公开(公告)号：US20080026583A1

公开(公告)日：2008-01-31

申请号：US11839329

申请日：2007-08-15

申请人： L. Hardy ,  Heather Kranz ,  Thomas Wood ,  David Kaisaki ,  John Gagliardi ,  John Clark ,  Patricia Savu ,  Philip Clark

发明人： L. Hardy ,  Heather Kranz ,  Thomas Wood ,  David Kaisaki ,  John Gagliardi ,  John Clark ,  Patricia Savu ,  Philip Clark

IPC分类号： H01L21/302

CPC分类号： H01L21/31053 ,  B24B37/044 ,  B24B37/245 ,  C09G1/02 ,  H01L21/3212

摘要： The disclosure pertains to compositions and methods for modifying or refining the surface of a wafer suited for semiconductor fabrication. The compositions include working liquids useful in modifying a surface of a wafer suited for fabrication of a semiconductor device. In some embodiments, the working liquids are aqueous solutions of initial components substantially free of loose abrasive particles, the components including water, a surfactant, and a pH buffer exhibiting at least one pKa greater than 7. In certain embodiments, the pH buffer includes a basic pH adjusting agent and an acidic complexing agent, and the working liquid exhibits a pH from about 7 to about 12. In further embodiments, the disclosure provides a fixed abrasive article comprising a surfactant suitable for modifying the surface of a wafer, and a method of making the fixed abrasive article. Additional embodiments describe methods that may be used to modify a wafer surface.

摘要翻译： 本公开涉及用于改性或精制适于半导体制造的晶片表面的组合物和方法。 组合物包括可用于改性适于制造半导体器件的晶片表面的工作液体。 在一些实施方案中，工作液体是基本上不含松散磨料颗粒的初始组分的水溶液，组分包括水，表面活性剂和显示出大于7的至少一个pK的一个pH缓冲液。 某些实施方案中，pH缓冲液包括碱性pH调节剂和酸性络合剂，并且工作液体的pH值为约7至约12.在另外的实施方案中，本发明提供了一种固定磨料制品，其包含适于改性 晶片的表面，以及制造固定的磨料制品的方法。 另外的实施例描述了可用于修改晶片表面的方法。

公开(公告)号：US06250830B1

公开(公告)日：2001-06-26

申请号：US09493224

申请日：2000-01-28

申请人： Philip Clark

发明人： Philip Clark

IPC分类号： A46B1100

CPC分类号： E01C23/227 ,  B65D83/203 ,  E01C23/00

摘要： A device for marking hidden delaminations in a structure subject to hidden delaminations comprising a wheeled spray paint can holder, wherein said holder is adapted to hold a paint can containing a nozzle which when depressed releases an upward spray of paint, and wherein said holder is fixedly connected to an outer tube containing therein an inner tube adapted for freely sliding inside said outer tube, wherein said inner tube contains a section extending beyond said outer tube in an upper axial direction, and wherein said inner tube is mounted on top of a spring in said outer tube, and wherein said inner tube contains a protrusion in said section, and wherein said inner tube contains one or more wheels, at or near the upper end of said section, for rolling said holder on an overhead surface, and wherein said outer tube contains means fixedly attached thereto for engaging said spring and located inside said outer tube and below said spring, and wherein when said outer tube is adapted through said means to connect to an extension pole through said outer tube so as to engage said spring, and wherein when said extension pole is connected in a fixed relationship to said means and is urged against said spring while said one or more wheels are in contact with said overhead surface, said protrusion is urged against said nozzle, thereby releasing said upward spray of paint.

摘要翻译： 一种用于标记隐藏的分层的结构中的隐藏的分层的装置，包括轮式喷漆​​罐保持器，其中所述保持器适于容纳包含喷嘴的油漆罐，所述喷嘴在压下时释放油漆的向上喷射，并且其中所述保持器固定 连接到其中包含适于在所述外管内自由滑动的内管的外管，其中所述内管包含在上轴向方向上延伸超过所述外管的部分，并且其中所述内管安装在弹簧的顶部 所述外管，其中所述内管在所述部分中包含突起，并且其中所述内管包含一个或多个车轮，位于所述部分的上端处或附近，用于在所述顶部表面上滚动所述保持器，并且其中所述外管 管包含固定在其上用于接合所述弹簧并且位于所述外管内部和所述弹簧下方的装置，并且其中当所述外管适于t 通过所述装置通过所述外管连接到延伸杆以便接合所述弹簧，并且其中当所述延伸杆以固定的关系连接到所述装置并且当所述一个或多个轮接触时被推靠在所述弹簧上 在所述塔顶表面上，所述突出部被推靠在所述喷嘴上，从而释放所述向上的喷涂。

公开(公告)号：US20060272677A1

公开(公告)日：2006-12-07

申请号：US11156763

申请日：2005-06-20

申请人： Nam Lee ,  Philip Clark ,  Brent Schwab

发明人： Nam Lee ,  Philip Clark ,  Brent Schwab

IPC分类号： C23G1/00 ,  C23G1/02 ,  B08B3/00

CPC分类号： H01L21/02052 ,  B08B3/08 ,  C11D7/08 ,  C11D11/0047 ,  H01L21/0206

摘要： The present invention relates to cleaning processes for semiconductor substrates. More particularly, the present inventive method can provide enhanced particle removal efficiencies at a given material loss. In fact, in certain embodiments, the present method can achieve particle removal efficiencies of at least about 90%, while yet removing less than about 2 angstroms of any oxide present on the semiconductor substrate. As such, the present methods find particular applicability in the processing of advanced technology nodes.

摘要翻译： 本发明涉及半导体基板的清洗工艺。 更具体地，本发明的方法可以在给定的材料损失下提供增强的颗粒去除效率。 事实上，在某些实施方案中，本发明的方法可以实现至少约90％的颗粒去除效率，同时除去少于约2埃的半导体衬底上存在的任何氧化物。 因此，本方法在高级技术节点的处理中具有特殊的适用性。

公开(公告)号：US20070057057A1

公开(公告)日：2007-03-15

申请号：US11470660

申请日：2006-09-07

申请人： David Andresky ,  Nathan Cummings ,  Philip Clark ,  Gregory Fossen ,  Michael Malone ,  Thad Smith

发明人： David Andresky ,  Nathan Cummings ,  Philip Clark ,  Gregory Fossen ,  Michael Malone ,  Thad Smith

IPC分类号： G06K7/08 ,  H04Q5/22

CPC分类号： G06K7/0008 ,  G06K7/10297 ,  G06K7/10356

摘要： Methods and apparatus for provisioning the use of multiple readers and/or wireless communication protocols within a defined area are provided. More specifically, a coordinator or the like can be used to manage the activation and deactivation of the multiple readers and/or communication protocols within a single reader such that interference between disparate technologies is avoided.

摘要翻译： 提供了在限定区域内供应多个读取器和/或无线通信协议的使用的方法和装置。 更具体地，可以使用协调器等来管理单个读取器内的多个读取器和/或通信协议的激活和去激活，从而避免不同技术之间的干扰。

公开(公告)号：US20050032293A1

公开(公告)日：2005-02-10

申请号：US10894319

申请日：2004-07-19

申请人： Philip Clark ,  Kurt Christenson ,  Brent Schwab

发明人： Philip Clark ,  Kurt Christenson ,  Brent Schwab

IPC分类号： H01L21/306 ,  H01L21/3105 ,  H01L21/311 ,  H01L21/312 ,  H01L21/316 ,  H01L21/768 ,  H01L23/31 ,  H01L21/469

CPC分类号： H01L21/31138 ,  H01L21/02063 ,  H01L21/02137 ,  H01L21/02203 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/02348 ,  H01L21/3105 ,  H01L21/31058 ,  H01L21/3122 ,  H01L21/3124 ,  H01L21/3125 ,  H01L21/31695 ,  H01L21/76814 ,  H01L21/76826 ,  H01L23/3171 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides improvements to the use of silyating agents in semiconductor processing. More particularly, the silyating agents may be provided in combination with a substantially non-flammable ether, so that the combination is substantially non-flammable. Additionally, the silyating agent may be utilized in vapor form, or applied in conjunction with the electromagnetic radiation. Each of these embodiments can enhance the usability of the silyating agent, i.e., by rendering the silyating agent more safe, more easily utilized in a variety of processing equipment and/or by enhancing the passivation efficacy/efficiency of the silyating agent.

摘要翻译： 本发明提供了在半导体加工中使用硅烷化剂的改进。 更具体地说，可以与基本上不可燃的醚组合提供该酯化剂，使得该组合基本上是不可燃的。 另外，可以以蒸气形式使用，也可以与电磁辐射结合使用。 这些实施方案中的每一个都可以增强水解剂的可用性，即通过使得silyating剂更安全，更容易地用于各种加工设备和/或通过提高所述silyating剂的钝化效率/效率。

公开(公告)号：US20070129273A1

公开(公告)日：2007-06-07

申请号：US11295859

申请日：2005-12-07

申请人： Philip Clark ,  Nobuaki Ando ,  Paul Rajtar

发明人： Philip Clark ,  Nobuaki Ando ,  Paul Rajtar

IPC分类号： C11D7/32

CPC分类号： C11D11/0047 ,  C11D7/28 ,  C11D7/3263 ,  C11D7/3281 ,  C11D11/04

摘要： Compositions consisting essentially of the reaction product (including unreacted components) obtained by mixing (a) one or more selected fluorinated compounds and (b) one or more selected organic agents and providing in-situ generation of fluoride ions. Also, kits for forming such compositions and methods for using such compositions.

摘要翻译： 基本上由通过混合（a）一种或多种选择的氟化化合物和（b）一种或多种选择的有机试剂并提供原位产生氟离子获得的反应产物（包括未反应的组分）组成的组合物。 而且，用于形成这种组合物的试剂盒和使用这种组合物的方法。

公开(公告)号：US20060070979A1

公开(公告)日：2006-04-06

申请号：US11226918

申请日：2005-09-13

申请人： Kurt Christenson ,  Philip Clark

发明人： Kurt Christenson ,  Philip Clark

IPC分类号： B08B6/00 ,  C03C15/00 ,  H01L21/306

CPC分类号： H01L21/02063 ,  C11D7/02 ,  C11D7/3209 ,  C11D11/0047 ,  G03F7/423 ,  H01L21/02052 ,  H01L21/31116 ,  H01L21/31133 ,  H01L21/67051

摘要： The present invention relates to methods of processing wafer-like objects (e.g., having an exposed copper feature and/or including low-k dielectric material) with ozone. In certain preferred embodiments, a base is also used to process the wafer-like object(s).

摘要翻译： 本发明涉及用臭氧处理晶片状物体（例如，具有暴露的铜特征和/或包括低k电介质材料）的方法。 在某些优选实施例中，基底也用于处理晶片状物体。

公开(公告)号：US06220097B1

公开(公告)日：2001-04-24

申请号：US09413812

申请日：1999-10-07

申请人： Philip Clark

发明人： Philip Clark

IPC分类号： G01M700

CPC分类号： G01N29/045 ,  G01H13/00 ,  G01N33/383 ,  G01N2291/0232

摘要： A device for detecting hidden delaminations in a structure subject to hidden delaminations comprising a rotary percussion tool head adapted at an end thereof to connect to an extension pole, wherein said head comprises at least one circular member, each circular member having on the periphery thereof projections extending in the radial direction and spaced apart in the circumferential direction, and a method of using same.

摘要翻译： 一种用于检测隐藏的分层的结构中的隐藏的分层的装置，包括一个旋转冲击工具头，该旋转冲击工具头在其一端适于连接到延伸杆，其中所述头部包括至少一个圆形构件，每个圆形构件在其周边上具有凸起 沿圆周方向延伸并间隔开的方法及其使用方法。