REUSABLE TEMPLATE FOR CREATION OF THIN FILMS; METHOD OF MAKING AND USING TEMPLATE; AND THIN FILMS PRODUCED FROM TEMPLATE
    10.
    发明申请
    REUSABLE TEMPLATE FOR CREATION OF THIN FILMS; METHOD OF MAKING AND USING TEMPLATE; AND THIN FILMS PRODUCED FROM TEMPLATE 审中-公开
    用于创建薄膜的可重复使用的模板; 制作和使用模板的方法; 和薄膜生产的薄膜

    公开(公告)号:US20100221488A1

    公开(公告)日:2010-09-02

    申请号:US12777623

    申请日:2010-05-11

    Abstract: The present invention is directed generally to templates used in the creation of thin-film replicas, for example, the creation of thin films, such as carbon films, for use as specimen support in electron-beam specimen analysis. More specifically, the present invention is directed to novel reusable patterned templates, the methodology of making these reusable templates, the templates made from such methodologies, the use and reuse of these templates to make thin films of any type for any purpose, and the thin films made from these templates. A feature of the novel template of the present invention is in its employment of one or more zones of discontinuity, or undercuts, associated with the patterns transferred into the template to allow for the removal of the thin film from the template without sacrificing the structural integrity of the template to prevent at least one re-use of the template.

    Abstract translation: 本发明一般涉及用于制造薄膜复制品的模板,例如在电子束标本分析中用作样品载体的薄膜如碳膜。 更具体地,本发明涉及新颖的可重复使用的图案化模板,制造这些可再利用模板的方法,由这些方法制成的模板,这些模板的使用和再利用以制造用于任何目的的任何类型的薄膜,以及薄的 这些模板制作的电影。 本发明的新型模板的特征在于其使用与转移到模板中的图案相关联的一个或多个不连续区域或底切区域,以允许从模板移除薄膜而不牺牲结构完整性 的模板,以防止至少一次重新使用模板。

Patent Agency Ranking