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公开(公告)号：US09279762B2
公开(公告)日：2016-03-08
申请号：US13500305
申请日：2010-10-01
IPC分类号： G01N21/31 , G01N21/3563 , H01L21/66
CPC分类号： G01N21/3151 , G01N21/31 , G01N2021/3568 , H01L22/14 , H01L2924/0002 , H01L2924/00
摘要： In a semiconductor carrier lifetime measuring apparatus A1 of the present invention, at least two types of light having mutually different wavelengths are irradiated onto a semiconductor X to be measured, a predetermined measurement wave is irradiated onto the semiconductor X to be measured, a reflected wave of the measurement wave that has been reflected by the semiconductor X to be measured or a transmitted wave of the measurement wave that has transmitted through the semiconductor X to be measured is detected, and the carrier lifetime in the semiconductor X to be measured is obtained based on the detection results so as to minimize the error. Accordingly, the semiconductor carrier lifetime measuring apparatus A1 configured as described above can more accurately measure the carrier lifetime.
摘要翻译： 在本发明的半导体载体寿命测量装置A1中，将具有相互不同波长的至少两种类型的光照射到要测量的半导体X上，将预定测量波照射到要测量的半导体X上，反射波 检测被测半导体X所反射的测量波，或检测通过半导体X的被测量的测定波的透过波，测定半导体X的载流子寿命， 检测结果，以最小化误差。 因此，如上所述构成的半导体载体寿命测定装置A1能够更准确地测定载流子寿命。
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公开(公告)号：US20120203473A1
公开(公告)日：2012-08-09
申请号：US13500305
申请日：2010-10-01
申请人： Kazushi Hayashi , Hiroyuki Takamatsu , Yoshito Fukumoto , Naokazu Sakoda , Masahiro Inui , Shingo Sumie
发明人： Kazushi Hayashi , Hiroyuki Takamatsu , Yoshito Fukumoto , Naokazu Sakoda , Masahiro Inui , Shingo Sumie
CPC分类号： G01N21/3151 , G01N21/31 , G01N2021/3568 , H01L22/14 , H01L2924/0002 , H01L2924/00
摘要： In a semiconductor carrier lifetime measuring apparatus A1 of the present invention, at least two types of light having mutually different wavelengths are irradiated onto a semiconductor X to be measured, a predetermined measurement wave is irradiated onto the semiconductor X to be measured, a reflected wave of the measurement wave that has been reflected by the semiconductor X to be measured or a transmitted wave of the measurement wave that has transmitted through the semiconductor X to be measured is detected, and the carrier lifetime in the semiconductor X to be measured is obtained based on the detection results so as to minimize the error. Accordingly, the semiconductor carrier lifetime measuring apparatus A1 configured as described above can more accurately measure the carrier lifetime.
摘要翻译： 在本发明的半导体载体寿命测量装置A1中，将具有相互不同波长的至少两种类型的光照射到要测量的半导体X上，将预定测量波照射到要测量的半导体X上，反射波 检测被测半导体X所反射的测量波，或检测通过半导体X的被测量的测定波的透过波，测定半导体X的载流子寿命， 检测结果，以最小化误差。 因此，如上所述构成的半导体载体寿命测定装置A1能够更准确地测定载流子寿命。
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3.发明授权Method of and apparatus for measuring lifetime of carriers in semiconductor sample 失效测量半导体样品中载流子寿命的方法和装置
公开(公告)号：US5760597A
公开(公告)日：1998-06-02
申请号：US659515
申请日：1996-06-06
申请人： Naoyuki Yoshida , Hiroyuki Takamatsu , Shingo Sumie , Yutaka Kawata , Hidehisa Hashizume , Futoshi Ojima , Yuji Hirao
发明人： Naoyuki Yoshida , Hiroyuki Takamatsu , Shingo Sumie , Yutaka Kawata , Hidehisa Hashizume , Futoshi Ojima , Yuji Hirao
IPC分类号： G01N21/88 , G01N21/00 , G01N21/956 , G01R31/265 , G01R31/28 , H01L21/66 , G01R31/26
CPC分类号： G01R31/2656 , G01R31/2831 , H01L22/14
摘要： In addition to microwave and excitation light, bias light as well is irradiated upon a surface of a semiconductor sample that is passivated using a solution which contains an electrolyte. Irradiation of the bias light increases the quantity of ionic substances that exist in the solution, largely changes a surface potential of the semiconductor sample, and suppresses surface recombination. This makes it possible to measure the lifetime of carriers which exist within the semiconductor sample at a high accuracy, without influenced by surface recombination.
摘要翻译： 除了微波和激发光之外，偏光也照射在使用含有电解质的溶液钝化的半导体样品的表面上。 偏置光的照射增加溶液中存在的离子物质的量，极大地改变了半导体样品的表面电位，并抑制了表面复合。 这使得可以以高精度测量半导体样品内存在的载流子的寿命，而不受表面复合的影响。
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4.发明授权
公开(公告)号：US5619326A
公开(公告)日：1997-04-08
申请号：US409670
申请日：1995-03-24
CPC分类号： G01N21/171
摘要： A sample evaluation method based on the measurement of photothermal displacement in which two exciting light beams and two measuring light beams are produced by a laser source, the exciting beams are rendered intensity modulation in opposite phase relationship by an acoustic-optic modulator and illuminated to different positions of a sample, the measuring beams are provided with different oscillation frequencies by acoustic-optic modulators and illuminated to the irradiation positions of the exciting beams correspondingly, the reflected lights of measuring beams from the sample are merged so as to interfere with each other, and the sample is evaluated based on the phase of the interference light. The method is capable of measuring the photothermal displacement accurately and stably without implementing intricate signal processings.
摘要翻译： 基于通过激光源产生两个激发光束和两个测量光束的光热位移测量的样本评估方法，激发光束通过声光调制器呈相反相位关系的强度调制，并被照射到不同的 样品的位置，测量光束通过声光调制器被提供有不同的振荡频率，并相应地照射到激发光束的照射位置，来自样品的测量光束的反射光被合并以相互干扰， 并且基于干涉光的相位来评估样品。 该方法能够精确稳定地测量光热位移，而不需要执行复杂的信号处理。
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5.发明授权
公开(公告)号：US5298970A
公开(公告)日：1994-03-29
申请号：US955241
申请日：1992-10-01
CPC分类号： G01N21/1717 , G01J9/04 , G01N2021/1731 , G01N2021/1782 , G01N21/21
摘要： When evaluating defects, etc. of a sample by measuring thermal expansion displacement on the surface of the sample, which is produced by irradiating thereto an excitation beam of which intensity is cyclically modulated, a measuring beam having the displacement frequency F.sub.1 is irradiated to the vibrating surface of the sample, and the reflection beam is interfered with a reference beam having the frequency F.sub.2. The beat wave signal E.sub.1 (Beat frequency F.sub.b =F.sub.1 -F.sub.2) is converted to a binary signal E.sub.2. Then, the sample is evaluated by signals which are obtained by giving a suitable processing to the binary signals. In addition, the optic axes alignment is eliminated by utilizing the excitation beam itself concurrently as measuring beam.
摘要翻译： 当通过测量样品的表面上的热膨胀位移来评估样品的缺陷等时，其通过向其照射强度为周期性调制的激发光束而产生，将具有位移频率F1的测量光照射到振动 样品的表面，并且反射光束被干扰具有频率F2的参考光束。 拍频信号E1（拍频Fb = F1-F2）被转换为二进制信号E2。 然后，通过对二进制信号给出合适的处理而获得的信号来评估样本。 此外，通过将激发光束本身同时用作测量光束来消除光轴对准。
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公开(公告)号：US20050136694A1
公开(公告)日：2005-06-23
申请号：US10973249
申请日：2004-10-27
IPC分类号： C23C14/34 , C23C14/24 , C23C14/26 , C23C14/35 , C23C16/00 , H01J37/32 , H01L21/203 , H01L21/26 , H01L21/324 , H01L21/42 , H01L21/477
CPC分类号： C23C14/35 , C23C14/228 , C23C14/26 , H01J37/32009
摘要： A rotor having a cylindrical peripheral surface is disposed in a treatment vessel into which a carrier gas is introduced, and the rotor peripheral surface is opposed to the surface of a substrate with a predetermine gap therebetween. The rotor peripheral surface is also opposed to a film-forming material supplying member having a film-forming material on its surface at a position apart from the position where the rotor faces the substrate. Film-forming particulates including atomic molecules of the film-forming material and cluster particulates thereof are scattered from the surface of the film-forming material supplying member by sputtering, and the rotor is rotated to form a carrier gas flow near the rotor peripheral surface. The film-forming particulates are transported to the vicinity of the surface of the substrate by the carrier gas flow and adhered to the surface of the substrate. As a result, the adverse effect of high-energy particles and the like can be suppressed to efficiently form a satisfactory thin film by an evaporation or sputtering process, which has less restriction to a source material gas, without the need for large equipment.
摘要翻译： 具有圆筒形周面的转子设置在其中引入载气的处理容器中，并且转子外周表面与基板的表面之间具有预定的间隙。 转子外周表面也与在其表面上离开转子面向基板的位置的表面上的成膜材料供给构件相对。 包括成膜材料的原子分子和簇粒子的成膜颗粒通过溅射从成膜材料供给构件的表面散射，转子旋转以在转子周边表面附近形成载气流。 成膜微粒通过载气流输送到基板的表面附近并粘附到基板的表面。 结果，可以抑制高能粒子等的不利影响，通过蒸发或溅射法有效地形成令人满意的薄膜，对原料气体的限制较少，而无需大型设备。
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公开(公告)号：US07897025B2
公开(公告)日：2011-03-01
申请号：US10973249
申请日：2004-10-27
IPC分类号： C23C14/00
CPC分类号： C23C14/35 , C23C14/228 , C23C14/26 , H01J37/32009
摘要： A rotor having a cylindrical peripheral surface is disposed in a treatment vessel into which a carrier gas is introduced, and the rotor peripheral surface is opposed to the surface of a substrate with a predetermine gap therebetween. Film-forming particulates including atomic molecules of the film-forming material and cluster particulates thereof are scattered from the surface of the film-forming material supplying member by sputtering, and the rotor is rotated to form a carrier gas flow near the rotor peripheral surface. The film-forming particulates are transported to the vicinity of the surface of the substrate by the carrier gas flow and adhered to the surface of the substrate. As a result, the adverse effect of high-energy particles and the like is suppressed to efficiently form a satisfactory thin film by an evaporation or sputtering process, which has less restriction to a source material gas, without the need for large equipment.
摘要翻译： 具有圆筒形周面的转子设置在其中引入载气的处理容器中，并且转子外周表面与基板的表面之间具有预定的间隙。 包括成膜材料的原子分子和簇粒子的成膜颗粒通过溅射从成膜材料供给构件的表面散射，转子旋转以在转子周边表面附近形成载气流。 成膜微粒通过载气流输送到基板的表面附近并粘附到基板的表面。 结果，抑制高能粒子等的不利影响，通过蒸发或溅射法有效地形成令人满意的薄膜，对原料气体的限制较少，而不需要大型设备。
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公开(公告)号：US20080123099A1
公开(公告)日：2008-05-29
申请号：US11902279
申请日：2007-09-20
申请人： Eiji Takahashi , Ryo Katayama , Hiroyuki Takamatsu
发明人： Eiji Takahashi , Ryo Katayama , Hiroyuki Takamatsu
CPC分类号： G01N21/171 , G01N21/031
摘要： There is provided a photothermal conversion measuring instrument which can measure change in property caused by thermal effect in a sample with high sensitivity and high accuracy by a simple structure. The instrument includes a current control circuit for sequentially switching output light of a plurality of excitation light sources each outputting excitation light having a different wavelength band so that one of the output light is irradiated to the sample, a light detector for interfering measurement light transmitted through the sample with reference light and detecting the intensity of the interference light, and a signal processor for extracting the same cycle components as the switching cycle of the output light switched by the current control circuit from a signal of the interference light intensity obtained from the light detector and for obtaining a difference of signal values corresponding to each of the excitation light based on the extracted signals.
摘要翻译： 提供了一种光热转换测量仪器，可以通过简单的结构，以高灵敏度和高精度测量样品中热效应引起的性能变化。 该仪器包括电流控制电路，用于顺序地切换多个激发光源的输出光，每个激发光源输出具有不同波长带的激发光，使得输出光中的一个照射到样本，用于干扰测量光的光检测器， 具有参考光的样本并检测干涉光的强度;以及信号处理器，用于从由光获得的干涉光强度的信号中提取与由电流控制电路切换的输出光的切换周期相同的周期分量 并且用于基于所提取的信号获得与每个激发光对应的信号值的差异。
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公开(公告)号：US07268114B2
公开(公告)日：2007-09-11
申请号：US10365231
申请日：2003-02-12
申请人： Fusao Makishima , Hiroyuki Takamatsu , Hideo Miki , Shinji Kawai , Michio Kimura , Tomoaki Matsumoto , Mieko Katsuura , Koichi Enomoto , Yusuke Satoh
发明人： Fusao Makishima , Hiroyuki Takamatsu , Hideo Miki , Shinji Kawai , Michio Kimura , Tomoaki Matsumoto , Mieko Katsuura , Koichi Enomoto , Yusuke Satoh
CPC分类号： C07K14/51 , A61K38/00 , Y10S514/801
摘要： A protein having amino acid sequence in SEQ ID NO: 1 of the Sequence Listing derived from human MP52, and a dimer protein thereof. A homodimer protein described above can be obtained by constructing a plasmid containing DNA coding amino acid sequence in SEQ ID NO: 1 of the Sequence Listing with a methionine at the N-terminus, introducing the plasmid into E. coli for transformation, solubilizing inclusion bodies obtained by culturing the transformant, purifying the monomer protein from the solubilized solution, refolding the monomer protein into a dimer protein and purifying the same. The homodimer protein described above is useful as a pharmaceutical composition for treating cartilage and bone diseases.
摘要翻译： 衍生自人MP52的序列表的SEQ ID NO：1中具有氨基酸序列的蛋白质及其二聚体蛋白质。 可以通过在N末端构建含有序列表的SEQ ID NO：1的DNA编码氨基酸序列的质粒与甲硫氨酸在N末端引入，将质粒导入大肠杆菌进行转化，从而增溶包涵体 通过培养转化体获得，从溶解的溶液中纯化单体蛋白质，将单体蛋白重折叠成二聚体蛋白质并进行纯化。 上述同型二聚体蛋白质可用作治疗软骨和骨疾病的药物组合物。
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公开(公告)号：US5665168A
公开(公告)日：1997-09-09
申请号：US515007
申请日：1995-08-14
申请人： Masami Nakano , Isao Uchiyama , Hiroyuki Takamatsu
发明人： Masami Nakano , Isao Uchiyama , Hiroyuki Takamatsu
IPC分类号： B08B3/08 , C11D3/04 , C11D7/02 , C11D7/08 , C11D7/22 , H01L21/304 , H01L21/306 , B08B3/00
CPC分类号： H01L21/02052
摘要： A method for cleaning a semiconductor silicon wafer, which can suppress and reduce adhesion of particles to the surface of the wafer, is disclosed. The method includes the steps of cleaning the semiconductor silicon wafer by using hydrofluoric acid aqueous solution containing a surfactant, and thereafter rinsing the semiconductor silicon wafer by using pure water containing ozone.
摘要翻译： 公开了一种能够抑制和降低颗粒对晶片表面的粘附性的半导体硅晶片的清洗方法。 该方法包括通过使用含有表面活性剂的氢氟酸水溶液清洗半导体硅晶片的步骤，然后使用含有臭氧的纯水冲洗半导体硅晶片。
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