Method and apparatus for forming thin film
    3.
    发明申请
    Method and apparatus for forming thin film 有权
    用于形成薄膜的方法和装置

    公开(公告)号:US20050136694A1

    公开(公告)日:2005-06-23

    申请号:US10973249

    申请日:2004-10-27

    摘要: A rotor having a cylindrical peripheral surface is disposed in a treatment vessel into which a carrier gas is introduced, and the rotor peripheral surface is opposed to the surface of a substrate with a predetermine gap therebetween. The rotor peripheral surface is also opposed to a film-forming material supplying member having a film-forming material on its surface at a position apart from the position where the rotor faces the substrate. Film-forming particulates including atomic molecules of the film-forming material and cluster particulates thereof are scattered from the surface of the film-forming material supplying member by sputtering, and the rotor is rotated to form a carrier gas flow near the rotor peripheral surface. The film-forming particulates are transported to the vicinity of the surface of the substrate by the carrier gas flow and adhered to the surface of the substrate. As a result, the adverse effect of high-energy particles and the like can be suppressed to efficiently form a satisfactory thin film by an evaporation or sputtering process, which has less restriction to a source material gas, without the need for large equipment.

    摘要翻译: 具有圆筒形周面的转子设置在其中引入载气的处理容器中,并且转子外周表面与基板的表面之间具有预定的间隙。 转子外周表面也与在其表面上离开转子面向基板的位置的表面上的成膜材料供给构件相对。 包括成膜材料的原子分子和簇粒子的成膜颗粒通过溅射从成膜材料供给构件的表面散射,转子旋转以在转子周边表面附近形成载气流。 成膜微粒通过载气流输送到基板的表面附近并粘附到基板的表面。 结果,可以抑制高能粒子等的不利影响,通过蒸发或溅射法有效地形成令人满意的薄膜,对原料气体的限制较少,而无需大型设备。

    Method and apparatus for forming thin film
    4.
    发明授权
    Method and apparatus for forming thin film 有权
    用于形成薄膜的方法和装置

    公开(公告)号:US07897025B2

    公开(公告)日:2011-03-01

    申请号:US10973249

    申请日:2004-10-27

    IPC分类号: C23C14/00

    摘要: A rotor having a cylindrical peripheral surface is disposed in a treatment vessel into which a carrier gas is introduced, and the rotor peripheral surface is opposed to the surface of a substrate with a predetermine gap therebetween. Film-forming particulates including atomic molecules of the film-forming material and cluster particulates thereof are scattered from the surface of the film-forming material supplying member by sputtering, and the rotor is rotated to form a carrier gas flow near the rotor peripheral surface. The film-forming particulates are transported to the vicinity of the surface of the substrate by the carrier gas flow and adhered to the surface of the substrate. As a result, the adverse effect of high-energy particles and the like is suppressed to efficiently form a satisfactory thin film by an evaporation or sputtering process, which has less restriction to a source material gas, without the need for large equipment.

    摘要翻译: 具有圆筒形周面的转子设置在其中引入载气的处理容器中,并且转子外周表面与基板的表面之间具有预定的间隙。 包括成膜材料的原子分子和簇粒子的成膜颗粒通过溅射从成膜材料供给构件的表面散射,转子旋转以在转子周边表面附近形成载气流。 成膜微粒通过载气流输送到基板的表面附近并粘附到基板的表面。 结果,抑制高能粒子等的不利影响,通过蒸发或溅射法有效地形成令人满意的薄膜,对原料气体的限制较少,而不需要大型设备。

    Apparatus and method for measuring semiconductor carrier lifetime
    5.
    发明授权
    Apparatus and method for measuring semiconductor carrier lifetime 有权
    测量半导体载体寿命的装置和方法

    公开(公告)号:US09279762B2

    公开(公告)日:2016-03-08

    申请号:US13500305

    申请日:2010-10-01

    摘要: In a semiconductor carrier lifetime measuring apparatus A1 of the present invention, at least two types of light having mutually different wavelengths are irradiated onto a semiconductor X to be measured, a predetermined measurement wave is irradiated onto the semiconductor X to be measured, a reflected wave of the measurement wave that has been reflected by the semiconductor X to be measured or a transmitted wave of the measurement wave that has transmitted through the semiconductor X to be measured is detected, and the carrier lifetime in the semiconductor X to be measured is obtained based on the detection results so as to minimize the error. Accordingly, the semiconductor carrier lifetime measuring apparatus A1 configured as described above can more accurately measure the carrier lifetime.

    摘要翻译: 在本发明的半导体载体寿命测量装置A1中,将具有相互不同波长的至少两种类型的光照射到要测量的半导体X上,将预定测量波照射到要测量的半导体X上,反射波 检测被测半导体X所反射的测量波,或检测通过半导体X的被测量的测定波的透过波,测定半导体X的载流子寿命, 检测结果,以最小化误差。 因此,如上所述构成的半导体载体寿命测定装置A1能够更准确地测定载流子寿命。

    Photothermal conversion measuring instrument
    6.
    发明申请
    Photothermal conversion measuring instrument 审中-公开
    光热转换测量仪器

    公开(公告)号:US20080123099A1

    公开(公告)日:2008-05-29

    申请号:US11902279

    申请日:2007-09-20

    IPC分类号: G01B9/02 G01N21/00

    CPC分类号: G01N21/171 G01N21/031

    摘要: There is provided a photothermal conversion measuring instrument which can measure change in property caused by thermal effect in a sample with high sensitivity and high accuracy by a simple structure. The instrument includes a current control circuit for sequentially switching output light of a plurality of excitation light sources each outputting excitation light having a different wavelength band so that one of the output light is irradiated to the sample, a light detector for interfering measurement light transmitted through the sample with reference light and detecting the intensity of the interference light, and a signal processor for extracting the same cycle components as the switching cycle of the output light switched by the current control circuit from a signal of the interference light intensity obtained from the light detector and for obtaining a difference of signal values corresponding to each of the excitation light based on the extracted signals.

    摘要翻译: 提供了一种光热转换测量仪器,可以通过简单的结构,以高灵敏度和高精度测量样品中热效应引起的性能变化。 该仪器包括电流控制电路,用于顺序地切换多个激发光源的输出光,每个激发光源输出具有不同波长带的激发光,使得输出光中的一个照射到样本,用于干扰测量光的光检测器, 具有参考光的样本并检测干涉光的强度;以及信号处理器,用于从由光获得的干涉光强度的信号中提取与由电流控制电路切换的输出光的切换周期相同的周期分量 并且用于基于所提取的信号获得与每个激发光对应的信号值的差异。

    LIVING BODY INFORMATION REGISTRATION METHOD, BIOMETRICS AUTHENTICATION METHOD, AND BIOMETRICS AUTHENTICATION APPARATUS
    10.
    发明申请
    LIVING BODY INFORMATION REGISTRATION METHOD, BIOMETRICS AUTHENTICATION METHOD, AND BIOMETRICS AUTHENTICATION APPARATUS 有权
    生物体信息注册方法,生物识别认证方法和生物识别认证装置

    公开(公告)号:US20120201431A1

    公开(公告)日:2012-08-09

    申请号:US13448872

    申请日:2012-04-17

    IPC分类号: G06K9/46

    摘要: A vein authentication apparatus registers vein data and vein characteristic amounts, determines comparison order at vein data identification time by sorting records in descending order of degree of similarity on the basis of vein characteristic amounts for comparison and the registered vein characteristic amounts, and makes vein data comparison in accordance with the comparison order. The vein authentication apparatus uses 32 frequencies obtained by performing a Fourier transform, 12 angles obtained by performing a Fourier transform, curvature directions in 36 angle areas, segment directions in 18 angle areas, and a vein amount as the vein characteristic amounts. By doing so, the accuracy of comparison order is improved and a comparison using a record for which a degree of similarity is low can be omitted. As a result, the speed of a comparison process and the maximum number of pieces of living body information which can be registered can be increased.

    摘要翻译: 静脉认证装置记录静脉数据和静脉特征量,通过基于用于比较的静脉特征量和登记的静脉特征量的相似度的降序对记录进行排序来确定静脉数据识别时间的比较顺序,并使静脉数据 按照比较顺序进行比较。 静脉认证装置使用通过执行傅里叶变换获得的32个频率,通过傅里叶变换获得的12个角度,36个角度区域中的曲率方向,18个角度区域中的分段方向,以及作为静脉特征量的静脉量。 通过这样做,可以提高比较顺序的精度,并且可以省略使用相似度低的记录的比较。 结果,可以增加比较处理的速度和可以登记的最大生物体信息数量。