Thin film capacitor avoiding short circuit between electrodes
    2.
    发明申请
    Thin film capacitor avoiding short circuit between electrodes 审中-公开
    薄膜电容器避免电极之间的短路

    公开(公告)号:US20020020836A1

    公开(公告)日:2002-02-21

    申请号:US09838337

    申请日:2001-04-20

    Abstract: There is provided a thin film capacitor including (a) a lower electrode, (b) an insulating layer formed burying the lower electrode therein and formed with a via-hole reaching the lower electrode, (c) a dielectric layer formed on an inner sidewall of the via-hole and covering an exposed surface of the lower electrode therewith, and (d) an upper electrode surrounded by the dielectric layer. In accordance with the thin film capacitor, the upper electrode is formed to be buried in the via-hole formed above the lower electrode. Hence, it is possible to prevent short-circuit between the upper and lower electrodes, and degradation of the dielectric layer during fabrication of a thin film capacitor, both of which enhances reliability of a capacitor. In addition, a multi-layered wiring structure could be readily fabricated on the thin film capacitor.

    Abstract translation: 提供一种薄膜电容器,其包括(a)下电极,(b)在其中埋设下电极并形成有到达下电极的通孔形成的绝缘层,(c)形成在内侧壁上的电介质层 的通孔,并且覆盖下电极的暴露表面,以及(d)由电介质层包围的上电极。 根据薄膜电容器,上电极被形成为埋在形成在下电极上的通孔中。 因此,可以防止上下电极之间的短路,以及薄膜电容器的制造时的电介质层的劣化,这两者都提高了电容器的可靠性。 此外,可以容易地在薄膜电容器上制造多层布线结构。

    Wiring board for high dense mounting and method of producing the same
    4.
    发明申请
    Wiring board for high dense mounting and method of producing the same 审中-公开
    高密度安装接线板及其制造方法

    公开(公告)号:US20020024138A1

    公开(公告)日:2002-02-28

    申请号:US09922766

    申请日:2001-08-07

    Abstract: A wiring board for high dense mounting comprises at least one layer of interlayer insulator and at least one layer of conductive wiring pattern formed on a base material. The interlayer insulator comprises a polybenzoxazole film. An adhesive layer comprising at least one selected from the group consisting of Ti, Ti-containing compounds and Ni is formed between the polybenzoxazole film and the conductive wiring pattern. The wiring board has a high heat resistance, low dielectric constant, low water absorption degree, low thermal expansion coefficient, and high adhesion between conductors and insulators. The wiring board is also excellent in film strength and shear extensibility, capable of enduring a stress in mounting of a semiconductor device, excellent in reliability, and optimal for high speed and high dense mounting.

    Abstract translation: 用于高密度安装的布线板包括至少一层层间绝缘体和形成在基材上的至少一层导电布线图案。 层间绝缘体包含聚苯并恶唑膜。 在聚苯并恶唑膜和导电布线图案之间形成包含选自Ti,Ti的化合物和Ni中的至少一种的粘合剂层。 布线板具有高耐热性,低介电常数,低吸水度,低热膨胀系数以及导体和绝缘体之间的高粘合性。 布线板的膜强度和剪切伸长性也优异,能够耐受半导体器件的安装应力,可靠性优异,并且对于高速,高密度安装是最佳的。

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