IMPRINTING APPARATUS
    8.
    发明申请

    公开(公告)号:US20180178416A1

    公开(公告)日:2018-06-28

    申请号:US15847150

    申请日:2017-12-19

    Abstract: An imprinting apparatus includes a silicon master having a plurality of nanofeatures defined therein. An anti-stick layer coats the silicon master, the anti-stick layer including a molecule having a cyclosiloxane with at least one silane functional group. A method includes forming a master template by: depositing a formulation on a silicon master including a plurality of nanofeatures defined therein, the formulation including a solvent and a molecule having a cyclosiloxane with at least one silane functional group; and curing the formulation, thereby forming an anti-stick layer on the silicon master, the anti-stick layer including the molecule. The method further includes depositing a silicon-based working stamp material on the anti-stick layer of the master template; curing the silicon-based working stamp material to form a working stamp including a negative replica of the plurality of nanofeatures; and releasing the working stamp from the master template.

    IMPRINTING APPARATUS
    9.
    发明申请

    公开(公告)号:US20250114980A1

    公开(公告)日:2025-04-10

    申请号:US18964377

    申请日:2024-11-30

    Abstract: An imprinting apparatus includes a silicon master having a plurality of nanofeatures defined therein. An anti-stick layer coats the silicon master, the anti-stick layer including a molecule having a cyclosiloxane with at least one silane functional group. A method includes forming a master template by: depositing a formulation on a silicon master including a plurality of nanofeatures defined therein, the formulation including a solvent and a molecule having a cyclosiloxane with at least one silane functional group; and curing the formulation, thereby forming an anti-stick layer on the silicon master, the anti-stick layer including the molecule. The method further includes depositing a silicon-based working stamp material on the anti-stick layer of the master template; curing the silicon-based working stamp material to form a working stamp including a negative replica of the plurality of nanofeatures; and releasing the working stamp from the master template.

    FLOW CELLS WITH DENDRON ARCHITECTURE

    公开(公告)号:US20250010285A1

    公开(公告)日:2025-01-09

    申请号:US18750789

    申请日:2024-06-21

    Applicant: ILLUMINA, INC.

    Abstract: An example of a flow cell includes a substrate including a surface and a dendron architecture. The dendron architecture includes a functionalized focal point of attachment that is attached to the substrate surface and a plurality of peripheral functional groups that are orthogonal to the functionalized focal point of attachment. The flow cell further includes a primer set attached to the dendron architecture via the plurality of peripheral functional groups.

Patent Agency Ranking