Adhesive Sheet for Semiconductor Wafer Processing, Method for Processing of Semiconductor Wafer Using Sheet
    4.
    发明申请
    Adhesive Sheet for Semiconductor Wafer Processing, Method for Processing of Semiconductor Wafer Using Sheet 审中-公开
    用于半导体晶片处理的粘合片,使用片的半导体晶片的处理方法

    公开(公告)号:US20140342531A1

    公开(公告)日:2014-11-20

    申请号:US14362933

    申请日:2012-12-05

    Abstract: To provide an adhesive sheet for wafer processing that satisfies characteristics such as: (1) protecting an uneven circuit surface during grinding with an adhesive force that is not excessively weak; (2) being easy to remove after processing; and (3) leaving very little adhesive residue on the wafer, and that can preferably be used as a removable BG sheet or the like. This adhesive sheet for wafer processing is characterized in having a substrate and an adhesive layer formed on the substrate, the adhesive layer having an adhesive polymer (A) and a polyrotaxane (B) having a linear-chain molecule passing through the opening of the at least two cyclic molecules, and having a block group at both ends of the linear-chain molecule, the adhesive polymer (A) and the cyclic molecule of the polyrotaxane (B) being linked together to form a crosslinked structure.

    Abstract translation: 提供一种满足以下特性的晶片加工用粘合片:(1)以不过分弱的粘接力在磨削过程中保护不平衡的电路面; (2)加工后易于除去; 和(3)在晶片上留下非常少的粘合剂残留物,并且可以优选地用作可移除的BG片材等。 这种用于晶片加工的粘合片的特征在于具有在基片上形成的基底和粘合剂层,该粘合剂层具有粘合聚合物(A)和具有穿过该孔的开口的直链分子的聚轮烷(B) 至少两个环状分子,并且在直链分子的两端具有嵌段基团,粘合聚合物(A)和聚轮烷(B)的环状分子连接在一起形成交联结构。

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