Ion implanter
    1.
    发明授权
    Ion implanter 失效
    离子注入机

    公开(公告)号:US5072125A

    公开(公告)日:1991-12-10

    申请号:US592659

    申请日:1990-10-04

    IPC分类号: H01J37/02

    摘要: An ion implanter has a sample table on which a sample is placed, and means for injecting ions into the sample by applying an ion beam to the sample on the sample table. The ion implanter has magnetic field applying means for generating radial magnetic fields on the surface of the sample from near the center of the sample to outside of the outer periphery of the sample. The secondary electrons generated when the ion beam irradiates the sample table or the sample, including the secondary electrons generated from the sample table near the outer periphery of the sample, are trapped in the magnetic fields and transferred to the central portion of the sample. The secondary electrons are attracted by the electrostatic charge of the ions injected to the surface of the sample and recombine with the ions. Consequently, the electrostatic charge on the surface of the sample is decreased, preventing generation of device defects caused by electrostatic discharge damage.

    摘要翻译: 离子注入机具有放置样品的样品台,以及通过向样品台上的样品施加离子束将离子注入样品的装置。 离子注入机具有磁场施加装置,用于从样品中心附近在样品的外周附近产生径向磁场。 当离子束照射样品台或样品时产生的二次电子,包括从样品外周附近的样品台产生的二次电子被捕获在磁场中并转移到样品的中心部分。 二次电子被注入到样品表面的离子的静电荷吸引,并与离子重新结合。 因此,样品表面上的静电电荷减少,防止由静电放电损伤引起的器件缺陷的产生。

    Inverter system, AC rotating machine and electric power converter
    7.
    发明授权
    Inverter system, AC rotating machine and electric power converter 有权
    逆变器系统,交流旋转机和电力转换器

    公开(公告)号:US07554780B2

    公开(公告)日:2009-06-30

    申请号:US11264386

    申请日:2005-11-02

    IPC分类号: H02H7/09

    CPC分类号: H02M1/126

    摘要: In an inverter system including of an electric-power converter and an ac rotating machine, over-voltage generated in the ac rotating machine is controlled by a low-cost system configuration. The system includes: an electric-power converter; a three-phase ac rotating machine; and a four-core non-coaxial cable, having a ground line and three-phase electric-power supplying lines, connecting the electric-power converter to the three-phase ac rotating machine. One or two capacitors are connected between the ground line and one or two of the electric-power supplying lines, at electric-power supplying terminals on the rotating machine, so that respective capacitances between the three-phase electric-power supplying lines and the ground line are approximately equal to each other.

    摘要翻译: 在包括电力转换器和交流旋转机械的逆变器系统中,在交流旋转机器中产生的过电压由低成本的系统配置来控制。 该系统包括:电力转换器; 三相交流旋转机; 以及具有接地线和三相电力供给线的四芯非同轴电缆,将电力转换器与三相交流旋转机连接起来。 一个或两个电容器连接在旋转机器上的电力供应端子的地线和一个或两个供电线之间,使得三相电力供应线和地面之间的电容 线大致相等。

    Inverter system, AC rotating machine and electric power converter

    公开(公告)号:US20060113951A1

    公开(公告)日:2006-06-01

    申请号:US11264386

    申请日:2005-11-02

    IPC分类号: H02P27/04

    CPC分类号: H02M1/126

    摘要: In an inverter system including of an electric-power converter and an ac rotating machine, over-voltage generated in the ac rotating machine is controlled by a low-cost system configuration. The system includes: an electric-power converter; a three-phase ac rotating machine; and a four-core non-coaxial cable, having a ground line and three-phase electric-power supplying lines, connecting the electric-power converter to the three-phase ac rotating machine. One or two capacitors are connected between the ground line and one or two of the electric-power supplying lines, at electric-power supplying terminals on the rotating machine, so that respective capacitances between the three-phase electric-power supplying lines and the ground line are approximately equal to each other.