SURFACE EMITTING LASER DEVICE, SURFACE EMITTING LASER ARRAY, OPTICAL SCANNING DEVICE, IMAGE FORMING APPARATUS, AND METHOD OF MANUFACTURING THE SURFACE EMITTING LASER DEVICE
    7.
    发明申请
    SURFACE EMITTING LASER DEVICE, SURFACE EMITTING LASER ARRAY, OPTICAL SCANNING DEVICE, IMAGE FORMING APPARATUS, AND METHOD OF MANUFACTURING THE SURFACE EMITTING LASER DEVICE 有权
    表面发射激光器件,表面发射激光阵列,光学扫描装置,图像形成装置以及制造表面发射激光器件的方法

    公开(公告)号:US20110304684A1

    公开(公告)日:2011-12-15

    申请号:US13155494

    申请日:2011-06-08

    摘要: A surface emitting laser device includes a substrate and plural semiconductor layers laminated on the substrate, the plural semiconductor layers including a first semiconductor multi-layer film including aluminum (Al), an active layer, and a second semiconductor multi-layer film, a light emitting section having a mesa structure being formed on the first semiconductor multi-layer film. When viewed in a direction orthogonal to a surface of the substrate, an outer shape of the first semiconductor multi-layer film is a macroscopically smooth shape without an angular corner, and a side surface of the first semiconductor multi-layer film is coated with a passivation film and a protection film.

    摘要翻译: 表面发射激光器件包括衬底和层叠在衬底上的多个半导体层,所述多个半导体层包括包括铝(Al),有源层和第二半导体多层膜的第一半导体多层膜,光 具有在第一半导体多层膜上形成的台面结构的发光部。 当在与基板表面正交的方向上观察时,第一半导体多层膜的外形是没有角角的宏观平滑形状,并且第一半导体多层膜的侧表面涂覆有 钝化膜和保护膜。