide a projection aligner having optical properties, such as durability, optical transmittance and the like, which are not degraded over a long time of operation and the optical system can be constructed at a low cost as a whole, it is suggested that the optical system comprises a first quartz glass optical member group whose hydrogen molecule concentration is in the range between 1.times.10.sup.17 and 5.times.10.sup.18 molecules/cm.sup.3 and a third quartz glass optical member group whose hydrogen molecule concentration is in the range between 5.times.10.sup.18 to 5.times.10.sup.19 molecules/cm.sup.3.

    摘要翻译: PCT No.PCT / EP97 / 03406 Sec。 371日期1998年2月26日 102(e)1998年2月26日PCT 1997年6月30日PCT公布。 出版物WO98 / 00761 日本1998年1月8日在集成电路制造中,集成电路图案投影在晶片上的已知投影对准器包括ArF准分子激光器和由合成石英玻璃制成的石英玻璃光学部件组成的光学系统。 为了提供一种投影对准器,其具有在长时间不劣化的光学性能,例如耐久性,光透射率等,并且光学系统可以以低成本整体构造,因此建议光学 系统包括其氢分子浓度在1×10 17和5×10 18分子/ cm 3之间的第一石英玻璃光学构件组和氢分子浓度在5×1018至5×1019分/ cm 3之间的第三石英玻璃光学构件组。

    Camera apparatus for electronic conference
    9.
    发明授权
    Camera apparatus for electronic conference 失效
    电子会议摄像机

    公开(公告)号:US5734414A

    公开(公告)日:1998-03-31

    申请号:US395097

    申请日:1995-02-27

    IPC分类号: H04N7/14

    CPC分类号: H04N7/142

    摘要: A camera unit for an electronic conference is adapted to be set on a monitor, and comprises a stationary support base set on the monitor, a camera unit body provided on said stationary support base so as to be horizontally rotatable, a lens block supported to the camera unit body so as to be vertically rotatable, and a control device incorporated in the camera unit body, for controlling the rotation of the camera unit body and the lens block and the focal distance and zooming ratio of the lens block, the lens block is adapted to be turned between a horizontal position at which the lens block is stored in a recess formed in the camera unit body, and picks up a person in front thereof, and a vertical position at which the lens block is projected forward from the camera unit body so as to pick up a document set therebelow, and the control device controls the focal distance and zooming ratio of the lens block in accordance with a horizontally rotating position of the camera unit body and a vertical rotating position of the lens block.

    摘要翻译: 一种用于电子会议的相机单元适于设置在监视器上,并且包括设置在监视器上的固定支撑基座,设置在所述固定支撑基座上以便水平可旋转的照相机单元主体, 相机单元主体以便可垂直旋转;以及控制装置,其结合在相机单元主体中,用于控制相机单元主体和透镜块的旋转以及透镜块的焦距和变焦比,透镜块为 适于在透镜块被存储在形成于相机单元主体中的凹部中的水平位置之间转动,并且拾取其前方的人以及透镜块从相机单元向前突出的垂直位置 从而拾取其下面的文件,并且控制装置根据照相机单元主体的水平旋转位置来控制透镜块的焦距和变焦比,并且 透镜块的垂直旋转位置。