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    Stamp usage to enhance surface layer functionalization and selectivity
    1.
    发明授权
    Stamp usage to enhance surface layer functionalization and selectivity 有权
    印章使用，以增强表面层的功能化和选择性

    公开(公告)号：US08580344B2

    公开(公告)日：2013-11-12

    申请号：US12405218

    申请日：2009-03-16

    申请人： Nikhil D. Kalyankar ,  Zachary Fresco ,  Chi-I Lang

    发明人： Nikhil D. Kalyankar ,  Zachary Fresco ,  Chi-I Lang

    IPC分类号： G01N31/00 ,  G01N31/20 ,  G01N31/22 ,  B01L3/00

    CPC分类号： C40B60/08 ,  B01J19/0046 ,  B01J2219/00317 ,  B01J2219/00364 ,  B01J2219/00376 ,  B01J2219/00382 ,  B01J2219/00427 ,  B01J2219/00527 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00659 ,  B01J2219/00702 ,  C40B50/18

    摘要： This disclosure provides methods, devices and systems for using a stamp to enhance selectivity between surface layers of a substrate, and to facilitate functionalizing selected layers. An array of flat stamps may be used to concurrently stamp multiple regions of a substrate to transfer one or more substances to the topmost layer or layers of the substrate. If desired, the affected regions of the substrate may be isolated from each other through the use of a reactor plate that, when clamped to the substrate's surface, forms reaction wells in the area of stamping. The stamp area can, if desired, be configured for stamping the substrate after the reactor plate has been fitted, with the individual stamps sized and arranged in a manner that permits stamping within each reaction well. If applied in a combinatorial process, a robotic process may be used to transfer multiple combinations of contact substances and processing chemicals to each reaction well to perform many concurrent processes upon a single substrate (e.g., a single coupon). The methods, devices and systems provided facilitate semiconductor design, optimization and qualification, and may be adapted to production manufacturing.

    摘要翻译： 本公开提供了使用印模来增强基底的表面层之间的选择性并促进官能化所选择的层的方法，装置和系统。 可以使用平面阵列阵列来同时印刷衬底的多个区域以将一种或多种物质转移到衬底的最上层或多层。 如果需要，可以通过使用反应器板将基材的受影响区域彼此隔离，当将其夹在基材表面上时，在冲压区域中形成反应孔。 如果需要，邮票区域可以被配置用于在安装反应器板之后冲压衬底，各个邮票的大小和布置方式允许在每个反应井内冲压。 如果应用于组合过程中，机器人过程可用于将接触物质和加工化学品的多种组合转移到每个反应井，以在单个底物（例如，单一试样）上进行许多并行处理。 提供的方法，设备和系统有助于半导体设计，优化和鉴定，并可适用于生产制造。

    Stamp Usage To Enhance Surface Layer Functionalization And Selectivity
    4.
    发明申请
    Stamp Usage To Enhance Surface Layer Functionalization And Selectivity 有权
    用于增强表层功能化和选择性的邮票用途

    公开(公告)号：US20090232966A1

    公开(公告)日：2009-09-17

    申请号：US12405218

    申请日：2009-03-16

    申请人： Nikhil D. Kalyankar ,  Zachary Fresco ,  Chi-I Lang

    发明人： Nikhil D. Kalyankar ,  Zachary Fresco ,  Chi-I Lang

    IPC分类号： B05D1/28 ,  B05C1/00

    CPC分类号： C40B60/08 ,  B01J19/0046 ,  B01J2219/00317 ,  B01J2219/00364 ,  B01J2219/00376 ,  B01J2219/00382 ,  B01J2219/00427 ,  B01J2219/00527 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00659 ,  B01J2219/00702 ,  C40B50/18

    摘要： This disclosure provides methods, devices and systems for using a stamp to enhance selectivity between surface layers of a substrate, and to facilitate functionalizing selected layers. An array of flat stamps may be used to concurrently stamp multiple regions of a substrate to transfer one or more substances to the topmost layer or layers of the substrate. If desired, the affected regions of the substrate may be isolated from each other through the use of a reactor plate that, when clamped to the substrate's surface, forms reaction wells in the area of stamping. The stamp area can, if desired, be configured for stamping the substrate after the reactor plate has been fitted, with the individual stamps sized and arranged in a manner that permits stamping within each reaction well. If applied in a combinatorial process, a robotic process may be used to transfer multiple combinations of contact substances and processing chemicals to each reaction well to perform many concurrent processes upon a single substrate (e.g., a single coupon). The methods, devices and systems provided facilitate semiconductor design, optimization and qualification, and may be adapted to production manufacturing.

    摘要翻译： 本公开提供了使用印模来增强基底的表面层之间的选择性并促进官能化所选择的层的方法，装置和系统。 可以使用平面阵列阵列来同时印刷衬底的多个区域以将一种或多种物质转移到衬底的最上层或多层。 如果需要，可以通过使用反应器板将基材的受影响区域彼此隔离，当将其夹在基材表面上时，在冲压区域中形成反应孔。 如果需要，邮票区域可以被配置用于在安装反应器板之后冲压衬底，各个邮票的大小和布置方式允许在每个反应井内冲压。 如果应用于组合过程中，机器人过程可用于将接触物质和加工化学品的多种组合转移到每个反应井，以在单个底物（例如，单一试样）上进行许多并行处理。 提供的方法，设备和系统有助于半导体设计，优化和鉴定，并可适用于生产制造。

    Sol-gel based antireflective coatings using alkyltrialkoxysilane binders having low refractive index and high durability
    5.
    发明授权
    Sol-gel based antireflective coatings using alkyltrialkoxysilane binders having low refractive index and high durability 有权
    使用具有低折射率和高耐久性的烷基三烷氧基硅烷粘合剂的溶胶 - 凝胶基抗反射涂层

    公开(公告)号：US09109121B2

    公开(公告)日：2015-08-18

    申请号：US13273007

    申请日：2011-10-13

    申请人： Nikhil D. Kalyankar ,  Zhi-Wen Sun ,  Jeroen Van Duren ,  Mark Lewis ,  Liang Liang

    发明人： Nikhil D. Kalyankar ,  Zhi-Wen Sun ,  Jeroen Van Duren ,  Mark Lewis ,  Liang Liang

    IPC分类号： C03C17/00 ,  C03C17/22 ,  C03C17/30 ,  C09D1/00 ,  C09D5/00 ,  C09D7/12 ,  G02B1/115 ,  C08K3/36

    CPC分类号： C09D1/00 ,  C03C17/008 ,  C03C17/22 ,  C03C17/30 ,  C08K3/36 ,  C09D5/006 ,  C09D7/61 ,  C09D7/67 ,  G02B1/115

    摘要： Methods and compositions for forming porous low refractive index coatings on substrates are provided. The method comprises coating a substrate with a sol-formulation comprising silica based nanoparticles and an alkyltrialkoxysilane based binder. Use of the alkyltrialkoxysilane based binder results in a porous low refractive index coating having bimodal pore distribution including mesopores formed from particle packing and micropores formed from the burning off of organics including the alkyl chain covalently bonded to the silicon. The mass ratio of binder to particles may vary from 0.1 to 20. Porous coatings formed according to the embodiments described herein demonstrate good optical properties (e.g. a low refractive index) while maintaining good mechanical durability due to the presence of a high amount of binder and a close pore structure.

    摘要翻译： 提供了在基底上形成多孔低折射率涂层的方法和组合物。 该方法包括用包含二氧化硅基纳米颗粒和烷基三烷氧基硅烷基粘合剂的溶胶制剂涂覆基材。 使用烷基三烷氧基硅烷基粘合剂导致具有双峰孔分布的多孔低折射率涂层，包括由颗粒填充形成的介孔和由共价键合到硅上的烷基链的有机物燃烧形成的微孔。 粘合剂与颗粒的质量比可以在0.1至20之间变化。根据本文所述实施方案形成的多孔涂层表现出良好的光学性能（例如低折射率），同时由于存在大量粘合剂而保持良好的机械耐久性， 密闭孔结构。

    SOL-GEL BASED ANTIREFLECTIVE COATINGS USING ALKYLTRIALKOXYSILANE BINDERS HAVING LOW REFRACTIVE INDEX AND HIGH DURABILITY
    6.
    发明申请
    SOL-GEL BASED ANTIREFLECTIVE COATINGS USING ALKYLTRIALKOXYSILANE BINDERS HAVING LOW REFRACTIVE INDEX AND HIGH DURABILITY 有权
    使用具有低折射率和高耐久性的烷基酮树脂粘合剂的基于溶胶凝胶的抗反射涂层

    公开(公告)号：US20130095237A1

    公开(公告)日：2013-04-18

    申请号：US13273007

    申请日：2011-10-13

    申请人： Nikhil D. Kalyankar ,  Zhi-Wen Sun ,  Jeroen Van Duren ,  Mark Lewis ,  Liang Liang

    发明人： Nikhil D. Kalyankar ,  Zhi-Wen Sun ,  Jeroen Van Duren ,  Mark Lewis ,  Liang Liang

    IPC分类号： B05D5/06 ,  C09D7/12 ,  B82Y30/00

    CPC分类号： C09D1/00 ,  C03C17/008 ,  C03C17/22 ,  C03C17/30 ,  C08K3/36 ,  C09D5/006 ,  C09D7/61 ,  C09D7/67 ,  G02B1/115

    摘要： Methods and compositions for forming porous low refractive index coatings on substrates are provided. The method comprises coating a substrate with a sol-formulation comprising silica based nanoparticles and an alkyltrialkoxysilane based binder. Use of the alkyltrialkoxysilane based binder results in a porous low refractive index coating having bimodal pore distribution including mesopores formed from particle packing and micropores formed from the burning off of organics including the alkyl chain covalently bonded to the silicon. The mass ratio of binder to particles may vary from 0.1 to 20. Porous coatings formed according to the embodiments described herein demonstrate good optical properties (e.g. a low refractive index) while maintaining good mechanical durability due to the presence of a high amount of binder and a close pore structure.

    摘要翻译： 提供了在基底上形成多孔低折射率涂层的方法和组合物。 该方法包括用包含二氧化硅基纳米颗粒和烷基三烷氧基硅烷基粘合剂的溶胶制剂涂覆基材。 使用烷基三烷氧基硅烷基粘合剂导致具有双峰孔分布的多孔低折射率涂层，包括由颗粒填充形成的介孔和由共价键合到硅上的烷基链的有机物燃烧形成的微孔。 粘合剂与颗粒的质量比可以在0.1至20之间变化。根据本文所述实施方案形成的多孔涂层表现出良好的光学性能（例如低折射率），同时由于存在大量粘合剂而保持良好的机械耐久性， 密闭孔结构。

    SOL-GEL BASED ANTIREFLECTIVE COATINGS USING PARTICLE-BINDER APPROACH WITH HIGH DURABILITY, MOISTURE RESISTANCE, CLOSED PORE STRUCTURE AND CONTROLLABLE PORE SIZE
    7.
    发明申请
    SOL-GEL BASED ANTIREFLECTIVE COATINGS USING PARTICLE-BINDER APPROACH WITH HIGH DURABILITY, MOISTURE RESISTANCE, CLOSED PORE STRUCTURE AND CONTROLLABLE PORE SIZE 审中-公开
    使用具有高耐久性，耐水分性，封闭孔结构和可控内孔尺寸的颗粒粘合剂方法的基于溶胶凝胶的抗反射涂层

    公开(公告)号：US20130034722A1

    公开(公告)日：2013-02-07

    申请号：US13195119

    申请日：2011-08-01

    申请人： Nikhil D. Kalyankar ,  Nitin Kumar

    发明人： Nikhil D. Kalyankar ,  Nitin Kumar

    IPC分类号： B05D5/06 ,  G02B5/22

    CPC分类号： G02B1/11 ,  G02B2207/107 ,  G02B2207/109 ,  Y10T428/249984

    摘要： Durable porous low refractive index coatings, methods and compositions for forming the porous low refractive index coatings are provided. The method comprises coating a substrate with a sol formulation comprising a silane-based binder having one or more reactive groups and silica based nanoparticles and annealing the coated substrate. The silane-based binder comprises from about 30 wt. % to about 70 wt. % ash contribution in the total ash content of the sol formulation. Porous coatings formed according to the embodiments described herein demonstrate good optical properties (e.g., a low refractive index) while maintaining good mechanical durability due to the presence of a high amount of binder and a closed pore structure.

    摘要翻译： 提供耐久的多孔低折射率涂层，用于形成多孔低折射率涂层的方法和组合物。 该方法包括用包含具有一个或多个反应性基团的硅烷基粘合剂和基于二氧化硅的纳米颗粒的溶胶制剂涂覆基材并对涂覆的基材进行退火。 硅烷基粘合剂包含约30wt。 ％至约70wt。 灰分对溶胶配方总灰分的贡献。 根据本文所述的实施方案形成的多孔涂层表现出良好的光学性能（例如，低折射率），同时由于存在大量粘合剂和闭孔结构而保持良好的机械耐久性。

    Sol-gel based antireflective (AR) coatings with controllable pore size using organic nanocrystals and dendrimers
    10.
    发明授权
    Sol-gel based antireflective (AR) coatings with controllable pore size using organic nanocrystals and dendrimers 有权
    使用有机纳米晶体和树枝状大分子的具有可控孔径的溶胶 - 凝胶基抗反射（AR）涂层

    公开(公告)号：US09176259B2

    公开(公告)日：2015-11-03

    申请号：US13041137

    申请日：2011-03-04

    申请人： Nikhil D. Kalyankar

    发明人： Nikhil D. Kalyankar

    IPC分类号： B05D3/14 ,  B05D5/00 ,  G02B1/111 ,  B05D3/02 ,  B82Y20/00 ,  C09D183/04 ,  G02B1/11 ,  C08L79/02 ,  C08K5/54

    CPC分类号： G02B1/111 ,  B05D3/0254 ,  B05D3/148 ,  B05D5/00 ,  B82Y20/00 ,  C08K5/54 ,  C08L79/02 ,  C09D183/04 ,  G02B2207/101 ,  G02B2207/107 ,  G02B2207/109 ,  C08K5/01

    摘要： Embodiments of the invention relate generally to methods and compositions for forming porous low refractive index coatings on substrates. In one embodiment, a method for forming a porous coating on a substrate is provided. The method comprises coating a substrate with a sol-gel composition, comprising at least one porosity forming agent, wherein the porosity forming agent is selected from at least one of dendrimers and organic nanocrystals and removing the at least one porosity forming agent to form the porous coating. Use of at least one of the dendrimers and organic nanocrystals leads to the formation of stable pores with larger volume fraction in the film. Further, the size and interconnectivity of the pores may be controlled via selection of the organic nanocrystal or dendrimer structure, the total organic nanocrystal or dendrimer molecule fraction, polarity of the organic nanocrystal or dendrimer molecule and solvent, and other physiochemical properties of the gel phase.

    摘要翻译： 本发明的实施方案一般涉及在基底上形成多孔低折射率涂层的方法和组合物。 在一个实施例中，提供了一种在基底上形成多孔涂层的方法。 该方法包括用包含至少一种孔隙形成剂的溶胶 - 凝胶组合物涂覆基材，其中孔隙形成剂选自树枝状聚合物和有机纳米晶体中的至少一种，并除去至少一种孔隙形成剂以形成多孔 涂层。 使用至少一种树枝状聚合物和有机纳米晶体导致在膜中形成具有较大体积分数的稳定孔。 此外，孔的尺寸和互连性可以通过选择有机纳米晶体或树枝状聚合物结构，总有机纳米晶体或树枝状聚合物分子级分，有机纳米晶体或树状分子和溶剂的极性以及凝胶相的其它物理化学性质来控制 。