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101 条记录 (耗时 0.029 秒)

    PROCESSING SYSTEMS AND APPARATUSES HAVING A SHAFT COVER
    1.
    发明申请
    PROCESSING SYSTEMS AND APPARATUSES HAVING A SHAFT COVER 审中-公开
    加工系统和具有轴承盖的装置

    公开(公告)号：US20120073503A1

    公开(公告)日：2012-03-29

    申请号：US13098241

    申请日：2011-04-29

    申请人： Juno Yu-Ting Huang ,  Sang Won Kang ,  David H. Quach ,  Wei-Yung Hsu

    发明人： Juno Yu-Ting Huang ,  Sang Won Kang ,  David H. Quach ,  Wei-Yung Hsu

    IPC分类号： C30B25/08 ,  C30B25/12

    CPC分类号： C30B25/08 ,  C30B25/12 ,  C30B29/403

    摘要： Apparatus and systems are disclosed for processing a substrate. In an embodiment, a system includes a processing chamber, which includes a substrate support to support the substrate. The chamber further includes a plate member positioned below the substrate support and designed to improve heating efficiency within the processing chamber. The processing chamber further includes a lower dome positioned below the plate member. The plate member is designed to prevent a coating from being deposited on the lower dome during processing conditions. The plate member is designed to prevent particles and debris from falling below the plate member. The plate member is designed to improve heating uniformity between the plate member and the substrate within the processing chamber.

    摘要翻译： 公开了用于处理衬底的装置和系统。 在一个实施例中，系统包括处理室，其包括用于支撑衬底的衬底支撑件。 腔室还包括位于衬底支撑件下方并被设计成提高处理室内的加热效率的板构件。 处理室还包括位于板构件下方的下拱顶。 板构件被设计成防止在加工条件下涂层沉积在下圆顶上。 板构件被设计成防止颗粒和碎屑落在板构件下方。 板构件被设计成改善处理室内的板构件和衬底之间的加热均匀性。

    GROWTH OF III-V LED STACKS USING NANO MASKS
    6.
    发明申请
    GROWTH OF III-V LED STACKS USING NANO MASKS 审中-公开
    使用NANO MASKS的III-V LED堆叠的增长

    公开(公告)号：US20120235115A1

    公开(公告)日：2012-09-20

    申请号：US13355255

    申请日：2012-01-20

    申请人： Sang Won Kang ,  Jie Su ,  Tuoh-Bin NG ,  David Bour ,  Wei-Yung Hsu

    发明人： Sang Won Kang ,  Jie Su ,  Tuoh-Bin NG ,  David Bour ,  Wei-Yung Hsu

    IPC分类号： H01L21/205 ,  C23C16/34 ,  C23C16/52 ,  H01L33/06

    CPC分类号： H01L33/007 ,  H01L21/0237 ,  H01L21/02458 ,  H01L21/0254 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/0265 ,  H01L33/02 ,  H01L33/20

    摘要： Methods, semiconductor material stacks and equipment for manufacture of light emitting diodes (LEDs) with improve crystal quality. A growth stopper is deposited between nuclei for a group III-V material, such as GaN, to form a nano mask. The group III-V material is laterally overgrown from a region of the nuclei not covered by the nano mask to form a continuous material layer with reduced dislocation density in preparation for subsequent growth of n-type and p-type layers of the LED. The lateral overgrowth from the nuclei may further recover the surface morphology of the buffer layer despite the presence of the nano mask. Presence of the growth stopper may further result in void formation on a substrate side of an LED stack to improve light extraction efficiency.

    摘要翻译： 方法，用于制造具有改善晶体质量的发光二极管（LED）的半导体材料堆叠和设备。 在诸如GaN的III-V族材料的核之间沉积生长塞，以形成纳米掩模。 III-V族材料从未被纳米掩模覆盖的核的区域横向长满，以形成具有降低的位错密度的连续材料层，以准备LED的n型和p型层的随后生长。 即使存在纳米掩模，来自核的侧向过度生长也可进一步恢复缓冲层的表面形态。 生长停止剂的存在可能进一步导致在LED堆叠的衬底侧上的空隙形成以提高光提取效率。

    LASER PROCESSING SYSTEM WITH VARIABLE BEAM SPOT SIZE
    8.
    发明申请
    LASER PROCESSING SYSTEM WITH VARIABLE BEAM SPOT SIZE 审中-公开
    具有可变光束尺寸的激光加工系统

    公开(公告)号：US20110253685A1

    公开(公告)日：2011-10-20

    申请号：US13076422

    申请日：2011-03-30

    申请人： Wei-Yung Hsu ,  Antoine P. Manens

    发明人： Wei-Yung Hsu ,  Antoine P. Manens

    IPC分类号： B23K26/00

    CPC分类号： B23K26/046 ,  B23K26/364 ,  B23K26/40 ,  B23K2103/16 ,  B23K2103/42 ,  B23K2103/50

    摘要： Systems for scribing a workpiece incorporate a motorized beam expander to change a laser beam spot size incident on a workpiece. A system includes a frame, a laser coupled with the frame and generating an output to remove material from at least a portion of a workpiece, a beam expander positioned along a path of the laser output and having a motorized mechanism operable to vary a beam expansion ratio applied to the laser output, and at least one scanning device coupled with the frame and operable to control a position of the laser output, after expansion, on the workpiece. The motorized beam expander can be used to selectively vary the width of a laser beam supplied to a scanning device so as to selectively vary the size of the laser beam incident on the workpiece. Alternatively, a variable aperture can be used instead of a beam expander.

    摘要翻译： 用于对工件进行划线的系统包括电动束扩张器以改变入射在工件上的激光束斑点尺寸。 一种系统包括框架，激光器与框架耦合并且产生输出以从工件的至少一部分移除材料;沿着激光输出路径定位的光束扩展器，并具有可操作以改变光束膨胀的电动机构 以及至少一个与框架耦合的扫描装置，并可操作以控制激光输出在膨胀之后在工件上的位置。 电动光束扩展器可以用于选择性地改变提供给扫描装置的激光束的宽度，以便选择性地改变入射在工件上的激光束的尺寸。 或者，可以使用可变光圈来代替光束扩展器。

    IN-LINE METROLOGY METHODS AND SYSTEMS FOR SOLAR CELL FABRICATION
    9.
    发明申请
    IN-LINE METROLOGY METHODS AND SYSTEMS FOR SOLAR CELL FABRICATION 审中-公开
    用于太阳能电池制造的在线计量方法和系统

    公开(公告)号：US20110198322A1

    公开(公告)日：2011-08-18

    申请号：US12851471

    申请日：2010-08-05

    申请人： Antoine P. Manens ,  Ting-Ruei Shiu ,  Bassam Shamoun ,  Wei-Yung Hsu ,  Manivannan Thothadri

    发明人： Antoine P. Manens ,  Ting-Ruei Shiu ,  Bassam Shamoun ,  Wei-Yung Hsu ,  Manivannan Thothadri

    IPC分类号： B23K26/00 ,  G01J1/42 ,  H04N7/18

    CPC分类号： B23K26/048 ,  B23K26/032 ,  B23K26/0673 ,  B23K26/082 ,  B23K26/083 ,  B23K26/364 ,  B23K26/40 ,  B23K26/705 ,  B23K2103/172 ,  H01L31/046 ,  H01L31/0463 ,  Y02E10/50

    摘要： In-line metrology methods and systems for use with laser-scribing systems used in solar-cell fabrication are disclosed. Such methods and systems can involve a variety of components, for example, a device for measuring the amount of power input to a laser, a power meter for measuring laser output power, a beam viewer for measuring aspects of a laser beam, a height sensor for measuring a workpiece height, a microscope for measuring workpiece features formed by the laser-scribing system, and a system for monitoring a laser-scribing system and annunciating a warning(s) and/or an error message(s) when operational limits are exceeded. In-line metrology methods can also include the processing of output beam reflections so as to track beam drift over time and/or provide for focusing of an imaging device.

    摘要翻译： 公开了用于太阳能电池制造中使用的激光划线系统的在线测量方法和系统。 这样的方法和系统可以涉及各种部件，例如，用于测量激光输入功率的装置，用于测量激光输出功率的功率计，用于测量激光束的方面的光束观察器，高度传感器 用于测量工件高度的显微镜，用于测量由激光划线系统形成的工件特征的显微镜，以及用于监视激光划线系统的系统，并且当操作限度为...时，发出警告和/或错误消息 超过了 在线测量方法还可以包括输出光束反射的处理，以便随时间跟踪光束漂移和/或提供成像装置的聚焦。

    LASER-SCRIBING TOOL ARCHITECTURE
    10.
    发明申请
    LASER-SCRIBING TOOL ARCHITECTURE 审中-公开
    激光切割工具架构

    公开(公告)号：US20100252543A1

    公开(公告)日：2010-10-07

    申请号：US12621316

    申请日：2009-11-18

    申请人： Antoine P. Manens ,  Wei-Yung Hsu

    发明人： Antoine P. Manens ,  Wei-Yung Hsu

    IPC分类号： B23K26/00

    CPC分类号： B23K26/082 ,  B23K26/702

    摘要： The present disclosure relates to apparatuses and systems for laser scribing a vertically-oriented workpiece. In many embodiments, a laser-scribing apparatus includes a frame, a first fixture coupled with the frame, a second fixture coupled with the frame, a laser operable to generate output able to remove material from at least a portion of the workpiece, and a scanning device coupled with the laser and the frame. The first fixture is configured for engagement with a first portion of the workpiece. The second fixture is configured for engagement with a second portion of the workpiece. When the workpiece is engaged by the first and second fixtures the workpiece is substantially vertically oriented. The scanning device is operable to control a position of the output from the laser relative to the workpiece.

    摘要翻译： 本公开涉及用于激光划线垂直取向的工件的装置和系统。 在许多实施例中，激光划线设备包括框架，与框架连接的第一固定件，与框架连接的第二固定件，可操作以产生能够从工件的至少一部分移除材料的激光器，以及 与激光和框架耦合的扫描装置。 第一夹具构造成与工件的第一部分接合。 第二夹具被构造成与工件的第二部分接合。 当工件被第一和第二固定件接合时，工件基本上垂直定向。 扫描装置可操作以控制来自激光器的输出相对于工件的位置。