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1.发明申请Substrate Heating Apparatus, Heating Method, and Semiconductor Device Manufacturing Method 有权基板加热装置，加热方法和半导体装置制造方法公开(公告)号：US20090191724A1
公开(公告)日：2009-07-30
申请号：US12360378
申请日：2009-01-27
CPC分类号： H01L21/68742 , F27B17/0025 , H01L21/67098 , H01L21/67115
摘要： A substrate heating apparatus having a conductive heater which heats a substrate includes a filament arranged in the conductive heater and connected to a filament power supply to generate thermoelectrons, and an acceleration power supply which accelerates the thermoelectrons between the filament and conductive heater. The filament has inner peripheral portions formed at a predetermined interval along an inner circle concentric with the substrate, outer peripheral portions formed at a predetermined interval on an outer circle concentric with the inner circle and having a diameter larger than that of the inner circle, and a region formed by connecting the end point of each inner peripheral portions and the end point of a corresponding one of the outer peripheral portions.
摘要翻译： 具有加热基板的导电加热器的基板加热装置包括布置在导电加热器中并连接到灯丝电源以产生热电子的灯丝，以及加速灯丝和导电加热器之间的热电子的加速电源。 所述灯丝具有沿着与所述基板同心的内圆周以预定间隔形成的内周部，外周部以与所述内圆同心的外圆形以预定间隔形成，并且具有比所述内圆更大的直径， 通过连接每个内周部的端点和相应的一个外周部的端点而形成的区域。
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2.发明授权Substrate heating apparatus, heating method, and semiconductor device manufacturing method 有权基板加热装置，加热方法和半导体装置的制造方法公开(公告)号：US07897523B2
公开(公告)日：2011-03-01
申请号：US12360378
申请日：2009-01-27
IPC分类号： H01L21/311 , F27D11/00
CPC分类号： H01L21/68742 , F27B17/0025 , H01L21/67098 , H01L21/67115
摘要： A substrate heating apparatus having a conductive heater which heats a substrate includes a filament arranged in the conductive heater and connected to a filament power supply to generate thermoelectrons, and an acceleration power supply which accelerates the thermoelectrons between the filament and conductive heater. The filament has inner peripheral portions formed at a predetermined interval along an inner circle concentric with the substrate, outer peripheral portions formed at a predetermined interval on an outer circle concentric with the inner circle and having a diameter larger than that of the inner circle, and a region formed by connecting the end point of each inner peripheral portions and the end point of a corresponding one of the outer peripheral portions.
摘要翻译： 具有加热基板的导电加热器的基板加热装置包括布置在导电加热器中并连接到灯丝电源以产生热电子的灯丝，以及加速灯丝和导电加热器之间的热电子的加速电源。 所述灯丝具有沿着与所述基板同心的内圆周以预定间隔形成的内周部，外周部以与所述内圆同心的外圆形以预定间隔形成，并且具有比所述内圆更大的直径， 通过连接每个内周部的端点和相应的一个外周部的端点而形成的区域。
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3.发明授权公开(公告)号：US09194038B2
公开(公告)日：2015-11-24
申请号：US12974245
申请日：2010-12-21
IPC分类号： C23C14/00 , C23C14/34 , C23C14/56 , C23C16/44 , C23C16/455 , C23C16/458 , H01J37/32 , H01J37/34
CPC分类号： C23C14/564 , C23C14/0036 , C23C14/34 , C23C16/4401 , C23C16/45591 , C23C16/4585 , H01J37/32477 , H01J37/32651 , H01J37/3405 , H01J37/3411 , H01J37/3441 , H01J2237/026 , H01J2237/0268
摘要： The inventors of this invention conducted a test and found out that to prevent peel-off of an adherent film, it is not of essential importance to set the radius of curvature equal to or larger than a predetermined threshold. The inventors of the present invention also found out that peel-off of an adherent film occurs in the region in which the curvature of a shield changes and is less likely to occur when the change in curvature of the shield is small. Accordingly, the key to the problem is the magnitude of a change in curvature of the shield, so changing the curvature stepwise makes it possible to suppress a large change in curvature, and thus to prevent peel-off of an adherent film free from any disadvantages such as deterioration in film thickness distribution, which may occur due to an increase in size of the shield.
摘要翻译： 本发明人进行了测试，发现为了防止粘附膜的剥离，将曲率半径设定为等于或大于预定阈值不是重要的。 本发明的发明人还发现，粘合膜的剥离发生在屏蔽的曲率变化的区域中，并且当屏蔽的曲率变化小时不太可能发生。 因此，问题的关键在于屏蔽体的曲率变化的大小，因此逐渐改变曲率使得可以抑制曲率的大的变化，从而防止粘附膜的剥离没有任何缺点 例如由于屏蔽件的尺寸增加而可能发生的膜厚分布的劣化。
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4.发明申请公开(公告)号：US20110155059A1
公开(公告)日：2011-06-30
申请号：US12974245
申请日：2010-12-21
CPC分类号： C23C14/564 , C23C14/0036 , C23C14/34 , C23C16/4401 , C23C16/45591 , C23C16/4585 , H01J37/32477 , H01J37/32651 , H01J37/3405 , H01J37/3411 , H01J37/3441 , H01J2237/026 , H01J2237/0268
摘要： The inventors of this invention conducted a test and found out that to prevent peel-off of an adherent film, it is not of essential importance to set the radius of curvature equal to or larger than a predetermined threshold. The inventors of the present invention also found out that peel-off of an adherent film occurs in the region in which the curvature of a shield changes and is less likely to occur when the change in curvature of the shield is small. Accordingly, the key to the problem is the magnitude of a change in curvature of the shield, so changing the curvature stepwise makes it possible to suppress a large change in curvature, and thus to prevent peel-off of an adherent film free from any disadvantages such as deterioration in film thickness distribution, which may occur due to an increase in size of the shield.
摘要翻译： 本发明人进行了测试，发现为了防止粘附膜的剥离，将曲率半径设定为等于或大于预定阈值不是重要的。 本发明的发明人还发现，粘合膜的剥离发生在屏蔽的曲率变化的区域中，并且当屏蔽的曲率变化小时不太可能发生。 因此，问题的关键在于屏蔽体的曲率变化的大小，因此逐渐改变曲率使得可以抑制曲率的大的变化，从而防止粘附膜的剥离没有任何缺点 例如由于屏蔽件的尺寸增加而可能发生的膜厚分布的劣化。
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公开(公告)号：US20120225974A1
公开(公告)日：2012-09-06
申请号：US13404216
申请日：2012-02-24
申请人： Makoto Uno , Shinya Hasegawa
发明人： Makoto Uno , Shinya Hasegawa
CPC分类号： B60C1/0016 , C08K3/346 , C08L7/00 , C08L9/00 , C08L9/06
摘要： A rubber composition for tire, comprising at least a rubber component and an inorganic filler, wherein the inorganic filler has an angle of repose of 40 degrees or more, a Mohs' hardness of 2.0 or less, a BET specific surface area (BETS) (m2/g) of 10 m2/g or more, and a ratio (DBP)/(BET5) of the amount (ml/100 g) of dibutyl phthalate (DBP) absorbed to the BET specific surface area (BET5) (m2/g) of 2.0 or more, and wherein the content of the inorganic filler is from 0.5 to 50 parts by mass based on 100 parts by mass of the rubber component.
摘要翻译： 一种轮胎用橡胶组合物，至少含有橡胶成分和无机填料，其中，所述无机填料的休止角为40度以上，莫氏硬度为2.0以下，BET比表面积（BETS）（ m 2 / g）为10m 2 / g以上，吸附在BET比表面积（BET5）（BET / 5）的邻苯二甲酸二丁酯（DBP）的量（ml / 100g）的比（DBP）/（BET5） g）为2.0以上，相对于100质量份的橡胶成分，无机填料的含量为0.5〜50质量份。
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6.发明授权公开(公告)号：US08154096B2
公开(公告)日：2012-04-10
申请号：US12834040
申请日：2010-07-12
IPC分类号： H01L27/14 , H01L31/00 , H01L31/0232
CPC分类号： H01L31/035281 , H01L21/32136 , H01L21/32137 , H01L27/14643 , Y02E10/50
摘要： An object is to provide a photoelectric conversion element having a side surface with different taper angles by conducting etching of a photoelectric conversion layer step-by-step. A pin photodiode has a high response speed compared with a pn photodiode but has a disadvantage of large dark current. One cause of the dark current is considered to be conduction through an etching residue which is generated in etching and deposited on a side surface of the photoelectric conversion layer. Leakage current of the photoelectric conversion element is reduced by forming a structure in which a side surface has two different tapered shapes, which conventionally has a uniform surface, so that the photoelectric conversion layer has a side surface of a p-layer and a side surface of an n-layer, which are not in the same plane.
摘要翻译： 本发明的目的是提供一种具有不同锥角的侧面的光电转换元件，该光电转换元件逐步进行光电转换层的蚀刻。 与pn光电二极管相比，pin光电二极管具有高响应速度，但是具有大的暗电流的缺点。 认为暗电流的一个原因是通过在蚀刻中产生并沉积在光电转换层的侧表面上的蚀刻残余物导电。 光电转换元件的泄漏电流通过形成侧表面具有两个不同的锥形形状的结构而降低，通常具有均匀的表面，使得光电转换层具有p层的侧表面和侧表面 的n层，它们不在同一平面。
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公开(公告)号：US08004193B2
公开(公告)日：2011-08-23
申请号：US12094340
申请日：2006-11-02
摘要： A glass composition of the present invention is an oxide glass, in which the percentages of elements except for oxygen (O) contained therein are as follows, in terms of atom %: the amount of boron (B) exceeds 72% but does not exceed 86%, the total amount of lithium (Li), sodium (Na), and potassium (K) is 8% to 20%, the total amount of magnesium (Mg), calcium (Ca), strontium (Sr), and barium (Ba) is 1% to 8%, the amount of silicon (Si) is from 0% to less than 15%, and the amount of zinc (Zn) is from 0% to less than 2%. This glass composition further may contain molybdenum (Mo) and/or tungsten (W) in the range of more than 0% but not more than 3%.
摘要翻译： 本发明的玻璃组合物是氧化物玻璃，其中除了氧（O）以外的元素的百分比如下，以原子％表示：硼（B）的量超过72％但不超过 86％，锂（Li），钠（Na）和钾（K）的总量为8％〜20％，镁（Mg），钙（Ca），锶（Sr）和钡 （Ba）为1〜8％，硅（Si）的含量为0〜15％，锌（Zn）的含量为0〜2％。 该玻璃组合物还可以含有大于0％但不超过3％的钼（Mo）和/或钨（W）。
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8.发明申请公开(公告)号：US20100019337A1
公开(公告)日：2010-01-28
申请号：US12575910
申请日：2009-10-08
IPC分类号： H01L31/0232 , H01L31/0352
CPC分类号： H01L31/035281 , H01L21/32136 , H01L21/32137 , H01L27/14643 , Y02E10/50
摘要： An object is to provide a photoelectric conversion element having a side surface with different taper angles by conducting etching of a photoelectric conversion layer step-by-step. A pin photodiode has a high response speed compared with a pn photodiode but has a disadvantage of large dark current. One cause of the dark current is considered to be conduction through an etching residue which is generated in etching and deposited on a side surface of the photoelectric conversion layer. Leakage current of the photoelectric conversion element is reduced by forming a structure in which a side surface has two different tapered shapes, which conventionally has a uniform surface, so that the photoelectric conversion layer has a side surface of a p-layer and a side surface of an n-layer, which are not in the same plane.
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9.发明申请DATA RECORDING DEVICE, DATA REPRODUCTION DEVICE, PROGRAM, AND RECORDING MEDIUM 审中-公开数据记录设备，数据复制设备，程序和记录介质公开(公告)号：US20090157205A1
公开(公告)日：2009-06-18
申请号：US12063412
申请日：2006-08-03
申请人： Satoru Inoue , Norio Itoh , Masahiro Shioi , Shinya Hasegawa , Akemi Ohara
发明人： Satoru Inoue , Norio Itoh , Masahiro Shioi , Shinya Hasegawa , Akemi Ohara
IPC分类号： G06F17/00
CPC分类号： H04N7/163 , G11B27/034 , G11B27/3027 , G11B27/34 , G11B2020/1823 , H04N9/7921 , H04N21/4147 , H04N21/4325 , H04N21/4334 , H04N21/44209 , H04N21/4425
摘要： A data recording device of the invention has: a reception state acquisition processing section (21) for creating a reception state value on whether the reception state of a broadcast content is good or poor; a recording data creation process section (22) for creating recording data from them; and a recording control processing section (20) for comparing the reception state with a threshold value when there is a change in the reception state value, and controlling whether to pass the recording data to the recording data creation processing section (22). A data reproduction device of the invention has: a formatting analysis processing section for analyzing a format of the recorded data read from a recording medium and extracting the reception state value and the broadcast content; a reproduction control processing section for controlling reproduction of the received data according to the reception state value; a decoding section for decoding the content according to the reproduction control; and an output section for outputting the decoded content. This provides the data recording device capable of reducing a memory amount required for recording the content and the data reproduction device capable of reducing unpleasant feelings felt by a user upon reproduction of a content.
摘要翻译： 本发明的数据记录装置具有：接收状态获取处理部（21），用于创建关于广播内容的接收状态是好还是差的接收状态值; 用于从其创建记录数据的记录数据创建处理部分（22）; 以及记录控制处理部（20），用于当接收状态值发生变化时将接收状态与阈值进行比较，并且控制是否将记录数据传送到记录数据创建处理部分（22）。 本发明的数据再现装置具有：格式化分析处理部分，用于分析从记录介质读取的记录数据的格式并提取接收状态值和广播内容; 再现控制处理部分，用于根据接收状态值控制接收数据的再现; 解码部分，用于根据再现控制对内容进行解码; 以及用于输出解码的内容的输出部分。 这提供了能够减少用于记录内容所需的存储量的数据记录装置和能够减少用户在再现内容时感到的令人不快的感觉的数据再现装置。
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公开(公告)号：US20090102379A1
公开(公告)日：2009-04-23
申请号：US12066149
申请日：2006-09-01
申请人： Osamu Inoue , Shinya Hasegawa , Miyuki Nakai , Tsutomu Koshizuka
发明人： Osamu Inoue , Shinya Hasegawa , Miyuki Nakai , Tsutomu Koshizuka
摘要： Disclosed is a glass composition composed of an oxide glass wherein the percentages of constitutional elements other than oxygen (O) expressed in atomic % are as follows: boron (B) is not less than 56% and not more than 72%; silicon (Si) is not less than 0% and not more than 15%; Zinc (Zn) is not less than 0% and not more than 18%; potassium (K) is not less than 8% and not more than 20%; and the total of K, sodium (Na) and lithium (Li) is not less than 12% and not more than 20%. This glass composition further may contain at least one of magnesium (Mg), calcium (Ca), strontium (Sr) and barium (Ba) in an amount of more than 0% and not more than 5%, and molybdenum (Mo) and/or tungsten (W) in an amount of more than 0% and not more than 3%.
摘要翻译： 公开了由氧化物玻璃构成的玻璃组合物，其中除原子％表示的氧（O）以外的组成元素的百分比如下：硼（B）不小于56％且不大于72％; 硅（Si）不小于0％且不大于15％; 锌（Zn）不小于0％且不超过18％; 钾（K）不小于8％且不大于20％; K，钠（Na）和锂（Li）的总和不小于12％且不大于20％。 该玻璃组合物还可以含有大于0％且不超过5％的量的镁（Mg），钙（Ca），锶（Sr）和钡（Ba）中的至少一种，以及钼（Mo）和 /或钨（W）的含量大于0％且不超过3％。
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