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公开(公告)号:US20190239361A1
公开(公告)日:2019-08-01
申请号:US15886820
申请日:2018-02-01
Applicant: NXP B.V.
Inventor: Tsung Nan Lo , Chung Hsiung Ho
IPC: H05K3/34 , H05K1/11 , H01L23/00 , H01L23/498
CPC classification number: H05K3/3421 , B23K20/02 , B23K2101/36 , H01L23/49816 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/81 , H05K1/111 , H05K2201/10636 , H05K2201/10689
Abstract: In a die-substrate assembly, a copper inter-component joint is formed by bonding corresponding copper interconnect structures together directly, without using solder. The copper interconnect structures have distal layers of (111) crystalline copper that enable them to bond together at a relatively low temperature (e.g., below 300° C.) compared to the relatively high melting point (about 1085° C.) for the bulk copper of the rest of the interconnect structures. By avoiding the use of solder, the resulting inter-component joint will not suffer from the adverse IMC/EM effects of conventional, solder-based joints. The distal surfaces of the interconnect structures may be curved (e.g., one concave and the other convex) to facilitate mating the two structures and improve the reliability of the physical contact between the two interconnect structures. The bonding may be achieved using directed microwave radiation and microwave-sensitive flux, instead of uniform heating.
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公开(公告)号:US20230378107A1
公开(公告)日:2023-11-23
申请号:US17664117
申请日:2022-05-19
Applicant: NXP B.V.
Inventor: Kuan-Hsiang Mao , Yufu Liu , Tsung Nan Lo , Wen Hung Huang
CPC classification number: H01L24/05 , H01L23/3171 , H01L21/56 , H01L24/03 , H01L2224/0233 , H01L2224/0401 , H01L2224/02311
Abstract: A semiconductor device package includes a semiconductor device and an electrically conductive pad disposed in contact with a surface of the semiconductor device. The semiconductor device package further includes a redistribution layer (RDL) formed over the electrically conductive pad and the surface of the semiconductor device, and an electrical connector disposed over and electrically coupled to the RDL. The RDL includes a first passivation layer disposed over a surface of the semiconductor device and the electrically conductive pad, and further includes an RDL trace. The RDL trace includes a first portion in contact with the electrically conductive pad, a second portion in contact with one of the electrical connector or an underlying metallization layer in contact with the electrical connector, and a third portion having a non-planar and undulating configuration relative to the surface of the semiconductor device.
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公开(公告)号:US20220344296A1
公开(公告)日:2022-10-27
申请号:US17239888
申请日:2021-04-26
Applicant: NXP B.V.
Inventor: Tsung Nan Lo , Sharon Huey Tay , Antonio Aguinaldo Marquez Macatangay
IPC: H01L23/00 , H01L23/532 , H01L23/498
Abstract: A method of manufacturing a semiconductor device is provided. The method includes depositing a non-conductive layer over a semiconductor die. An opening is formed in the non-conductive layer exposing a portion of a bond pad of the semiconductor die. A cavity is in the non-conductive layer with a portion of the non-conductive layer remaining between a bottom surface of the cavity and a bottom surface of the non-conductive layer. A conductive layer is formed over the non-conductive layer and the portion of the bond pad. The conductive layer is configured to interconnect the bond pad with a conductive layer portion over the cavity.
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公开(公告)号:US20240105659A1
公开(公告)日:2024-03-28
申请号:US17936042
申请日:2022-09-28
Applicant: NXP B.V.
Inventor: Kuan-Hsiang Mao , Yufu Liu , Wen Hung Huang , Tsung Nan Lo
IPC: H01L23/00
CPC classification number: H01L24/19 , H01L24/20 , H01L24/73 , H01L24/13 , H01L2224/13006 , H01L2224/2101 , H01L2224/2105 , H01L2224/211 , H01L2224/214 , H01L2224/215 , H01L2224/73101
Abstract: A method of manufacturing a semiconductor device is provided. The method includes forming a redistribution layer (RDL) over a semiconductor die. A portion of the RDL contacts a die pad of the semiconductor die. A metal layer is formed on a top surface and sidewalls of the RDL and configured to encase the RDL. A non-conductive layer is formed over the metal layer and underlying RDL. An opening in the non-conductive layer is formed exposing a portion of the metal layer formed on the RDL. An under-bump metallization (UBM) is formed in the opening and conductively connected to the die pad by way of the metal layer and RDL.
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公开(公告)号:US20230307402A1
公开(公告)日:2023-09-28
申请号:US18327178
申请日:2023-06-01
Applicant: NXP B.V.
IPC: H01L23/00 , H01L23/498 , H01L23/532
CPC classification number: H01L24/16 , H01L23/49811 , H01L23/53228 , H01L24/11 , H01L2224/0401 , H01L2224/081 , H01L2924/01029
Abstract: A method of manufacturing a semiconductor device is provided. The method includes depositing a non-conductive layer over a semiconductor die. An opening is formed in the non-conductive layer exposing a portion of a bond pad of the semiconductor die. A cavity is in the non-conductive layer with a portion of the non-conductive layer remaining between a bottom surface of the cavity and a bottom surface of the non-conductive layer. A conductive layer is formed over the non-conductive layer and the portion of the bond pad. The conductive layer is configured to interconnect the bond pad with a conductive layer portion over the cavity.
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公开(公告)号:US11728308B2
公开(公告)日:2023-08-15
申请号:US17239888
申请日:2021-04-26
Applicant: NXP B.V.
IPC: H01L23/00 , H01L23/498 , H01L23/532
CPC classification number: H01L24/16 , H01L23/49811 , H01L23/53228 , H01L24/11 , H01L2224/0401 , H01L2224/081 , H01L2924/01029
Abstract: A method of manufacturing a semiconductor device is provided. The method includes depositing a non-conductive layer over a semiconductor die. An opening is formed in the non-conductive layer exposing a portion of a bond pad of the semiconductor die. A cavity is in the non-conductive layer with a portion of the non-conductive layer remaining between a bottom surface of the cavity and a bottom surface of the non-conductive layer. A conductive layer is formed over the non-conductive layer and the portion of the bond pad. The conductive layer is configured to interconnect the bond pad with a conductive layer portion over the cavity.
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公开(公告)号:US12288770B2
公开(公告)日:2025-04-29
申请号:US17660441
申请日:2022-04-25
Applicant: NXP B.V.
Inventor: Kuan-Hsiang Mao , Norazham Mohd Sukemi , Chin Teck Siong , Tsung Nan Lo , Wen Hung Huang
IPC: H01L23/495 , H01L21/56 , H01L23/00 , H01L23/498 , H01L25/00 , H01L25/065
Abstract: Semiconductor packages with embedded wiring on re-distributed bumps are described. In an illustrative, non-limiting embodiment, a semiconductor package may include an integrated circuit (IC) having a plurality of pads and a re-distribution layer (RDL) coupled to the IC without any substrate or lead frame therebetween, where the RDL comprises a plurality of terminals, and where one or more of the plurality of pads are wire bonded to a corresponding one or more of the plurality of terminals.
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公开(公告)号:US20240105658A1
公开(公告)日:2024-03-28
申请号:US17935613
申请日:2022-09-27
Applicant: NXP B.V.
Inventor: Tsung Nan Lo , Antonio Aguinaldo Marquez Macatangay
IPC: H01L23/00
CPC classification number: H01L24/19 , H01L24/20 , H01L24/73 , H01L24/13 , H01L2224/13006 , H01L2224/13014 , H01L2224/2101 , H01L2224/2105 , H01L2224/211 , H01L2224/214 , H01L2224/215 , H01L2224/24991 , H01L2224/73101 , H01L2924/35121
Abstract: A method of manufacturing a semiconductor device is provided. The method includes forming a redistribution layer (RDL) over a semiconductor die, a portion of the RDL contacting a die pad of the semiconductor die. A non-conductive layer is formed over the RDL. An opening in the non-conductive layer is formed exposing a portion of the RDL. A plurality of plateau regions is formed in the non-conductive layer. A cavity region in the non-conductive layer separates each plateau region of the plurality of plateau regions. A metal layer is deposited over the non-conductive layer and exposed portion of the RDL and etched to expose the plurality of plateau regions through the metal layer. The cavity region remains substantially filled by a portion of the metal layer.
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公开(公告)号:US20230343749A1
公开(公告)日:2023-10-26
申请号:US17660441
申请日:2022-04-25
Applicant: NXP B.V.
Inventor: Kuan-Hsiang Mao , Norazham Mohd Sukemi , Chin Teck Siong , Tsung Nan Lo , Wen Hung Huang
IPC: H01L25/065 , H01L23/00 , H01L23/498 , H01L25/00 , H01L21/56
CPC classification number: H01L25/0657 , H01L24/48 , H01L23/49816 , H01L24/92 , H01L25/50 , H01L21/568 , H01L2224/48227 , H01L2224/92247
Abstract: Semiconductor packages with embedded wiring on re-distributed bumps are described. In an illustrative, non-limiting embodiment, a semiconductor package may include an integrated circuit (IC) having a plurality of pads and a re-distribution layer (RDL) coupled to the IC without any substrate or lead frame therebetween, where the RDL comprises a plurality of terminals, and where one or more of the plurality of pads are wire bonded to a corresponding one or more of the plurality of terminals.
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公开(公告)号:US10390440B1
公开(公告)日:2019-08-20
申请号:US15886820
申请日:2018-02-01
Applicant: NXP B.V.
Inventor: Tsung Nan Lo , Chung Hsiung Ho
IPC: B23K20/00 , H05K3/34 , H05K1/11 , H01L23/00 , H01L23/498 , B23K20/02 , B23K101/36
Abstract: In a die-substrate assembly, a copper inter-component joint is formed by bonding corresponding copper interconnect structures together directly, without using solder. The copper interconnect structures have distal layers of (111) crystalline copper that enable them to bond together at a relatively low temperature (e.g., below 300° C.) compared to the relatively high melting point (about 1085° C.) for the bulk copper of the rest of the interconnect structures. By avoiding the use of solder, the resulting inter-component joint will not suffer from the adverse IMC/EM effects of conventional, solder-based joints. The distal surfaces of the interconnect structures may be curved (e.g., one concave and the other convex) to facilitate mating the two structures and improve the reliability of the physical contact between the two interconnect structures. The bonding may be achieved using directed microwave radiation and microwave-sensitive flux, instead of uniform heating.
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