Method of manufacturing target of image pickup tube
    5.
    发明授权
    Method of manufacturing target of image pickup tube 失效
    摄像管目标的制造方法

    公开(公告)号:US4331506A

    公开(公告)日:1982-05-25

    申请号:US212213

    申请日:1980-12-02

    IPC分类号: H01J9/233 H01J31/46 H01J31/26

    CPC分类号: H01J31/46 H01J9/233

    摘要: A method of manufacturing a target of an image pickup tube comprising the steps of: forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate; forming a first layer on at least a portion constituting an image area of the image pickup tube, said first layer being substantially insoluble in etching liquid used for etching an insulating layer to constitute an intermediate layer insulator in a double layered interconnection structure; forming, after formation of said first layer, an insulating layer to constitute said intermediate-layer insulator; removing a predetermined portion of said insulating layer, removing said first layer together with said insulating layer located thereon; forming bus bars; and forming a photoconductive layer on said plurality of groups of the transparent conductive signal electrodes.This invention provides an excellent method for mass production.

    摘要翻译: 一种制造图像拾取管的目标的方法,包括以下步骤:在透明绝缘基板上形成多组透明导电信号电极; 在构成图像拾取管的图像区域的至少一部分上形成第一层,所述第一层基本上不溶于用于蚀刻绝缘层的蚀刻液,以构成双层互连结构中的中间层绝缘体; 在形成所述第一层之后形成构成所述中间层绝缘体的绝缘层; 去除所述绝缘层的预定部分,与位于其上的所述绝缘层一起去除所述第一层; 形成母线; 以及在所述多个透明导电信号电极组上形成光电导层。 本发明提供了一种很好的批量生产方法。

    Method of producing material patterns by evaporating material through a
perforated mask having a reinforcing bridge
    6.
    发明授权
    Method of producing material patterns by evaporating material through a perforated mask having a reinforcing bridge 失效
    通过具有加强桥的穿孔掩模蒸发材料来生产材料图案的方法

    公开(公告)号:US4273812A

    公开(公告)日:1981-06-16

    申请号:US8587

    申请日:1979-02-01

    CPC分类号: H05K3/143 C23C14/042

    摘要: A method of producing material patterns in which at least one substrate is fixed together with a mask to a substrate holder, and an evaporated film of desired substances is formed on the surface of the substrate by means of evaporation sources provided to confront the substrate. The mask is fabricated to have a plurality of reinforcing bridges formed in the desired portions of the mask openings of desired shape formed in the mask. The mask is held spaced from the substrate by a small distance during the evaporation, so that the evaporation may be effected at least through two pattern openings defined at both sides of each bridge. The evaporation is performed by means of evaporation sources which are located such that the line interconnecting one of the edges of each bridge and the evaporation source located at the same side with respect to the substantial bridging direction of the bridge and another line interconnecting the other edge of the bridge and the evaporation source located at the same side as the other edge intersect each other at a point on the surface of the substrate or in the clearance between the substrate surface and the mask. This method makes it possible to produce patterns which could never be produced by the conventional evaporation method.

    摘要翻译: 一种生产材料图案的方法,其中至少一个基板与掩模一起固定到基板保持器上,并且通过设置成面对基板的蒸发源在基板的表面上形成所需物质的蒸发膜。 掩模被制造成具有形成在形成在掩模中的所需形状的掩模开口的所需部分中的多个加强桥。 掩模在蒸发期间与衬底间隔开一小段距离,使得蒸发可以至少通过限定在每个桥的两侧的两个图案开口进行。 通过蒸发源进行蒸发,所述蒸发源被定位成使得相对于桥的基本桥接方向互连每个桥的边缘之一的线和位于同一侧的蒸发源的线,另一条线与另一边相互连接 和位于与另一边缘相同侧的蒸发源在基板的表面上的点处或基板表面与掩模之间的间隙中彼此相交。 这种方法使得可以产生由常规蒸发方法所不能产生的图案。

    Method of producing color filters
    8.
    发明授权
    Method of producing color filters 失效
    生产滤色片的方法

    公开(公告)号:US4311773A

    公开(公告)日:1982-01-19

    申请号:US120114

    申请日:1980-02-11

    CPC分类号: H01L31/02162 G03F7/0007

    摘要: A method of producing color filters comprising:a step for forming a photosensitive film by coating, on a rugged substrate, a mixture of a light-absorbing material which absorbs light and which can be removed with a solvent and a photosensitive material;a step for irradiating light onto the photosensitive film through a predetermined pattern;a step for removing dissolvable portions of the photosensitive film and the light-absorbing material from the photosensitive film which remains on the substrate; anda step for dyeing the photosensitive film into any desired color.

    摘要翻译: 一种彩色滤光片的制造方法,其特征在于,包括:通过在粗糙基板上涂布吸收光并可用溶剂和感光材料除去的吸光材料的混合物来形成感光膜的步骤; 用于通过预定图案将光照射到感光膜上的步骤; 从保留在基板上的感光膜除去感光膜和光吸收材料的可溶解部分的步骤; 以及将感光膜染色成任何所需颜色的步骤。

    Color solid-state imager and method of making the same
    9.
    发明授权
    Color solid-state imager and method of making the same 失效
    彩色固态成像仪及其制作方法

    公开(公告)号:US4285007A

    公开(公告)日:1981-08-18

    申请号:US123085

    申请日:1980-02-20

    摘要: A color solid-state imager comprises a semiconductor body over which are successively laminated a predetermined number of filter layers of any desired shape having predetermined spectral characteristics and, laminated on the filter layers, a predetermined number of layers composed of a transparent, organic high molecular material which is sensitive to radiation, the semiconductor substrate having at least a detector portion composed of an array of a plurality of optical detector elements. The method of making color solid-state imagers can be simplified by at least using the radiation-sensitive high molecular material for the intermediate layers or protection layers which are used for forming a laminate construction of color-decomposing filters.Further, in mounting the color-decomposing filters on the semiconductor substrate, it is particularly preferred to form beforehand a film of an organic high molecular material.

    摘要翻译: 彩色固态成像器包括半导体本体,其上依次层叠具有预定光谱特性的任意所需形状的预定数量的滤光层,并且层叠在滤光层上,预定数量的层由透明的有机高分子 对辐射敏感的材料,所述半导体衬底至少具有由多个光学检测器元件的阵列组成的检测器部分。 通过至少使用辐射敏感的高分子材料用于形成分色滤光片的层叠结构的中间层或保护层,可以简化制备彩色固态成像器的方法。 此外,在将分色滤光片安装在半导体基板上时,特别优选预先形成有机高分子材料的膜。