Methods of fabricating a large area transducer array
    2.
    发明授权
    Methods of fabricating a large area transducer array 有权
    制造大面积换能器阵列的方法

    公开(公告)号:US07867824B2

    公开(公告)日:2011-01-11

    申请号:US12117608

    申请日:2008-05-08

    IPC分类号: H01L21/00

    CPC分类号: H01L27/14601

    摘要: Methods of fabricating a tiled transducer array are disclosed. Embodiments of the methods include fabricating a wafer comprising a plurality of transducers, dicing the wafer to form individual transducers, testing the individual transducers to identify a plurality of known good transducers, preparing a substrate having a front side and a backside wherein the backside of the substrate comprises a plurality of connectors, positioning the plurality of known good transducers on the front side of the substrate and aligning the plurality of transducers in a horizontal direction and a vertical direction to form a transducer array, and electrically coupling the connectors on the substrate to the plurality of known good transducers, wherein the connectors are arranged such that each of the plurality of known good transducers may be electrically coupled to an electronic device disposed on the backside of the substrate, through a respective one or more of the plurality of connectors.

    摘要翻译: 公开了制作平铺式换能器阵列的方法。 所述方法的实施例包括制造包括多个换能器的晶片,切割晶片以形成单独的换能器,测试各个换能器以识别多个已知的良好换能器,制备具有正面和背面的基底,其中背面 衬底包括多个连接器,将多个已知的良好换能器定位在衬底的前侧上并且在水平方向和垂直方向上对准多个换能器以形成换能器阵列,并将衬底上的连接器电耦合到 所述多个已知的良好换能器,其中所述连接器被布置成使得所述多个已知的良好换能器中的每一个可以通过所述多个连接器中的相应一个或多个电耦合到设置在所述基板的背面上的电子装置。

    METHODS OF FABRICATING A LARGE AREA TRANSDUCER ARRAY
    5.
    发明申请
    METHODS OF FABRICATING A LARGE AREA TRANSDUCER ARRAY 有权
    制作大面积传感器阵列的方法

    公开(公告)号:US20080213933A1

    公开(公告)日:2008-09-04

    申请号:US12117608

    申请日:2008-05-08

    IPC分类号: H01L21/50

    CPC分类号: H01L27/14601

    摘要: Methods of fabricating a tiled transducer array are disclosed. Embodiments of the methods include fabricating a wafer comprising a plurality of transducers, dicing the wafer to form individual transducers, testing the individual transducers to identify a plurality of known good transducers, preparing a substrate having a front side and a backside wherein the backside of the substrate comprises a plurality of connectors, positioning the plurality of known good transducers on the front side of the substrate and aligning the plurality of transducers in a horizontal direction and a vertical direction to form a transducer array, and electrically coupling the connectors on the substrate to the plurality of known good transducers, wherein the connectors are arranged such that each of the plurality of known good transducers may be electrically coupled to an electronic device disposed on the backside of the substrate, through a respective one or more of the plurality of connectors.

    摘要翻译: 公开了制作平铺式换能器阵列的方法。 所述方法的实施例包括制造包括多个换能器的晶片,切割晶片以形成单独的换能器,测试各个换能器以识别多个已知的良好换能器,制备具有正面和背面的基底,其中背面 衬底包括多个连接器,将多个已知的良好换能器定位在衬底的前侧上并且在水平方向和垂直方向上对准多个换能器以形成换能器阵列,并将衬底上的连接器电耦合到 所述多个已知的良好换能器,其中所述连接器被布置成使得所述多个已知的良好换能器中的每一个可以通过所述多个连接器中的相应一个或多个电耦合到设置在所述基板的背面上的电子装置。

    Large area transducer array
    8.
    发明授权
    Large area transducer array 有权
    大面积换能器阵列

    公开(公告)号:US07375420B2

    公开(公告)日:2008-05-20

    申请号:US11003054

    申请日:2004-12-03

    IPC分类号: H01L23/02

    CPC分类号: H01L27/14601

    摘要: A large area transducer array comprising a substrate having a front side and a backside, a plurality of transducers disposed on the front side of the substrate and patterned in the form of a two-dimensional transducer array in the X-Y plane, a plurality of connectors disposed on the backside of the substrate where the connectors are electrically coupled to the transducer elements. Further, a stacked transducer array comprising an electronic device disposed in a first layer, a substrate including a front side and a backside, an electrical interconnect layer disposed on the substrate and a plurality of transducers disposed in a third layer where the transducers are electrically coupled to the electronic device disposed in the first layer.

    摘要翻译: 一种大面积传感器阵列,包括具有正面和背面的基底,多个换能器,设置在基板的前侧,并以XY平面中的二维换能器阵列的形式图案化,多个连接器被设置 在衬底的背面,其中连接器电耦合到换能器元件。 此外,堆叠的换能器阵列包括设置在第一层中的电子器件,包括正面和背面的衬底,设置在衬底上的电互连层和设置在第三层中的多个换能器,其中换能器电耦合 到设置在第一层中的电子设备。