Method and apparatus for control of pulse width modulation (PWM)
converter
    3.
    发明授权
    Method and apparatus for control of pulse width modulation (PWM) converter 失效
    用于控制脉宽调制(PWM)转换器的方法和装置

    公开(公告)号:US5446646A

    公开(公告)日:1995-08-29

    申请号:US851782

    申请日:1992-03-16

    申请人: Masanori Miyazaki

    发明人: Masanori Miyazaki

    CPC分类号: H02M7/219

    摘要: A control method for a PWM converter which is connected to an AC current source via a reactor, and performs the sending and receiving of power between the AC power source and a DC power source, includes a step of separating a supplied AC current into an effective current and a reactive current and performing PWM control and a step for control so that said reactive current is larger when there is conversion of DC power into AC power, than when there is conversion of an AC power into DC power. In addition, the control apparatus includes a detector element which detects at least two phases of a three-phase AC current as a current detection value, a phase detection element which detects a voltage phase of the three-phase current, a current separation element which uses the voltage phase to separate the detected current detection value into an effective current and a reactive current, an effective current control element which performs feedback control so that the separated effective current becomes a required value, a reactive current control element which performs feedback control so that the separated reactive current becomes a required value, and a reference calculation element which calculates a reference value so that an reference value of a reactive current becomes larger for when the effective current and power voltage are of opposite polarities, than for when they are of the same polarity.

    摘要翻译: 一种PWM转换器的控制方法,其经由电抗器连接到AC电流源,并且在AC电源和DC电源之间执行电力的发送和接收,包括将所提供的AC电流分离成有效的步骤 电流和无功电流,并且执行PWM控制和控制步骤,使得当将DC电力转换成AC电力时,与将AC电力转换为DC电力时相比,所述无功电流较大。 另外,控制装置具有检测作为电流检测值的三相交流电流的至少两相的检测元件,检测三相电流的电压相位的相位检测元件, 使用电压相位将检测到的电流检测值分离成有效电流和无功电流,执行反馈控制使得分离的有效电流成为所需值的有效电流控制元件,执行反馈控制的无功电流控制元件 分离的无功电流成为所需值,以及参考运算单元,其计算参考值,使得当有效电流和功率电压具有相反的极性时,无功电流的基准值变大, 相同的极性。

    Single chamber for CVD and sputtering film manufacturing
    4.
    发明授权
    Single chamber for CVD and sputtering film manufacturing 失效
    用于CVD和溅射膜制造的单室

    公开(公告)号:US5755938A

    公开(公告)日:1998-05-26

    申请号:US556188

    申请日:1995-11-09

    摘要: An apparatus which allows a first film to be formed on a substrate by chemical vapor deposition (CVD) and a second film to be formed on the substrate by sputtering, wherein the processes are performed sequentially in the same deposition chamber without exposing the substrate to an oxidative atmosphere. The deposition chamber includes a first electrode and a second electrode located under the first electrode. A transfer mechanism loads a dummy target onto the first electrode and the substrate onto the second electrode prior to a CVD process. The dummy target is resistant to sputtering and thus does not contaminate the film deposited on the substrate during CVD. After CVD and prior to sputtering, the transfer mechanism unloads the dummy target and replaces it with a sputtering target for film formation by sputtering. Both the dummy target and sputtering target can be loaded and unloaded from a single pressurized storage chamber. Thus, film formation by both sputtering and CVD can be accomplished by using a single deposition chamber without removing the substrate between processes.

    摘要翻译: 一种允许通过化学气相沉积(CVD)在衬底上形成第一膜和通过溅射形成在衬底上的第二膜的装置,其中在相同的沉积室中顺序地进行处理,而不将衬底暴露于 氧化气氛。 沉积室包括位于第一电极下方的第一电极和第二电极。 转移机构在CVD工艺之前将虚拟靶加载到第二电极上的第一电极和衬底上。 虚拟靶对溅射是耐受的,因此在CVD期间不会污染沉积在衬底上的膜。 在CVD之后并且在溅射之前,转移机构卸载虚拟靶并用用溅射的成膜溅射靶代替它。 虚拟靶和溅射靶都可以从单个加压储存室装载和卸载。 因此,通过溅射和CVD的成膜可以通过使用单个沉积室而不在工艺之间移除基板来实现。

    Motor drive system
    7.
    发明授权
    Motor drive system 有权
    电机驱动系统

    公开(公告)号:US6075299A

    公开(公告)日:2000-06-13

    申请号:US247807

    申请日:1999-02-11

    摘要: A motor drive system comprises a motor driven by a variable frequency power supply and a machine driven by the motor, which are mechanically connected by the drive shaft of the motor and the shaft of the machine via bearings. A stationary portion of the motor and the frame of the machine are electrically connected by a low-impedance conductor, so that a current can be caused to flow at least partially between the stationary portion of the motor and the frame of the machine.

    摘要翻译: 电动机驱动系统包括由变频电源驱动的电动机和由电动机驱动的机器,其通过轴承通过电动机的驱动轴和机器的轴机械连接。 电动机的静止部分和机器的框架通过低阻抗导体电连接,使得可以使电流至少部分地在电机的固定部分和机器的框架之间流动。

    Film manufacturing method using single reaction chamber for
chemical-vapor deposition and sputtering
    8.
    发明授权
    Film manufacturing method using single reaction chamber for chemical-vapor deposition and sputtering 失效
    使用单反应室进行化学气相沉积和溅射的膜制造方法

    公开(公告)号:US5609737A

    公开(公告)日:1997-03-11

    申请号:US289713

    申请日:1994-08-12

    摘要: A method for manufacturing thin films in which a first film is formed on a substrate using chemical-vapor deposition (CVD), and a second film is formed on the substrate using sputtering, wherein the processes are sequentially performed in the same deposition chamber without exposing the substrate to an oxidative atmosphere. The deposition chamber includes a first electrode, and a second electrode located under the first electrode. During the CVD process, a dummy target is mounted on the first electrode and the substrate is mounted on the second electrode, a reactive gas is introduced into the chamber, and high frequency electrical power is applied to both the first and second electrodes, thereby causing the constituents of the reactive gas to deposit on the substrate to form the first film. Subsequently, any remaining reactive gas is removed from the chamber and an automated mechanism removes the dummy target from the first electrode and stores the dummy target in a storage chamber. A sputtering electrode is then mounted on the first electrode and a sputtering gas is introduced into the reaction chamber. High frequency electrical power is then applied to both the first and second electrodes, thereby causing the sputtering gas and sputtering target to deposit the second film on the substrate.

    摘要翻译: 一种用于制造薄膜的方法,其中使用化学气相沉积(CVD)在基板上形成第一膜,并且使用溅射在所述基板上形成第二膜,其中所述工艺在相同的沉积室中依次进行而不暴露 底物转化为氧化性气氛。 沉积室包括第一电极和位于第一电极下方的第二电极。 在CVD工艺期间,将虚拟目标物安装在第一电极上,并且将基板安装在第二电极上,将反应性气体引入室中,并且将高频电力施加到第一和第二电极两者,由此引起 反应气体的成分沉积在基底上以形成第一膜。 随后,将任何剩余的反应气体从室中除去,并且自动化机构从第一电极移除虚设目标物并将虚拟目标物存储在储存室中。 然后将溅射电极安装在第一电极上,并将溅射气体引入反应室。 然后将高频电力施加到第一和第二电极,由此使溅射气体和溅射靶将第二膜沉积在基板上。

    Induction motor control system
    9.
    发明授权
    Induction motor control system 失效
    感应电动机控制系统

    公开(公告)号:US5387855A

    公开(公告)日:1995-02-07

    申请号:US42405

    申请日:1993-04-02

    IPC分类号: H02P21/00 H02P5/40

    CPC分类号: H02P21/00

    摘要: In order to carry out commercial synchronous exchange for disconnecting an induction motor from its driving power supply and connecting it to a variable frequency power supply, or commercial synchronous switching for disconnecting the induction motor from the variable frequency power supply and connecting it to a commercial power supply, without any accompanying adverse shock, an induction-motor vector control technique is utilized. A phase-locked loop (PLL) is formed to detect the difference in phase between the output voltage from the variable frequency power supply or the magnetic flux phase of the induction motor on the one hand, and the phase of the power supply voltage on the other, so that the difference in phase thus detected can be maintained at a predetermined value.

    摘要翻译: 为了进行用于将感应电动机与其驱动电源断开并将其连接到可变频率电源的商业同步交换,或用于将感应电动机与变频电源断开并将其连接到商业电力的商业同步开关 供应,没有任何伴随的不利冲击,使用感应电动机矢量控制技术。 形成锁相环(PLL)以一方面检测来自变频电源的输出电压或感应电动机的磁通相位之间的相位差,以及电源电压的相位 另一方面,使得如此检测的相位差可以保持在预定值。

    Induction motor control system
    10.
    发明授权
    Induction motor control system 失效
    感应电动机控制系统

    公开(公告)号:US5212438A

    公开(公告)日:1993-05-18

    申请号:US873711

    申请日:1992-04-22

    IPC分类号: H02P21/00

    CPC分类号: H02P21/00

    摘要: In order to carry out commercial synchronous exchange for disconnecting an induction motor from its driving power supply and connecting it to a variable frequency power supply or commercial synchronous switching for disconnecting the induction motor from the variable frequency power supply and connecting it to a commercial power supply without any accompanying adverse shock, an induction-motor vector control technique is utilized and furthermore, a phase-locked loop (PLL) is formed to detect the difference in phase between the phase of the output voltage from the variable frequency power supply or the magnetic flux phase of the induction motor on the one hand, and the phase of the voltage of the power supply on the other, so that the difference in phase thus detected can be maintained at a predetermined value.

    摘要翻译: 为了进行商业同步交换,以将感应电动机与其驱动电源断开并将其连接到变频电源或商用同步开关,用于将感应电动机与变频电源断开并将其连接到商用电源 没有任何伴随的不利冲击,利用感应电动机矢量控制技术,此外,形成锁相环(PLL)以检测来自可变频率电源或磁场的输出电压的相位之间的相位差 一方面是感应电动机的通量相位,另一方面是电源电压的相位,使得这样检测的相位差可以保持在预定值。